Adhesive soft felt for heat shield of single crystal furnace

Abstract

The utility model discloses an adhesive soft felt for a heat shield of a single crystal furnace, which particularly relates to the technical field of monocrystalline silicon production and comprises a carbon-carbon support ring, a quartz ring is arranged at the top of the carbon-carbon support ring, and the adhesive soft felt is arranged between the carbon-carbon support ring and the quartz ring. The carbon-carbon supporting ring and the adhesive soft felt are movably clamped, connecting clamping grooves are formed in the surfaces of the two sides of the bottom of the inner wall of the carbon-carbon supporting ring in a penetrating mode, and connecting clamping blocks are fixedly connected to the two sides of the bottom of the adhesive soft felt. The carbon-carbon supporting ring and the adhesive soft felt are arranged, the soft felt is high in heat preservation performance, capable of effectively reducing temperature loss and playing a role in reducing power consumption and good in oxidation resistance, the soft felt is adopted for replacing a solidified felt, and therefore the whole body is soft, elastic, capable of being folded and cut at will, high in tensile force, not prone to damage, soft, elastic and not prone to damage. And the carbon-carbon supporting ring and the adhesive soft felt are matched, so that the cost performance is higher, and the service life is longer.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal silicon production, and more specifically to an adhesive soft felt used for a single crystal furnace heat shield. Background Art

[0002] At present, the heat shield in the thermal field of the single crystal furnace for producing single crystal silicon rods has an inner heat shield layer and an outer heat shield layer, and an insulation layer is arranged between the inner heat shield layer and the outer heat shield layer. The material of the insulation layer is soft felt, and the insulation material used above the heat shield is solidified felt, and quartz rings are placed on the solidified felt.

[0003] After searching, a Chinese patent with publication number CN216683589U discloses a carbon fiber thermal insulation curing felt. In view of the poor elasticity and flame retardancy of the existing carbon fiber thermal insulation curing felt, and the problem that the surface of the carbon fiber thermal insulation curing felt becomes dirty after being used for a period of time and needs to be dismantled and replaced as a whole, which causes waste, the elasticity and flame retardancy of the carbon fiber thermal insulation curing felt can be improved through structural design, and the effect of absorbing harmful substances can be achieved. At the same time, after the carbon fiber thermal insulation curing felt has been used for a period of time, the first external adhesive protective layer and the second external adhesive protective layer provided on the outer layer can be dismantled and replaced, thereby avoiding the problem that the surface of the carbon fiber thermal insulation curing felt becomes dirty and needs to be dismantled and replaced as a whole, which causes waste.

[0004] However, during its use, the elasticity of the curing felt is average, and its rigidity can easily cause the curing felt to be damaged and delaminated. When it is subjected to external impact, or when it needs to be folded or cut, the curing felt can easily be damaged. Utility Model Content

[0005] In order to overcome the problems and defects in the prior art, the utility model provides an adhesive soft felt used for a single crystal furnace heat shield to solve the problems raised in the above background technology.

[0006] To achieve the above object, the utility model provides the following technical solution: an adhesive soft felt used in a single crystal furnace heat shield, comprising a carbon-carbon support ring, a quartz ring is arranged on the top of the carbon-carbon support ring, and an adhesive soft felt is arranged between the carbon-carbon support ring and the quartz ring;

[0007] The carbon-carbon support ring is movably connected to the adhesive soft felt, and both sides of the inner wall bottom of the carbon-carbon support ring are penetrated with connecting slots, and both sides of the bottom of the adhesive soft felt are fixedly connected with connecting blocks;

[0008] The interior of the carbon-carbon support ring includes a high-temperature resistant base layer, a heat insulation layer, a fireproof layer, a heat conductive layer and a pressure-resistant protective layer from bottom to top. The thicknesses of the fireproof layer, the heat conductive layer and the pressure-resistant protective layer are the same, and the thicknesses of the high-temperature resistant base layer and the heat insulation layer are the same.

[0009] Preferably, the bottom of the connecting block passes through the carbon-carbon support ring and extends to the bottom of the carbon-carbon support ring, and the carbon-carbon support ring is made of a carbon-carbon composite material.

[0010] Preferably, the connection slot and the connection block are movably connected, and the quartz ring and the adhesive soft felt are adhered together by adhesive.

[0011] Preferably, the top surfaces of the quartz ring and the adhesive soft felt are both provided with connecting threaded holes, and the number of the connecting threaded holes is set to be multiple.

[0012] Preferably, the high temperature resistant base layer is made of silicone material, the heat insulating layer is made of asbestos fiber material, and the high temperature resistant base layer and the heat insulating layer are connected together by using silicone adhesive.

[0013] Preferably, flame retardants are sprayed on the top and bottom surfaces of the fireproof layer, and the fireproof layer is made of phosphorus compound material.

[0014] Preferably, the heat-conducting layer is made of copper foil, the anti-compression protective layer is made of polymer fibers woven in an interlaced knitting manner, and the top surface of the anti-compression protective layer is sprayed with a silicon carbide coating.

