Vacuum cavity sample transfer rod

Abstract

The utility model discloses a vacuum cavity sample transfer rod which comprises a sample transfer rod body and an observation window set, the observation window set is installed on the surface of the sample transfer rod body, valve assemblies are symmetrically installed on the left side and the right side of the sample transfer rod body, and swivel joint assemblies are installed on the sides, away from the sample transfer rod body, of the valve assemblies. According to the vacuum cavity sample transfer rod, a plurality of observation window groups are annularly distributed and mounted on the surface of the sample transfer rod body, so that the state of a material in the sample transfer rod body can be observed at different positions as required, and different magnifying lenses can be replaced by utilizing the structural detachability of the sample transfer rod, so that the state of the material can be observed more accurately and microcosmically; and through the use of the swivel joint assembly, the sealing performance of butt joint with a conveying structure can be guaranteed, and meanwhile, the sample transfer rod body has axial rotation performance in the horizontal direction, so that real-time observation can be conveniently carried out while conveying is carried out, and accidents in the conveying process are avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor materials, in particular to a vacuum cavity sample transfer rod. Background Art

[0002] In various micro-nano manufacturing and detection technologies such as semiconductor manufacturing, micro-nano processing, thin film growth, energy spectrum detection and electron microscopy, the processing, preparation and transfer of samples are required to be completed in a vacuum environment. Vacuum can provide a high-cleanliness environment and isolate oxygen and water, which is conducive to keeping the sample clean and stable. A vacuum chamber transfer rod, that is, a vacuum transfer sample rod, is often used. As a common experimental instrument, it is widely used in many fields such as chemistry, physics, and biology. The vacuum chamber transfer rod is an experimental tool that uses vacuum adsorption and transfer technology.

[0003] Some types of conventional vacuum chamber sample transfer rods have an observation window structure on the surface, but due to the limitation of the size of the structure, the observation of the internal materials is limited. In addition, some vacuum chamber sample transfer rods also have the function of material preparation. At this time, the disadvantages of the observation window are relatively obvious. On the one hand, the observation range is limited, and on the other hand, the observation at a relatively microscopic angle is also relatively limited, making it difficult to accurately grasp the real-time status of the material.

[0004] Therefore, in view of this, the existing structure and defects are studied and improved, and a vacuum chamber sample transfer rod is proposed. Utility Model Content

[0005] The purpose of the utility model is to provide a vacuum chamber sample transfer rod to solve the problems raised in the above background technology.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a vacuum chamber sample transfer rod, comprising a sample transfer rod body and an observation window group, the observation window group is installed on the surface of the sample transfer rod body, and valve assemblies are symmetrically installed on the left and right sides of the sample transfer rod body, and a swivel joint assembly is installed on the side of the valve assembly away from the sample transfer rod body, the observation window group comprises an extension tube, a fixed ring cover, a fastening bolt, a magnifying lens, a sealing gasket ring and a tempered glass cover, the opening of the extension tube is connected to the fixed ring cover, and the fastening bolt is threadedly installed at the connection between the fixed ring cover and the extension tube, and a magnifying lens is arranged at the internal joint between the fixed ring cover and the extension tube, and the upper and lower sides of the magnifying lens are fitted with sealing gasket rings, and at the same time, a tempered glass cover is arranged on the side of the sealing gasket ring away from the magnifying lens.

[0007] Furthermore, the extension tube is connected to the sample transfer rod body by welding, and the fastening bolts are arranged around the outer edge of the connection between the fixed ring cover and the extension tube.

[0008] Furthermore, the magnifying lens and the tempered glass cover have the same size, and the outer surface structures of the magnifying lens and the tempered glass cover match the inner surface structures of the extension tube and the fixing ring cover.

[0009] Furthermore, the valve assembly includes a one-way valve, a connecting spiral tube, a micro vacuum pump and an exhaust filter tube. A connecting spiral tube is arranged on the top of the one-way valve, and the top of the connecting spiral tube is connected to the micro vacuum pump, and an exhaust filter tube is installed on one side of the micro vacuum pump.

[0010] Furthermore, the valve assembly also includes a pressure relief valve and an air intake filter tube. The bottom of the one-way valve is connected to the pressure relief valve, and the air intake filter tube is installed on the side of the pressure relief valve away from the one-way valve.

