Cleaning device and processing equipment

Abstract

The utility model discloses a cleaning device and machining equipment. The cleaning device comprises two containers, a liquid supply pipeline, a first valve set, a liquid supplementing pipeline and a second valve set. The two containers are connected in parallel and used for storing cleaning liquid, the liquid supply pipeline is communicated with the two containers respectively, and the liquid supplementing pipeline is also communicated with the two containers; the first valve group is used for controlling one container to be communicated with the liquid supply pipeline and controlling the other container to be blocked from the liquid supply pipeline, and the container communicated with the liquid supply pipeline is in a liquid supply state; and the second valve group is used for controlling the container in the liquid supply state to be blocked from the liquid supplementing pipeline and controlling the other container to be communicated with the liquid supplementing pipeline. When one container supplies liquid to the outside and the liquid level is low, the other container can be switched to supply liquid to the outside through the first valve set, meanwhile, the second valve set controls the liquid supplementing pipeline to supplement liquid to the container with the low liquid level, continuous liquid supply to the outside can be achieved, and meanwhile the liquid supplementing working condition and the liquid supply working condition do not interfere with each other.

Description

Technical Field

[0001] The present application relates to the field of wafer processing, and in particular to a cleaning device and processing equipment. Background Art

[0002] Cleaning is an important process throughout the semiconductor industry chain. Cleaning equipment plays an important role in the quality of semiconductor products. It is mainly used to remove impurities that may exist in each step of semiconductor silicon wafer manufacturing, wafer manufacturing and packaging testing to prevent impurities from affecting chip yield and chip product performance. The liquid supply of cleaning equipment is generally concentrated in pressure tanks. The main advantage of using pressure tanks is that the liquid outlet pressure can be stabilized. Traditional cleaning equipment has a relatively simple liquid outlet method and uses a single pressure tank to supply cleaning liquid. When the liquid level in the pressure tank is low, the operation needs to be suspended for liquid replenishment, which has a greater impact on cleaning capacity. Utility Model Content

[0003] The present application proposes a cleaning device and a processing equipment, aiming to solve the problem of the inability to continuously supply liquid during the current wafer cleaning process.

[0004] The present application proposes a cleaning device, comprising:

[0005] two containers for storing cleaning fluid;

[0006] a liquid supply pipeline, comprising a first branch and a second branch, wherein the first branch is connected to one of the containers, and the second branch is connected to the other container;

[0007] A first valve group, arranged in the liquid supply pipeline, for controlling the on-off of the first branch and the on-off of the second branch;

[0008] a liquid infusion pipeline, comprising a third branch and a fourth branch, wherein the third branch is connected to one of the containers, and the fourth branch is connected to the other container;

[0009] A second valve group is arranged in the liquid infusion pipeline, and the second valve group is used to control the on-off of the third branch and the on-off of the fourth branch;

[0010] The two containers can alternately supply liquid and exchange substitute liquid.

[0011] In some embodiments, the cleaning device further comprises a pressure difference building module connected to the liquid supply pipeline, wherein the pressure difference building module is used to build a pressure difference in the liquid supply pipeline to provide power for supplying liquid to the container.

[0012] In some embodiments, the container includes a pressure container, the cleaning device also includes a pressure relief valve arranged on the pressure container, and the pressure difference building module also includes a booster component connected to the two containers, and the booster component is used to increase the internal air pressure of the container.

[0013] In some embodiments, the cleaning device also includes a liquid level sensor arranged in the container. When the cleaning liquid in any of the containers in the liquid supply state is lower than a set amount, the first valve group is used to switch to another container for liquid supply, and the second valve group is used to connect the liquid replenishing pipeline with the container where the cleaning liquid is lower than the set amount.

[0014] In some embodiments, the first valve group includes a first valve disposed on the first branch and a second valve disposed on the second branch.

[0015] In some embodiments, the liquid supply pipeline includes a first main line connected to the first branch and the second branch respectively; the first valve group includes a first three-way valve, and the three valve ports of the first three-way valve are connected to the first main line, the first branch and the second branch one by one.

