Synthesis crucible of silicon carbide powder
By designing a silicon carbide powder synthesis crucible with a detachable bottom cover and connecting rod, the problems of graphite crucible corrosion and material handling difficulties were solved, achieving the effects of extending crucible life and reducing costs.
Patent Information
- Application Number
- CN202421213360.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-30
- Publication Date
- 2025-01-10
- Estimated Expiration
- 2034-05-30
AI Technical Summary
In the existing silicon carbide powder synthesis process, graphite crucibles suffer from severe corrosion in the silicon-rich gas phase, resulting in short service life and difficulty in material extraction, leading to high synthesis costs.
A silicon carbide powder synthesis crucible was designed, including a detachable bottom cover, a connecting rod, and a handle. The bottom cover is detachably connected to the crucible body. Combined with the baffle and connecting rod, the corrosion of silicon-rich gas phase is reduced, and the material handling is convenient.
This improved the crucible's service life, reduced synthesis costs, simplified the material handling process, and enhanced the crucible's practicality.
Smart Images
Figure CN222332142U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of crystal growth, in particular to a synthetic crucible for silicon carbide powder. Background Art
[0002] As one of the third-generation semiconductor materials, silicon carbide single crystal material has the advantages of high voltage resistance, high frequency resistance, large bandgap and high thermal conductivity. Therefore, it is widely used as a new material in industries such as information, energy, transportation and national defense.
[0003] As the raw material for the growth of silicon carbide single crystals, the purity, particle size and crystal form of silicon carbide powder seriously affect the quality of silicon carbide crystals. During the synthesis of silicon carbide powder, the silicon-rich gas phase will seriously corrode the graphite crucible, especially the threaded connection structure between the crucible body and the crucible cover, which will shorten the service life of the graphite crucible and increase the synthesis cost of silicon carbide powder. Moreover, during the synthesis of silicon carbide powder, the raw material will inevitably crystallize, and the crystals will adhere to the inside of the crucible, making it difficult to remove the material from the crucible. Utility Model Content
[0004] The utility model aims to provide a synthesis crucible for silicon carbide powder, which can facilitate the material removal operation in the crucible, increase the service life of the crucible, and reduce the synthesis cost of silicon carbide powder.
[0005] In order to achieve the above-mentioned purpose and other related purposes, the utility model is implemented through the following technical solutions.
[0006] The utility model provides a synthetic crucible for silicon carbide powder, which at least comprises:
[0007] A crucible body, one side of the crucible body is open, and a hole is arranged on a side of the crucible body away from the opening;
[0008] A bottom cover, detachably arranged on the opening;
[0009] a connecting rod, disposed in the crucible body, and connecting the bottom cover and the crucible body; and
[0010] The handle passes through the hole and is connected to an end of the connecting rod away from the bottom cover.
[0011] In one embodiment of the utility model, the handle includes a first section and a second section which are vertically arranged, the second section passes through the hole and is connected to the connecting rod, and in a direction perpendicular to the axis of the crucible body, the shape and size of the second section match the shape and size of the connecting rod.
[0012] In an embodiment of the present invention, the synthesis crucible further comprises a baffle, and the baffle is arranged on a side of the bottom cover close to the crucible body.
[0013] In an embodiment of the present invention, the connecting rod connects the crucible body, the baffle and the bottom cover.
[0014] In an embodiment of the present invention, a step is arranged on the baffle, and the step is arranged around the edge of the baffle.
[0015] In an embodiment of the present invention, a step is arranged on the bottom cover, and the step is arranged around the edge of the bottom cover.
[0016] In an embodiment of the present invention, in the axial direction of the crucible body, the sum of the height of the step and the height of the step is equal to the height of the baffle.
[0017] In an embodiment of the present invention, the side surface of the step is in contact with the inner wall of the crucible body, and in the axial direction of the crucible body, the side wall of the step away from the center of the bottom cover is in contact with the inner wall of the crucible body.
[0018] In an embodiment of the present invention, a protrusion is further provided on the bottom cover, and the protrusion is provided on the outer side of the step away from the center of the bottom cover.
[0019] In an embodiment of the present invention, the width of the protrusion is equal to the wall thickness of the crucible body.
[0020] In summary, the present invention provides a synthesis crucible for silicon carbide powder, which can facilitate the material extraction operation from the bottom of the crucible, thereby improving the practicality of the crucible. Moreover, the synthesis crucible provided by the present invention can reduce the corrosion of the interior of the crucible by the silicon-rich gas during the synthesis of silicon carbide powder, thereby significantly improving the service life of the crucible and reducing the synthesis cost.
