Adjusting device, vacuum pump device and vacuum coating equipment

Abstract

The utility model belongs to the technical field of vacuum coating, and discloses an adjusting device, a vacuum pump device and vacuum coating equipment. Wherein the adjusting device comprises a first adjusting structure, the first adjusting structure comprises a universal adjusting part, a first connecting part of the universal adjusting part is connected with the output end of the driving mechanism, and a universal adjusting part of the universal adjusting part is movably connected with the second part; the driving mechanism can drive the second part to rotate around the shaft, so that the second part has a first working state and a second working state; in the process that the second part is converted into the first working state from the second working state, the universal adjusting part can adjust the sealing surface of the second part to be parallel to the covering surface of the first part; and when the second part is in the first working state, the universal adjusting part can apply pressure to the second part, so that the second part can seal the opening of the first part. The sealing surface of the second part can be quickly and efficiently adjusted to be parallel to the covering surface of the first part, and the working performance of a workpiece is effectively improved.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating, in particular to a regulating device, a vacuum pump device and vacuum coating equipment. Background Art

[0002] Vacuum coating is a cutting-edge coating technology, and its application scope is becoming more and more extensive. For example, vacuum coating technology is applied to glass, solar energy, electronic products and tool production fields, and vacuum coating equipment has also developed from single-chamber intermittent vacuum coating equipment to multi-chamber continuous vacuum coating equipment. Among them, the vacuum pump device is an important component of the vacuum coating equipment, which is composed of a vacuum pump body, and a driving mechanism of a pump body that drives the vacuum pump body and is covered or separated from the vacuum pump body. For the vacuum pump body, when the driving mechanism drives the pump cover to cover the pump body, there is a possibility that the pump cover cannot effectively seal the opening of the pump body due to poor processing accuracy and / or installation accuracy of the pump cover. There is also a possibility that the pump cover cannot effectively seal the opening of the pump body due to poor processing accuracy and / or installation accuracy of the pump body, that is, there will be an angle between the covering surface of the pump cover and the sealing surface of the pump body, which leads to air leakage when the pump cover is covered on the pump body.

[0003] In the prior art, a sealing ring is usually provided to seal the joint between the pump body and the pump cover. However, for the problems existing in the above vacuum pump, air leakage cannot be effectively avoided. Utility Model Content

[0004] The purpose of the utility model is to provide a regulating device, a vacuum pump device and a vacuum coating device to solve the above problems existing in the prior art.

[0005] To achieve this purpose, the utility model adopts the following technical solutions:

[0006] The adjusting device includes a first part and a second part that can cover the opening of the first part, the adjusting device includes a first adjusting structure, the first adjusting structure includes a universal adjusting member, a first connecting portion of the universal adjusting member is connected to the output end of the driving mechanism, and a universal adjusting portion of the universal adjusting member is movably connected to the second part;

[0007] The driving mechanism can drive the second part to rotate around the axis so that the second part has a first working state covering the opening of the first part, and a second working state away from the first part; during the process of the second part changing from the second working state to the first working state, the universal adjustment part can adjust the sealing surface of the second part to be parallel to the covering surface of the first part; when the second part is in the first working state, the universal adjustment part can apply pressure to the second part so that the second part can seal the opening of the first part.

[0008] As a preferred solution of the above-mentioned adjustment device, the first adjustment structure further includes a connection limit assembly, the connection limit assembly includes a detachably connected upper connection limit piece and a lower connection limit piece, and the lower connection limit piece is also connected to the second part;

[0009] A limiting movable space is formed between the upper connection limiting member and the lower connection limiting member; or a limiting movable space is formed between the upper connection limiting member, the lower connection limiting member and the second part;

[0010] The universal adjustment part is limited in the limiting movable space and can move relative to the upper connecting limiting member and the lower connecting limiting member, and the first connecting part extends out of the limiting movable space and is connected to the output end of the driving mechanism;

[0011] When the second part is in the first working state, the universal adjustment portion can abut against the bottom wall of the position-limiting activity space to apply pressure to the second part.

[0012] As a preferred solution of the above-mentioned adjustment device, the universal adjustment part is provided with a universal adjustment surface, and the universal adjustment surface is a spherical adjustment surface or an ellipsoidal adjustment surface. Both the spherical adjustment surface and the ellipsoidal adjustment surface are used to adjust the sealing surface of the second part to be parallel to the covering surface of the first part, and both the spherical adjustment surface and the ellipsoidal adjustment surface can also abut against the bottom wall of the limited activity space to apply pressure to the second part.

[0013] As a preferred solution of the above-mentioned adjustment device, the adjustment device also includes a plurality of elastic positioning structures arranged at the output end of the driving mechanism, and the plurality of elastic positioning structures are distributed at intervals along the circumference of the second part. When the second part is in the second working state, the plurality of elastic positioning structures can adjust the sealing surface of the second part to be parallel to a fixed surface; the fixed surface is a plane on the output end of the driving mechanism parallel to the covering surface of the first part when the second part is in the first working state.

[0014] As a preferred embodiment of the above-mentioned adjustment device, the adjustment device also includes a second adjustment structure, which is connected between the output end of the drive mechanism and the universal adjustment member, and the second adjustment structure is configured to be able to adjust the maximum distance between the universal adjustment surface and the fixed surface of the universal adjustment part, and to lock the relative position between the universal adjustment member and the output end of the drive mechanism; the fixed surface is a plane on the output end of the drive mechanism parallel to the covering surface of the first part when the second part is in the first working state.

[0015] As a preferred solution of the above-mentioned adjustment device, the second adjustment structure includes a first screw and a first locking nut, the first screw is threadedly connected to the output end of the driving mechanism and is pressed against the end surface of the first connecting part away from the universal adjustment part, and the first locking nut is threadedly connected to the first screw and can lock the relative position of the first screw and the output end of the driving mechanism.

[0016] As a preferred solution of the above-mentioned adjusting device, the second adjusting structure further includes a second screw, and the second screw is threadedly connected to the output end of the driving mechanism and the first connecting portion.

[0017] As a preferred solution of the above-mentioned adjusting device, the adjusting device further comprises a third screw, wherein the third screw is threadedly connected to the output end of the driving mechanism and is tightly pressed against the outer peripheral wall of the first connecting portion.

[0018] A vacuum pump device includes a valve body, a vacuum pump body and a driving mechanism, wherein the vacuum pump body includes a pump body arranged on the valve body, and a pump cover that can cover the opening of the pump body; and also includes the above-mentioned adjustment device, wherein the vacuum pump body is the workpiece, the pump body is the first part, and the pump cover is the second part.

[0019] As a preferred solution of the above-mentioned vacuum pump device, the driving mechanism includes a driving member fixedly arranged on the valve body, a driving shaft drivingly connected to the output shaft of the driving member, and a driving arm fixedly sleeved on the driving shaft, the driving shaft is rotatably connected to the valve body, the driving member can drive the driving arm to rotate around the central axis of the driving shaft, and the output end of the driving arm is connected to the first connecting part.

[0020] As a preferred solution of the above-mentioned vacuum pump device, the number of the adjusting device, the vacuum pump body and the driving arm are all multiple, and the multiple adjusting devices, the multiple vacuum pump bodies and the multiple driving arms are arranged in one-to-one correspondence, the multiple driving arms are distributed at intervals along the axial direction of the driving shaft, and the pump covers of the multiple vacuum pump bodies are independently arranged.

