Radio frequency interference prevention device based on semiconductor equipment

Abstract

The utility model provides a radio frequency interference prevention device based on semiconductor equipment, which is applied to the technical field of semiconductor equipment, and comprises an input interface, a filtering module, a detection module and an emergency control module, the detection module is used for detecting whether the processed radio frequency signal is normal or not; the emergency control module comprises a relay and an emergency control interface, the relay is connected with the external equipment through the output interface, the emergency control interface is connected with the external equipment and used for transmitting a stop instruction to the external equipment, the relay is in a normally closed state under the normal condition, and when the detection module detects that the radio frequency signal is not within the threshold range, the relay is disconnected. And a detection module is additionally arranged to detect the radio frequency signal processed by the filtering module, judge whether the radio frequency signal is in a normal state or not, and control corresponding output according to a detection result to ensure that the signal received by the external equipment is in the normal state.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor equipment, and in particular relates to a radio frequency interference prevention device based on semiconductor equipment. Background Art

[0002] In the production process of semiconductor materials, radio frequency signals are needed to control the heating of the heating plate. Radio frequency heating can achieve rapid heating, uniform heating and precise temperature control to promote process steps such as growth, deposition and annealing of semiconductor materials. During the production process, if the radio frequency signal is interfered with, it may cause the heating system to work unstably, causing fluctuations in the heating effect, resulting in uneven sample temperature and affecting the precise control of the process steps. At the same time, it may also cause deviations between the actual heating temperature and the set value, affecting the quality and performance of the semiconductor material. What's worse, strong radio frequency interference may damage the electronic components and sensors in the heating system, causing equipment failure or abnormal operation, which in turn affects production efficiency. If the received radio frequency interference is very serious, it will also cause safety problems such as equipment overheating and short circuit, and there is a certain risk of fire and electric shock.

[0003] The Chinese utility model patent with announcement number CN205081979U discloses a semiconductor equipment spray plate heating device. The device includes a temperature control system and a heating plate. The temperature control system includes a temperature controller and a power controller. The output end of the power controller is connected to the heating plate by connecting an AC filter circuit. A thermocouple is set to collect the temperature of the heating plate. The thermocouple is connected to the temperature collection input end of the temperature controller by connecting a TC filter circuit. Most of the AC interference signal of the utility model will be prevented from being absorbed by the inductor and converted into magnetic induction and thermal energy, and most of the remaining will be bypassed to the ground by the capacitor, which can suppress the effect of the interference signal and obtain a relatively pure AC power at the output end. After the TC filter circuit, an RLC filter circuit composed of a resistor, an inductor and a capacitor is used to filter out radio frequency interference (above 13.56MHz) and 50Hz / 60Hz (power supply) power frequency interference, ensuring that the signal received by the thermostat can correctly reflect the actual temperature of the heating plate.

[0004] Although the above patent can filter the signal input to the heating plate and remove interference signals, it does not provide a detection module to detect the processed signal, and cannot ensure that the signal input to the heating plate is the required normal signal, and there are still safety issues. Utility Model Content

[0005] In view of the above-mentioned problems in the prior art, the purpose of the utility model is to provide an anti-RF interference device based on semiconductor devices, adding a detection module to detect the RF signal processed by the filtering module to determine whether it is in a normal state, and controlling the corresponding output according to the detection result to ensure that the signal received by the external device is in a normal state.

[0006] A semiconductor device-based radio frequency interference prevention device comprises a main box body equipped with an input interface, a filter module and a detection module, wherein the input interface is used to receive an external radio frequency signal, the filter module is used to perform interference elimination on the radio frequency signal, and the detection module comprises an inductor and an MCU, and is used to detect whether the radio frequency signal processed by the filter module is normal; the detection module is connected to an emergency control module, the emergency control module comprises a relay and an emergency control interface, the relay is connected to an external device via an output interface, the emergency control interface is connected to the external device, the emergency control interface transmits a stop instruction to the external device, the relay is in a normally closed state under normal circumstances, and when the detection module detects that the radio frequency signal is not within a threshold range, the detection module controls the relay to disconnect.

[0007] Preferably, the detection module is also connected to a reset module and a communication module, the reset module includes a reset button and a reset circuit for controlling the reset of the detection module; the communication module includes a communication chip and a communication interface for sending an abnormal alarm signal when the detection module detects that the radio frequency signal is not within a threshold range.

