Fresh air valve structure and waste gas treatment equipment

Abstract

The utility model provides a fresh air valve structure and waste gas treatment equipment, and relates to the technical field of semiconductor waste gas treatment. The fresh air valve structure comprises a valve body, the valve body is provided with an air inlet and an air outlet, and a valve plug is arranged in the valve body; the driving device is arranged on the valve body, is connected with the valve plug and is used for driving the valve plug to move relative to the valve body so as to realize opening and closing between the valve body and the valve plug; the reset elastic piece is arranged between the valve plug and the driving device and used for driving the valve plug and the driving device to reset to the state that the valve body and the valve plug are closed. The driving device drives the valve plug to be matched with the valve body under the normal condition so that the air outlet can be closed, the fresh air valve structure can achieve the effect of a single-drive normally-closed valve, the phenomenon that backflow occurs at the air outlet of the fresh air valve structure to cause damage is avoided, the use safety of the fresh air valve structure is improved, and the maintenance cost is reduced; and the sealing effect when the valve is closed is further improved through the reset elastic piece.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor waste gas treatment, and in particular to a fresh air valve structure and waste gas treatment equipment. Background Art

[0002] With the increasing prosperity of the semiconductor industry and the surge in production capacity, various waste gases are generated in the production process of semiconductors, most of which are seriously harmful to the human body and the environment. Therefore, in order to treat the waste gas generated by semiconductors, it is necessary to connect the semiconductor production facilities with the waste gas treatment equipment through a fresh air valve to achieve waste gas treatment.

[0003] However, the internal facilities and environment of semiconductor production are often complex and different. The existing fresh air valves are large in size, and it is easy for condensed water to flow back into the exhaust gas treatment equipment during the exhaust gas treatment process, damaging the valve body, making maintenance difficult. Utility Model Content

[0004] Based on this, the present application provides a fresh air valve structure and exhaust gas treatment equipment, which can improve the safety of the fresh air valve and reduce maintenance costs.

[0005] The present application discloses a fresh air valve structure, comprising a valve body, provided with an air inlet and an air outlet, wherein a valve plug is provided inside the valve body;

[0006] A driving device, disposed on the valve body and connected to the valve plug, for driving the valve plug to move relative to the valve body to achieve opening and closing between the valve body and the valve plug;

[0007] A resetting elastic member is disposed between the valve plug and the driving device, and is used to drive the valve plug and the driving device to return to a closed state between the valve body and the valve plug.

[0008] Optionally, a first conical surface is provided inside the valve body, a second conical surface is provided at the air outlet, and the valve plug is provided with a valve plug matching surface matching with the second conical surface.

[0009] Optionally, the valve plug mating surface is provided with a valve plug sealing ring.

[0010] Optionally, the driving device includes a cylinder body and a piston rod, one end of the piston rod is arranged in the cylinder body, the other end of the piston rod is connected to the valve plug, and the reset elastic member is arranged in the circumference of the piston rod and is located between the valve plug and the cylinder body.

[0011] Optionally, the piston rod is provided with an adjusting nut, and the adjusting nut is used to adjust the elastic compression amount of the reset elastic member to adjust the pressure of the valve plug acting on the second conical surface.

[0012] Optionally, a pipe joint is provided at the air inlet, and a connecting thread is provided inside the pipe joint.

[0013] Optionally, a flange is provided at the air outlet for connecting and installing the valve body, and a flange sealing ring is provided between the flange and the valve body.

[0014] Optionally, a long outer support is circumferentially arranged on the outer diameter circumference of the flange sealing ring, a short inner support is circumferentially arranged on the inner diameter circumference of the flange sealing ring, and a groove body matching the long outer support is arranged on the inner wall of the flange to realize the positioning and support of the flange.

[0015] Optionally, the valve body is provided with a drive device fixing plate, and the drive device is arranged on the valve body through the drive device fixing plate.

