Mask plate

Abstract

The utility model relates to the technical field of photoetching, and particularly discloses a mask plate which comprises a glass plate and a film, the glass plate can be arranged on the mask frame; mounting grooves are formed in the glass plates; the film is embedded in the mounting groove, and the film is detachably connected with the glass plate; the film is provided with a graphic area and a non-graphic area, and the non-graphic area is arranged on the periphery of the graphic area in a surrounding mode. According to the utility model, the film can be positioned through the mounting grooves so as to ensure that the position of the film on the glass plate is fixed, so that when the film is replaced so as to overlay a plurality of layers of patterns, a plurality of films can be accurately aligned, and position deviation is not easy to occur, thereby avoiding low manufacturing precision of products, and meanwhile, improving the production efficiency. The non-graphic area of the film is in contact with the groove wall of the mounting groove, and the graphic area of the film is spaced from the groove wall of the mounting groove, so that the influence of the groove wall of the mounting groove on transfer of graphic information of the graphic area is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of photolithography, in particular to a mask plate. Background Art

[0002] The mask is a graphic master used in the photolithography process commonly used in micro-nano processing technology, which is also called a photomask. The mask can transfer the graphic information to the product substrate through the exposure process. Currently, the masks on the market are mainly divided into film masks, chrome masks, dry plates and liquid relief plates. Among them, the price of film masks is relatively low. When making products with low precision requirements, film masks are generally used.

[0003] At present, a film plastic film with patterns is attached to a glass plate by fixing tape to form a film mask. However, the existing film mask can only make a single-layer pattern. When facing multi-layer patterns, due to manual attachment, it is impossible to align different film plastic films when attaching them to the glass plate, which is prone to position deviation, thereby further reducing the product manufacturing accuracy. Utility Model Content

[0004] The purpose of the utility model is to provide a mask plate to solve the problem that the film mask plate in the prior art can only make a single-layer pattern. When facing the superimposed multi-layer patterns, due to manual lamination, it is impossible to align different film plastic films on the glass plate, which is prone to position deviation, thereby further reducing the problem of product manufacturing accuracy.

[0005] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0006] The utility model provides a mask plate, which comprises:

[0007] A glass plate, the glass plate can be arranged on the mask frame; the glass plate is provided with a mounting groove;

[0008] The film film is embedded in the installation groove and is detachably connected to the glass plate; the film film has a graphic area and a non-graphic area, and the non-graphic area is surrounded by the periphery of the graphic area.

[0009] As an optional solution for the mask, the film includes a graphic layer and an electrostatic adsorption layer connected to each other, and the electrostatic adsorption layer is arranged on a side close to the bottom of the mounting groove for adsorbing the bottom of the mounting groove.

[0010] As an optional solution for the mask plate, the film is an electrostatic adsorption film, and the film can be adsorbed on the bottom of the mounting groove.

[0011] As an optional solution of the above-mentioned mask, the above-mentioned mask further includes a shaping frame, and the above-mentioned shaping frame is arranged around the outer periphery of the above-mentioned film film to fix the shape of the above-mentioned film film.

[0012] As an optional solution for the above-mentioned mask, the above-mentioned shaping frame is arranged in the above-mentioned non-graphic area.

[0013] As an optional solution for the above-mentioned mask, the above-mentioned shaping frame is arranged on a side away from the bottom of the above-mentioned installation groove.

[0014] As an optional solution for the mask plate, the glass plate is further provided with a side groove, the side groove and the mounting groove are located on the same side of the glass plate, and one end of the side groove is connected to the mounting groove.

[0015] As an optional solution for the mask, a surface of the film facing away from the bottom of the mounting groove is coplanar with the outer surface of the glass plate.

[0016] As an optional solution for the mask plate, the mounting groove is arranged at a middle position of the glass plate.

[0017] As an optional solution for the above-mentioned mask plate, the above-mentioned mounting groove and the above-mentioned film are both rectangular structures.

[0018] The beneficial effects of the utility model are:

[0019] The mask plate includes a glass plate and a film. The glass plate is provided with a mounting groove, and the film is embedded in the mounting groove, and the film is detachably connected to the glass plate, so that the film can be positioned through the mounting groove to ensure that the film is fixed on the glass plate. When the film is replaced to superimpose multiple layers of graphics, the multiple film films can be accurately aligned and are not prone to positional deviation, thereby avoiding low product manufacturing precision, wherein the glass plate can be set on the mask frame to facilitate exposure. At the same time, the film has a graphic area and a non-graphic area, and the non-graphic area is surrounded by the periphery of the graphic area, so that the non-graphic area of ​​the film contacts the groove wall of the mounting groove, and the graphic area of ​​the film is spaced from the groove wall of the mounting groove, thereby avoiding the groove wall of the mounting groove from affecting the transfer of graphic information in the graphic area. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 The structure of the mask provided by the embodiment of the utility model is schematically shown Figure 1 ;

[0021] Figure 2 The structure of the mask provided by the embodiment of the utility model is schematically shown Figure 2 ;

[0022] Figure 3A bottom view of the mask provided by an embodiment of the utility model.

[0023] In the figure:

[0024] 1. Glass plate; 11. Mounting groove; 12. Side groove; 2. Film; 21. Graphic area; 22. Non-graphic area; 3. Shape frame. DETAILED DESCRIPTION

[0025] The technical solution of the utility model will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0026] In the description of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance. Among them, the terms "first position" and "second position" are two different positions, and the first feature "above", "above" and "above" the second feature include the first feature being directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. The first feature "below", "below" and "below" the second feature include the first feature being directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0027] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0028] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0029] This embodiment provides a mask plate for transferring pattern information to a product substrate during an exposure process.