[0021] As a preferred solution of the above vacuum pump device, the driving member is a motor.

[0022] As a preferred embodiment of the above-mentioned vacuum pump device, the vacuum pump device also includes a coaxiality adjustment component, which is connected between the drive shaft and the valve body, and is used to adjust the central axis of the drive shaft to be colinear with the rotation center line.

[0023] Vacuum coating equipment comprises the above-mentioned vacuum pump device.

[0024] Beneficial effects of the utility model:

[0025] The utility model provides an adjustment device, a vacuum pump device and a vacuum coating device. The workpiece includes a first part and a second part that can cover the opening of the first part. The adjustment device includes a first adjustment structure, the first adjustment structure includes a universal adjustment member, the first connection part of the universal adjustment member is connected to the output end of the driving mechanism, and the universal adjustment part of the universal adjustment member is movably connected to the second part; the driving mechanism can drive the second part to rotate around the axis, so that the second part has a first working state covering the opening of the first part, and a second working state away from the first part; in the process of the second part changing from the second working state to the first working state, the universal adjustment part can adjust the sealing surface of the second part to be parallel to the covering surface of the first part; when the second part is in the first working state, the universal adjustment part can apply pressure to the second part, so that the second part can seal the opening of the first part.

[0026] The adjustment device is provided with a first connecting part of a universal adjustment member connected to the output end of the driving mechanism, and the universal adjustment part of the universal adjustment member is movably connected to the second part. It can be understood that the universal adjustment part can move relative to the second part under the action of an external force. Therefore, in the process of the second part changing from the second working state to the first working state, when the second part tends to cover the opening of the first part, if there is an angle between the sealing surface of the second part and the covering surface of the first part, only part of the structure on the second part will start to contact and bear the force first. At this time, the part of the structure on the second part that contacts and bears the force drives the second part to move relative to the universal adjustment part, so that the sealing surface of the second part can be adjusted to be parallel to the covering surface of the first part quickly and efficiently. Therefore, when the sealing surface of the second part is completely parallel to the covering surface of the first part, the second part changes to the first working state, and the second part covers the opening of the first part well. At this time, the driving mechanism continues to apply pressure to the second part, and the opening of the first part can be sealed through the second part, thereby effectively improving the working performance of the workpiece. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1It is a cross-sectional view of a universal adjusting member of an adjusting device provided in a specific embodiment of the utility model;

[0028] Figure 2 A partial cross-sectional view of a vacuum pump device provided by a specific embodiment of the utility model Figure 1 ;

[0029] Figure 3 A partial cross-sectional view of a vacuum pump device provided by a specific embodiment of the utility model Figure 2 ;

[0030] Figure 4 It is a structural schematic diagram of the vacuum pump device provided by a specific embodiment of the utility model when it is in a first working state;

[0031] Figure 5 It is a structural schematic diagram of the vacuum pump device provided by a specific embodiment of the utility model when it is in a second working state;

[0032] Figure 6 A partial cross-sectional view of a vacuum pump device provided by a specific embodiment of the utility model along a first viewing angle Figure 3 ;

[0033] Figure 7 A partial cross-sectional view of a vacuum pump device provided by a specific embodiment of the utility model along a second viewing angle Figure 3 .

[0034] In the figure:

[0035] 100, workpiece; 110, first part; 1101, opening; 120, second part; 121, sealing surface; 130, valve body; 131, accommodating cavity; 132, through hole;

[0036] 1. first adjustment structure; 11. universal adjustment member; 111. first connection portion; 112. universal adjustment portion; 1121. universal adjustment surface; 12. upper connection limit member; 13. lower connection limit member;

[0037] 2. Elastic positioning structure; 21. Screw; 22. Positioning rod; 23. Elastic member; 24. Locking member;

[0038] 3. Second adjustment structure; 31. First screw; 32. First locking nut; 33. Second screw; 34. Third screw;

[0039] 4. The first sealing ring;

[0040] 51. driving member; 52. driving shaft; 521. connecting shaft; 53. driving arm; 531. fixing surface; 54. mounting seat; 541. mounting hole; 5411. limiting surface;

[0041] 6. Coaxiality adjustment component;

[0042] 61, first connection structure; 611, connection seat; 6111, second connection part; 6112, third connection part; 612, first bearing; 613, second sealing ring; 614, closed end plate; 615, third sealing ring;

[0043] 62. Second connecting structure; 621. Connecting ring; 6211. Threaded hole; 622. Connecting piece. DETAILED DESCRIPTION

[0044] The present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for ease of description, only the parts related to the present invention, rather than all structures, are shown in the accompanying drawings.

[0045] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0046] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0047] In the description of this embodiment, the terms "upper", "lower", "right", etc., are based on the directions or positions shown in the drawings, and are only for the convenience of description and simplified operation, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0048] like Figure 2 , Figure 4 and Figure 5 As shown, the workpiece 100 includes a first part 110 and a second part 120 that can cover an opening 1101 of the first part 110 .

[0049] The utility model provides an adjustment device, such as Figure 1 , Figure 2 , Figure 4 and Figure 5 As shown, the adjustment device includes a first adjustment structure 1, and the first adjustment structure 1 includes a universal adjustment member 11. The first connection portion 111 of the universal adjustment member 11 is connected to the output end of the driving mechanism, and the universal adjustment portion 112 of the universal adjustment member 11 is movably connected to the second part 120; the driving mechanism can drive the second part 120 to rotate around the axis, so that the second part 120 has a first working state covering the opening 1101 of the first part 110, and a second working state away from the first part 110; during the process of the second part 120 changing from the second working state to the first working state, the universal adjustment portion 112 can adjust the sealing surface of the second part 120 to be parallel to the covering surface of the first part 110; when the second part 120 is in the first working state, the universal adjustment portion 112 can apply pressure to the second part 120, so that the second part 120 can seal the opening 1101 of the first part 110.

[0050] like Figure 1 , Figure 2 , Figure 4 and Figure 5As shown, the adjustment device is provided with a first connection portion 111 of the universal adjustment member 11 connected to the output end of the driving mechanism, and the universal adjustment portion 112 of the universal adjustment member 11 is movably connected to the second part 120. It can be understood that the universal adjustment portion 112 can move relative to the second part 120 under the action of an external force. Therefore, in the process of the second part 120 changing from the second working state to the first working state, when the second part 120 tends to cover the opening 1101 of the first part 110, if there is an angle between the sealing surface 121 of the second part 120 and the covering surface of the first part 110, only a part of the structure on the second part 120 will first start to contact the force. At this time, the second part 120 is The partial structure on the part 120 that is in contact with the force drives the second part 120 to move relative to the universal adjustment part 112, so that the sealing surface 121 of the second part 120 can be adjusted quickly and efficiently to be parallel to the covering surface of the first part 110. Therefore, when the sealing surface 121 of the second part 120 is completely parallel to the covering surface of the first part 110, the second part 120 is transformed into the first working state, and the second part 120 is well covered on the opening 1101 of the first part 110. At this time, the driving mechanism continues to apply pressure to the second part 120, so that the opening 1101 of the first part 110 can be sealed by the second part 120, thereby effectively improving the working performance of the workpiece 100.

