Flower basket with rotating structure

Abstract

The utility model relates to the technical field of semiconductors, and discloses a flower basket with a rotating structure, which comprises a first support plate and a second support plate, a plurality of connecting rods are arranged between the first support plate and the second support plate, a plurality of fixing grooves are arranged on one side of each connecting rod, and the fixing grooves are arranged on the other side of each connecting rod. A plurality of sliding grooves are formed in the opposite sides of the first supporting plate and the second supporting plate, threaded rods are rotationally connected into the sliding grooves, the outer surfaces of the threaded rods are in threaded connection with the connecting rods, and one ends of the threaded rods extend to the outer sides of the first supporting plate and the second supporting plate and are fixedly connected with rotating discs. According to the silicon wafer cleaning device, by arranging the sliding groove, the threaded rod and the rotating disc, silicon wafers of different sizes can be placed on the device, the application range of the device is widened, the silicon wafers of various sizes can be cleaned, and the cleaning cost is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a flower basket with a rotating structure. Background Art

[0002] In the semiconductor device manufacturing industry, silicon wafer surfaces require cleaning to remove contaminants such as particles, metal ions, and organic matter. Using a cleaning basket to place the wafers during cleaning not only reduces the risk of corrosive chemicals, but also improves cleaning efficiency by allowing the slots in the basket to separate the wafers evenly and prevent them from sticking together.

[0003] The existing cleaning basket can only fix silicon wafers of one specification. When the sizes of silicon wafers to be cleaned are different, it is necessary to add cleaning baskets of corresponding sizes, which increases the cleaning cost. Utility Model Content

[0004] The purpose of the present utility model is to provide a flower basket with a rotating structure to solve the problems raised in the above background technology.

[0005] To achieve the above-mentioned purpose, the present invention provides the following technical solution: a flower basket with a rotating structure, comprising a first support plate and a second support plate, a plurality of connecting rods are arranged between the first support plate and the second support plate, a plurality of fixing grooves are arranged on one side of the connecting rod, a plurality of sliding grooves are opened on the opposite sides of the first support plate and the second support plate, a threaded rod is rotatably connected to the interior of the sliding groove, the outer surface of the threaded rod is threadedly connected to the connecting rod, and one end of the threaded rod extends to the outside of the first support plate and the second support plate and is fixedly connected to a turntable.

[0006] The following improvement is made in the solution of the present application: a motor is provided on one side of the first support plate, an output end of the motor is connected to a rotating shaft via a coupling, and the other end of the rotating shaft is fixedly connected to one side of the first support plate.

[0007] The following improvement is made in the solution of the present application: a first support seat is provided on one side of the first support plate, a first connecting hole is opened through one side of the first support seat, and the rotating shaft is rotatably connected inside the first connecting hole.

[0008] The following improvements are made in the present application: a second support seat is provided on one side of the second support plate, a second connecting hole is opened through one side of the second support seat, a rotating rod is rotatably connected inside the second connecting hole, and one end of the rotating rod is fixedly connected to one side of the second support plate.

[0009] The following improvement is made in the solution of the present application: a silicon wafer is placed inside the fixing groove, and the width of the silicon wafer is slightly smaller than the width of the fixing groove.

[0010] Compared with the prior art, the present invention provides a flower basket with a rotating structure, which has the following beneficial effects:

[0011] The flower basket with a rotating structure is provided with a slide groove, a threaded rod and a turntable. When silicon wafers of different sizes need to be cleaned, the turntable is rotated, and the turntable drives the threaded rod to rotate, and the threaded rod drives the connecting rod to move, thereby changing the distance between the four connecting rods, so that the device can place silicon wafers of different sizes, thereby improving the applicability of the device, being able to clean silicon wafers of various sizes, and reducing the cleaning cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for describing the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without inventive work.

[0013] Figure 1 This is a three-dimensional diagram of the external structure of the utility model;

[0014] Figure 2 This is a schematic diagram of the external structure of the utility model from another perspective.

[0015] In the figure, 1 is the first support plate; 2 is the second support plate; 3 is the connecting rod; 4 is the fixing groove; 5 is the sliding groove; 6 is the threaded rod; 7 is the turntable; 8 is the motor; 9 is the rotating shaft; 10 is the first support seat; 11 is the first connecting hole; 12 is the second support seat; 13 is the second connecting hole; 14 is the rotating rod; 15 is the silicon wafer. DETAILED DESCRIPTION

[0016] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0017] In this utility model, unless otherwise specified or limited, the terms "installed," "connected," "connect," "fixed," etc. should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection, electrical connection; direct connection, indirect connection through an intermediate medium, internal communication between two components, or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on specific circumstances.

