Intelligent sensor mask

Abstract

The utility model discloses an intelligent sensor mask which comprises an inner ring and an outer ring which are connected by a bracket, and further comprises a fixing piece, a hollow area on the inner side of the inner ring is used for depositing a signal electrode; an area between the inner ring and the outer ring is used for depositing a grounding electrode; the fixing piece is arranged on the outer ring or the inner ring; the outer ring is further provided with a plurality of open holes, and the open holes are used for forming a channel for connecting the grounding electrode and the substrate on the substrate after deposition. According to the intelligent sensor mask plate disclosed by the utility model, the bracket is designed to connect the inner ring and the outer ring, and the outer ring is also provided with a plurality of open holes, so that on one hand, the whole mechanism has good supporting performance and is not easy to deform, and on the other hand, a conduction channel is deposited in an electrode deposition process by skillfully utilizing a penumbra effect; and the grounding electrode ring is connected with the substrate to form a larger grounding electrode, so that signal measurement is facilitated.

Description

Technical Field

[0001] The utility model relates to the technical field of film coating masks, in particular to an intelligent sensor mask. Background Art

[0002] There are still some deficiencies in the current fastener sensor technology. For example, for the preparation technology of the electrode layer and its insulating ring, since the current ultrasonic signal measurement probe cannot identify the grounding position from the outside, it is necessary to prepare the electrode with a sufficiently large grounding electrode. Currently, the electrode layer is mainly prepared in the following two ways:

[0003] Method 1: Use a high-temperature glue insulating ring, stick it on the surface of the piezoelectric layer or the insulating layer, and then prepare the electrode layer. The traditional high-temperature glue insulating ring is a single-ring structure with a sufficiently large grounding electrode, but the insulating ring cannot be reused, has low preparation and use efficiency, poor appearance quality and instability, and the electrode coating deposition process involves high-temperature conditions. Under high temperatures, the high-temperature glue insulating ring is prone to volatile organic matter, which causes carbon pollution in the electrode layer and affects the pass rate.

[0004] Method 2: Use a tooling mask with a fixed size structure, and put the mask on the fastener to deposit the electrode layer. The biggest disadvantage of this method is that the tooling mask cannot be used flexibly. The tooling mask of specific specifications must be customized according to the bolt size. In addition, the tooling mask is large in size, which is not convenient for fine cleaning and is prone to residues of the previous coating, which contaminates the subsequent electrode materials. Utility Model Content

[0005] In order to solve the problems existing in the prior art, the utility model provides an intelligent sensor mask, comprising an inner ring and an outer ring connected by a bracket, and also comprising a fixing member;

[0006] The hollow area inside the inner ring is used for depositing signal electrodes;

[0007] The area between the inner ring and the outer ring is used for depositing a ground electrode;

[0008] The fixing member is arranged on the outer ring or the inner ring;

[0009] The outer ring is also provided with a plurality of openings, which are used to form a channel connecting the ground electrode and the substrate on the substrate after deposition.

[0010] Furthermore, the width of the opening is 0.05-0.15 mm, and the length is 0.1-1.5 mm; preferably, the number of the openings is 3-4.

[0011] Furthermore, the inner ring has a width of 1-3 mm;

[0012] The width of the outer ring is 3-5 mm.

[0013] Furthermore, the width of the bracket is 0.05-0.15 mm and the length is 2-4 mm.

[0014] Furthermore, the fixing member is a binding strap arranged on the outer ring.

[0015] Furthermore, the binding straps are rectangular with a width of 2-5 mm, and the number of the binding straps is 2-6.

[0016] Furthermore, the fixing member is a magnet that can withstand the deposition temperature. When it is arranged on the outer ring or the inner ring, it will not cover the area beyond the outer ring or the inner ring, respectively, so as to prevent the integrity of the electrode appearance from being damaged.

[0017] Furthermore, the inner ring and the outer ring are in the shape of circular rings, and the hollow area in the inner ring is a circle with a diameter of 2-8 mm;

[0018] The ring width of the area between the inner ring and the outer ring is 2-4 mm.

[0019] Furthermore, the thickness of the inner ring, the outer ring and the bracket is 50-200 μm.

[0020] Compared with the prior art, the utility model has the following beneficial effects:

[0021] The intelligent sensor mask of the utility model is designed with a bracket connecting the inner ring and the outer ring, and a plurality of openings are also provided on the outer ring. Such a structure makes the overall mechanism well supported and not easy to deform. At the same time, the penumbra effect is cleverly used to deposit a conducting channel during the electrode deposition process, connecting the ground electrode ring with the substrate to form a larger ground electrode, which is convenient for signal measurement.

[0022] The intelligent sensor mask of the utility model is not pasted on the substrate surface, and the electrode coating prepared by using the mask does not have carbon pollution and has a sufficiently large ground electrode;

[0023] The intelligent sensor mask of the utility model is suitable for substrates of any size, model, shape and material, and has a simple structure, convenient operation and repeatable practicality.