[0051] Specifically, the first part 110 is disposed on the valve body 130, and the second part 120 can cover the valve body 130 so as to close the opening 111 of the first part 110; and / or, the second part 120 can cover the covering surface of the first part 110 so as to close the opening 1101 of the first part 110. In this way, the second part 120 can cover the opening 1101 of the first part 110. Specifically, in this embodiment, Figure 2 , Figure 4 and Figure 5 As shown, the second part 120 is exemplarily provided to cover the valve body 130 so as to close the opening 1101 of the first part 110. In other embodiments, the second part 120 can also be provided to cover the covering surface of the first part 110 so as to close the opening 1101 of the first part 110, or the second part 120 can be provided to cover the covering surfaces of the valve body 130 and the first part 110 so as to close the opening 1101 of the first part 110.

[0052] It can be understood that, in this embodiment, Figure 1 , Figure 2 , Figure 4 and Figure 5As shown, during the process of the second part 120 changing from the second working state to the first working state, when the second part 120 tends to cover the opening 1101 of the first part 110, if there is an angle between the sealing surface 121 of the second part 120 and the covering surface of the first part 110, only a part of the structure of the second part 120 will first start to contact the valve body 130. At this time, the part of the structure of the second part 120 that contacts the valve body 130 drives the second part 120 to move relative to the universal adjustment part 112 under the support force of the valve body 130, so that the second part 120 can be adjusted quickly and efficiently. 0 is parallel to the covering surface of the first part 110, so that when the sealing surface 121 of the second part 120 is completely parallel to the covering surface of the first part 110, the second part 120 is transformed into the first working state, and the second part 120 is well covered at the opening 1101 of the first part 110. At this time, the driving mechanism continues to apply pressure to the second part 120 to press the second part 120 circumferentially against the valve body 130, so as to achieve sealing of the opening 1101 of the first part 110 by the second part 120, thereby effectively improving the working performance of the workpiece 100.

[0053] Specifically, Figure 2 As shown, the regulating device further includes a first sealing ring 4, which is used to seal the covering portion between the second part 120 and the valve body 130 and / or the first part 110. Thus, the sealing effect of the second part 120 sealing the opening 1101 of the first part 110 is further improved. More specifically, the first sealing ring 4 is provided on the sealing surface 121 of the second part 120 and / or the valve body 130, and when the second part 120 is in the first working state, the first sealing ring 4 seals the gap between the sealing surface 121 of the second part 120 and the valve body 130. Or; the first sealing ring 4 is provided on the sealing surface 121 of the second part 120 and / or the covering surface of the first part 110, and when the second part 120 is in the first working state, the first sealing ring 4 seals the gap between the sealing surface 121 of the second part 120 and the covering surface of the first part 110. Or; The sealing surface 121 of the second part 120 is provided with two first sealing rings 4, one of which is used to seal the gap between the sealing surface 121 of the second part 120 and the valve body 130, and the other is used to seal the gap between the sealing surface 121 of the second part 120 and the covering surface of the first part 110. Or; The covering surface of the first part 110 and the valve body 130 are both provided with a first sealing ring 4, and when the second part 120 is in the first working state, the first sealing ring 4 seals the gap between the sealing surface 121 of the second part 120 and the covering surface of the first part 110, and seals the gap between the sealing surface 121 of the second part 120 and the valve body 130. Wherein, in this embodiment, as Figure 2As shown, the sealing surface 121 of the second part 120 is exemplarily provided with a first sealing ring 4, and the first sealing ring 4 is partially embedded in the second part 120. When the second part 120 is in the first working state, the first sealing ring 4 can be elastically pressed against the valve body 130 along the circumferential direction. Preferably, the first sealing ring 4 is a rubber sealing ring.

[0054] Among them, Figure 1 and Figure 2 As shown, the first adjustment structure 1 also includes a connection limit assembly, which includes a detachably connected upper connection limit piece 12 and a lower connection limit piece 13, and the lower connection limit piece 13 is also connected to the second part 120; a limit activity space is formed between the upper connection limit piece 12 and the lower connection limit piece 13; or, a limit activity space is formed between the upper connection limit piece 12, the lower connection limit piece 13 and the second part 120; the universal adjustment part 112 is limited in the limit activity space and can move relative to the upper connection limit piece 12 and the lower connection limit piece 13, the first connection part 111 extends out of the limit activity space and is connected to the output end of the driving mechanism; when the second part 120 is in the first working state, the universal adjustment part 112 can abut against the bottom wall of the limit activity space to apply pressure to the second part 120. Such a configuration is adopted to realize the movable connection between the universal adjustment part 112 and the second part 120, and to realize that when the second part 120 is in the first working state, pressure can be applied to the second part 120 through the universal adjustment part 112, so that the second part 120 can seal the opening 1101 of the first part 110; secondly, the upper connection limiter 12 and the lower connection limiter 13 are detachably connected, which can facilitate the assembly of the universal adjustment part 11 and the second part 120, and also facilitate the later maintenance of the universal adjustment part 11 and / or the second part 120. Specifically, in the present embodiment, the upper connection limiter 12 and the lower connection limiter 13 are exemplarily configured to form a limiting movable space. Among them, the lower connection limiter 13 is detachably connected to the second part 120; or, the lower connection limiter 13 is fixedly connected to the second part 120 or is integrally formed. In the present embodiment, the lower connection limiter 13 is exemplarily configured to be detachably connected to the second part 120.

[0055] It is understandable that in this embodiment, the upper connection stopper 12 and the lower connection stopper 13 are both clearance-matched with the universal adjustment part 112 to ensure that the second part 120 can effectively move relative to the universal adjustment part 112 and the second part 120 will not separate from the universal adjustment part 112.

[0056] Specifically, the universal adjustment portion 112 is provided with a universal adjustment surface 1121, which is a spherical adjustment surface or an ellipsoidal adjustment surface. Both the spherical adjustment surface and the ellipsoidal adjustment surface are used to adjust the sealing surface of the second part 120 to be parallel to the covering surface of the first part 110, and both the spherical adjustment surface and the ellipsoidal adjustment surface can also abut against the bottom wall of the limited activity space to apply pressure to the second part 120. Specifically, both the spherical adjustment surface and the ellipsoidal adjustment surface can make the second part 120 swing at various angles, so that if there is an angle between the sealing surface 121 of the second part 120 and the covering surface of the first part 110, only a part of the structure on the second part 120 will start to contact and bear force first. At this time, the part of the structure on the second part 120 that contacts and bears force drives the second part 120 to swing relative to the universal adjustment part 112, so that the sealing surface 121 of the second part 120 can be adjusted quickly and efficiently to be parallel to the covering surface of the first part 110; when the second part 120 is well covered on the opening 1101 of the first part 110, the driving mechanism continues to apply pressure to the second part 120 through the universal adjustment surface 1121 of the universal adjustment part 112, so that the opening 1101 of the first part 110 can be sealed by the second part 120, thereby effectively improving the working performance of the workpiece 100.

[0057] It is understandable that, for an ellipsoidal adjustment surface, the smaller the curvature of the ellipsoidal adjustment surface, the easier it is for the universal adjustment portion 112 to be worn and fail. Therefore, in this embodiment, it is preferred that the universal adjustment surface 1121 is a spherical adjustment surface.

[0058] In other embodiments, the universal adjustment portion 112 may also be spherical. It is understood that the spherical adjustment surface is a portion of the spherical surface of the universal adjustment portion 112 close to the second part 120 .

[0059] In other embodiments, the universal adjustment portion 112 may also be configured to be ellipsoidal. It is understood that the ellipsoidal adjustment surface is a portion of the ellipsoidal surface of the universal adjustment portion 112 that is close to the second part 120 .

