Stable turbo molecular pump protection device

Abstract

The utility model relates to a stable turbo molecular pump protection device. The device comprises a base, a pump body, a supporting assembly, a mounting assembly, a buffering assembly, an adjusting assembly and a fixing assembly. A supporting assembly is arranged above the base, a fixing assembly is arranged on the side wall of the supporting assembly, a mounting assembly is arranged on the inner wall of the supporting assembly, a buffering assembly with a buffering function is arranged above the mounting assembly, an adjusting assembly is arranged above the buffering assembly, and a pump body is arranged in the adjusting assembly. Compared with a traditional turbo molecular pump, the turbo molecular pump is provided with the buffering structure and the adjusting structure, and when the buffering structure is subjected to high-frequency vibration generated by working of the turbo molecular pump, the purpose of buffering and protecting the turbo molecular pump can be achieved according to resilience force generated by elastic deformation of the buffering structure.

Description

Technical Field

[0001] The utility model relates to the technical field of turbomolecular pumps, in particular to a stable turbomolecular pump protection device. Background Art

[0002] A turbomolecular pump is a vacuum pump that utilizes a high-speed rotating impeller to transfer momentum to gas molecules, causing the gas to produce a directional flow and exhaust air. The advantages of a turbomolecular pump are fast startup, resistance to various radiation, resistance to atmospheric impact, no gas storage and desorption effects, no oil vapor pollution or very little pollution, and the ability to obtain a clean ultra-high vacuum. The utility model relates to the technical field of turbomolecular pumps. With the development of society, the turbomolecular pump industry has become more and more developed, and turbomolecular pumps have been continuously improved to meet the needs of production. Most turbomolecular pumps have the function of momentum transmission, but the function of buffer protection is not yet complete. The technical problem is that during the dynamic balancing process, the turbine may sometimes become unstable, causing the pump body to tip over, the pump casing and the turbine to fly out, causing an irreversible effect on the molecular pump, and a simple protective structure will inevitably bend when it collides with the pump body for a long time, resulting in its blocking effect becoming increasingly poor, and it is also easy to cause damage to the outer side of the pump body, thereby making it inconvenient to achieve the problem of buffer protection. Utility Model Content

[0003] In order to overcome the problem that the turbine may become unstable during the use of the turbomolecular pump, causing the pump body to topple over, the pump casing and the turbine to fly out, which will have an irreversible impact on the molecular pump. In addition, the simple protective structure will inevitably bend after colliding with the pump body for a long time, resulting in its blocking effect becoming worse and worse. At the same time, it is also easy to cause damage to the outside of the pump body, making it inconvenient to achieve buffer protection.

[0004] According to a first aspect of the present disclosure, a stable turbomolecular pump protection device is provided, comprising a base, a pump body, a support assembly, a mounting assembly, a buffer assembly, an adjustment assembly and a fixing assembly; a support assembly is arranged above the base, a fixing assembly is arranged on a side wall of the support assembly, a mounting assembly is arranged on an inner wall of the support assembly, a buffer assembly with a buffering function is arranged above the mounting assembly, an adjustment assembly is arranged above the buffer assembly, and a pump body is arranged inside the adjustment assembly.

[0005] Preferably, first, the support assembly and the base can be fastened and installed by a fixing assembly, and when the buffer assembly is subjected to the high-frequency vibration generated by the operation of the turbomolecular pump, the rebound force generated by the elastic deformation of the buffer assembly can achieve the purpose of buffering and protecting the turbomolecular pump. At the same time, the effect of flexible rotation adjustment can be achieved through the adjustment assembly and the installation assembly.

[0006] Preferably, the support assembly includes a support frame and a support block; a support frame is arranged above the base, support blocks are arranged on the side walls of the support frame, and multiple groups of support blocks are arranged; through the arrangement of multiple groups of support blocks, the support frame can be supported and fixed.

[0007] Preferably, the mounting assembly includes a mounting block and a mounting groove; a mounting block is arranged on the inner wall of the support frame, and multiple groups of mounting blocks are arranged, and mounting grooves are opened inside the mounting blocks; multiple groups of buffer assemblies can be installed respectively through multiple groups of mounting grooves, and multiple groups of mounting blocks can play a role in auxiliary installation.