[0015] Technical effects and advantages of the utility model:

[0016] 1. The adhesive soft felt is inserted into the carbon-carbon support ring, and then the quartz ring is covered on the top of the adhesive soft felt. The quartz ring and the adhesive soft felt are fixed through the connecting threaded holes on the top of the quartz ring and the adhesive soft felt by external bolts or screws, so as to improve the connection and fixing effect of the overall soft felt. The thermal insulation performance of the heat shield is improved by the carbon-carbon support ring, and better strength is provided, so that the heat shield can better withstand mechanical stress under high temperature. At the same time, the heat resistance, corrosion resistance and oxidation resistance are strong. The connecting card block is inserted into the connecting card slot, so that the carbon-carbon support ring and the quartz ring and the adhesive soft felt can be disassembled and quickly connected and installed. Compared with the prior art, the soft felt has strong thermal insulation performance, can effectively reduce the loss of temperature, play a role in reducing power consumption, and has good antioxidant performance. The soft felt is used instead of the cured felt, so that the overall soft decoration is elastic, can be folded and cut at will, has strong tensile strength and is not easy to be damaged. It is soft and elastic, not easy to be damaged. The combination of the carbon-carbon support ring and the adhesive soft felt has a higher cost performance and a longer service life.

[0017] 2. Through the setting of multiple levels inside the carbon-carbon support ring, structural support and stability are provided to maintain the shape and integrity of the soft felt, reduce heat conduction, protect the substrate or base layer from high temperature, enhance the safety performance of the soft felt under fire or high temperature conditions, improve the efficiency of the soft felt in thermal conductivity, help the conduction and distribution of heat, improve the structural strength and durability of the carbon-carbon support ring, improve its compressive performance and improve its wear resistance. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the overall structure of the utility model.

[0019] Figure 2 It is a schematic diagram of the three-dimensional structure of the carbon-carbon support ring of the utility model.

[0020] Figure 3 It is a structural schematic diagram of the connection state of the carbon-carbon support ring and the adhesive soft felt of the utility model.

[0021] Figure 4 It is a side sectional structural schematic diagram of the utility model.

[0022] Figure 5 It is a schematic diagram of the internal structure of the adhesive soft felt of the utility model.

[0023] The accompanying drawings are marked as follows: 1. carbon-carbon support ring; 2. quartz ring; 3. adhesive soft felt; 4. connecting threaded hole; 5. connecting slot; 6. connecting block; 7. high temperature resistant base layer; 8. thermal insulation layer; 9. fireproof layer; 10. thermal conductive layer; 11. pressure-resistant protective layer. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0025] As attached Figure 1-5 An adhesive soft felt used for a single crystal furnace heat shield shown in the figure comprises a carbon-carbon support ring 1, a quartz ring 2 is arranged on the top of the carbon-carbon support ring 1, and an adhesive soft felt 3 is arranged between the carbon-carbon support ring 1 and the quartz ring 2;

[0026] The carbon-carbon support ring 1 is movably connected with the adhesive soft felt 3. The inner wall bottom surfaces of the carbon-carbon support ring 1 are penetrated with connecting slots 5 on both sides. The bottom of the adhesive soft felt 3 is fixedly connected with connecting blocks 6 on both sides.

[0027] The interior of the carbon-carbon support ring 1 includes, from bottom to top, a high-temperature resistant base layer 7, a heat-insulating layer 8, a fire-proof layer 9, a heat-conducting layer 10 and a pressure-resistant protective layer 11. The thicknesses of the fire-proof layer 9, the heat-conducting layer 10 and the pressure-resistant protective layer 11 are the same, and the thicknesses of the high-temperature resistant base layer 7 and the heat-insulating layer 8 are the same.

[0028] As attached Figure 1-4As shown, the bottom of the connecting block 6 passes through the carbon-carbon support ring 1 and extends to the bottom of the carbon-carbon support ring 1. The carbon-carbon support ring 1 is a carbon-carbon composite material. The carbon-carbon support ring 1 provides better strength and can better withstand mechanical stress under high temperature. At the same time, it has strong high temperature resistance, corrosion resistance, and oxidation resistance.

[0029] As attached Figure 1-4 As shown, the connecting slot 5 and the connecting block 6 are movably connected, the quartz ring 2 and the adhesive soft felt 3 are adhered together by adhesive, and connecting threaded holes 4 are provided on the top surfaces of the quartz ring 2 and the adhesive soft felt 3. The number of the connecting threaded holes 4 is set to be multiple, which is convenient for quick connection and installation between the carbon-carbon support ring 1, the quartz ring 2 and the adhesive soft felt 3.

[0030] As attached Figure 5 As shown, the high temperature resistant base layer 7 is made of silicone, the heat insulating layer 8 is made of asbestos fiber, the high temperature resistant base layer 7 and the heat insulating layer 8 are connected together by silicone adhesive, the top and bottom surfaces of the fireproof layer 9 are sprayed with flame retardant, the fireproof layer 9 is made of phosphorus compound material, the heat conductive layer 10 is made of copper foil, the compressive protective layer 11 is woven by polymer fiber in an interlaced knitting manner, and the top surface of the compressive protective layer 11 is sprayed with silicon carbide coating, so as to improve the overall performance of the carbon-carbon support ring 1 and improve its use effect.