[0060] Optionally, the universal adjustment surface 1121 is concavely provided with a groove; and / or, the universal adjustment surface 1121 is convexly provided with a protrusion. Further optionally, the number of grooves is multiple, and the multiple grooves are spaced and distributed on the universal adjustment surface 1121. Further optionally, when the number of protrusions is one, the protrusion is spherical or ellipsoidal. When the number of protrusions is multiple, the contact surface formed on the end surface of the multiple protrusions close to the second part 120 is a spherical surface or an ellipsoidal surface, or the multiple protrusions are all spherical or ellipsoidal. Among them, the distribution position of the protrusions and the protruding height of the protrusions protruding from the universal adjustment surface 1121 are not limited, and it is sufficient to ensure that they do not affect the working performance of the universal adjustment part 112.

[0061] It is understandable that the shape of the universal adjustment portion 112 is not limited, as long as it can be movable within the limited movable space and is provided with a universal adjustment surface 1121 that can adjust the sealing surface of the second part 120 to be parallel to the covering surface of the first part 110.

[0062] It is understandable that if Figure 1 , Figure 2 , Figure 4 and Figure 5 As shown, for multiple workpieces 100, when the second parts 120 of the multiple workpieces 100 are synchronously driven by the output end of the driving mechanism to cover the openings 1101 of the corresponding first parts 110, if the processing accuracy and / or installation accuracy of each second part 120 are inconsistent, and / or the processing accuracy and / or installation accuracy of each first part 110 are inconsistent, resulting in different angles between the sealing surfaces 121 of each second part 120 and the covering surfaces of the corresponding first parts 110, by adopting the above-mentioned first adjustment structure 1, the sealing surfaces 121 of each second part 120 can be effectively adjusted to be parallel to the covering surfaces of the corresponding first part 110, effectively avoiding the air leakage caused by the above-mentioned situation, thereby effectively improving the reliability of the coordinated work of the multiple workpieces 100 and effectively saving the driving cost of driving the multiple second parts 120.

[0063] Among them, Figure 2 and Figure 3 As shown, the adjustment device also includes a plurality of elastic positioning structures 2 arranged at the output end of the driving mechanism, and the plurality of elastic positioning structures 2 are spaced along the circumference of the second part 120. When the second part 120 is in the second working state, the plurality of elastic positioning structures 2 can adjust the sealing surface 121 of the second part 120 to be parallel to the fixed surface 531; the fixed surface 531 is a plane on the output end of the driving mechanism parallel to the covering surface of the first part 110 when the second part 120 is in the first working state. Such arrangement ensures that when the second part 120 is in the second working state, the posture of the second part 120 remains unchanged, thereby further improving the efficiency of sealing the opening 1101 of the first part 110 through the second part 120. For multiple second parts 120, the postures of the multiple second parts 120 can be consistent, thereby further improving the reliability of the collaborative work of multiple workpieces 100.

[0064] Specifically, the fixed surface 531 is not limited to Figure 2 The plane shown in may also be another plane on the output end of the driving mechanism parallel to the covering surface of the first part 110 when the second part 120 is in the first working state.

[0065] Specifically, Figure 2 and Figure 3As shown, a mounting seat 54 is provided at the output end of the driving mechanism, and the mounting seat 54 is provided with a plurality of mounting holes 541, and the plurality of mounting holes 541 are arranged one by one corresponding to the plurality of elastic positioning structures 2; the elastic positioning structure 2 includes a screw 21 with one end threadedly connected to the mounting hole 541, a positioning rod 22 slidably arranged in the mounting hole 541, an elastic member 23 distributed in the mounting hole 541, and a locking member 24, the two ends of the elastic member 23 are respectively fixedly arranged on the screw 21 and the positioning rod 22, and the end of the positioning rod 22 extending out of the mounting hole 541 is used to press against the second part 120, and the locking member 24 can lock or unlock the relative position of the screw 21 and the mounting seat 54. It can be understood that by screwing the screw 21, the tightening force of the positioning rod 22 against the second part 120 can be adjusted, so that when the second part 120 is in the second working state, the sealing surface 121 of the second part 120 can be adjusted to be parallel to the fixed surface 531, and after the sealing surface 121 of the second part 120 is adjusted to be parallel to the fixed surface 531, the posture of the second part 120 can be ensured to remain stationary. Secondly, because the positioning rod 22 always maintains a state of elastically pressing against the second part 120 under the action of the elastic member 23, in the process of driving the second part 120 to change from the second working state to the first working state, when the second part 120 tends to cover the opening 1101 of the first part 110, if there is an angle between the sealing surface 121 of the second part 120 and the covering surface of the first part 110, the upper part structure of the second part 120 first starts to contact the valve body 130, thereby driving the second part 120 to move relative to the universal adjustment part 112, and at the same time, a force is applied to the positioning rod 22 to cause the elastic member 23 to expand and contract, so that the elastic positioning structure 2 and the universal adjustment member 11 can be used together to further improve the efficiency and effect of adjusting the sealing surface 121 of the second part 120 to be parallel to the covering surface of the first part 110.

[0066] In this embodiment, the locking member 24 is a second locking nut.

[0067] More specifically, if Figure 3 As shown, the inner wall of the mounting hole 541 is provided with a limiting surface 5411, and the positioning rod 22 is provided with a limiting edge, and along the sliding direction of the positioning rod 22, the limiting edge can abut against the limiting surface 5411 to prevent the positioning rod 22 from being separated from the mounting seat 54 and becoming ineffective.

[0068] Specifically, the mounting seat 54 and the output end of the driving mechanism can be two independent structures; or, the mounting seat 54 can be a partial structure on the output end of the driving mechanism. When the mounting seat 54 and the output end of the driving mechanism are two independent structures, it is preferred that the mounting seat 54 is connected to the output end of the driving mechanism by a detachable connection such as a threaded connection. In this embodiment, the mounting seat 54 is exemplarily set as a partial structure on the output end of the driving mechanism.

[0069] Among them, Figure 1 and Figure 2 As shown, the adjustment device also includes a second adjustment structure 3, which is connected between the output end of the driving mechanism and the universal adjustment member 11. The second adjustment structure 3 is configured to be able to adjust the maximum distance between the universal adjustment surface 1121 of the universal adjustment part 112 and the fixed surface 531, and can lock the relative position between the universal adjustment member 11 and the output end of the driving mechanism; the fixed surface 531 is a plane on the output end of the driving mechanism parallel to the covering surface of the first part 110 when the second part 120 is in the first working state. By arranging the second adjustment structure 3 between the output end of the driving mechanism and the universal adjustment member 11, when the second part 120 is in the second working state, the maximum distance between the universal adjustment surface 1121 of the universal adjustment part 112 and the fixed surface 531 can be adjusted, so that when the second part 120 is in the first working state, the sealing surface 121 of the second part 120 can be completely fitted with the valve body 130 and / or the covering surface of the first part 110 along the circumferential direction, so that when the driving mechanism continues to apply pressure to the second part 120, the sealing surface 121 of the second part 120 can be effectively pressed against the valve body 130 and / or the covering surface of the first part 110 along the circumferential direction, thereby further avoiding air leakage. Figure 2 As shown, the maximum distance between the universal adjustment surface 1121 of the universal adjustment portion 112 and the fixed surface 531 is L.