[0008] Preferably, the filtering module includes a filtering circuit, and the filtering circuit includes a capacitor and an inductor, which is used to filter out noise interference of the radio frequency signal.

[0009] Preferably, the detection module is also connected to an LED light. When the detection module detects that the radio frequency signal is not within the threshold range, the LED light turns red. When the detection module detects that the radio frequency signal is within the threshold range, the LED light turns green.

[0010] Preferably, the detection module, the filtering module, and the emergency control module are arranged inside the main box, and the main box is installed with an input interface, an emergency control interface, an LED light, a reset button, a communication interface, and an output interface.

[0011] Preferably, the main box is configured with three groups of input channels and three groups of output channels, each group of input channels corresponds one-to-one to each group of output channels, each group of input channels is respectively configured with an input interface, an LED light, and a reset button, and each group of output channels is respectively configured with an emergency control interface, a communication interface, and an output interface.

[0012] The beneficial effect of the utility model is that the anti-RF interference device based on semiconductor equipment processes the RF signal through the filter module, and adds a detection module to detect the RF signal processed by the filter module, judges whether the RF signal is in a normal state, and controls the corresponding output according to the detection result to ensure that the signal received by the external device is in a normal state. The device can further solve the problem of reduced production quality caused by RF interference in the production process; it can also protect the related devices of the semiconductor equipment when the RF signal is abnormal, avoiding economic losses and safety accidents. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation of the present invention. In the accompanying drawings:

[0014] Figure 1 It is a structural block diagram of the utility model;

[0015] Figure 2 It is a structural schematic diagram of the utility model.

[0016] The markings in the figure are: 1. Input interface; 2. Emergency control interface; 3. LED light; 4. Reset button; 5. Communication interface; 6. Output interface. DETAILED DESCRIPTION

[0017] Embodiment 1

[0018] like Figure 1 , Figure 2 As shown, a device for preventing radio frequency interference based on semiconductor equipment includes a main box body, and a filter module, a detection module and an emergency control module are configured inside the main box body. An input interface 1, an emergency control interface 2, an LED light 3, a reset button 4, a communication interface 5, an output interface 6 and a power interface (not shown in the figure) are installed on the main box body. Among them, the input interface 1 is connected to the filter module, the output end of the filter module is connected to the detection module, the detection module is respectively connected to the emergency control module, the LED light 3, the reset module and the communication module, the emergency control module includes a relay and an emergency control interface 2, the relay is connected to an external device through the output interface 6, the emergency control interface 2 is connected to the external device, and the emergency control interface 2 transmits a stop command to the external device. The relay is normally in a normally closed state. When the detection module detects that the radio frequency signal is not within the threshold range, the detection module controls the relay to disconnect.

[0019] Specifically, the input interface 1 receives an external RF signal, the RF signal is processed by the filter module to remove interference, and then the detection module detects whether the RF signal processed by the filter module is normal. Among them, the detection module includes an inductor and an MCU. The inductor in the detection module generates an induced current according to the RF signal output by the filter module and transmits it to the MCU. The MCU determines whether the induced current is in a normal state according to the set threshold range, and can determine whether the RF signal output by the filter module is in a normal state. The threshold range determined by the MCU can be adjusted according to actual needs, and no specific restrictions are made here.

[0020] When the detection module detects that the radio frequency signal is within the threshold range, the LED lamp 3 lights up green, and the radio frequency signal is transmitted to the external device through the output interface 6. After receiving the radio frequency signal, the heating plate in the external device starts to work normally.

[0021] When the detection module detects that the radio frequency signal is not within the threshold range, the LED lamp 3 lights up red, the relay of the emergency control module is disconnected, the circuit where the output interface 6 is located is in a disconnected state, and the radio frequency signal cannot be output, which can prevent abnormal radio frequency signals from damaging external devices and protect external devices. At the same time, the emergency control interface 2 transmits a stop command to the external device to stop the heating plate of the external device from working.

[0022] In addition, the reset module includes a reset button 4 and a reset circuit, which are used to control the reset of the detection module. When the device sends an emergency stop signal, the reset button 4 is used to make the device resume work.

[0023] The communication module includes a communication chip and a communication interface 5, which is used to send an abnormal alarm signal when the detection module detects that the radio frequency signal is not within the threshold range. The abnormal alarm signal is transmitted through the communication interface 5, and abnormal information can be transmitted to engineers, so as to facilitate timely handling of abnormal situations.