[0031] Working principle of the utility model: during the use of the adhesive soft felt used for the heat shield of a single crystal furnace provided by the utility model, the adhesive soft felt 3 is inserted into the inside of the carbon-carbon support ring 1, and then the quartz ring 2 is covered on the top of the adhesive soft felt 3, and the connecting threaded holes 4 on the tops of the quartz ring 2 and the adhesive soft felt 3 are passed through external bolts or screws to fix the quartz ring 2 and the adhesive soft felt 3, thereby improving the connection and fixing effect of the overall soft felt, and the thermal insulation performance of the heat shield is improved by the carbon-carbon support ring 1, providing better strength, and being able to better withstand mechanical stress under high temperature, while having strong high temperature resistance, corrosion resistance, and oxidation resistance, and at the same time, the two connecting blocks 6 at the bottom of the adhesive soft felt 3 are inserted between the two connecting grooves 5 on the bottom surface of the inner wall of the carbon-carbon support ring 1, so that the carbon-carbon support ring 1 and the quartz ring 2 and the adhesive soft felt 3 can be disassembled and quickly connected and installed, and the installation and disassembly are simple and convenient, and it is easy to replace any one of the carbon-carbon support ring 1, the quartz ring 2 and the adhesive soft felt 3, and the applicability is better, and the replacement cost is reduced;

[0032] The high temperature resistant base layer 7 provides structural support and stability to maintain the shape and integrity of the soft felt, the heat insulation layer 8 reduces heat conduction and protects the base or foundation layer from high temperature, the fireproof layer 9 enhances the safety of the soft felt in fire or high temperature conditions, the thermal conductive layer 10 improves the thermal conductivity of the soft felt and helps the conduction and distribution of heat, and the compressive protective layer 11 improves the structural strength and durability of the carbon-carbon support ring 1, thereby improving its compressive resistance and wear resistance.

[0033] Finally: The above embodiments are only illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. Anyone familiar with the technology may modify or change the above embodiments without violating the spirit and scope of the present invention. Therefore, all equivalent modifications or changes made by those with ordinary knowledge in the relevant technical field without departing from the spirit and technical ideas disclosed by the present invention should still be covered by the claims of the present invention.

Claims

1. An adhesive soft felt used for a single crystal furnace heat shield, comprising a carbon-carbon support ring (1), characterized in that: A quartz ring (2) is arranged on the top of the carbon-carbon support ring (1), and an adhesive soft felt (3) is arranged between the carbon-carbon support ring (1) and the quartz ring (2); The carbon-carbon support ring (1) and the adhesive soft felt (3) are movably connected, and connecting slots (5) are provided through the inner wall bottom surfaces of both sides of the carbon-carbon support ring (1), and connecting blocks (6) are fixedly connected to both sides of the bottom of the adhesive soft felt (3); The carbon-carbon support ring (1) comprises, from bottom to top, a high-temperature resistant base layer (7), a heat insulating layer (8), a fireproof layer (9), a heat conducting layer (10) and a pressure resistant protective layer (11); the fireproof layer (9), the heat conducting layer (10) and the pressure resistant protective layer (11) are of the same thickness; and the high-temperature resistant base layer (7) and the heat insulating layer (8) are of the same thickness.

2. The adhesive felt used for the single crystal furnace heat shield according to claim 1, characterized in that: The bottom of the connecting block (6) passes through the carbon-carbon support ring (1) and extends to the bottom of the carbon-carbon support ring (1); the carbon-carbon support ring (1) is made of a carbon-carbon composite material.

3. The adhesive felt used for the single crystal furnace heat shield according to claim 1, characterized in that: The connection slot (5) and the connection block (6) are movably connected, and the quartz ring (2) and the adhesive soft felt (3) are bonded together by adhesive.

4. The adhesive soft felt used for the single crystal furnace heat shield according to claim 1, characterized in that: The top surfaces of the quartz ring (2) and the adhesive soft felt (3) are both provided with connecting threaded holes (4), and the number of the connecting threaded holes (4) is set to be multiple.

5. The adhesive felt used for the single crystal furnace heat shield according to claim 1, characterized in that: The high temperature resistant base layer (7) is made of a silicone material, the heat insulating layer (8) is made of an asbestos fiber material, and the high temperature resistant base layer (7) and the heat insulating layer (8) are connected together using a silicone adhesive.

6. The adhesive felt used for the single crystal furnace heat shield according to claim 1, characterized in that: The top and bottom surfaces of the fireproof layer (9) are sprayed with flame retardant, and the fireproof layer (9) is made of a phosphorus compound material.

7. The adhesive felt used for the single crystal furnace heat shield according to claim 1, characterized in that: The heat-conducting layer (10) is made of copper foil, the pressure-resistant protective layer (11) is made of polymer fibers woven in an interlaced knitting manner, and the top surface of the pressure-resistant protective layer (11) is sprayed with a silicon carbide coating.

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