Developing machine for chip production

Abstract

The utility model provides a developing machine for chip production, which relates to the technical field of chip production equipment and comprises a developing machine main body, a fixing plate arranged at the bottom of the developing machine main body, a connecting base connected to the bottom of the fixing plate through bolts, a limiting box arranged at the bottom of the connecting base, and support box bodies arranged on two sides of the limiting box; the adjusting assembly is arranged between the two bracket box bodies and is used for horizontally adjusting the developing machine main body; and the positioning assembly is arranged between the bracket box body and the limiting box and is used for improving the stability of the developing machine main body. According to the chip developing machine, through the arrangement of the adjusting assembly, the developing device can be kept in a strict horizontal state, so that clear and accurate circuit patterns are obtained, and through the arrangement of the positioning assembly, the stability of connection between the developing machine main body and the mounting plate can be ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of chip production equipment, in particular to a developing machine for chip production. Background Art

[0002] The chip developing device is a key equipment in the semiconductor chip manufacturing process. It is used to remove the unexposed or underexposed parts of the photoresist layer on the chip surface by chemical means after the photolithography process, thereby developing the circuit pattern produced in the photolithography step. With the advancement of semiconductor industry technology and changes in wafer size, the scale of developing equipment is also expanding. Generally speaking, for wafers of different diameters, the size of the developing device, such as the developing equipment for processing 4-inch or 6-inch wafers, may have an area ranging from a few square meters to more than ten square meters, and the height will also vary according to the internal structure of the equipment and the number of layers.

[0003] Currently, in the chip production process, chip development and fixing are all done manually. However, with the globalization of market competition, the continuous shortening of development cycles, and the rapid expansion of demand for semiconductor components, manual operations not only take a long time to cause fatigue and poor consistency, resulting in a low chip production rate, but also chips are prone to missing during manual operations, resulting in a high defective rate.

[0004] In response to the above problems, China's publication number is: CN204989752U "A chip developing and fixing device". Through the arrangement of a disc, a chip carrying bar, a magnetic ring cylinder, a developing and fixing cylinder and a servo motor, it can replace the original manual operation with semi-automatic mechanical production, solving the problems of fatigue caused by long manual operation time and poor operation consistency, and significantly improving the chip production rate. However, this type of developer still has certain defects when in use. For example, when this type of developer is in use, if the ground on which the developer is placed is uneven, the developer is tilted, and the developer in the cavity may not be evenly distributed on the wafer surface, resulting in uneven development. The circuit pattern after development may have problems such as blurred edges and distorted lines, affecting the yield and performance of the chip. Utility Model Content

[0005] The utility model aims to solve the shortcomings existing in the background technology and provides a developer for chip production. To solve the above problems, by adjusting the setting of the components, it can ensure that the developing device maintains a strict horizontal state, so as to obtain a clear and accurate circuit pattern, and by the setting of the positioning components, it can ensure the stability of the connection between the developer body and the mounting plate.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a developer for chip production, comprising: a developer main body, a fixing plate is provided at the bottom of the developer main body, a connecting base is connected to the bottom of the fixing plate by bolts, a limit box is provided at the bottom of the connecting base, support boxes are provided on both sides of the limit box, an adjustment component is provided between the two support boxes, which is used for horizontal adjustment of the developer main body, and a positioning component is provided between the support box and the limit box, which is used to improve the stability of the developer main body.

[0007] Furthermore, the adjustment component includes: an equipment cavity opened inside the two bracket boxes, two electric telescopic rods are provided inside the two equipment cavities; a mounting plate is arranged between the two bracket boxes, the bottom of the limit box is connected to the mounting plate by bolts, a lifting groove is opened on one side of the two bracket boxes, a plurality of horizontal frames are arranged on the top of the limit box, the connecting base is located inside the limit box, a plurality of bubble levels are provided on the top of the horizontal frames, a plurality of telescopic rods a are arranged at the bottom of the mounting plate, a plurality of fixing cylinders are provided on the top of the fixed plate, and a connecting cover is provided at the bottom of the plurality of telescopic rods a.

[0008] Furthermore, external threads are provided on the outer sides of the plurality of telescopic rods a, and internal threads matching with the external threads on the outer sides of the telescopic rods a are respectively provided on the inner sides of the plurality of connecting covers.

[0009] Furthermore, a lifting cavity is provided inside each of the telescopic rods a, a telescopic rod b is provided inside each of the lifting cavities, one end of each of the telescopic rods b protrudes from the bottom of the lifting cavity, an external thread is provided on the outside of each of the telescopic rods b, a through hole is provided on the bottom of each of the connecting covers, and an internal thread matching the external thread on the outside of the telescopic rod b is provided inside each of the through holes.