[0008] Preferably, the mounting assembly also includes a rotating shaft, a rotating block and a mounting hole; a rotating block is arranged inside the mounting groove, a mounting hole is opened inside the rotating block, a rotating shaft is arranged inside the mounting hole, and both ends of the rotating shaft are rotatably connected to the inner wall of the mounting groove; when the rotating block is vibrated, the rotating block can achieve a flexible adjustment effect through the rotating shaft.

[0009] Preferably, the buffer assembly includes a support tube, a buffer spring and a support column; a support tube is arranged above the rotating block, a buffer spring is arranged inside the support tube, a support column is arranged above the support tube, and one end of the buffer spring is fixedly connected to one end of the support column; when the support column is subjected to the high-frequency vibration generated by the operation of the turbomolecular pump, the rebound force generated by the elastic deformation of the buffer spring can achieve the purpose of buffering protection for the turbomolecular pump.

[0010] Preferably, the adjustment component includes a connecting block, a connecting hole, a connecting shaft, a fixed block and a fixed ring; a connecting block is provided at the other end of the support column, a connecting hole is provided inside the connecting block, a connecting shaft is provided inside the connecting hole, a fixed block is provided outside the connecting shaft, and a fixed ring is provided above the fixed block; when the fixed ring is subjected to high-frequency vibration, the fixed block, the connecting block and the connecting hole can cooperate with each other to achieve the effect of flexible rotation adjustment.

[0011] Preferably, the fixing assembly includes a fixing ear, a mounting threaded hole and a mounting bolt; a fixing ear is arranged on the side wall of the support frame, and a plurality of fixing ears are arranged, a mounting threaded hole is opened inside the fixing ear, a mounting bolt is arranged inside the mounting threaded hole, and the mounting bolt is threadedly connected to the mounting threaded hole; through the mutual cooperation of the plurality of mounting bolts and the mounting threaded holes, the fixing ear can be installed on the base, thereby achieving the effect of a tightened installation.

[0012] Preferably, the number of buffer components is three or more.

[0013] Furthermore, the buffer components are evenly arranged around the fixing ring.

[0014] Furthermore, one end of the buffer assembly is arranged to abut against the inner side of the support frame, and the other end of the buffer assembly is arranged to abut against the lower side of the fixing ring.

[0015] The beneficial effects of the utility model are:

[0016] 1. Compared with the traditional turbomolecular pump, the turbine may become unstable during the dynamic balancing process, causing the pump body to fall over, the pump casing and the turbine to fly out, which will have an irreversible impact on the molecular pump. The simple protective structure will inevitably bend after colliding with the pump body for a long time, resulting in its blocking effect becoming worse and worse. At the same time, it is also easy to cause damage to the outside of the pump body, making it inconvenient to achieve buffer protection. The turbomolecular pump is provided with a buffer structure and an adjustment structure. When the buffer structure is subjected to the high-frequency vibration generated by the operation of the turbomolecular pump, the elastic deformation of the buffer structure generates a rebound force, thereby achieving the purpose of buffer protection for the turbomolecular pump.

[0017] 2. First, the fixing ears and the base can be fastened and installed by the mutual cooperation of multiple sets of mounting bolts and mounting threaded holes. Moreover, when the support column is subjected to the high-frequency vibration generated by the operation of the turbomolecular pump, the rebound force generated by the elastic deformation of the buffer spring can achieve the purpose of buffering and protecting the turbomolecular pump. At the same time, when the fixing ring is subjected to high-frequency vibration, the fixing block, the connecting block and the connecting hole can cooperate with each other to achieve the effect of flexible rotation and adjustment.