[0016] In some embodiments, the second valve group includes a third valve disposed on the third branch and a fourth valve disposed on the fourth branch.

[0017] In some embodiments, the infusion pipeline includes a second main road connected to the third branch and the fourth branch respectively, the second valve group includes a second three-way valve, and the three valve ports of the second three-way valve are connected to the second main road, the third branch and the fourth branch one by one.

[0018] The present application also proposes a processing equipment, comprising the above-mentioned cleaning device, and the processing equipment also includes a machine platform for installing the cleaning device.

[0019] The cleaning device in the present application includes two containers, a liquid supply pipeline, a first valve group, a liquid replenishment pipeline and a second valve group; the two containers are arranged in parallel to store cleaning liquid, the liquid supply pipeline is connected to the two containers respectively, and the liquid replenishment pipeline is also arranged to be connected to the two containers; the first valve group is used to control one of the containers to be connected to the liquid supply pipeline, and to control the other container to be blocked from the liquid supply pipeline, and the container connected to the liquid supply pipeline is in a liquid supply state; the second valve group is used to control the container in the liquid supply state to be blocked from the liquid replenishment pipeline, and to control the other container to be connected to the liquid replenishment pipeline. When one of the containers supplies liquid to the outside and the liquid level is low, the first valve group can be used to switch the other container to supply liquid to the outside, and at the same time, the second valve group can be used to control the liquid replenishment pipeline to replenish the container with the lower liquid level, so that uninterrupted liquid supply to the outside can be achieved, and at the same time, the liquid replenishment condition and the liquid supply condition do not interfere with each other. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is a schematic diagram of the structure of a cleaning device in one embodiment of the present application;

[0021] Figure 2 This is a schematic structural diagram of a cleaning device in another embodiment of the present application;

[0022] Figure 3 This is a schematic structural diagram of a cleaning device in another embodiment of the present application;

[0023] Figure 4 This is a schematic structural diagram of a cleaning device in another embodiment of the present application;

[0024] Figure 5 This is a schematic diagram of the structure of a cleaning device in another embodiment of the present application.

[0025] Description of labels:

[0026] 10. Container; 11. Pressure relief valve; 12. Liquid level gauge; 20. Liquid supply pipeline; 21. First main pipeline; 22. First branch pipeline; 23. Second branch pipeline; 31. First valve; 32. Second valve; 33. First three-way valve; 40. Liquid replenishment pipeline; 41. Second main pipeline; 42. Third branch pipeline; 43. Fourth branch pipeline; 51. Third valve; 52. Fourth valve; 61. First water pump; 62. Second water pump; 63. First air pump; 64. Second air pump; 65. Third air pump; 66. Seventh valve;

[0027] The purpose, features and advantages of this application will be further described in conjunction with the embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0028] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the scheme in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments in the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0029] It should be noted that all directional indications such as up, down, left, right, front, back... in the embodiments of the present application are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture as shown in the accompanying drawings. If the specific posture changes, the directional indication will also change accordingly.

[0030] It should also be noted that when an element is referred to as being "fixed on" or "disposed on" another element, it may be directly on the other element or there may be an intermediate element at the same time. When an element is referred to as being "connected to" another element, it may be directly connected to the other element or there may be an intermediate element at the same time.

[0031] In addition, the descriptions of "first", "second", etc. in this application are only for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, the technical solutions between the various embodiments can be combined with each other, but they must be based on the ability of ordinary technicians in this field to implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by this application.

[0032] This application proposes a cleaning device, referring to Figure 1 The cleaning device includes: two containers 10 for storing cleaning liquid; a liquid supply pipeline 20, including a first branch 22 and a second branch 23, the first branch 22 is connected to one of the containers 10, and the second branch 23 is connected to the other container 10; a first valve group is arranged in the liquid supply pipeline, and is used to control the on-off of the first branch 22 and the on-off of the second branch 23; a liquid replenishment pipeline 40, including a third branch 42 and a fourth branch 43, the third branch 42 is connected to one of the containers 10, and the fourth branch 43 is connected to the other container 10; a second valve group is arranged in the liquid replenishment pipeline 40, and the second valve group is used to control the on-off of the third branch 42 and the on-off of the fourth branch 43; the two containers 10 can alternately supply liquid and replace liquid.