[0070] Specifically, Figure 1 and Figure 2 As shown, the second adjustment structure 3 includes a first screw 31 and a first locking nut 32. The first screw 31 is threadedly connected to the output end of the driving mechanism and is pressed against the end surface of the first connecting portion 111 away from the universal adjustment portion 112. The first locking nut 32 is threadedly connected to the first screw 31 and can lock the relative position between the first screw 31 and the output end of the driving mechanism. Specifically, by screwing the first screw 31, the first screw 31 can move against the end surface of the first connecting portion 111 away from the universal adjustment portion 112, thereby driving the universal adjustment member 11 to move, so that the maximum distance between the universal adjustment surface 1121 of the universal adjustment portion 112 and the fixed surface 531 can be adjusted; after the maximum distance between the universal adjustment surface 1121 of the universal adjustment portion 112 and the fixed surface 531 is adjusted, the first locking nut 32 is screwed so that the first locking nut 32 is pressed against the output end of the driving mechanism in the axial direction, so as to achieve locking the relative position between the first screw 31 and the output end of the driving mechanism.

[0071] Optionally, the number of the first screws 31 and the first locking nuts 32 are both multiple, the multiple first screws 31 are distributed at intervals, and the multiple first screws 31 and the multiple first locking nuts 32 are arranged in a one-to-one correspondence. This can further improve the accuracy and reliability of adjusting the maximum distance between the universal adjustment surface 1121 of the universal adjustment portion 112 and the fixed surface 531.

[0072] Preferably, the output end of the driving mechanism is slidably connected to the first connecting portion 111 along a first direction, and the first direction is perpendicular to the sealing surface 121 of the second part 120. With such a configuration, it is more convenient to adjust the maximum spacing between the universal adjustment surface 1121 of the universal adjustment portion 112 and the fixed surface 531. Specifically, one of the output end of the driving mechanism and the first connecting portion 111 is recessed with a slot along the first direction, and the other is partially plugged into the slot. This is to achieve a sliding connection between the output end of the driving mechanism and the first connecting portion 111 along the first direction. Specifically, in this embodiment, the output end of the driving mechanism is exemplarily provided with a slot recessed along the first direction, and the first connecting portion 111 is partially plugged into the slot.

[0073] Specifically, Figure 1 and Figure 2 As shown, the second adjustment structure 3 further includes a second screw 33, and the second screw 33 is threadedly connected to the output end of the driving mechanism and the first connecting portion 111. After the maximum distance between the universal adjustment surface 1121 of the universal adjustment portion 112 and the fixed surface 531 is adjusted by the first screw 31, and the relative position of the first screw 31 and the output end of the driving mechanism is locked by the first locking nut 32, the second screw 33 is threadedly connected to the output end of the driving mechanism and the first connecting portion 111, so as to achieve locking of the relative position between the universal adjustment member 11 and the output end of the driving mechanism.

[0074] Optionally, there are multiple second screws 33, and the multiple second screws 33 are distributed at intervals, which can further improve the reliability of locking the relative position between the universal adjustment member 11 and the output end of the driving mechanism.

[0075] Preferably, if Figure 1 and Figure 2 As shown, the adjustment device further includes a third screw 34, which is threadedly connected to the output end of the driving mechanism and abuts against the outer peripheral wall of the first connecting portion 111. It can prevent the universal adjustment member 11 from rotating and ensure the working performance of the second adjustment structure 3.

[0076] Further preferably, the outer peripheral wall of the first connection part 111 includes a tightening plane and an arcuate surface connected to the tightening plane, and the arcuate surface and the tightening plane form the outer peripheral wall of the first connection part 111; the third screw 34 is tightened on the tightening plane. The effect of preventing the universal adjustment member 11 from rotating can be further improved. As an alternative, the first connection part 111 and the slot can also be prismatic. The effect of preventing the universal adjustment member 11 from rotating can also be further improved.

[0077] The utility model also discloses a vacuum pump device, such as Figure 1-5 As shown, it includes a valve body 130, a vacuum pump body and a driving mechanism, the vacuum pump body includes a pump body arranged on the valve body 130, and a pump cover that can cover the opening 1101 of the pump body; it also includes the above-mentioned adjusting device, the vacuum pump body is the workpiece 100, the pump body is the first part 110, and the pump cover is the second part 120.

[0078] By adopting the above-mentioned adjustment device, when the pump cover is driven to cover the pump body by the driving mechanism, the sealing surface 121 of the pump cover can be adjusted to be parallel to the covering surface of the pump body quickly and efficiently; secondly, when the second part 120 is in the second working state, the maximum distance between the universal adjustment surface 1121 of the universal adjustment part 112 and the fixed surface 531 can be adjusted, so that when the second part 120 is in the first working state, the sealing surface 121 of the second part 120 can be completely fitted with the valve body 130 and / or the covering surface of the first part 110 along the circumferential direction; secondly, when the second part 120 is in the second working state, the posture of the second part 120 can be ensured to be immobile, and the efficiency of sealing the opening 1101 of the first part 110 by the second part 120 can be improved. Thereby, the working performance and service life of the vacuum pump body are effectively improved.

[0079] Specifically, the valve body 130 and the pump body can be two independent structures; or, the valve body 130 can be a partial structure on the pump body. When the valve body 130 and the pump body are two independent structures, the valve body 130 and the pump body can be detachably connected. This facilitates the assembly and disassembly and maintenance of the pump body. Figure 4 and Figure 5 As shown, the valve body 130 and the pump body are preferably arranged as two independent structures, and the valve body 130 and the pump body are detachably connected.

[0080] More specifically, if Figure 4 and Figure 5As shown, the valve body 130 includes a first sub-valve body and a second sub-valve body that are detachably connected. The first sub-valve body and the second sub-valve body form a receiving chamber 131. The pump body is detachably connected to the first sub-valve body, and the receiving chamber 131 is communicated with the opening 1101 of the pump body; the receiving chamber 131 is used to accommodate structures such as the drive shaft 52, the drive arm 53 and the pump cover. This further facilitates the assembly and disassembly of the drive arm 53 and the vacuum pump body. Among them, the connection method for the detachable connection between the first sub-valve body and the second sub-valve body can be selected from threaded, plug-in and other connection methods.

[0081] Among them, Figure 2 , Figure 4 and Figure 5 As shown, the driving mechanism includes a driving member 51 fixedly arranged on the valve body 130, a driving shaft 52 drivingly connected to the output shaft of the driving member 51, and a driving arm 53 fixedly sleeved on the driving shaft 52. The driving shaft 52 is rotatably connected to the valve body 130. The driving member 51 can drive the driving arm 53 to rotate around the central axis of the driving shaft 52. The output end of the driving arm 53 is connected to the first connecting portion 111. This arrangement can realize that the second part 120 can be driven to rotate around the central axis of the driving shaft 52, so that the pump cover can cover the opening 1101 of the pump body, or be away from the opening 1101 of the pump body.

[0082] Specifically, Figure 2 , Figure 4 and Figure 5 As shown, there are multiple adjusting devices, multiple vacuum pump bodies and multiple driving arms 53, and the multiple adjusting devices, multiple vacuum pump bodies and multiple driving arms 53 are all arranged in a one-to-one correspondence. The multiple driving arms 53 are distributed at intervals along the axial direction of the driving shaft 52, and the pump covers of the multiple vacuum pump bodies are independently arranged.