[0018] 3. Multiple groups of buffer components can be installed through multiple groups of installation grooves respectively, and multiple groups of installation blocks can play a role in auxiliary installation. Moreover, when the rotating block is vibrated, the rotating block can achieve a flexible adjustment effect through the rotating shaft. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 A schematic diagram of a first three-dimensional structure of a stable turbomolecular pump protection device according to an embodiment of the present disclosure is shown;

[0020] Figure 2 A schematic diagram of a first partial three-dimensional structure of a stable turbomolecular pump protection device according to an embodiment of the present disclosure is shown;

[0021] Figure 3 A schematic diagram of a second partial three-dimensional structure of a stable turbomolecular pump protection device according to an embodiment of the present disclosure is shown;

[0022] Figure 4 A third partial three-dimensional structure schematic diagram of a stable turbomolecular pump protection device according to an embodiment of the present disclosure is shown;

[0023] Explanation of the accompanying drawings: 1. Support assembly; 2. Mounting assembly; 3. Buffer assembly; 4. Adjustment assembly; 5. Fixing assembly; 6. Base; 7. Pump body; 101. Support frame; 102. Support block; 201. Mounting block; 202. Mounting groove; 203. Rotating shaft; 204. Rotating block; 205. Mounting hole; 301. Support cylinder; 302. Buffer spring; 303. Support column; 401. Connecting block; 402. Connecting hole; 403. Connecting shaft; 404. Fixing block; 405. Fixing ring; 501. Fixing ear; 502. Mounting threaded hole; 503. Mounting bolt. DETAILED DESCRIPTION

[0024] The utility model is further described below in conjunction with the accompanying drawings and embodiments. Although certain embodiments of the present disclosure are shown in the accompanying drawings, it should be understood that the present disclosure can be implemented in various forms and should not be construed as being limited to the embodiments described herein. On the contrary, these embodiments are provided to provide a more thorough and complete understanding of the present disclosure. It should be understood that the drawings and embodiments of the present disclosure are only for exemplary purposes and are not intended to limit the scope of protection of the present disclosure.

[0025] In the description of the embodiments of the present disclosure, the term "including" and similar terms should be understood as open inclusion, that is, "including but not limited to". The term "based on" should be understood as "based at least in part on". The term "one embodiment" or "the embodiment" should be understood as "at least one embodiment". The terms "first", "second", etc. can refer to different or the same objects.

[0026] Generally, during the use of a turbomolecular pump, the turbine may become unstable during the dynamic balancing process, causing the pump body to topple over, the pump casing and the turbine to fly out, which will have an irreversible impact on the molecular pump. In addition, a simple protective structure will inevitably bend after colliding with the pump body for a long time, resulting in its blocking effect becoming increasingly poor. It is also easy to cause damage to the outside of the pump body, making it difficult to achieve buffer protection. For one or more of the above problems, as well as one or more potential problems.

[0027] The utility model is further described below in conjunction with the accompanying drawings and embodiments.

[0028] See also Figure 1The utility model provides an embodiment: a stable turbomolecular pump protection device, including a base 6, a pump body 7, a support component 1, a mounting component 2, a buffer component 3, an adjustment component 4 and a fixing component 5; the support component 1 is arranged above the base 6, the fixing component 5 is arranged on the side wall of the support component 1, the mounting component 2 is arranged on the inner wall of the support component 1, the buffer component 3 with a buffering function is arranged above the mounting component 2, the adjustment component 4 is arranged above the buffer component 3, and the pump body 7 is arranged inside the adjustment component 4.

[0029] See also Figure 2 The support assembly 1 includes a support frame 101 and a support block 102; a support frame 101 is arranged above the base 6, and a support block 102 is arranged on the side wall of the support frame 101, and a plurality of support blocks 102 are arranged; by setting a plurality of support blocks 102, the support frame 101 can be supported and fixed; the mounting assembly 2 includes a mounting block 201 and a mounting groove 202; a mounting block 201 is arranged on the inner wall of the support frame 101, and a plurality of mounting blocks 201 are arranged, and a mounting groove 202 is opened inside the mounting block 201; the plurality of buffer assemblies 3 can be divided into The mounting assembly 2 is installed through multiple groups of mounting grooves 202, and multiple groups of mounting blocks 201 can play an auxiliary installation role; the mounting assembly 2 also includes a rotating shaft 203, a rotating block 204 and a mounting hole 205; the mounting groove 202 is provided with a rotating block 204, the rotating block 204 is provided with a mounting hole 205, the mounting hole 205 is provided with a rotating shaft 203, and both ends of the rotating shaft 203 are rotatably connected to the inner wall of the mounting groove 202; when the rotating block 204 is vibrated, the rotating block 204 can achieve a flexible adjustment effect through the rotating shaft 203. It should be noted that from the perspective of the figure, the support frame 101 can also include an inner side, that is, the direction toward the center of the device; and an outer side away from the center, wherein the inner side and the outer side are only used to illustrate and explain the embodiment, and do not necessarily mean to limit the name of its workpiece.