[0011] Furthermore, the swivel joint assembly includes a docking movable tube, a precision bearing and a connecting flange. The interior of the docking movable tube is equipped with a precision bearing, and a connecting flange is installed on a side of the precision bearing away from the docking movable tube.

[0012] Furthermore, the swivel joint assembly also includes fixing bolts and a sealing ring. The outer edge of the docking movable tube away from the precision bearing is ringed with fixing bolts, and the side of the docking movable tube away from the precision bearing is installed with a sealing ring.

[0013] Furthermore, the docking movable tube is sealedly connected to the valve assembly, and the docking movable tube has horizontal axial rotation ability with the connecting flange through the connection of the precision bearing.

[0014] The utility model provides a vacuum chamber sample transfer rod, which has the following beneficial effects:

[0015] 1. The utility model, wherein a magnifying lens is arranged at the center of the connection between the extension tube and the fixed ring cover, allows the operator to utilize the characteristics of the magnifying lens to observe the interior of the sample transfer rod body at a microscopic perspective to confirm the state of the material in real time, and the tempered glass covers arranged on both sides of the magnifying lens, in conjunction with the use of sealing gaskets, can not only protect the magnifying lenses, but also effectively strengthen and seal the structure to avoid structural leakage, and the extension tube and the fixed ring cover connected by fastening bolts can make the disassembly of the structure convenient and flexible, and can ensure the stability of the structural connection. When the magnifying lens needs to be replaced, it is only necessary to screw out the fastening bolts, then remove the fixed ring cover and the sealing gasket ring with the tempered glass cover embedded inside in turn, and then directly take out the middle magnifying lens and replace it with the required magnification.

[0016] 2. The utility model uses the structure of a swivel joint assembly on the side of the valve assembly. On the one hand, the precision bearing inside the docking movable tube is used to make the entire sample transfer rod body have the mobility of axial rotation in the horizontal direction after docking with the external conveying structure. By using the above structure, the direction of the observation window group arranged on the surface of the sample transfer rod body can be rotated in real time during the conveying process as needed, so as to observe the conveying state of the internal material. The sealing ring installed on one side of the connecting flange, in conjunction with the use of fixing bolts, can simplify the connection method and ensure the sealing of the connection to the greatest extent. In addition, by respectively providing an exhaust filter tube on one side of the micro vacuum pump and an air inlet filter tube on one side of the pressure relief valve, it can be avoided to the greatest extent that when the air inside the sample transfer rod body interacts with the outside world, the impurities in the air affect the state inside the sample transfer rod body, thereby reducing the negative impact during material conveying. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a schematic diagram of the side view of the main body of a vacuum chamber sample transfer rod of the utility model;

[0018] Figure 2 This is a schematic diagram of the internal structure of an observation window group of a vacuum chamber sample transfer rod of the utility model;

[0019] Figure 3 This is a schematic diagram of the structure of a valve assembly of a vacuum chamber sample transfer rod of the utility model;

[0020] Figure 4 The utility model is a schematic diagram of the three-dimensional structure of a magnifying lens, a sealing gasket ring and a strengthened glass cover of a vacuum chamber sample transfer rod.

[0021] In the figure: 1. sample transfer rod body; 2. observation window assembly; 201. extension tube; 202. fixing ring cover; 203. fastening bolts; 204. magnifying lens; 205. sealing gasket ring; 206. tempered glass cover; 3. valve assembly; 301. one-way valve; 302. connecting spiral tube; 303. micro vacuum pump; 304. exhaust filter tube; 305. pressure relief valve; 306. intake filter tube; 4. swivel joint assembly; 401. docking movable tube; 402. precision bearing; 403. connecting flange; 404. fixing bolts; 405. sealing ring. DETAILED DESCRIPTION

[0022] The following is a further detailed description of the implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but cannot be used to limit the scope of the present invention.