[0010] Furthermore, both ends of the mounting plate extend into the two equipment cavities and are connected to the top of the electric telescopic rod through a universal joint.

[0011] Furthermore, the positioning assembly includes: limit slots opened on both sides of the inner wall of the limit box, two equipment cavities opened inside the connecting base, electric push rods are provided inside the two equipment cavities, and one end of the two electric push rods respectively extends into the limit slots and is fixedly connected to the limit blocks.

[0012] Furthermore, a positioning groove is provided at the bottom of the inner wall of the limiting box, a limiting strip is provided at the bottom of the connecting base, and the limiting strip is located inside the positioning groove.

[0013] The utility model provides a developing machine for chip production, which has the following beneficial effects:

[0014] The utility model has the advantages that, by adjusting the setting of the components, it is possible to ensure that the developing device maintains a strict horizontal state, ensure that the developing liquid is evenly distributed on the surface of the wafer, and ensure the uniformity and consistency of the developing process, thereby obtaining a clear and accurate circuit pattern;

[0015] Secondly, by setting the positioning component, the stability of the connection between the developer body and the mounting plate can be ensured, thereby fixing the chip developer body, ensuring its stability during operation, and preventing the developer body from tipping over or shifting. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the overall structure of the utility model.

[0017] Figure 2 It is a sectional view of the overall structure of the utility model.

[0018] Figure 3 It is a cross-sectional view of the limit box structure of the utility model.

[0019] Figure 4 It is a cross-sectional schematic diagram of the telescopic rod a structure of the utility model.

[0020] Figure 5 This is a schematic diagram of the mounting plate structure of the utility model.

[0021] Figure 6 For the utility model Figure 2 Enlarged view of point A in .

[0022] Figure 7 For the utility model Figure 2 Enlarged view of point B in .

[0023] Figure 1-7 In: 1. Developing machine body; 101. Fixing cylinder; 102. Fixing plate; 2. Bracket box; 201. Equipment cavity; 202. Lifting slot; 203. Electric telescopic rod; 204. Mounting plate; 3. Telescopic rod a; 301. Lifting cavity; 4. Connecting cover; 401. Perforation; 402. Telescopic rod b; 5. Horizontal frame; 501. Bubble level; 6. Limit box; 601. Positioning slot; 602. Limit strip; 603. Equipment cavity; 604. Electric push rod; 605. Limit block; 606. Limit slot hole; 607. Connecting base. DETAILED DESCRIPTION

[0024] The technical solutions in the embodiments of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present application.

[0025] The disclosure below provides many different embodiments or examples to realize the different structures of the present application. In order to simplify the disclosure of the present application, the parts and settings of specific examples are described below. Of course, they are only examples, and the purpose is not to limit the present application. In addition, the present application can repeat reference numbers and / or reference letters in different examples, and this repetition is for the purpose of simplification and clarity, which itself does not indicate the relationship between the various embodiments and / or settings discussed. In addition, the various specific processes and material examples provided by the present application, but those of ordinary skill in the art can appreciate the application of other processes and / or the use of other materials.

[0026] The embodiment of the present application provides a developer for chip production, which can ensure that the developer device is kept in a strictly horizontal state by adjusting the setting of the components, thereby obtaining a clear and accurate circuit pattern, and can ensure the stability of the connection between the developer body and the mounting plate by setting the positioning components. The developer for chip production is described in detail below. It should be noted that the description order of the following embodiments is not intended to limit the preferred order of the embodiments.

[0027] The present application is described in detail below with reference to the accompanying drawings and specific implementation methods.

[0028] Example 1

[0029] See also Figure 1-7 In the embodiment, a developer for chip production is provided, comprising: a developer main body 1, a fixing plate 102 is provided at the bottom of the developer main body 1, a connecting base 607 is connected to the bottom of the fixing plate 102 by bolts, a limit box 6 is provided at the bottom of the connecting base 607, and support boxes 2 are provided on both sides of the limit box 6; an adjusting component provided between the two support boxes 2, which is used for horizontal adjustment of the developer main body 1; and a positioning component provided between the support box 2 and the limit box 6, which is used to improve the stability of the developer main body 1.