[0033] In this embodiment, the container 10 can be a sealed tank or a tank with no pressure difference with the outside. One end of the liquid replenishment pipeline 40 is arranged at the top of the container 10, and one end of the liquid supply pipeline 20 is arranged at the bottom of the container 10. The liquid replenishment pipeline 40 is arranged at a position higher than the liquid supply pipeline 20, so that the potential energy of the cleaning liquid in the tank can be used to complete the liquid replenishment and liquid supply operations. Two containers 10 can be arranged in parallel, and the first valve group includes a first valve 31 arranged on the first branch 22, and a second valve 32 arranged on the second branch 23. The first branch 22 and the second branch 23 can be controlled separately by the two valves. The second valve group includes a third valve 51 arranged on the third branch 42, and a fourth valve 52 arranged on the fourth branch 43. The two branches in the liquid replenishment pipeline 40 can be controlled separately by the third valve 51 and the fourth valve 52. When one of the containers 10 supplies liquid to the outside and the liquid level is low, the first valve group can be used to switch the other container 10 to supply liquid to the outside, and at the same time, the second valve group can be used to control the liquid replenishment pipeline 40 to replenish the container 10 with the lower liquid level, so that uninterrupted liquid supply to the outside can be achieved, and the liquid replenishment and liquid supply conditions do not interfere with each other. The liquid replenishment operation and the liquid supply operation can be performed at the same time, that is, one container 10 performs the liquid replenishment operation and the other container 10 performs the liquid supply operation, or one container 10 enters the liquid supply condition for a period of time, and then the other container 10 performs the liquid replenishment operation. As long as it can be ensured that the two containers 10 can switch the liquid supply, it will be fine.

[0034] In some embodiments, reference Figure 1 The liquid supply pipeline 20 includes a first main line 21 and a first branch line 22 and a second branch line 23 connected to the first main line 21. The first branch line 22 is connected to one of the containers 10, and the second branch line 23 is connected to the other container 10. In this embodiment, the first main line 21 and the first branch line 22 and the second branch line 23 are connected by a three-way joint. Of course, a three-way valve can also be used to control the on-off status of the two branches. Specifically, refer to Figure 2 The first valve group includes a first three-way valve 33, and the three valve ports of the first three-way valve 33 are connected to the first main road 21, the first branch road 22 and the second branch road 23 in a one-to-one correspondence. The first three-way valve 33 can control the two branches to be connected to the first main road 21, and the other branch road is in a blocked state. Of course, a three-position three-way valve can also be used to enable the liquid supply pipeline 20 to have a fully blocked working condition.

[0035] In some embodiments, reference Figure 1 and Figure 2The infusion pipeline 40 includes a second main route 41 and a third branch 42 and a fourth branch 43 connected to the second main route 41. The third branch 42 is connected to one of the containers 10, and the fourth branch 43 is connected to the other container 10. The second main route 41 and the third branch 42 and the fourth branch 43 can be connected through a three-way joint. The second valve group can also use a three-way valve, which can be named as the second three-way valve here. The second main route 41 and the third branch 42 and the fourth branch 43 can be directly connected to the three valve ports of the second three-way valve in a one-to-one correspondence. The second three-way valve can connect the second main route 41 with the third branch 42 or the fourth branch 43. Of course, a three-position three-way valve can also be used to make the infusion pipeline 40 also have a fully blocked working condition, so that the container 10 can be cleaned later.

[0036] In some embodiments, reference Figure 1 The cleaning device further includes a pressure difference building module connected to the liquid supply pipeline 20, and the pressure difference building module is used to build a pressure difference in the liquid supply pipeline 20 to provide power for liquid supply to the container 10. In this embodiment, the pressure difference building module can be a water pump, and specifically, the first water pump 61 can be arranged on the second main path 41 of the liquid replenishment pipeline 40, and the second water pump 62 can be arranged on the first main path 21. The water pump builds a pressure difference in the pipeline to provide power for liquid replenishment and liquid supply.