[0030] See also Figure 3-4In this embodiment, the buffer component 3 includes a support cylinder 301, a buffer spring 302 and a support column 303; a support cylinder 301 is arranged above the rotating block 204, a buffer spring 302 is arranged inside the support cylinder 301, and a support column 303 is arranged above the support cylinder 301, and one end of the buffer spring 302 is fixedly connected to one end of the support column 303; when the support column 303 is subjected to the high-frequency vibration generated by the operation of the turbomolecular pump, the rebound force generated by the elastic deformation of the buffer spring 302 can achieve the purpose of buffering and protecting the turbomolecular pump; the adjustment component 4 includes a connecting block 401, a connecting hole 402, a connecting shaft 403, a fixed block 404 and a fixed ring 405; a connecting block 401 is arranged at the other end of the support column 303, a connecting hole 402 is opened inside the connecting block 401, and a connecting shaft 403 is arranged inside the connecting hole 402 , a fixing block 404 is arranged on the outside of the connecting shaft 403, and a fixing ring 405 is arranged above the fixing block 404; when the fixing ring 405 is subjected to high-frequency vibration, the fixing block 404, the connecting block 401 and the connecting hole 402 can cooperate with each other to achieve the effect of flexible rotation and adjustment; the fixing component 5 includes a fixing ear 501, a mounting threaded hole 502 and a mounting bolt 503; a fixing ear 501 is arranged on the side wall of the support frame 101, and the fixing ear 501 is provided with multiple groups, and the fixing ear 501 is provided with a mounting threaded hole 502 inside, and the mounting bolt 503 is arranged inside the mounting threaded hole 502, and the mounting bolt 503 is threadedly connected with the mounting threaded hole 502; through the cooperation of multiple groups of mounting bolts 503 and the mounting threaded hole 502, the fixing ear 501 can be installed with the base 6, so as to achieve the effect of fastening installation.

[0031] It should be noted that, from the perspective of the figure, the fixing ring 405 may also include an upper side facing upwards of the paper, and a lower side facing downwards of the paper, wherein the upper side and the lower side are only used to illustrate and explain the embodiment, and do not necessarily limit the name of the workpiece.

[0032] When working, first, the fixing ears 501 and the base 6 can be fastened and installed by the cooperation of multiple sets of mounting bolts 503 and mounting threaded holes 502;

[0033] Furthermore, when the support column 303 is subjected to high-frequency vibrations generated by the operation of the turbomolecular pump, the elastic deformation of the buffer spring 302 generates a rebound force, thereby achieving the purpose of buffering and protecting the turbomolecular pump;

[0034] At the same time, when the fixing ring 405 is subjected to high-frequency vibration, the fixing block 404, the connecting block 401 and the connecting hole 402 cooperate with each other, so as to achieve the effect of flexible rotation adjustment.

[0035] Through the above steps, first, the support component 1 and the base 6 can be fastened and installed through the fixing component 5, and when the buffer component 3 is subjected to the high-frequency vibration generated by the operation of the turbomolecular pump, the rebound force generated by the elastic deformation of the buffer component 3 can achieve the purpose of buffering and protecting the turbomolecular pump. At the same time, the effect of flexible rotation adjustment can be achieved through the adjustment component 4 and the installation component 2.