[0021] Of course, any method of implementing the present invention does not necessarily need to achieve all of the advantages described above at the same time. BRIEF DESCRIPTION OF THE DRAWINGS
[0022] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for describing the embodiments are briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.
[0023] Figure 1 It is a front view of a synthesis crucible for silicon carbide powder in one embodiment of the utility model.
[0024] Figure 2 for Figure 1 Front view of the center handle.
[0025] Figure 3 for Figure 1 Top view of the center handle.
[0026] Figure 4 for Figure 1 Front view of the crucible body.
[0027] Figure 5 for Figure 1 Top view of the crucible body.
[0028] Figure 6 for Figure 1 Front view of the connecting rod.
[0029] Figure 7 for Figure 1 Front view of the center panel.
[0030] Figure 8 for Figure 1 Top view of the center baffle.
[0031] Fig. 9 for Figure 1 Front view of the midsole cover.
[0032] Marking Description:
[0033] 100, handle; 101, first subsection; 102, second subsection; 103, first external thread; 200, crucible body; 201, hole; 202, crucible side wall; 203, crucible bottom wall; 300, connecting rod; 301, rod body; 302, first internal thread; 303, second external thread; 400, baffle; 401, opening; 402, step; 500, bottom cover; 501, cover body; 502, second internal thread; 503, step; 504, raised portion. DETAILED DESCRIPTION
[0034] The following describes the implementation of the present invention through specific examples. Those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific implementations. The details in the present invention can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention. It should be noted that the following embodiments and features in the embodiments can be combined with each other without conflict.
[0035] It should be noted that the illustrations provided in the following embodiments are only schematic illustrations of the basic concept of the present invention, and thus the drawings only show components related to the present invention rather than being drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component may be changed at will, and the component layout may also be more complicated.
[0036] In the present invention, it should be noted that, if the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. appear, the orientation or position relationship indicated is based on the orientation or position relationship shown in the drawings, which is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application. In addition, if the terms "first" and "second" appear, they are only used for description and distinction purposes, and cannot be understood as indicating or implying relative importance.
[0037] As the raw material of silicon carbide crystal, the purity of silicon carbide powder and other parameters affect the quality of silicon carbide single crystal crystal and even the quality of the subsequent manufactured devices. The synthesis methods of silicon carbide powder can be divided into: solid phase method, liquid phase method and gas phase method. Among them, the raw material source of the solid phase method is wide and the price is low, which is easy to industrialize and produce, and the synthesized silicon carbide powder is more economical. However, in the solid phase reaction process, with the increase of synthetic raw materials, the corrosion of the silicon-rich gas in the synthesis process relative to the crucible and the graphite cover is more serious, resulting in a reduction in the service life of the crucible and increasing the cost of silicon carbide powder. The synthetic crucible of silicon carbide powder provided by the utility model can reduce the corrosion of the silicon-rich gas in the synthesis process relative to the crucible, improve the service life of the crucible, and facilitate the material extraction operation from the crucible, thereby improving the service life of the crucible and making the crucible more economical and practical.
[0038] See also Figures 1 to 9As shown, the utility model provides a synthesis crucible for silicon carbide powder, for example, including a handle 100, a crucible body 200, a connecting rod 300 and a bottom cover 500. Among them, one side of the crucible body 200 is open, and the bottom cover 500 is detachably arranged on the side of the opening of the crucible body 200, and the connecting rod 300 connects the crucible body 200 and the bottom cover 500. By setting the bottom cover 500 to be detachably connected to the crucible body 200, the crucible provided by the utility model can facilitate the operator to take the material in the crucible from the bottom of the crucible, thereby improving the practicality of the crucible. Moreover, the crucible provided by the utility model can reduce the corrosion of the crucible by the silicon-rich gas in the synthesis process of silicon carbide powder by setting the connecting rod 300 to connect the crucible body 200 and the bottom cover 500, significantly improve the service life of the crucible, and reduce the synthesis cost. The crucible provided by the utility model can be widely used in the synthesis process of various powders to improve the service life of the crucible. In this embodiment, the crucible is described by taking the synthesis of silicon carbide powder as an example.