[0016] Optionally, O-rings are provided between the drive device fixing plate and the valve body, and between the drive device and the drive device fixing plate.

[0017] The present application also provides an exhaust gas treatment device, comprising the above-mentioned fresh air valve structure.

[0018] The fresh air valve structure and exhaust gas treatment equipment provided in the present application, through the driving device, drive the valve plug and the valve body to cooperate to close the air outlet under normal circumstances, so that the fresh air valve structure can achieve the effect of a single-drive normally closed valve, avoid the phenomenon of backflow at the air outlet of the fresh air valve structure causing damage, improve the safety of the fresh air valve structure in small space, internal negative pressure and other environments, and reduce maintenance costs; the sealing effect when the valve is closed is further improved by the reset elastic part. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without exceeding the scope of protection required by the present application.

[0020] Figure 1 It is a top sectional view of the structure of the fresh air valve structure provided by the present application;

[0021] Figure 2 It is a schematic structural stereogram of the fresh air valve structure provided by the present application;

[0022] Figure 3 It is a front cross-sectional view of the fresh air valve structure provided in the present application.

[0023] Explanation of the accompanying drawings: 1. valve body; 101. air inlet; 102. air outlet; 103. first conical surface; 104. second conical surface; 2. driving device; 21. cylinder body; 22. piston rod; 3. reset elastic member; 4. valve plug; 401. valve plug mating surface; 402. valve plug sealing ring; 5. adjusting nut; 6. pipe joint; 7. flange; 701. trough body; 8. flange sealing ring; 801. long outer support; 802. short inner support; 9. driving device fixing plate. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present application.

[0025] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, which are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first", "second", etc. are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the present application, "multiple" means two or more, unless otherwise clearly and specifically defined.

[0026] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, an electrical connection, or mutual communication; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0027] In the present application, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply means that the first feature is lower in level than the second feature.

[0028] refer to Figure 1 A fresh air valve structure includes a valve body 1, a driving device 2 and a reset elastic member 3. The valve body 1 is provided with an air inlet 101 and an air outlet 102, and a valve plug 4 is provided inside the valve body 1; the driving device 2 is arranged on the valve body 1 and connected to the valve plug 4, and is used to drive the valve plug 4 to move relative to the valve body 1 to realize the opening and closing between the valve body 1 and the valve plug 4; the reset elastic member 3 is arranged between the valve plug 4 and the driving device 2, and is used to drive the valve plug 4 and the driving device 2 to reset to a closed state between the valve body 1 and the valve plug 4.

[0029] The generated exhaust gas enters through the air inlet 101 of the fresh air valve structure. Under normal circumstances, the valve plug 4 cooperates with the inner wall of the valve body 1 under the action of the reset elastic member 3 and the driving device 2 to close the fresh air valve structure. When opening, the driving device 2 introduces pressurized gas to drive the valve plug 4 to move toward the contraction side of the driving device 2. At this time, the air outlet 102 is connected with the air inlet 101 to realize the opening of the valve; under normal circumstances, the driving device 2 drives the valve plug 4 to cooperate with the valve body 1 to close the air outlet 102, so that the fresh air valve structure can achieve the effect of a single-drive normally closed valve, avoiding the phenomenon of backflow at the air outlet 102 of the fresh air valve structure causing damage, improving the safety of the fresh air valve structure in small space, internal negative pressure and other environments, and reducing maintenance costs; the sealing effect of the valve when closed is further improved by the reset elastic member 3, reducing the risk of leakage when the fresh air valve is closed. At the same time, the fresh air valve of the present application has a simple structure, a large flow rate, simple maintenance and easy installation.

[0030] The driving device 2 can use a normally pushed single-driven thin cylinder, and the single-driven thin cylinder can add a position switch or quick-insert accessories as needed; the reset elastic member 3 can use a spring, and the valve body 1 can be set to a right-angle T-type structure, or it can be set to any other structure that is easy to apply to various pipelines, so as to improve the adaptability range of the fresh air valve structure.