[0083] For multiple vacuum pump bodies, by independently setting the pump covers of the multiple vacuum pump bodies, compared with the prior art in which the pump covers of the multiple vacuum pump bodies are set as one total pump cover, the independently set pump covers are light in weight and small in size, thereby effectively reducing the difficulty of installing and disassembling the pump covers on the drive shaft 52, making later maintenance more convenient.

[0084] Secondly, for multiple vacuum pump bodies, a driving member 51 is used to synchronously drive multiple pump covers to rotate around the central axis of the driving shaft 52, so that the multiple pump covers can be synchronously covered or separated from the corresponding openings 1101 of the pump body, effectively saving the driving cost of driving the pump covers of multiple vacuum pump bodies.

[0085] Secondly, for multiple vacuum pump bodies, by adopting the above-mentioned driving mechanism, and connecting the above-mentioned adjusting device between the output end of each driving arm 53 of the driving mechanism and the pump cover, when the driving member 51 synchronously drives the multiple pump covers to rotate around the central axis of the driving shaft 52, so that the pump covers are transformed from the second working state to the first working state, if the processing accuracy and / or installation accuracy of each pump cover are inconsistent, and / or the processing accuracy and / or installation accuracy of each pump body are inconsistent, resulting in different angles and / or surface differences between the sealing surfaces 121 of each pump cover and the corresponding cover surfaces of the pump body, the first adjusting structure 1 and the elastic positioning structure 2 of the adjusting device can work together to effectively adjust the sealing surfaces 121 of each pump cover and the corresponding The pump covers of the respective vacuum pump bodies are parallel to the covering surfaces of the respective pump bodies. When the pump covers of the respective vacuum pump bodies are in the first working state, the sealing surfaces 121 of the respective pump covers can be completely fitted with the valve body 130 and / or the covering surfaces of the respective pump bodies in the circumferential direction, thereby effectively avoiding the air leakage caused by the above-mentioned situation, and effectively improving the reliability of the pump covers of the plurality of vacuum pump bodies that are synchronously driven to be fitted on the corresponding pump bodies and to seal the openings 1101 of the corresponding pump bodies; secondly, by adopting the above-mentioned adjusting device, when the pump covers are in the second working state, it is also possible to ensure that the postures of the plurality of pump covers are consistent, thereby further improving the reliability of the pump covers of the plurality of vacuum pump bodies that are synchronously driven to be fitted on the corresponding pump bodies and to seal the openings 1101 of the corresponding pump bodies.

[0086] It can be understood that the adjustment of the sealing surface 121 of each pump cover to be parallel to the corresponding cover surface of the pump body by the first adjustment structure 1 and the elastic positioning structure 2 is synchronized in the process of the pump cover changing from the second working state to the first working state. The adjustment of the sealing surface 121 of each pump cover to be completely in contact with the valve body 130 and / or the cover surface of the corresponding pump body along the circumferential direction when the pump cover of each vacuum pump body is in the first working state by the second adjustment structure 3 is performed when the pump cover is in the second working state.

[0087] Preferably, the driving member 51 is a motor. Since the distance between the sealing surface 121 of the pump cover and the cover surface of the pump body has an impact on the vacuum pumping speed, the motor drives the multiple pump covers to rotate around the central axis of the driving shaft 52, and the motor can infinitely adjust the rotation speed of the driving shaft 52, so that the vacuum degree of the vacuum pump body can be well controlled by controlling the pumping speed.

[0088] Specifically, the motor and the drive shaft 52 are connected via a transmission mechanism such as a reducer.

[0089] Specifically, the vacuum pump device also includes a controller and an encoder electrically connected to the controller. The motor is also electrically connected to the controller. The controller can control the output speed of the motor according to the electrical signal sent by the encoder.

[0090] Specifically, taking the transmission mechanism including the first transmission shaft and the second transmission shaft in transmission connection as an example, the first transmission shaft is also connected to the output shaft of the driving member 51, and the second transmission shaft is also connected to the driving shaft 52, and the second transmission shaft can drive the driving shaft 52 to rotate around its own central axis. It can be understood that when the pump cover is not provided on the driving shaft 52, that is, when the driving shaft 52 is not pressed down by an external force, the rotation center line of the second transmission shaft, the rotation center line of the driving shaft 52 and the central axis of the driving shaft 52 are all collinear. When the pump cover is driven to rotate by the driving shaft 52, especially when multiple pump covers are driven to rotate synchronously by the driving shaft 52, due to the heavy weight of the multiple pump covers and the multiple pump covers are distributed at intervals along the axial direction of the driving shaft 52, the gravity of the pump cover will cause the end of the driving shaft 52 away from the second transmission shaft in the axial direction to be pressed down, thereby causing the central axis of the driving shaft 52 to be non-collinear with the rotation center line of the second transmission shaft and the rotation center line of the driving shaft 52.

[0091] So Figure 4-7 As shown, the vacuum pump device further includes a coaxiality adjustment component 6, which is connected between the drive shaft 52 and the valve body 130, and is used to adjust the central axis of the drive shaft 52 to be in line with the rotation center line. Such an arrangement can effectively avoid the problem that the central axis of the drive shaft 52 and the rotation center line are not in line with each other due to the heavy weight of the multiple pump covers when they are driven to rotate synchronously for multiple vacuum pump bodies, effectively improve the driving performance and service life of the driving mechanism, and can further improve the reliability of the coordinated work of multiple vacuum pump bodies.

[0092] Specifically, Figure 4-7As shown, the first end of the drive shaft 52 axially close to the drive member 51 is rotatably connected to the valve body 130, and the coaxiality adjustment assembly 6 includes a first connection structure 61, a second connection structure 62 and a plurality of coaxiality adjustment members. The first connection structure 61 includes a connection seat 611, and the second connection portion 6111 of the connection seat 611 is rotatably connected to the second end of the drive shaft 52, and the second connection portion 6111 and the second end of the drive shaft 52 are both clearance-matched with the valve body 130, and the third connection portion 6112 of the connection seat 611 abuts against the valve body 130 along the axial direction of the drive shaft 52; the second connection structure 62 is spaced apart at the outer periphery of the third connection portion 6112 and is detachably connected to the valve body 130; a plurality of coaxiality adjustment members are distributed at intervals along the circumference of the second connection structure 62 and are all arranged on the second connection structure 62, and the coaxiality adjustment member is configured to be able to drive the third connection portion 6112 to move along the radial direction of the second connection structure 62, and to lock the relative position of the second connection structure 62 and the third connection portion 6112. Specifically, when the central axis of the drive shaft 52 is not colinear with the rotation centerline, the third connecting part 6112 is driven to move by at least a part of the multiple coaxiality adjustment parts. It can be understood that in this process, the connecting seat 611 and the second end of the drive shaft 52 are driven to move synchronously, so that the drive shaft 52 can be fine-tuned to the central axis and the rotation centerline. After the central axis of the drive shaft 52 is adjusted to be colinear with the rotation centerline, the relative position of the second connecting structure 62 and the third connecting part 6112 is locked by the coaxiality adjustment part. At this time, the relative position of the second connecting structure 62, the connecting seat 611 and the drive shaft 52 is synchronously locked, so that the central axis of the drive shaft 52 can be adjusted to be colinear with the rotation centerline quickly and efficiently, so that the driving member 51 can drive the drive shaft 52 to rotate around its own central axis, thereby improving the driving performance and service life of the driving mechanism, and can further improve the reliability of the coordinated work of multiple vacuum pump bodies.