[0023] like Figure 1 , Figure 2 and Figure 4As shown, a vacuum chamber sample transfer rod comprises a sample transfer rod body 1 and an observation window group 2, the observation window group 2 is installed on the surface of the sample transfer rod body 1, and valve assemblies 3 are symmetrically installed on the left and right sides of the sample transfer rod body 1, and a swivel joint assembly 4 is installed on the side of the valve assembly 3 away from the sample transfer rod body 1, the observation window group 2 comprises an extension tube 201, a fixed ring cover 202, a fastening bolt 203, a magnifying lens 204, a sealing gasket ring 205 and a tempered glass cover 206, the opening of the extension tube 201 is connected to the fixed ring cover 202, and the fastening bolt 203 is threadedly installed at the connection between the fixed ring cover 202 and the extension tube 201, and the magnifying lens 204 is arranged at the internal connection between the fixed ring cover 202 and the extension tube 201, and the upper and lower sides of the magnifying lens 204 are affixed with sealing gasket rings 205 At the same time, a tempered glass cover 206 is provided on the side of the sealing gasket ring 205 away from the magnifying lens 204. The extension tube 201 is welded to the sample transfer rod body 1, and the fastening bolts 203 are arranged on the outer edge of the connection between the fixed ring cover 202 and the extension tube 201. The magnifying lens 204 and the tempered glass cover 206 have the same size, and the outer surface structures of the magnifying lens 204 and the tempered glass cover 206 match the inner surface structures of the extension tube 201 and the fixed ring cover 202. When the magnifying lens 204 needs to be replaced, it is only necessary to screw out the fastening bolts 203, and then remove the fixed ring cover 202 and the sealing gasket ring 205 with the tempered glass cover 206 embedded therein in turn, and then directly take out the middle magnifying lens 204 and replace it with the required magnification.

[0024] like Figure 1 and Figure 3As shown, the valve assembly 3 includes a one-way valve 301, a connecting solenoid 302, a micro vacuum pump 303 and an exhaust filter tube 304. The top of the one-way valve 301 is provided with a connecting solenoid 302, and the top of the connecting solenoid 302 is connected to the micro vacuum pump 303, and the exhaust filter tube 304 is installed on one side of the micro vacuum pump 303. The valve assembly 3 also includes a pressure relief valve 305 and an air intake filter tube 306. The bottom of the one-way valve 301 is connected to the pressure relief valve 305, and the side of the pressure relief valve 305 away from the one-way valve 301 is installed with the air intake filter tube 306. The swivel joint assembly 4 includes a docking movable tube 401, a precision bearing 402 and a connecting flange 403. The interior of the docking movable tube 401 is installed with a precision bearing 402, and the side of the precision bearing 402 away from the docking movable tube 401 is installed with a connecting flange 403. The swivel joint assembly 4 also includes a fixing bolt 40 4 and a sealing ring 405, the outer edge of the docking movable tube 401 away from the precision bearing 402 is ringed with fixing bolts 404, and a sealing ring 405 is installed on the side of the docking movable tube 401 away from the precision bearing 402, the docking movable tube 401 and the valve assembly 3 are sealed, and the docking movable tube 401 has horizontal axial rotation between the connection with the connecting flange 403 through the precision bearing 402. By using the structure of the swivel joint assembly 4 on the side of the valve assembly 3, on the one hand, the precision bearing 402 inside the docking movable tube 401 is utilized, so that the entire sample transfer rod body 1 has the activity of axial rotation in the horizontal direction after docking with the external conveying structure. By using the above structure, the observation window group 2 set on the surface of the sample transfer rod body 1 can be rotated in real time during the conveying process as needed, so as to observe the conveying status of the internal material.

[0025] In summary, if Figures 1 to 4 As shown, when the vacuum chamber sample transfer rod is used, the rotary joint assembly 4 connected to the valve assembly 3 on the left and right sides of the sample transfer rod body 1 is first connected to the conveying structure, and the flange structure corresponding to the external structure is docked through the connecting flange 403, and the sealing ring 405 is embedded in the joint, and then the fixing bolts 404 are screwed in sequence, so as to complete the connection and installation of the entire device structure;

[0026] Then, according to specific needs, it is selected whether to replace the magnifying lens 204 installed in the observation window group 2. When replacement is required, firstly, the fastening bolts 203 fixing the extension tube 201 and the fixing ring cover 202 are screwed out in sequence, and then the fixing ring cover 202 with a tempered glass cover 206 embedded therein is removed, and then the sealing gasket ring 205 on the surface of the magnifying lens 204 is removed, and then the magnifying lens 204 at the top opening of the extension tube 201 can be taken out, and then replaced with a pre-prepared one, and then the structures are reset in sequence and the sealing stability of the structure is ensured;

[0027] When preparing to transport materials, the connection channel between the sample container connected thereto and the sample transfer rod body 1 is opened through the one-way valve 301 on one side of the sample transfer rod body 1, so that the material enters the sample transfer rod body 1, and then the micro vacuum pump 303 connected to the top of the solenoid 302 is started to extract the air inside the sample transfer rod body 1 and discharge it through the exhaust filter tube 304, so that the inside of the sample transfer rod body 1 forms a negative pressure, that is, a vacuum state. Then, under the vacuum state, the internal objects can be transferred and transported to another container or a conveying structure through the entire device. After the material is transferred, the pressure relief valve 305 can be started to cooperate with the air intake filter tube 306 to restore the inside of the sample transfer rod body 1 to a normal pressure state to facilitate the next transfer.