[0036] Further, in some embodiments, in order to better play the supporting and impacting role, the number of buffer components is three or more, for example, it can be 4, 5, 6, 7, 8 or more. Of course, the multiple buffer components are preferably evenly arranged around the fixing ring so that the multiple buffer components can rebound more effectively. In particular, one end of the buffer component is arranged to abut against the inner side of the support frame, and the other end of the buffer component is arranged to abut against the lower side of the fixing ring.

[0037] The embodiments of the present invention are described in detail above in conjunction with the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge scope of those skilled in the art without departing from the purpose of the present invention.

Claims

1. A stable turbomolecular pump protection device, comprising a base (6); characterized in that: The invention also comprises a pump body (7), a support assembly (1), a mounting assembly (2), a buffer assembly (3), an adjustment assembly (4) and a fixing assembly (5); the support assembly (1) is arranged above the base (6), the fixing assembly (5) is arranged on the side wall of the support assembly (1), the mounting assembly (2) is arranged on the inner wall of the support assembly (1), the buffer assembly (3) with a buffering function is arranged above the mounting assembly (2), the adjustment assembly (4) is arranged above the buffer assembly (3), and the pump body (7) is arranged inside the adjustment assembly (4).

2. The turbomolecular pump protection device according to claim 1, characterized in that: The support assembly (1) comprises a support frame (101) and a support block (102); the support frame (101) is arranged above the base (6), the support block (102) is arranged on the side wall of the support frame (101), and the support block (102) is arranged in multiple groups.

3. The turbomolecular pump protection device according to claim 2, characterized in that: The mounting assembly (2) comprises a mounting block (201) and a mounting groove (202); the mounting block (201) is arranged on the inner wall of the support frame (101), a plurality of groups of the mounting blocks (201) are arranged, and the mounting groove (202) is provided inside the mounting block (201).

4. The turbomolecular pump protection device according to claim 3, characterized in that: The mounting assembly (2) further comprises a rotating shaft (203), a rotating block (204) and a mounting hole (205); the rotating block (204) is arranged inside the mounting groove (202), the mounting hole (205) is opened inside the rotating block (204), the rotating shaft (203) is arranged inside the mounting hole (205), and both ends of the rotating shaft (203) are rotatably connected to the inner wall of the mounting groove (202).

5. The turbomolecular pump protection device according to claim 4, characterized in that: The buffer assembly (3) comprises a support cylinder (301), a buffer spring (302) and a support column (303); the support cylinder (301) is arranged above the rotating block (204), the buffer spring (302) is arranged inside the support cylinder (301), the support column (303) is arranged above the support cylinder (301), and one end of the buffer spring (302) is fixedly connected to one end of the support column (303).

6. The turbomolecular pump protection device according to claim 5, characterized in that: The adjustment component (4) comprises a connecting block (401), a connecting hole (402), a connecting shaft (403), a fixing block (404) and a fixing ring (405); the other end of the support column (303) is provided with a connecting block (401), a connecting hole (402) is provided inside the connecting block (401), a connecting shaft (403) is provided inside the connecting hole (402), a fixing block (404) is provided outside the connecting shaft (403), and a fixing ring (405) is provided above the fixing block (404).

7. The turbomolecular pump protection device according to claim 1, characterized in that: The fixing assembly (5) comprises a fixing ear (501), a mounting threaded hole (502) and a mounting bolt (503); the fixing ear (501) is arranged on the side wall of the support frame (101), and a plurality of fixing ears (501) are arranged; a mounting threaded hole (502) is provided inside the fixing ear (501); a mounting bolt (503) is provided inside the mounting threaded hole (502); and the mounting bolt (503) is threadedly connected to the mounting threaded hole (502).

8. The turbomolecular pump protection device according to claim 6, characterized in that: The number of the buffer components (3) is three or more.

9. The turbomolecular pump protection device according to claim 7, characterized in that: The buffer components (3) are evenly arranged around the fixing ring (405).

10. The turbomolecular pump protection device according to claim 9, characterized in that: One end of the buffer assembly (3) is arranged to abut against the inner side of the support frame (101), and the other end of the buffer assembly (3) is arranged to abut against the lower side of the fixing ring (405).

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