[0037] In some embodiments, reference Figure 3 , the container 10 may be a pressure container 10, the cleaning device further includes a pressure relief valve 11 arranged on the pressure container 10, and the pressure difference building module further includes a booster assembly connected to the two container 10 devices, and the booster assembly is used to increase the internal air pressure of the container 10. In this embodiment, a booster liquid supply method is adopted, the cleaning liquid is stored in the pressure container 10, and the pressure container 10 is pressurized, and the cleaning liquid is discharged under pressure. The booster assembly can be two air pumps, and specifically, a first air pump 63 can be arranged to be connected to one of the containers 10, and a second air pump 64 can be arranged to be connected to the other container 10. The pressure relief valve 11 can be used as a safety valve to prevent the air pressure in the container 10 from being too high. Of course, the pressure relief valve 11 can also be a solenoid valve, which plays the role of active pressure relief. When fluid replenishment is needed, the pressure inside the pressure container 10 is made consistent with the external air pressure through active pressure relief, and then the container 10 is replenished through the fluid replenishment pipeline 40 to avoid the high pressure inside the container 10 affecting the fluid replenishment during fluid supply.

[0038] The two pressure relief valves 11 mentioned above can also be replaced by three-way valves, the two valve ports of the three-way valve are connected to the two containers 10 one by one, and the other valve port is connected to the outside. The container 10 in the liquid supply condition is blocked from the external air pressure, and the container 10 in the liquid replenishment condition is connected to the external air pressure. Of course, the three-way valve also has a phase in which all three valve ports are blocked. After the container 10 in the liquid replenishment condition completes the liquid replenishment, the three valve ports are all blocked, and the container 10 is pressurized to prepare for the subsequent switching of the liquid supply.

[0039] Further references Figure 4 In this embodiment, only the third air pump 65 and the seventh valve 66 may be provided to realize selective communication with the two pressure vessels 10. Specifically, the seventh valve 66 may be a three-way valve, and the air outlet of the third air pump 65 may be connected to one valve port of the three-way valve, and the other two valve ports of the three-way valve may be connected to the two containers 10 one by one. Through the switching function of the three-way valve, the third air pump 65 may be used to alternately pressurize the two containers 10. The container 10 may be pressurized in advance before supplying liquid to the outside, so that when the liquid supply is switched later, the internal air pressure of the container 10 meets the set requirements.

[0040] In some embodiments, reference Figures 3 to 5 The cleaning device also includes a liquid level sensor disposed in the container 10. When the cleaning liquid in any container 10 in the liquid supply state is lower than a set amount, the first valve group is used to switch to another container 10 for liquid supply, and the second valve group is used to connect the liquid replenishment pipeline 40 with the container 10 in which the cleaning liquid is lower than the set amount. In this embodiment, the liquid level sensor can be a liquid level gauge 12. The liquid level gauge 12 is installed on two pressure vessels 10. The liquid level gauge 12 is a float type liquid level gauge 12. The magnet in the float changes with the liquid level to change the resistance in the connecting rod of the liquid level gauge 12, and then convert it into a liquid level signal for liquid level detection. The pressure vessel 10 can be a pressure tank, and its material is 316 stainless steel to ensure corrosion resistance; the tank body is highly sealed as a whole to ensure its pressure resistance. In the embodiment of the present application, a method of supplying liquid simultaneously with two pressure tanks is adopted, so as to avoid the problem of pausing the operation for replenishing the liquid during the operation, thereby improving the operation efficiency; while the pressure tank A is discharging liquid, the pressure tank B can be replenished with liquid at the same time; when the liquid level of the pressure tank A is low, the pressure tank B can be switched to discharge the liquid, and the liquid level of the pressure tank A can be replenished at the same time, and the cycle can be repeated, so as to solve the problem of not being able to continuously discharge and replenish the liquid during the operation.