[0093] Specifically, the peripheral shape of the third connection part 6112 of the connection seat 611 is not limited to a circle, and the peripheral shape of the third connection part 6112 can also be set to a square, a rectangle or a polygon, etc. Exemplarily, when the peripheral shape of the third connection part 6112 is a circle, if the central axis of the drive shaft 52 is not colinear with the rotation center line, it is necessary to adjust all the adjustment members so that the third connection part 6112 can be driven to move, so that the drive shaft 52 can be fine-tuned to the central axis and the rotation center line. Exemplarily, when the peripheral shape of the third connection part 6112 is a square or a rectangle, if the central axis of the drive shaft 52 is not colinear with the rotation center line, it is necessary to adjust a part of the adjustment members or adjust all the adjustment members so that the third connection part 6112 can be driven to move, so that the drive shaft 52 can be fine-tuned to the central axis and the rotation center line.

[0094] Preferably, the second connection portion 6111 and the third connection portion 6112 of the connection base 611 are integrally formed, which can reduce the number of parts, facilitate assembly, and improve the structural strength and service life of the connection base 611.

[0095] Specifically, Figure 6 and Figure 7 As shown, the second connection structure 62 includes a connection ring 621 that is detachably connected to the valve body 130, and the connection ring 621 is provided with a plurality of threaded holes 6211, and the plurality of threaded holes 6211 correspond to a plurality of coaxiality adjusting members one by one, and the coaxiality adjusting members are threadedly connected to the threaded holes 6211 and can be pressed against the outer peripheral wall of the third connection part 6112 along the radial direction of the second connection structure 62. When the central axis of the drive shaft 52 is to be adjusted to be colinear with the rotation centerline, a corresponding part of the coaxiality adjusting members among the plurality of coaxiality adjusting members is screwed to drive the third connection part 6112 to move, thereby driving the connection seat 611 and the second end of the drive shaft 52 to move synchronously until the drive shaft 52 is finely adjusted to have the central axis and the rotation centerline colinear; when the central axis of the drive shaft 52 is adjusted to be colinear with the rotation centerline, the coaxiality adjusting member synchronously locks the relative position of the connection ring 621 and the third connection part 6112, so that the relative position of the connection ring 621, the connection seat 611 and the drive shaft 52 is synchronously locked, and the structure is simple and the operation is convenient. In this embodiment, the coaxiality adjustment member is a fourth screw.

[0096] Preferably, a plurality of coaxiality adjustment members are evenly spaced and distributed along the circumference of the second connection structure 62. This can further improve the efficiency and accuracy of adjusting the central axis of the driving shaft 52 to be colinear with the rotation centerline.

[0097] Specifically, Figure 6 and Figure 7 As shown, the second connection structure 62 also includes a plurality of connection members 622, which are spaced apart along the circumference of the connection ring 621, and the connection members 622 pass through the connection ring 621 and are detachably connected to the valve body 130. This is to achieve detachable connection of the connection ring 621 to the valve body 130. In this embodiment, the connection member 622 is a fifth screw. In other embodiments, the connection member 622 may also include a bolt and a third locking nut used in conjunction, so that the connection ring 621 can be detachably connected to the valve body 130. It can be understood that the connection member 622 and the coaxiality adjustment member are spaced apart along the circumference of the connection ring 621.

[0098] Preferably, in this embodiment, if Figure 4-7As shown, the valve body 130 is provided with a through hole 132 communicating with the accommodating cavity 131, and the second connecting portion 6111 partially passes through the through hole 132 and is rotatably connected to the second end of the driving shaft 52; along the radial direction of the driving shaft 52, the gap between the outer peripheral wall of the second connecting portion 6111 and the inner peripheral wall of the through hole 132 is smaller than the gap between the outer peripheral wall of the third connecting portion 6112 and the inner peripheral wall of the connecting ring 621. This enables the second end of the driving shaft 52 to be rotatably connected to the second connecting portion 6111, and enables the central axis of the driving shaft 52 to be effectively adjusted to be colinear with the rotation center line through the coaxiality adjusting member; secondly, such a setting can effectively reduce the space occupancy rate of the coaxiality adjusting assembly 6, and improve the aesthetics.

[0099] As an alternative, the valve body 130 is provided with a through hole 132 communicating with the accommodating chamber 131, and the second end of the drive shaft 52 passes through the through hole 132 and is rotatably connected to the second connecting portion 6111; along the radial direction of the drive shaft 52, the gap between the outer peripheral wall of the drive shaft 52 and the inner peripheral wall of the through hole 132 is smaller than the gap between the outer peripheral wall of the third connecting portion 6112 and the inner peripheral wall of the connecting ring 621. This also enables the second end of the drive shaft 52 to be rotatably connected to the second connecting portion 6111, and the central axis of the drive shaft 52 can be effectively adjusted to be colinear with the rotation center line through the coaxiality adjusting member.

[0100] More specifically, if Figure 6 and Figure 7 As shown, the second end of the drive shaft 52 is provided with a connecting shaft 521, and the first connecting structure 61 also includes a first bearing 612, the inner ring of the first bearing 612 is fixedly sleeved on the connecting shaft 521, and the second connecting portion 6111 is fixedly sleeved on the outer ring of the first bearing 612. This arrangement is used to realize the rotational connection between the second end of the drive shaft 52 and the second connecting portion 6111. Among them, the connecting shaft 521 and the drive shaft 52 can be two independent shafts, or a part of the shaft section integrally formed at the second end of the drive shaft 52. When the connecting shaft 521 and the drive shaft 52 are two independent shafts, the second end of the drive shaft 52 and the connecting shaft 521 are connected by plugging or using a coupling. In this embodiment, it is preferably set that the connecting shaft 521 and the drive shaft 52 are two independent shafts, and the second end of the drive shaft 52 and the connecting shaft 521 are connected by plugging. With such a configuration, the coaxiality adjustment component 6 can be adapted to drive shafts 52 of different sizes by replacing the connecting shaft 521 according to the size of the drive shaft 52, thereby effectively improving the versatility of the coaxiality adjustment component 6.

[0101] Optionally, there are multiple first bearings 612, and the multiple first bearings 612 are distributed along the axial direction of the connecting shaft 521 at intervals. Figure 6 and Figure 7As shown, two first bearings 612 are exemplarily provided. The distribution positions of the two first bearings 612 along the axial direction are defined by the shoulder of the connecting shaft 521, the limit retaining ring and the shoulder of the second connecting portion 6111.

[0102] More specifically, the first end of the driving shaft 52 is rotatably connected to the valve body 130 via a second bearing.

[0103] More specifically, if Figure 6 and Figure 7 As shown, a second sealing ring 613 is disposed between the abutment portion of the third connection portion 6112 and the valve body 130, and the second sealing ring 613 is used to seal the gap between the third connection portion 6112 and the valve body 130. This arrangement can prevent debris and the like from entering the valve body 130 through the gap between the third connection portion 6112 and the valve body 130. Specifically, in this embodiment, the second sealing ring 613 is a rubber sealing ring.

[0104] More specifically, if Figure 6 and Figure 7 As shown, the first connection structure 61 further includes a closed end plate 614, which is detachably connected to the third connection portion 6112 and is relatively far away from the drive shaft 52 relative to the connection seat 611. It can prevent debris from entering the valve body 130, and it can prevent debris from entering the connection between the third connection portion 6112 and the connection shaft 521 to damage the working performance and service life of the first bearing 612; secondly, it can further improve the aesthetics.