[0031] refer to Figure 1-3As an optional embodiment, a first conical surface 103 is provided inside the valve body 1, a second conical surface 104 is provided at the air outlet 102, and a valve plug 4 is provided with a valve plug matching surface 401 matching with the second conical surface 104. The first conical surface 103 gradually decreases from the air outlet 102 to the inside of the valve body 1, and the second conical surface 104 gradually decreases from the inside to the outside.

[0032] The first conical surface 103 allows condensed water to flow along the first conical surface 103 to the outside of the valve body 1, preventing condensed water on the outside of the air outlet 102 from flowing back into the valve body 1 and causing damage. The second conical surface 104 cooperates with the valve plug mating surface 401 of the valve plug 4, so that the pressure generated by the reset elastic member 3 and the drive device 2 driving the valve plug 4 to act on the valve body 1 along the axial direction of the drive device 2 can fully act on the second conical surface 104, thereby improving the degree of cooperation and airtightness between the second conical surface 104 and the valve plug mating surface 401.

[0033] As an optional implementation, the valve plug mating surface 401 is provided with a valve plug sealing ring 402 .

[0034] The valve plug sealing ring 402 improves the sealing performance of the valve plug 4 and the valve body 1 when they are closed. At the same time, the second conical surface 104 fully acts on the valve plug sealing ring 402 when cooperating with the valve plug mating surface 401, making the valve plug sealing ring 402 not easy to fall off, thereby further improving the reliability of the sealing.

[0035] refer to Figure 1-3 As an optional embodiment, the driving device 2 includes a cylinder body 21 and a piston rod 22, one end of the piston rod 22 is arranged in the cylinder body 21, and the other end of the piston rod 22 is connected to the valve plug 4, and the reset elastic member 3 is arranged in the circumference of the piston rod 22 and is located between the valve plug 4 and the cylinder body 21.

[0036] As an optional implementation, the piston rod 22 is provided with an adjusting nut 5 , and the adjusting nut 5 is used to adjust the elastic compression amount of the reset elastic member 3 to adjust the pressure of the valve plug 4 acting on the second conical surface 104 .

[0037] The pressure exerted on the second conical surface 104 by the valve plug 4 is adjusted by adjusting the nut 5. When the adjusting nut 5 moves toward the side of the reset elastic member 3, the elastic compression of the reset elastic member 3 increases, thereby enhancing the pressure exerted on the valve body 1 by the valve plug 4; similarly, when the adjusting nut 5 moves away from the reset elastic member 3, the elastic compression of the reset elastic member 3 decreases, and the pressure exerted on the valve body 1 by the valve plug 4 decreases.

[0038] refer to Figure 1-2 As an optional implementation, a pipe joint 6 is provided at the air inlet 101, and a connecting thread is provided inside the pipe joint 6.

[0039] The air inlet 101 of the valve body 1 is connected to the pipeline through the pipeline joint 6 to facilitate air intake.

[0040] The pipe joint 6 can be a pagoda-type hose joint.

[0041] As an optional implementation, a flange 7 is provided at the air outlet 102 for connecting and installing the valve body 1 , and a flange sealing ring 8 is provided between the flange 7 and the valve body 1 .

[0042] The fresh air valve structure is quickly installed at a designated position through the flange 7, which is convenient for installation and removal of the valve body 1, and the flange sealing ring 8 seals between the flange 7 and the valve body 1.

[0043] Flange 7 can be KF flange.

[0044] refer to Figure 3 As an optional embodiment, a long outer support 801 is provided on the outer diameter circumference of the flange sealing ring 8, a short inner support 802 is provided on the inner diameter circumference of the flange sealing ring 8, and a groove 701 matching with the long outer support 801 is provided on the inner wall of the flange 7 to realize the positioning and support of the flange 7. The short inner support 802 fits the valve body 1, and the valve body 1 does not need to be provided with a groove matching with the short inner support 802, thereby improving the strength of the valve body 1.