[0030] Among them, by adjusting the setting of the components, it is possible to ensure that the developing device maintains a strict horizontal state, ensure that the developer is evenly distributed on the wafer surface, and ensure the uniformity and consistency of the developing process, so as to obtain a clear and accurate circuit pattern;

[0031] Secondly, by setting the positioning assembly, the stability of the connection between the developer body 1 and the mounting plate 204 can be ensured, thereby fixing the developer body, ensuring its stability during operation, and preventing the developer body 1 from tipping over or shifting.

[0032] Example 2

[0033] On the basis of Example 1, the adjustment component includes: an equipment cavity 201 opened inside the two support boxes 2, two electric telescopic rods 203 are arranged inside the two equipment cavities 201; a mounting plate 204 is arranged between the two support boxes 2, the bottom of the limit box 6 is connected to the mounting plate 204 by bolts, and one side of the two support boxes 2 is provided with a lifting groove 202; a plurality of horizontal frames 5 are arranged on the top of the limit box 6, the connecting base 607 is located inside the limit box 6, and the tops of the plurality of horizontal frames 5 are provided with bubble levels 501; a plurality of telescopic rods a3 are arranged at the bottom of the mounting plate 204, a plurality of fixing cylinders 101 are arranged on the top of the fixing plate 102, and a plurality of telescopic rods a3 are arranged at the bottom There is a connecting cover 4; multiple telescopic rods a3 are provided with external threads on the outside, and multiple connecting covers 4 are respectively provided with internal threads matching the external threads on the outside of the telescopic rod a3; multiple telescopic rods a3 are provided with lifting chambers 301, multiple lifting chambers 301 are provided with telescopic rods b402, one end of multiple telescopic rods b402 protrudes from the bottom of the lifting chamber 301, multiple telescopic rods b402 are provided with external threads on the outside, multiple connecting covers 4 are provided with through holes 401 at the bottom, and multiple through holes 401 are provided with internal threads matching the external threads on the outside of the telescopic rod b402; both ends of the mounting plate 204 extend into the two equipment chambers 201, and are connected to the top of the electric telescopic rod 203 through a universal joint.

[0034] When the levelness of the device needs to be adjusted, the user can observe whether the bubble position on the bubble level 501 is located in the middle. If the bubble is not in the middle of the bubble level 501, the multiple electric telescopic rods 203 at the bottom of the mounting plate 204 can be controlled to extend and retract one by one to adjust the positions of the four corners of the mounting plate 204. When the bubble on the bubble level 501 is in the middle of the bubble level 501, the electric telescopic rod 203 is closed, and then the multiple connection covers 4 at the bottom of the mounting plate 204 are controlled to be twisted to move the connection covers 4 downward along the telescopic rod b402, so that the connection covers 4 are separated from the telescopic rod a3. At this time, the telescopic rod b402 is pulled downward. 2, until the bottom of the telescopic rod b402 contacts the ground, so that the mounting plate 204 and the developer body 1 are supported by the telescopic rod a3 and the telescopic rod b402, to prevent the mounting plate 204 from being unable to bear the weight of the developer body 1, resulting in bending or breaking of the mounting plate 204, and then the connecting cover 4 is rotated upward to connect the connecting cover 4 and the telescopic rod a3 to each other. At this time, the connecting base 607 can be placed in the limit box 6, the limit bar 602 is stuck in the positioning groove 601, and the developer body 1 is fixed by the electric push rod 604 and the limit block 605 to complete the horizontal adjustment of the developer body 1.

[0035] Example 3

[0036] On the basis of Example 1, the positioning component includes: limiting slots 606 opened on both sides of the inner wall of the limiting box 6; two equipment cavities 603 opened inside the connecting base 607, and electric push rods 604 are provided inside the two equipment cavities 603, and one end of the two electric push rods 604 respectively extends into the limiting slots 606 and is fixedly connected to the limiting block 605; a positioning slot 601 is opened at the bottom of the inner wall of the limiting box 6, and a limiting strip 602 is provided at the bottom of the connecting base 607, and the limiting strip 602 is located inside the positioning slot 601.

[0037] After leveling the mounting plate 204 by means of the electric telescopic rod 203 and the bubble level 501, the user can lock the limit box 6 to the top of the mounting plate 204 by means of bolts, and then lock the fixing plate 102 at the bottom of the developer body 1 to the top of the connecting base 607 by means of bolts. At this time, the connecting base 607 is positioned by means of the limit strip 602 at the bottom of the fixing plate 102, and then the electric push rod 604 is controlled to extend, thereby inserting the limit block 605 into the limit slot 606 to limit the developer body 1, thereby completing the fixation of the developer body 1.