[0041] The present application also proposes a processing device, referring to Figures 1 to 5 The processing equipment includes the above-mentioned cleaning device, and the processing equipment also includes a machine for installing the cleaning device. In the embodiment of the present application, the processing equipment can be a wafer debonding device, and the specific operation steps are as follows:

[0042] Step 1: The cleaning liquid is supplied by the factory and transported to the equipment liquid supply cabinet through the liquid replenishment pipeline 40, and stops at the second valve group;

[0043] Step 2: Refill the cleaning liquid inside the pressure tank A to the specified liquid level, open the third valve 51 to refill the pressure tank A, and when the liquid level of the pressure tank A detects the specified liquid level, close the third valve 51 to stop refilling the pressure tank A.

[0044] Step 3: Open the first valve 31, and the cleaning liquid is delivered to the cleaning cavity for liquid discharge operation through the air intake pressure of the pressure tank A. When the pressure tank A is discharging liquid, the cleaning liquid inside the pressure tank B can be replenished to the specified liquid level at the same time, and the fourth valve 52 is opened to replenish the pressure tank B. When the liquid level of the pressure tank B detects the specified liquid level, the fourth valve 52 is closed to stop replenishing the pressure tank B.

[0045] Step 4: When the liquid level of pressure tank A drops to the specified low liquid level, the second valve 32 is opened and the first valve 31 is closed. The pressure tank B starts to discharge liquid. At this time, step 2 can be repeated to replenish the pressure tank A.

[0046] The above are only partial or preferred embodiments of the present application. Neither the text nor the drawings can limit the scope of protection of the present application. All equivalent structural changes made using the contents of the present application specification and drawings under the overall concept of the present application, or direct / indirect application in other related technical fields are included in the scope of protection of the present application.

Claims

1. A cleaning device, characterized in that: include: two containers for storing cleaning fluid; a liquid supply pipeline, comprising a first branch and a second branch, wherein the first branch is connected to one of the containers, and the second branch is connected to the other container; A first valve group, arranged in the liquid supply pipeline, for controlling the on-off of the first branch and the on-off of the second branch; a liquid infusion pipeline, comprising a third branch and a fourth branch, wherein the third branch is connected to one of the containers, and the fourth branch is connected to the other container; A second valve group is arranged in the liquid infusion pipeline, and the second valve group is used to control the on-off of the third branch and the on-off of the fourth branch; The two containers can alternately supply liquid and exchange substitute liquid.

2. The cleaning device according to claim 1, characterized in that: The cleaning device also includes a pressure difference building module connected to the liquid supply pipeline, and the pressure difference building module is used to build a pressure difference in the liquid supply pipeline to provide power for the container liquid supply.

3. The cleaning device according to claim 2, characterized in that: The container includes a pressure container, the cleaning device also includes a pressure relief valve arranged on the pressure container, and the pressure difference building module also includes a booster component connected to the two containers, and the booster component is used to increase the internal air pressure of the container.

4. The cleaning device according to claim 1, characterized in that: The cleaning device also includes a liquid level sensor arranged in the container. When the cleaning liquid in any of the containers in the liquid supply state is lower than a set amount, the first valve group is used to switch to another container for liquid supply, and the second valve group is used to connect the liquid replenishing pipeline with the container where the cleaning liquid is lower than the set amount.

5. The cleaning device according to claim 1, characterized in that: The first valve group includes a first valve disposed on the first branch and a second valve disposed on the second branch.

6. The cleaning device according to claim 1, characterized in that: The liquid supply pipeline includes a first main circuit connected to the first branch and the second branch respectively; the first valve group includes a first three-way valve, and the three valve ports of the first three-way valve are connected to the first main circuit, the first branch and the second branch in a one-to-one correspondence.

7. The cleaning device according to claim 1, characterized in that: The second valve group includes a third valve disposed on the third branch and a fourth valve disposed on the fourth branch.

8. The cleaning device according to claim 1, characterized in that: The infusion pipeline includes a second main road connected to the third branch and the fourth branch respectively, the second valve group includes a second three-way valve, and the three valve ports of the second three-way valve are connected to the second main road, the third branch and the fourth branch in a one-to-one correspondence.

9. A processing equipment, characterized in that: The processing equipment comprises the cleaning device according to any one of claims 1 to 8, and the processing equipment further comprises a machine platform for installing the cleaning device.

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