[0045] refer to Figure 1 As an optional implementation, the valve body 1 is provided with a drive device fixing plate 9, and the drive device 2 is arranged on the valve body 1 through the drive device fixing plate 9.

[0046] The driving device 2 is fixed to the valve body 1 through the driving device fixing plate 9, which is convenient for disassembly and installation of the driving device 2 and the valve body 1. The driving device fixing plate 9 can be fixed to the valve body 1 through threaded connection, and the driving device 2 can be connected to the driving device fixing plate 9 through fixing holes and screws.

[0047] As an optional implementation, O-rings (not shown) are provided between the drive device fixing plate 9 and the valve body 1, and between the drive device 2 and the drive device fixing plate 9. The O-rings further improve the sealing inside the fresh air valve structure to avoid air leakage.

[0048] The present application also provides a waste gas treatment device, which includes the above-mentioned fresh air valve structure.

[0049] The embodiments of the present application are described in detail above. Specific examples are used herein to illustrate the principles and implementation methods of the present application. The description of the above embodiments is only used to help understand the method and its core idea of ​​the present application. At the same time, changes or deformations made by those skilled in the art based on the ideas of the present application, the specific implementation methods and the scope of application of the present application, all belong to the scope of protection of the present application. In summary, the content of this specification should not be construed as a limitation on the present application.

Claims

1. A fresh air valve structure, characterized in that: include: A valve body is provided with an air inlet and an air outlet, and a valve plug is provided inside the valve body; A driving device, disposed on the valve body and connected to the valve plug, for driving the valve plug to move relative to the valve body to achieve opening and closing between the valve body and the valve plug; A resetting elastic member is disposed between the valve plug and the driving device, and is used to drive the valve plug and the driving device to return to a closed state between the valve body and the valve plug.

2. The fresh air valve structure according to claim 1 is characterized in that: The valve body is provided with a first conical surface inside, the air outlet is provided with a second conical surface, and the valve plug is provided with a valve plug matching surface matching with the second conical surface.

3. The fresh air valve structure according to claim 2 is characterized in that: The valve plug mating surface is provided with a valve plug sealing ring.

4. The fresh air valve structure according to claim 2 is characterized in that: The driving device includes a cylinder body and a piston rod, one end of the piston rod is arranged in the cylinder body, the other end of the piston rod is connected to the valve plug, and the reset elastic member is arranged in the circumference of the piston rod and is located between the valve plug and the cylinder body.

5. The fresh air valve structure according to claim 4 is characterized in that: The piston rod is provided with an adjusting nut, and the adjusting nut is used to adjust the elastic compression amount of the reset elastic member to adjust the pressure of the valve plug acting on the second conical surface.

6. The fresh air valve structure according to any one of claims 1 to 5, characterized in that: A pipe joint is provided at the air inlet, and a connecting thread is provided inside the pipe joint.

7. The fresh air valve structure according to any one of claims 1 to 5, characterized in that: A flange is provided at the air outlet for connecting and installing the valve body, and a flange sealing ring is provided between the flange and the valve body.

8. The fresh air valve structure according to claim 7, characterized in that: The outer diameter circumference of the flange sealing ring is circumferentially provided with a long outer support, the inner diameter circumference of the flange sealing ring is circumferentially provided with a short inner support, and the inner wall of the flange is provided with a groove body matched with the long outer support to achieve positioning and support of the flange.

9. The fresh air valve structure according to any one of claims 1 to 5, characterized in that: The valve body is provided with a driving device fixing plate, and the driving device is arranged on the valve body through the driving device fixing plate.

10. The fresh air valve structure according to claim 9, characterized in that: O-type sealing rings are arranged between the driving device fixing plate and the valve body, and between the driving device and the driving device fixing plate.

11. A waste gas treatment device, characterized in that: It comprises the fresh air valve structure described in any one of claims 1-10.

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