[0024] Other features and advantages of the utility model will be described in the following description, and partly become apparent from the description, or understood by implementing the utility model. The purpose and other advantages of the utility model can be realized and obtained by the structures indicated in the description and the drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0026] Figure 1 A schematic diagram showing the structure of the intelligent sensor mask of Example 1 installed on a non-magnetic bolt;

[0027] Figure 2 Shows Figure 1 Side view of

[0028] Figure 3 A schematic diagram showing the formation of a large ground electrode using the smart sensor mask of Example 1 is shown;

[0029] Figure 4 A top view of a smart sensor prepared using the smart sensor mask of Example 1 is shown;

[0030] Figure 5 A schematic diagram showing the structure of the intelligent sensor mask of Example 2 installed on the magnetic bolt;

[0031] Figure 6 Shows Figure 5 Side view of

[0032] Description of reference numerals:

[0033] 1. Substrate; 2. Inner ring; 3. Bracket; 4. Outer ring; 5. Opening; 6. Fixing part; 7. Electrode target; 8. Electrode metal material flow; 9. Shielding area; 10. Full deposition area; 11. Penumbra deposition area; 12. Signal electrode; 13. Ground electrode; 14. Conducting channel. DETAILED DESCRIPTION

[0034] The endpoints and any values ​​of the ranges disclosed in the present invention are not limited to the precise ranges or values, and these ranges or values ​​should be understood to include values ​​close to these ranges or values. For numerical ranges, the endpoint values ​​of each range, the endpoint values ​​of each range and the individual point values, and the individual point values ​​can be combined with each other to obtain one or more new numerical ranges, and these numerical ranges should be regarded as specifically disclosed in the present invention.

[0035] The following will combine the specific embodiments of the utility model and the drawings of the specification to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0036] Example 1

[0037] An intelligent sensor mask is used for preparing an intelligent fastener sensor with a bolt (made of non-magnetic chromium-nickel-inconel alloy bolt) as a substrate 1, such as Figure 1 As shown, it includes an inner ring 2 and an outer ring 4 connected by a bracket 3, and a fixing member 6 arranged on the outer ring 4. The inner ring 2 and the outer ring 4 are both in the shape of a circular ring, wherein the fixing member 6 is a band with a width of 3 mm, as shown in FIG. Figure 2 As shown, three straps are provided, and the other end of the straps is fixed to the head of the bolt; the width of the outer ring 4 is 5 mm, and the shape of the opening 5 on the outer ring 4 is a rectangle with a length of 1 mm and a width of 0.1 mm. Three openings 5 ​​are designed at equal intervals, and the openings 5 ​​are used to form a grounding electrode 13 on the substrate 1 and a conducting channel 14 connecting the substrate 1 after deposition; the width of the bracket 3 is 0.08 mm and the length is 3 mm; the width of the inner ring 2 is 2 mm, and the diameter of the hollow area inside the inner ring 2 is a circle of 3 mm, which is used to deposit the signal electrode 12; the area between the inner ring 2 and the outer ring 4 is used to deposit the grounding electrode 13, and this area is divided into four pieces by the bracket 3; the thickness of the fixing part 6, the outer ring 4, the bracket 3, and the inner ring 2 is 100 μm.

[0038] It should be noted that the shapes of the inner ring 2 and the outer ring 4 do not need to be strictly limited, and can be designed according to the required electrode shape and bolt end shape, and can be a circular ring, a square ring, a rectangular ring, a regular hexagonal ring, or other shapes. In this embodiment, the fixing member 6, the outer ring 4, the bracket 3, and the inner ring 2 are made of the same hard material, so their thickness is uniform. The temperature of the hard material needs to be able to withstand the temperature of the coating deposition. For example, it can be stainless steel, and of course it can also be other materials. In this embodiment, the material of the substrate 1 is a non-magnetic chromium-nickel-iron alloy bolt. Of course, the material of the substrate 1 can also be a magnetic material, and good fixation can be achieved through fastener straps.

[0039] The preparation and use method of the smart sensor mask of this embodiment is as follows:

[0040] (1) Design a shape and size diagram according to requirements, including the ring width of the inner ring 2 and the outer ring 4, the width of the bracket 3, the length and width of the opening 5 on the outer ring 4, etc. The shape and size diagram can include only one structure or multiple array structures;

[0041] (2) using a stainless steel sheet with a thickness of 100 μm as a substrate, using a laser to scratch the shape designed in step (1) on the stainless steel sheet to obtain a smart sensor mask. If laser scratching is performed based on multiple array structures, the multiple structures are separated after the laser scratching to obtain a smart sensor mask, wherein the laser runs at a speed of 400-600 mm / s and the number of cycles is 200-400 times;