[0038] Furthermore, the model of the electric telescopic rod 203 may be LAP32, which adopts a transmission system with a self-locking thread or a ratchet and pawl mechanism. After the electric telescopic rod 203 is extended into place, even if the power is cut off, the internal mechanical locking device will prevent the telescopic rod from retracting, thereby maintaining the extended position, thereby maintaining the position of the developer body 1, and the electric telescopic rod 203 with a self-locking thread or a ratchet and pawl mechanism transmission system is a prior art, and therefore will not be described in detail.

[0039] In addition, a control panel is provided on one side of the support housing 2, and the control panel can control the start and stop of the developer body 1, the electric telescopic rod 203 and the electric push rod 604, and the electric energy of the developer is provided by an external power supply.

[0040] The control program involved in the present utility model can be implemented by those skilled in the art according to the same or similar principles in the prior art, and this part is not the innovation of the present utility model.

[0041] In the above embodiments, the description of each embodiment has its own emphasis. For parts that are not described in detail in a certain embodiment, reference can be made to the relevant descriptions of other embodiments.

[0042] The above is a detailed introduction to a chip production developer provided in an embodiment of the present application. Specific examples are used herein to illustrate the principles and implementation methods of the present application. The description of the above embodiments is only used to help understand the technical solution and core idea of ​​the present application. Ordinary technicians in this field should understand that they can still modify the technical solutions recorded in the aforementioned embodiments, or replace some of the technical features therein with equivalents. These modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A developer for chip production, characterized in that: include: A developing machine body (1), wherein a fixing plate (102) is provided at the bottom of the developing machine body (1), a connecting base (607) is connected to the bottom of the fixing plate (102) by bolts, a limiting box (6) is provided at the bottom of the connecting base (607), and bracket boxes (2) are provided on both sides of the limiting box (6); An adjustment component disposed between the two support housings (2) and used for adjusting the level of the developer main body (1); and A positioning component arranged between the support housing (2) and the limit box (6) is used to improve the stability of the developing machine main body (1).

2. The chip production developing machine according to claim 1, characterized in that: The adjustment component comprises: An equipment cavity (201) is opened inside the two support boxes (2), and two electric telescopic rods (203) are arranged inside the two equipment cavities (201); A mounting plate (204) is arranged between the two support boxes (2), the bottom of the limit box (6) is connected to the mounting plate (204) by bolts, and one side of the two support boxes (2) is provided with a lifting groove (202); A plurality of horizontal frames (5) are arranged on the top of the limit box (6), the connecting base (607) is located inside the limit box (6), and a bubble level (501) is arranged on the top of each of the plurality of horizontal frames (5); A plurality of telescopic rods a (3) are arranged at the bottom of the mounting plate (204), a plurality of fixing cylinders (101) are arranged at the top of the fixing plate (102), and a connection cover (4) is arranged at the bottom of each of the plurality of telescopic rods a (3).

3. The chip production developing machine according to claim 2, characterized in that: The outer sides of the plurality of telescopic rods a (3) are provided with external threads, and the inner sides of the plurality of connecting covers (4) are respectively provided with internal threads matching with the external threads on the outer sides of the telescopic rods a (3).

4. The chip production developing machine according to claim 2, characterized in that: A lifting cavity (301) is provided inside each of the telescopic rods a (3), a telescopic rod b (402) is provided inside each of the telescopic rods b (402), one end of each of the telescopic rods b (402) protrudes from the bottom of the lifting cavity (301), an external thread is provided on the outside of each of the telescopic rods b (402), a through hole (401) is provided on the bottom of each of the connecting covers (4), and an internal thread matching the external thread on the outside of the telescopic rod b (402) is provided inside each of the through holes (401).

5. The chip production developing machine according to claim 2, characterized in that: Both ends of the mounting plate (204) extend into the interior of the two equipment cavities (201) and are connected to the top of the electric telescopic rod (203) via a universal joint.

6. The chip production developing machine according to claim 1, characterized in that: The positioning component comprises: Limiting slots (606) are provided on both sides of the inner wall of the limiting box (6); Two equipment cavities (603) are provided inside the connection base (607), and electric push rods (604) are provided inside the two equipment cavities (603). One end of the two electric push rods (604) respectively extends into the limiting slot hole (606) and is fixedly connected to the limiting block (605).

7. The chip production developing machine according to claim 1, characterized in that: A positioning groove (601) is provided at the bottom of the inner wall of the limiting box (6), a limiting strip (602) is provided at the bottom of the connecting base (607), and the limiting strip (602) is located inside the positioning groove (601).

Images