[0039] See also Figure 1 , Figure 4 and Figure 5 As shown, in one embodiment of the utility model, one side of the crucible body 200 is open, and a hole 201 is provided on the side of the crucible body 200 away from the opening. The shape of the crucible body 200 is, for example, a cylinder or a tetrahedron. In this embodiment, the shape of the crucible body 200 is, for example, a cylinder, the outer diameter of the crucible body 200 is, for example, 300-350 mm, and for example, 340 mm, the thickness of the crucible body 200 is, for example, 5-15 mm, and for example, 10 mm, the height of the crucible body 200 is, for example, 400-500 mm, and for example, 470 mm, and the crucible body 200 includes, for example, a crucible side wall 202 and a crucible bottom wall 203. The crucible side wall 202 surrounds the crucible bottom wall 203 to form a cylindrical crucible body 200 with an open end. In this embodiment, the hole 201 is arranged on the bottom wall 203 of the crucible. The hole 201 is, for example, circular. The ratio of the outer diameter of the crucible body 200 to the diameter of the hole 201 is, for example, (7-30):1. The diameter of the hole 201 is, for example, 20-40 mm, and for example, 30 mm, to accommodate subsequent structures.
[0040] See also Figure 1 and Fig. 9 As shown, in one embodiment of the utility model, the bottom cover 500 is detachably arranged on the opening of the crucible body 200. In this embodiment, the bottom cover 500 and the crucible body 200 surround the inner area of the crucible to place the synthetic raw materials of the silicon carbide powder. Moreover, by arranging the bottom cover 500 and the crucible body 200 to be detachably connected, it is convenient for the operator to take the material in the crucible from the bottom of the crucible, reducing the difficulty and workload of the operator.
[0041] See also Figure 1 and Fig. 9 As shown, in one embodiment of the present invention, the bottom cover 500 includes, for example, a cover body 501, a second internal thread 502, a step 503, and a protrusion 504. The cover body 501 is disposed on the opening of the crucible body 200, and in a direction perpendicular to the axis of the crucible body 200, the cross-sectional shape of the crucible body 200 is consistent with the cross-sectional shape of the cover body 501, so that the crucible body 200 and the cover body 501 can match each other. In this embodiment, the cover body 501 is, for example, a cylinder, and the outer diameter of the cover body 501 is, for example, 300-350 mm, and for example, 340 mm.
[0042] See also Figure 1 and Fig. 9 As shown, in one embodiment of the utility model, the second internal thread 502 is disposed in the cover body 501. In this embodiment, the second internal thread 502 is, for example, disposed inside the center of the cover body 501, and the nominal diameter of the second internal thread 502 is, for example, 10-20 mm, and another example is 15 mm. The second internal thread 502 is provided to connect the bottom cover 500 and the crucible body 200.
[0043] See also Figure 1 and Fig. 9 As shown, in one embodiment of the present invention, the step 503 is disposed around the edge of the cover 501. In this embodiment, the step 503 extends from two ends of the cover 501 in a direction perpendicular to the cover 501, for example.
[0044] See also Figure 1 and Fig. 9 As shown, in one embodiment of the present invention, the protrusion 504 is arranged outside the step 503 away from the center of the cover 501. Among them, at one end of the cover 501, the width of the protrusion 504, that is, the distance that the protrusion 504 extends in the direction away from the cover 501, is the same as the wall thickness of the crucible body 200, and the diameter of the cover 501 is the same as the inner diameter of the crucible body 200. By providing the protrusion 504 and the cover 501, the bottom cover 500 and the crucible body 200 can be matched and locked, thereby ensuring the sealing inside the crucible body 200.
[0045] See also Figure 1 , Figure 7 and Figure 8As shown, in one embodiment of the utility model, the synthesis crucible further includes a baffle 400, which is arranged on the side of the bottom cover 500 close to the crucible body 200. In this embodiment, the material of the baffle 400 is, for example, graphite, etc. In the axial direction perpendicular to the crucible body 200, the cross-sectional shape of the crucible body 200 is consistent with the shape of the baffle 400, so that the crucible body 200 and the baffle 400 can match each other. In this embodiment, the baffle 400 is, for example, a cylinder, and the outer diameter of the baffle 400 is, for example, 300-350 mm, and another example is 320 mm, and the height of the baffle 400 is, for example, 15-25 mm, and another example is 20 mm. In this embodiment, the silicon carbide powder is placed between the crucible body 200 and the baffle 400. By setting the baffle 400, the bottom cover 500 can be protected from being corroded by the silicon-rich gas phase during the synthesis of the silicon carbide powder, and the bottom cover 500 can be prevented from being pierced.
[0046] See also Figure 1 , Figure 7 and Figure 8 As shown, in one embodiment of the utility model, the baffle 400 is provided with an opening 401 and a step 402, etc. The opening 401 is provided at the center of the baffle 400, for example, and the size and shape of the opening 401 are the same as the size and shape of the hole 201, for example, so that the opening 401 and the hole 201 can be aligned. In this embodiment, the shape of the opening 401 is, for example, circular, and the diameter of the opening 401 is, for example, 20-40 mm, and for example, 30 mm.