[0105] Preferably, if Figure 6 and Figure 7 As shown, a third sealing ring 615 is disposed between the third connection portion 6112 and the closed end plate 614, and the third sealing ring 615 is used to seal the gap between the third connection portion 6112 and the closed end plate 614. Such a configuration can further improve the sealing performance of the closed end plate 614. Specifically, in this embodiment, the third sealing ring 615 is also a rubber sealing ring.

[0106] The utility model also discloses vacuum coating equipment, including the above-mentioned vacuum pump device. By adopting the above-mentioned vacuum pump device, the working performance and service life of the vacuum coating equipment can be effectively improved.

[0107] Obviously, the above embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention, and are not intended to limit the implementation methods of the present invention. For those skilled in the art, various obvious changes, readjustments and substitutions can be made without departing from the scope of protection of the present invention. It is not necessary and impossible to list all implementation methods here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention shall be included in the scope of protection of the claims of the present invention.

Claims

1. An adjusting device, wherein a workpiece (100) comprises a first part (110), and a second part (120) capable of covering an opening (1101) of the first part (110), characterized in that: The adjusting device comprises a first adjusting structure (1), the first adjusting structure (1) comprises a universal adjusting member (11), a first connecting portion (111) of the universal adjusting member (11) is connected to an output end of a driving mechanism, and a universal adjusting portion (112) of the universal adjusting member (11) is movably connected to the second part (120); The driving mechanism can drive the second part (120) to rotate around the axis, so that the second part (120) has a first working state in which it covers the opening (1101) of the first part (110), and a second working state away from the first part (110); during the process of the second part (120) changing from the second working state to the first working state, the universal adjustment part (112) can adjust the sealing surface of the second part (120) to be parallel to the covering surface of the first part (110); when the second part (120) is in the first working state, the universal adjustment part (112) can apply pressure to the second part (120), so that the second part (120) can seal the opening (1101) of the first part (110).

2. The adjusting device according to claim 1, characterized in that: The first adjustment structure (1) further comprises a connection limit assembly, the connection limit assembly comprising an upper connection limit piece (12) and a lower connection limit piece (13) which are detachably connected, and the lower connection limit piece (13) is also connected to the second part (120); A limiting movable space is formed between the upper connection limiting member (12) and the lower connection limiting member (13); or a limiting movable space is formed between the upper connection limiting member (12), the lower connection limiting member (13) and the second part (120); The universal adjustment part (112) is limited in the limiting movable space and can move relative to the upper connection limiting member (12) and the lower connection limiting member (13); the first connection part (111) extends out of the limiting movable space and is connected to the output end of the driving mechanism; When the second part (120) is in the first working state, the universal adjustment portion (112) can abut against the bottom wall of the position-limiting activity space to apply pressure to the second part (120).

3. The adjusting device according to claim 2, characterized in that: The universal adjustment portion (112) is provided with a universal adjustment surface (1121), and the universal adjustment surface (1121) is a spherical adjustment surface or an ellipsoidal adjustment surface. Both the spherical adjustment surface and the ellipsoidal adjustment surface are used to adjust the sealing surface of the second part (120) to be parallel to the covering surface of the first part (110), and both the spherical adjustment surface and the ellipsoidal adjustment surface can abut against the bottom wall of the limiting activity space to apply pressure to the second part (120).

4. The adjusting device according to any one of claims 1 to 3, characterized in that: The adjustment device also includes a plurality of elastic positioning structures (2) arranged at the output end of the driving mechanism, and the plurality of elastic positioning structures (2) are distributed at intervals along the circumference of the second part (120). When the second part (120) is in the second working state, the plurality of elastic positioning structures (2) can adjust the sealing surface (121) of the second part (120) to be parallel to a fixed surface (531); the fixed surface (531) is a plane on the output end of the driving mechanism that is parallel to the covering surface of the first part (110) when the second part (120) is in the first working state.

5. The adjusting device according to any one of claims 1 to 3, characterized in that: The adjustment device further comprises a second adjustment structure (3), the second adjustment structure (3) being connected between the output end of the drive mechanism and the universal adjustment member (11), the second adjustment structure (3) being configured to be able to adjust the maximum distance between the universal adjustment surface (1121) of the universal adjustment portion (112) and a fixed surface (531), and to lock the relative position between the universal adjustment member (11) and the output end of the drive mechanism; the fixed surface (531) being a plane on the output end of the drive mechanism parallel to the covering surface of the first part (110) when the second part (120) is in the first working state.

6. The adjusting device according to claim 5, characterized in that: The second adjustment structure (3) comprises a first screw (31) and a first locking nut (32); the first screw (31) is threadedly connected to the output end of the driving mechanism and is pressed against the end surface of the first connecting portion (111) away from the universal adjustment portion (112); the first locking nut (32) is threadedly connected to the first screw (31) and can lock the relative position of the first screw (31) and the output end of the driving mechanism.

7. The adjusting device according to claim 5, characterized in that: The second adjustment structure (3) further comprises a second screw (33), wherein the second screw (33) is threadedly connected to the output end of the driving mechanism and the first connecting portion (111).

8. The adjusting device according to any one of claims 1 to 3, characterized in that: The adjusting device further comprises a third screw (34), wherein the third screw (34) is threadedly connected to the output end of the driving mechanism and is tightly pressed against the outer peripheral wall of the first connecting portion (111).

9. A vacuum pump device, comprising a valve body (130), a vacuum pump body and a driving mechanism, wherein the vacuum pump body comprises a pump body arranged on the valve body (130), and a pump cover capable of covering an opening (1101) of the pump body; characterized in that: It also includes the regulating device according to any one of claims 1 to 8, the vacuum pump body is the workpiece (100), the pump body is the first part (110), and the pump cover is the second part (120).

10. The vacuum pump device according to claim 9, characterized in that The driving mechanism comprises a driving member (51) fixedly arranged on the valve body (130), a driving shaft (52) drivingly connected to the output shaft of the driving member (51), and a driving arm (53) fixedly sleeved on the driving shaft (52), wherein the driving shaft (52) is rotatably connected to the valve body (130), the driving member (51) can drive the driving arm (53) to rotate around the central axis of the driving shaft (52), and the output end of the driving arm (53) is connected to the first connecting portion (111).

11. The vacuum pump device according to claim 10, characterized in that: The number of the adjusting device, the vacuum pump body and the driving arm (53) is multiple, and the multiple adjusting devices, the multiple vacuum pump bodies and the multiple driving arms (53) are all arranged in a one-to-one correspondence. The multiple driving arms (53) are distributed at intervals along the axial direction of the driving shaft (52), and the pump covers of the multiple vacuum pump bodies are independently arranged.

12. The vacuum pump device according to claim 10, characterized in that: The driving member (51) is a motor.

13. The vacuum pump device according to claim 10, characterized in that The vacuum pump device further comprises a coaxiality adjustment component (6), wherein the coaxiality adjustment component (6) is connected between the drive shaft (52) and the valve body (130), and the coaxiality adjustment component (6) is used to adjust the central axis of the drive shaft (52) to be colinear with the rotation center line.

14. Vacuum coating equipment, characterized in that: A vacuum pump device comprising any one of claims 9 to 13.

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