[0028] The embodiments of the present invention are provided for the purpose of illustration and description, and are not intended to be exhaustive or to limit the present invention to the disclosed forms. Many modifications and variations will be apparent to those of ordinary skill in the art. The embodiments are selected and described to better illustrate the principles and practical applications of the present invention, and to enable those of ordinary skill in the art to understand the present invention and thereby design various embodiments with various modifications suitable for specific uses.

Claims

1. A vacuum chamber sample transfer rod, comprising a sample transfer rod body (1) and an observation window group (2), characterized in that: The surface of the sample transfer rod body (1) is provided with an observation window assembly (2), and valve assemblies (3) are symmetrically installed on the left and right sides of the sample transfer rod body (1), and a swivel joint assembly (4) is installed on the side of the valve assembly (3) away from the sample transfer rod body (1). The observation window assembly (2) comprises an extension tube (201), a fixing ring cover (202), a fastening bolt (203), a magnifying lens (204), a sealing gasket ring (205) and a tempered glass cover (206). The extension tube (201 ) is connected to the opening of the extension tube (201), and a fastening bolt (203) is threadedly installed at the connection between the fixed ring cover (202) and the extension tube (201), and a magnifying lens (204) is arranged at the internal connection between the fixed ring cover (202) and the extension tube (201), and sealing gaskets (205) are attached to the upper and lower sides of the magnifying lens (204), and a tempered glass cover (206) is arranged on the side of the sealing gasket (205) away from the magnifying lens (204).

2. The vacuum chamber sample transfer rod according to claim 1, characterized in that: The extension tube (201) is connected to the sample transfer rod body (1) by welding, and the fastening bolts (203) are arranged around the outer edge of the connection between the fixed ring cover (202) and the extension tube (201).

3. The vacuum chamber sample transfer rod according to claim 1, characterized in that: The magnifying lens (204) and the tempered glass cover (206) have the same size, and the outer surface structures of the magnifying lens (204) and the tempered glass cover (206) match the inner surface structures of the extension tube (201) and the fixing ring cover (202).

4. The vacuum chamber sample transfer rod according to claim 1, characterized in that: The valve assembly (3) comprises a one-way valve (301), a connecting solenoid (302), a micro vacuum pump (303) and an exhaust filter tube (304); the top of the one-way valve (301) is provided with a connecting solenoid (302), the top of the connecting solenoid (302) is connected to the micro vacuum pump (303), and the exhaust filter tube (304) is installed on one side of the micro vacuum pump (303).

5. The vacuum chamber sample transfer rod according to claim 4, characterized in that: The valve assembly (3) further comprises a pressure relief valve (305) and an air intake filter tube (306); the bottom of the one-way valve (301) is connected to the pressure relief valve (305), and the air intake filter tube (306) is installed on the side of the pressure relief valve (305) away from the one-way valve (301).

6. The vacuum chamber sample transfer rod according to claim 1, characterized in that: The swivel joint assembly (4) comprises a docking movable tube (401), a precision bearing (402) and a connecting flange (403); the precision bearing (402) is installed inside the docking movable tube (401), and the connecting flange (403) is installed on a side of the precision bearing (402) away from the docking movable tube (401).

7. The vacuum chamber sample transfer rod according to claim 6, characterized in that: The swivel joint assembly (4) further comprises fixing bolts (404) and a sealing ring (405); the fixing bolts (404) are arranged around the outer edge of the docking movable tube (401) away from the precision bearing (402); and the sealing ring (405) is installed on one side of the docking movable tube (401) away from the precision bearing (402).

8. The vacuum chamber sample transfer rod according to claim 6, characterized in that: The docking movable tube (401) is sealedly connected to the valve assembly (3), and the docking movable tube (401) is horizontally axially rotatable with the connection flange (403) through the connection of the precision bearing (402).

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