[0047] See also Figure 1 , Figure 7 and Figure 8 As shown, in one embodiment of the utility model, the step 402 is arranged around the edge of the baffle 400. In this embodiment, the distance that the step 402 extends in the direction away from the baffle 400 is the same as the width of the step 503 in the direction perpendicular to the axis of the crucible body 200, so that the step 402 and the step 503 can be aligned with each other. Moreover, in the axis direction of the crucible body 200, the sum of the height of the step 402 and the height of the step 503 is equal to the height of the baffle 400, so that the step 503 and the step 402 can match each other. In the axis direction of the crucible body 200, the height of the step 402 is, for example, 5-15 mm, and for example, 10 mm, and the height of the step 503 is, for example, 5-15 mm, and for example, 10 mm. By setting the step 503 and the step 402 matching each other, the step 402 is away from the side wall of the baffle 400, that is, the side surface S of the step 402 is in contact with the inner wall of the crucible body 200, and in the axial direction of the crucible body 200, the side wall of the step 503 away from the cover body 501 is in contact with the inner wall of the crucible body 200, so that the baffle 400 and the bottom cover 500 can be locked with each other, so that the bottom cover 500 provides support for the baffle 400.
[0048] See also Figures 1 to 9 As shown, in one embodiment of the utility model, the connecting rod 300 is disposed in the crucible body 200, and the connecting rod 300 connects the crucible body 200, the baffle 400 and the bottom cover 500. The material of the connecting rod 300 is, for example, graphite, etc. In the direction perpendicular to the axis of the crucible body 200, the cross-sectional shape and size of the connecting rod 300, the shape and size of the hole 201, and the size and shape of the opening 401 are, for example, the same, so that the connecting rod 300 can pass through the hole 201 and the opening 401 to connect the crucible body 200, the baffle 400 and the bottom cover 500. In this embodiment, the connecting rod 300 is, for example, a cylinder, the outer diameter of the connecting rod 300 is, for example, 20-40 mm, and for example, 30 mm, and the height of the connecting rod 300 is, for example, 450-550 mm, and for example, 500 mm.
[0049] See also Figures 1 to 9 As shown, in one embodiment of the utility model, the connecting rod 300 includes, for example, a rod body 301, a first internal thread 302, and a second external thread 303. The rod body 301 is arranged between the hole 201 and the opening 401, the first internal thread 302 is arranged on one end of the rod body 301 close to the hole 201, and the second external thread 303 is arranged on one end of the rod body 301 close to the opening 401. In this embodiment, the nominal diameters of the second external thread 303 and the second internal thread 502 are, for example, the same, so that the second external thread 303 and the second internal thread 502 can match each other, so as to achieve the purpose of connecting the bottom cover 500 and the crucible body 200. The nominal diameter of the first internal thread 302 is, for example, 15-25 mm, and for example, 20 mm, and the nominal diameter of the second external thread 303 is, for example, 10-20 mm, and for example, 15 mm. In this embodiment, the connecting rod 300 and the bottom cover 500 are connected, for example, by a threaded structure. In other embodiments of the present invention, the connecting rod 300 and the bottom cover 500 may also be an integrally formed structure.
[0050] See also Figures 1 to 6As shown, in one embodiment of the present invention, the handle 100 passes through the hole 201 and is connected to the end of the connecting rod 300 away from the bottom cover 500. The material of the handle 100 is, for example, stainless steel or graphite, and the handle 100 includes, for example, a first sub-portion 101, a second sub-portion 102, and a first external thread 103. In this embodiment, the second sub-portion 102 and the first sub-portion 101 are arranged vertically, and in the direction perpendicular to the axis of the crucible body 200, the shape and size of the second sub-portion 102 match the shape and size of the connecting rod 300, and the first external thread 103 is arranged on the outer ring of the second sub-portion 102. Moreover, in this embodiment, the nominal diameter of the first external thread 103 is, for example, the same as the nominal diameter of the first internal thread 302, so that the first external thread 103 and the first internal thread 302 can match each other, so as to achieve the purpose of connecting the handle 100 and the connecting rod 300. By providing the handle 100 , it is possible to facilitate the operation of assembling the connecting rod 300 in the crucible body 200 or taking out the connecting rod 300 .