[0042] (3) Clean the smart sensor mask, specifically use acetone, alcohol, and deionized water to clean it. After drying, the fixing part 6 is fixed on the surface of the bolt, and then transferred to the coating equipment and the coating parameters are set to deposit the coating. The opening 5 on the outer ring 4 of this embodiment forms a large ground electrode. Figure 3 As shown, an electrode metal material flow 8 is sputtered from the electrode target material 7. Due to the shielding effect of the stainless steel sheet between the three openings 5 ​​opened on the mask, a shielding area 9 is formed. However, due to the very small size of the openings 5, a penumbra effect is formed, and there are a complete deposition area 10 and a penumbra deposition area 11. Therefore, the entire area where the rectangular hole is located can be well deposited with a conducting channel 14. At the same time, the position of the bracket 3 with a width of only 0.08 mm can be well deposited, so that the ground electrode 13 is not divided into four pieces by the bracket 3, but forms a complete ring structure. The conducting channel 14 connects the ground electrode 13 with the substrate 1 to form a larger ground electrode, which is convenient for signal measurement;

[0043] (4) After the deposition is completed, the smart sensor mask is removed to obtain a smart sensor, such as Figure 4 As shown, it includes a signal electrode 12 with a diameter of 3 mm and a ground electrode 13 with a width of 3 mm. At the same time, the ground electrode 13 forms a larger ground electrode with the substrate 1 through a conducting channel 14 where the rectangular hole is located.

[0044] (5) Place the smart sensor mask in a clean sealed bag for next use.

[0045] Example 2

[0046] A smart sensor mask, compared with embodiment 1, substrate 1 is a magnetic galvanized steel bolt, such as Figure 5 and Figure 6As shown, the fixing part 6 is a magnet that can withstand the deposition temperature of the coating. In this embodiment, it is a CoSm5 magnet. The magnet is cylindrical in shape and is placed on the outer ring 4. The diameter of the cross-sectional circle at the bottom of the magnet is smaller than the ring width of the outer ring 4. It should be noted that the fixing part 6 magnet can also be placed on the inner ring 2. In this case, the diameter of the cross-sectional circle at the bottom of the magnet is smaller than the ring width of the inner ring 2; the fixing part 6 magnet can also be in the shape of a circular ring, but the ring width of the circular ring is smaller than the ring width of the inner ring 2 or the outer ring 4; the fixing part 6 magnet can also be in the shape of a rectangular parallelepiped or other irregular shapes. When it is necessary to set it on the outer ring 4 or the inner ring 2, it will not cover the area beyond the outer ring 4 or the inner ring 2, respectively, to avoid affecting the deposition of the signal electrode and the ground electrode.

[0047] Comparative Example 1

[0048] The currently commonly used high-temperature adhesive insulating ring is used to complete the preparation of the intelligent sensor.

[0049] The silver electrode coatings of the same thickness prepared in Example 1 and Comparative Example 1 were observed and analyzed for element content using a scanning electron microscope. The results showed that the electrode ring prepared in Example 1 had a uniform morphology and good appearance, while the electrode ring prepared in Comparative Example 1 with a high-temperature glue insulating ring had burrs, especially residual glue in the insulating ring. EDS measurement showed that the C and O contents of the electrode ring prepared in Comparative Example 1 were as high as 16% and 14%, respectively, while those of the electrode ring prepared in Example 1 were only 5% and 4%.

[0050] The intelligent sensor mask of Example 1 was used to deposit a Ti electrode on a stainless steel substrate 1. The results showed that the Ti electrode ring had a uniform morphology, good appearance, and a C content of only 5.8%. Although there was a bracket 3, the ground electrode was not divided into four pieces, and a complete ring structure was formed by making good use of the shadow effect. The presence of the opening 5 connected the ground electrode to the substrate, forming a huge ground electrode including the stainless steel substrate 1.

[0051] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A smart sensor mask, characterized in that: It includes an inner ring and an outer ring connected by a bracket, and also includes a fixing member; The hollow area inside the inner ring is used for depositing the signal electrode; the area between the inner ring and the outer ring is used for depositing the ground electrode; The fixing member is arranged on the outer ring or the inner ring; The outer ring is also provided with a plurality of openings, which are used to form a channel connecting the ground electrode and the substrate on the substrate after deposition.

2. The smart sensor mask according to claim 1, characterized in that: The opening has a width of 0.05-0.15 mm and a length of 0.1-1.5 mm.

3. The smart sensor mask according to claim 1, characterized in that: The inner ring has a width of 1-3 mm; The width of the outer ring is 3-5 mm.

4. The smart sensor mask according to claim 1, characterized in that: The width of the bracket is 0.05-0.15 mm and the length is 2-4 mm.

5. The smart sensor mask according to claim 1, characterized in that: The fixing piece is a binding strap arranged on the outer ring.

6. The smart sensor mask according to claim 5, characterized in that: The binding straps are rectangular with a width of 2-5 mm, and the number of the binding straps is between 2 and 6.

7. The smart sensor mask according to claim 1, characterized in that: The fixing member is a magnet that can withstand the deposition temperature. When it is arranged on the outer ring or the inner ring, it will not cover the area beyond the outer ring or the inner ring respectively.

8. The smart sensor mask according to claim 1, characterized in that: The inner ring and the outer ring are in the shape of circular rings, and the hollow area in the inner ring is a circle with a diameter of 2-8 mm; The ring width of the area between the inner ring and the outer ring is 2-4 mm.

9. The smart sensor mask according to any one of claims 1 to 8, characterized in that: The thickness of the inner ring, the outer ring and the bracket is 50-200 μm.

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