[0018] Example

[0019] like Figure 1-2 As shown, a flower basket with a rotating structure includes a first support plate 1 and a second support plate 2, a plurality of connecting rods 3 are arranged between the first support plate 1 and the second support plate 2, a plurality of fixing grooves 4 are arranged on one side of the connecting rod 3, a silicon wafer 15 is placed inside the fixing groove 4, and the width of the silicon wafer 15 is slightly smaller than the width of the fixing groove 4; a plurality of sliding grooves 5 are opened on the opposite sides of the first support plate 1 and the second support plate 2, the interior of the sliding groove 5 is rotatably connected with a threaded rod 6, the outer surface of the threaded rod 6 is threadedly connected to the connecting rod 3, one end of the threaded rod 6 extends to the outside of the first support plate 1 and the second support plate 2 and is fixedly connected to a turntable 7. When silicon wafers 15 of different sizes need to be cleaned, the turntable 7 is rotated, the turntable 7 drives the threaded rod 6 to rotate, and the threaded rod 6 drives the connecting rod 3 to move, thereby changing the distance between the four connecting rods 3, so that the device can place silicon wafers 15 of different sizes, thereby improving the applicability of the device, being able to clean silicon wafers 15 of various sizes, and reducing the cleaning cost.

[0020] A motor 8 is provided on one side of the first support plate 1. The output end of the motor 8 is connected to a rotating shaft 9 through a coupling. The other end of the rotating shaft 9 is fixedly connected to one side of the first support plate 1. When the motor 8 is started, the motor 8 drives the first support plate 1 to rotate through the rotating shaft 9, so that the flower basket can drive the silicon wafer 15 inside to rotate, thereby improving the cleaning effect.

[0021] A first support base 10 is provided on one side of the first support plate 1 . A first connecting hole 11 is formed through one side of the first support base 10 . A rotating shaft 9 is rotatably connected to the interior of the first connecting hole 11 .

[0022] A second support seat 12 is provided on one side of the second support plate 2 , and a second connecting hole 13 is opened through one side of the second support seat 12 . A rotating rod 14 is rotatably connected inside the second connecting hole 13 , and one end of the rotating rod 14 is fixedly connected to one side of the second support plate 2 .

Claims

1. A flower basket with a rotating structure, comprising a first support plate (1) and a second support plate (2), characterized in that: A plurality of connecting rods (3) are arranged between the first support plate (1) and the second support plate (2), a plurality of fixing grooves (4) are arranged on one side of the connecting rods (3), a plurality of sliding grooves (5) are arranged on opposite sides of the first support plate (1) and the second support plate (2), a threaded rod (6) is rotatably connected inside the sliding groove (5), the connecting rod (3) is threadedly connected to the outer surface of the threaded rod (6), and one end of the threaded rod (6) extends to the outer side of the first support plate (1) and the second support plate (2) and is fixedly connected to a rotating disk (7).

2. The flower basket with a rotating structure according to claim 1, characterized in that: A motor (8) is provided on one side of the first support plate (1); an output end of the motor (8) is connected to a rotating shaft (9) via a coupling; the other end of the rotating shaft (9) is fixedly connected to one side of the first support plate (1).

3. The flower basket with a rotating structure according to claim 2, characterized in that: A first support seat (10) is provided on one side of the first support plate (1), a first connection hole (11) is penetrated through one side of the first support seat (10), and the rotating shaft (9) is rotatably connected inside the first connection hole (11).

4. The flower basket with a rotating structure according to claim 1, characterized in that: A second support seat (12) is provided on one side of the second support plate (2), a second connection hole (13) is penetrated through one side of the second support seat (12), a rotating rod (14) is rotatably connected inside the second connection hole (13), and one end of the rotating rod (14) is fixedly connected to one side of the second support plate (2).

5. The flower basket with a rotating structure according to claim 1, characterized in that: A silicon wafer (15) is placed inside the fixing groove (4), and the width of the silicon wafer (15) is slightly smaller than the width of the fixing groove (4).

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