[0051] See also Figure 1 As shown, in one embodiment of the utility model, the crucible also includes a protective layer (not shown in the figure), which is arranged on the outer wall of the connecting rod 300 to reduce the corrosion of the connecting rod 300 by the silicon-rich component in the synthesis process of the silicon carbide powder, thereby extending the service life of the crucible. Wherein, the protective layer, for example, includes at least one of a high-temperature ceramic coating, a tantalum carbide coating or a tungsten carbide coating, and the protective layer is prepared by, for example, chemical vapor deposition, physical vapor deposition or a solution method. In other embodiments of the utility model, the protective layer is also, for example, graphite paper, and the graphite paper is uniformly coated on the outer wall of the connecting rod 300. Wherein, the graphite paper is, for example, at least one layer, and the thickness of the graphite paper is, for example, 0.1-1mm, and for example, 0.3mm, 0.5mm or 0.7mm, and the purity of the graphite paper is, for example, 1-10ppm, and for example, 3ppm, 5ppm or 7ppm.
[0052] In summary, the utility model provides a synthesis crucible for silicon carbide powder, which connects the crucible body, bottom cover and baffle by connecting rods, and can reduce the corrosion of the crucible by silicon-rich gas during the synthesis of silicon carbide powder, thereby increasing the service life of the crucible and reducing the synthesis cost. Moreover, the crucible provided by the utility model can facilitate the material removal operation from the bottom of the crucible by detachably connecting the bottom cover to the crucible body, thereby reducing the difficulty and workload of the operator.
[0053] References throughout the specification to "one embodiment," "an embodiment," or "a specific embodiment" mean that the specific features, structures, or characteristics described in conjunction with the embodiment are included in at least one embodiment of the utility model, and not necessarily in all embodiments. Thus, the various appearances of the phrases "in one embodiment," "in an embodiment," or "in a specific embodiment" in different places throughout the specification do not necessarily refer to the same embodiment. In addition, the specific features, structures, or characteristics of any specific embodiment of the utility model may be combined with one or more other embodiments in any suitable manner. It should be understood that other variations and modifications of the utility model embodiments described and shown herein may be based on the teachings herein and will be considered part of the spirit and scope of the utility model.
[0054] The above description is only a preferred embodiment of the present application and an explanation of the technical principles used. Those skilled in the art should understand that the scope of the utility model involved in the present application is not limited to the technical solution formed by a specific combination of the above-mentioned technical features, but should also cover other technical solutions formed by any combination of the above-mentioned technical features or their equivalent features without departing from the concept of the utility model, such as the technical solution formed by replacing the above-mentioned features with the technical features with similar functions disclosed in this application (but not limited to). In addition to the technical features described in the specification, the remaining technical features are known technologies to those skilled in the art. In order to highlight the innovative features of the present utility model, the remaining technical features will not be repeated here.
Claims
1. A synthetic crucible for silicon carbide powder, characterized in that: At least: A crucible body, one side of the crucible body is open, and a hole is arranged on a side of the crucible body away from the opening; A bottom cover, detachably arranged on the opening; A connecting rod is disposed in the crucible body, and the connecting rod connects the bottom cover and the crucible body; as well as The handle passes through the hole and is connected to an end of the connecting rod away from the bottom cover.
2. The synthesis crucible according to claim 1, characterized in that: The handle includes a first section and a second section arranged vertically, the second section passes through the hole and is connected to the connecting rod, and in a direction perpendicular to the axis of the crucible body, the shape and size of the second section match the shape and size of the connecting rod.
3. The synthesis crucible according to claim 1, characterized in that: The synthesis crucible further includes a baffle plate disposed on a side of the bottom cover close to the crucible body.
4. The synthesis crucible according to claim 3, characterized in that: The connecting rod connects the crucible body, the baffle and the bottom cover.
5. The synthesis crucible according to claim 3, characterized in that: The baffle is provided with a step, and the step is arranged around the edge of the baffle.
6. The synthesis crucible according to claim 5, characterized in that: The bottom cover is provided with a step, and the step is arranged around the edge of the bottom cover and extends in a direction close to the baffle.
7. The synthesis crucible according to claim 6, characterized in that: In the axial direction of the crucible body, the sum of the height of the step and the height of the step is equal to the height of the baffle.
8. The synthesis crucible according to claim 6, characterized in that: The side surface of the step is in contact with the inner wall of the crucible body, and in the axial direction of the crucible body, the side wall of the step away from the center of the bottom cover is in contact with the inner wall of the crucible body.
9. The synthesis crucible according to claim 6, characterized in that: The bottom cover is also provided with a raised portion, and the raised portion is provided on the outer side of the step away from the center of the bottom cover.
10. The synthesis crucible according to claim 9, characterized in that: The width of the protrusion is equal to the wall thickness of the crucible body.