[0030] like Figure 1 to Figure 3 As shown, the mask plate includes a glass plate 1 and a film 2. The glass plate 1 is provided with a mounting groove 11, and the film 2 is embedded in the mounting groove 11, and the film 2 is detachably connected to the glass plate 1, so that the film 2 can be positioned through the mounting groove 11 to ensure that the position of the film 2 on the glass plate 1 is fixed, and then when the film 2 is replaced to superimpose multiple layers of graphics, the multiple film films 2 can be accurately aligned and are not prone to position deviation, thereby avoiding low product manufacturing precision, wherein the glass plate 1 can be set on the mask frame to facilitate exposure. Optionally, the mounting groove 11 is set at the middle position of the glass plate 1, so that it is convenient to install the glass plate 1 on the mask frame, and avoid the mask frame from blocking the film 2. Further optionally, the mounting groove 11 and the film 2 are both rectangular structures, so as to facilitate the production of the glass plate 1 and the film 2, and avoid the deflection of the film 2 when it is installed in the mounting groove 11.

[0031] At the same time, the film 2 has a graphic area 21 and a non-graphic area 22, and the non-graphic area 22 is arranged around the periphery of the graphic area 21, so that the non-graphic area 22 of the film 2 contacts the groove wall of the mounting groove 11, and the graphic area 21 of the film 2 is spaced from the groove wall of the mounting groove 11, thereby preventing the groove wall of the mounting groove 11 from affecting the transfer of graphic information of the graphic area 21. Optionally, the side of the film 2 facing away from the groove bottom of the mounting groove 11 is coplanar with the outer surface of the glass plate 1, so that the exposure machine is more accurate in measuring the data of the gap analysis.

[0032] In one embodiment, the film 2 includes a graphic layer and an electrostatic adsorption layer connected to each other. The electrostatic adsorption layer is arranged on one side close to the bottom of the mounting groove 11, and is used to adsorb the bottom of the mounting groove 11. Thus, by using the electrostatic adsorption layer, the use of fixing tape is saved. At the same time, the entire plane of the electrostatic adsorption layer can be attached to the bottom of the mounting groove 11, thereby preventing the film 2 from sagging and deforming when the mask is suspended, thereby affecting the manufacturing accuracy of the product. In another embodiment, the film 2 is an electrostatic adsorption film, and the film 2 can be adsorbed on the bottom of the mounting groove 11. Thus, by using a film 2 having an electrostatic adsorption property, it is possible to ensure that the entire plane of the film 2 is attached to the bottom of the mounting groove 11, thereby preventing the film 2 from sagging and deforming when the mask is suspended, thereby affecting the manufacturing accuracy of the product.

[0033] Furthermore, the mask plate also includes a shaping frame 3, which is arranged around the periphery of the film 2 and is used to fix the shape of the film 2, so as to prevent the mask plate from wrinkling when installed in the installation groove 11 and causing position deviation, thereby affecting the manufacturing accuracy of the product. Specifically, the shaping frame 3 is arranged in the non-graphic area 22 to prevent the shaping frame 3 from blocking the graphic area 21 of the film 2. At the same time, the shaping frame 3 is arranged on the side away from the bottom of the installation groove 11 to prevent the shaping frame 3 from affecting the installation of the film 2 in the installation groove 11.

[0034] Furthermore, the glass plate 1 is also provided with a side groove 12, which is located on the same side of the glass plate 1 as the mounting groove 11, and one end of the side groove 12 is connected to the mounting groove 11, so that when replacing the film 2, the side groove 12 can facilitate the disassembly of the film 2 and reduce the difficulty of removing the film 2.

[0035] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation methods of the present invention. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all implementation methods here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention shall be included in the protection scope of the claims of the present invention.

Claims

1. A mask, characterized in that: include: A glass plate (1), wherein the glass plate (1) can be arranged on a mask frame; the glass plate (1) is provided with a mounting groove (11); A film film (2), wherein the film film (2) is embedded in the mounting groove (11), and the film film (2) is detachably connected to the glass plate (1); the film film (2) has a graphic area (21) and a non-graphic area (22), and the non-graphic area (22) is arranged around the periphery of the graphic area (21).

2. The mask according to claim 1, characterized in that: The film (2) comprises a graphic layer and an electrostatic adsorption layer which are connected to each other. The electrostatic adsorption layer is arranged on a side close to the bottom of the installation groove (11) and is used to adsorb the bottom of the installation groove (11).

3. The mask according to claim 1, characterized in that: The film (2) is an electrostatic adsorption film, and the film (2) can be adsorbed on the bottom of the installation groove (11).

4. The mask according to claim 1, characterized in that: The mask plate also includes a shaping frame (3), which is arranged around the outer periphery of the film (2) and is used to fix the outer shape of the film (2).

5. The mask according to claim 4, characterized in that: The shaping frame (3) is arranged in the non-graphic area (22).

6. The mask according to claim 4, characterized in that: The shaping frame (3) is arranged on a side away from the bottom of the installation groove (11).

7. The mask according to claim 1, characterized in that: The glass plate (1) is further provided with a side groove (12), the side groove (12) and the mounting groove (11) are located on the same side of the glass plate (1), and one end of the side groove (12) is connected to the mounting groove (11).

8. The mask according to any one of claims 1 to 7, characterized in that: The surface of the film (2) facing away from the bottom of the installation groove (11) is arranged coplanar with the outer surface of the glass plate (1).

9. The mask according to any one of claims 1 to 7, characterized in that: The mounting groove (11) is arranged at a middle position of the glass plate (1).

10. The mask according to any one of claims 1 to 7, characterized in that: The installation groove (11) and the film (2) are both rectangular structures.

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