[0024] The filtering module includes a filtering circuit, which includes a capacitor and an inductor, and is used to filter out noise interference of the radio frequency signal. In a specific embodiment, a filtering circuit capable of filtering the radio frequency signal in the prior art can be selected according to actual needs. The specific structure of the filtering circuit is not limited, and it is sufficient to be able to achieve the filtering function.

[0025] The device can be configured with multiple groups of corresponding input channels and output channels, so as to facilitate the simultaneous operation of multiple external devices. In a specific embodiment, the main box is configured with three groups of input channels and three groups of output channels, each group of input channels corresponds to each group of output channels, each group of input channels is respectively configured with an input interface 1, an LED light 3, and a reset button 4, and each group of output channels is respectively configured with an emergency control interface 2, a communication interface 5, and an output interface 6.

[0026] Working principle: When the anti-RF interference device based on semiconductor equipment is in use, the input interface 1 receives the RF signal from the outside without interference removal, and the signal is immediately transmitted to the filtering module. The filtering module removes interference from the RF signal through the inductor and capacitor in the filtering circuit. The filtered RF signal is transmitted to the detection module. The inductor in the detection module generates an induced current according to the RF signal output by the filtering module and transmits it to the MCU. The MCU determines whether the induced current is in a normal state according to the set threshold range, and can determine whether the RF signal output by the filtering module is in a normal state.

[0027] If the RF signal is normal, the MCU controls the LED light 3 to be always green, and the RF signal after interference removal is transmitted to the heating plate of the external device through the output interface 6; if the RF signal is abnormal, the MCU controls the LED light 3 to be always red, and controls the relay in the emergency control module from the normally closed state to the normally open state, and transmits the stop command to the external device through the emergency control interface 2, so that the heating plate corresponding to the foreign device stops working. At the same time, the MCU will also control the communication module to send abnormal alarm information through the communication interface 5. After the engineer handles the abnormality, press the reset button 4, and the corresponding transmission channel can resume working.

[0028] The above description is only a preferred embodiment of the utility model and is not intended to limit the utility model. Although the utility model is described in detail with reference to the above embodiments, those skilled in the art can still modify the technical solutions recorded in the above embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A radio frequency interference prevention device based on semiconductor equipment, characterized in that: It comprises a main box body equipped with an input interface (1), a filter module and a detection module, wherein the input interface (1) is used to receive an externally input radio frequency signal, the filter module is used to remove interference from the radio frequency signal, and the detection module comprises an inductor and an MCU, and is used to detect whether the radio frequency signal processed by the filter module is normal; The detection module is connected to the emergency control module, the emergency control module comprises a relay and an emergency control interface (2), the relay is connected to the external device via the output interface (6), the emergency control interface (2) is connected to the external device, the emergency control interface (2) transmits a stop instruction to the external device, the relay is in a normally closed state under normal circumstances, and when the detection module detects that the radio frequency signal is not within a threshold range, the detection module controls the relay to be disconnected.

2. The semiconductor device-based radio frequency interference prevention device according to claim 1, characterized in that: The detection module is also connected to a reset module and a communication module. The reset module comprises a reset key (4) and a reset circuit for controlling the reset of the detection module. The communication module comprises a communication chip and a communication interface (5) for sending an abnormal alarm signal when the detection module detects that the radio frequency signal is not within a threshold range.

3. The semiconductor device-based radio frequency interference prevention device according to claim 1, characterized in that: The filtering module includes a filtering circuit, and the filtering circuit includes a capacitor and an inductor, which is used to filter out noise interference of the radio frequency signal.

4. The semiconductor device-based radio frequency interference prevention device according to claim 1, characterized in that: The detection module is also connected to the LED light (3); when the detection module detects that the radio frequency signal is not within the threshold range, the LED light (3) lights up red; when the detection module detects that the radio frequency signal is within the threshold range, the LED light (3) lights up green.

5. The semiconductor device-based radio frequency interference prevention device according to claim 1, characterized in that: The detection module, the filter module and the emergency control module are arranged inside the main box, and the main box is equipped with an input interface (1), an emergency control interface (2), an LED light (3), a reset button (4), a communication interface (5) and an output interface (6).

6. The semiconductor device-based radio frequency interference prevention device according to claim 1, characterized in that: The main box is equipped with three groups of input channels and three groups of output channels, each group of input channels corresponds to each group of output channels, each group of input channels is respectively equipped with an input interface (1), an LED light (3), and a reset button (4), and each group of output channels is respectively equipped with an emergency control interface (2), a communication interface (5), and an output interface (6).

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