High-stability miniature cylinder needle tip forming device
By adopting a high-stability micro cylinder needle tip forming device in atomic force microscope and ion beam emission needle tip forming device, combining precise control and electrochemical corrosion process, the problems of needle tip curvature radius accuracy and stability in the prior art are solved, and the problem of needle tip curvature radius is realized High precision and high stability needle molding reduces consumable consumption and cost during equipment operation.
Patent Information
- Application Number
- CN202421082337.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-17
- Publication Date
- 2025-01-10
- Estimated Expiration
- 2034-05-17
AI Technical Summary
The prior art is difficult to achieve high accuracy and stability of the curvature radius of the tip of the atomic force microscope probe and ion beam emitter needle, resulting in unstable instrument operation and large consumption of consumables, affecting the life and performance of the equipment.
Using a high-stability micro cylinder needle tip forming device including device base, cathode reactor, fixture, mobile sliding table assembly and drive device, the high-precision molding of metal column needle tips is achieved through precise control and electrochemical corrosion processes, combining dynamic and Static electrochemical corrosion process ensures high stability and reproducibility of the needle tip.
The high stability and high precision curvature radius of metal cylindrical needle tip molding are achieved, the reproducibility and yield of molding are improved, and the consumable consumption and cost during equipment operation are reduced.
Smart Images
Figure CN222326919U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to a high-stability micro-column needle tip forming device, in particular to a high-stability micro-column needle tip forming device suitable for an atomic force microscope probe device, an electron microscope electron beam emitting needle and an ion beam emitting device. Background Art
[0002] Electron microscopes and atomic force microscopes are important scientific research tools in contemporary times, playing an important role in many scientific research fields such as engineering material testing and advanced semiconductor manufacturing processes. During sample observation, the atomic force microscope probe is easily affected by the sample surface, resulting in tip loss. At the same time, displacement during operation can easily lead to needle collision and damage to the probe. Atomic force microscope equipment generally needs to be imported, and the consumables trade cycle is long and costly.
[0003] In addition, as an important chip processing equipment, the focused ion beam microscope has a large consumption of ion beam emission devices, and the market demand for ion beam core accessories is large.
[0004] For atomic force microscope probes, in order to achieve the probe effect of atomic interaction, they must have a high-precision tip radius of curvature to achieve the monitoring effect of engineering material surface properties. At the same time, maintaining a high-precision tip radius of curvature is also one of the necessary conditions for ion beam emission tips.
[0005] The tip forming process of high-precision fillet curvature radius is critical to alleviate the market demand for consumables such as atomic force microscope probes and electron beam / ion beam emitter needles, as well as the operation stability of related consumables used in equipment. Since metal emitter needles are generally made by electrochemical corrosion, especially during manual operation, the curvature radius of the manufactured emitter tip fluctuates, which directly affects the stability and life of the instrument, and thus affects the working characteristics of the entire system.
[0006] Therefore, a high-stability micro-column needle tip forming device is particularly needed to solve the above-mentioned existing problems. Utility Model Content
[0007] The utility model aims to provide a high-stability micro-cylindrical needle tip forming device, which aims to improve the stability of metal cylindrical emitting tip forming and the accuracy and reproducibility of the tip curvature radius in order to address the deficiencies of the prior art.
[0008] The technical problem solved by the present invention can be achieved by adopting the following technical solutions:
[0009] A high-stability micro-cylinder needle tip molding device comprises a device base, a cathode reactor, a fixture, a movable slide assembly, a driving device and a power supply; the fixed end of the movable slide assembly is fixed to the device base through a fixed connecting piece, the sliding end of the movable slide assembly is fixed with a driving device for driving the sliding end of the movable slide assembly to move vertically up and down on the fixed end of the movable slide assembly, and the driving device is connected to a power supply; the fixture is fixed to the lower surface of the sliding end of the movable slide assembly, and the cathode reactor is arranged on the device base and corresponds to the fixture in the vertical direction.
[0010] In a preferred embodiment of the utility model, the driving device includes a coupling, a stepper motor and a driver, the stepper motor is connected to the movable slide assembly through the coupling, and the stepper motor is connected to the power supply through the driver.
[0011] In a preferred embodiment of the present invention, a position fixing tightening screw is provided between the fixed end of the movable slide assembly and the sliding end of the movable slide assembly.
[0012] In a preferred embodiment of the present invention, the clamp is fixed to the lower surface of the sliding end of the movable slide assembly through a connecting piece, a vibration motor is provided on the connecting piece, and the vibration motor is connected to the power supply through a lead wire.
[0013] Compared with the prior art, the high-stability micro-cylindrical needle tip forming device of the utility model can realize precise control of the depth during the metal cylindrical needle tip forming process, so that the metal cylindrical needle tip forming has high stability, and the curvature radius of the metal cylindrical needle tip has high precision, ensuring that the forming repeatability of the metal cylindrical needle tip prepared multiple times is at a high level, the reproducibility is good, and the preparation yield is high, thereby achieving the purpose of the utility model.
[0014] The features of the present invention can be clearly understood by referring to the drawings and the following detailed description of the preferred embodiments. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] Figure 1 It is a schematic structural diagram of a high-stability micro-cylinder needle tip forming device of the utility model;
[0016] Figure 2 It is an exploded schematic diagram of the high-stability micro-cylinder needle tip forming device of the utility model;
[0017] Figure 3 It is a schematic diagram of the back side of the high-stability micro-column needle tip forming device of the utility model;
[0018] Figure 4 It is a front schematic diagram of the high-stability micro-cylinder needle tip forming device of the utility model. DETAILED DESCRIPTION
[0019] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further described below with reference to specific illustrations. Example
[0020] like Figures 1 to 4 As shown, the high-stability micro-cylinder needle tip molding device of the utility model includes a device base 10, a cathode reactor 20, a clamp 30, a movable slide assembly 40, a driving device 50 and a power supply 60; the fixed end 41 of the movable slide assembly 40 is fixed to the device base 10 through a fixed connecting piece 11, the sliding end 42 of the movable slide assembly 40 is fixed with the driving device 50, and the driving device 50 is connected to the power supply 60; the clamp 30 is fixed to the lower surface of the sliding end 42 of the movable slide assembly 40, and the cathode reactor 20 is arranged on the device base 10 and corresponds to the clamp 30 in the vertical direction.
[0021] In this embodiment, the driving device 50 includes a coupling 51 , a stepper motor 52 and a driver 53 . The stepper motor 52 is connected to the movable slide assembly 40 via the coupling 51 , and the stepper motor 52 is connected to the power source 60 via the driver 53 .
[0022] In this embodiment, a position fixing screw 43 is disposed between the fixed end 41 of the movable slide assembly 40 and the sliding end 42 of the movable slide assembly 40 .
[0023] In this embodiment, the clamp 30 is fixed to the lower surface of the sliding end 42 of the movable slide assembly 40 through a connecting member 31 , and a vibration motor 70 is provided on the connecting member 31 , and the vibration motor 70 is connected to the power supply 60 through a lead wire.
[0024] The working process of the high-stability micro-cylinder needle tip forming device of the utility model is as follows:
[0025] Dynamic electrochemical corrosion process: used for the initial forming of metal cylindrical needle tips;
[0026] The metal column 100 is fixed by the clamp 30, and the driver 53 drives the stepper motor 52 to control the clamp 30 through the coupling 51 and the movable slide assembly 40 to achieve precise transmission, and the metal column 100 is controlled to slowly immerse in the reaction corrosion liquid in the cathode reactor 20 to ensure the liquid surface depth of the metal column 100 immersed in the reaction corrosion liquid in the cathode reactor 20; when the reaction starts, the power supply 60 is turned on, and the vibration motor 70 is connected to the positive and negative poles of the power supply 60 through the lead wire to ensure that the metal column 100 vibrates in a small range at the liquid surface of the reaction corrosion liquid in the cathode reactor 20; the positive lead wire of the corrosion power supply is connected to the clamp 30, and the negative lead wire is connected to the cathode reactor 20. After the power supply 60 is turned on, the corrosion power supply is turned on, and after the power supply reaction current is 0, the corrosion power supply is turned off, and the vibration power supply is immediately turned off; at this time, the preliminary formed metal column needle tip is obtained.
[0027] Static electrochemical corrosion process: used for metal cylindrical needle tip forming and modification;
[0028] The initially formed metal cylindrical needle tip is fixed by the clamp 30, and the driver 53 drives the stepper motor 52 to control the clamp 30 to be positioned to the liquid level of the reaction corrosion liquid in the cathode reactor 20 via the coupling 51 and the movable slide assembly 40, so that the formed end of the metal cylindrical needle tip is just flush with the liquid level of the reaction corrosion liquid; the vibration motor 70 is turned on to keep the metal cylindrical body vibrating in a small range at the liquid surface; then the corrosion power supply is turned on, and the power supply voltage is about one tenth of the voltage of the dynamic electrochemical corrosion process. The reaction stops after about half a minute; the metal cylindrical needle tip is finally formed after modification.
[0029] The above shows and describes the basic principle and main features of the utility model and the advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments, and the above embodiments and descriptions are only for explaining the principle of the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, which fall within the scope of the utility model to be protected, and the scope of protection of the utility model is defined by the attached claims and their equivalents.
Claims
1. A high-stability micro-cylinder needle tip forming device, characterized in that: It includes a device base, a cathode reactor, a fixture, a movable slide assembly, a driving device and a power supply; the fixed end of the movable slide assembly is fixed to the device base through a fixed connector, the sliding end of the movable slide assembly is fixed with a driving device for driving the sliding end of the movable slide assembly to move vertically up and down on the fixed end of the movable slide assembly, and the driving device is connected to a power supply; The clamp is fixed on the lower surface of the sliding end of the moving slide assembly, and the cathode reactor is arranged on the device base and corresponds to the clamp in the vertical direction.
2. The high-stability micro-column needle tip forming device according to claim 1, characterized in that: The driving device comprises a coupling, a stepper motor and a driver. The stepper motor is connected to the movable slide assembly through the coupling, and the stepper motor is connected to the power supply through the driver.
3. The high-stability micro-column needle tip forming device according to claim 1, characterized in that: A position fixing tightening screw is arranged between the fixed end of the movable slide assembly and the sliding end of the movable slide assembly.
4. The high-stability micro-column needle tip forming device according to claim 1, characterized in that: The clamp is fixed to the lower surface of the sliding end of the movable slide assembly through a connecting piece, a vibration motor is arranged on the connecting piece, and the vibration motor is connected to the power supply through a lead wire.