Wafer dehydration device and wafer cleaning machine

Abstract

The utility model discloses a wafer dewatering device and a wafer cleaning machine, and belongs to the technical field of cleaning equipment of photovoltaic modules. The device comprises a mechanical arm, a feeding conveying module, a rotary dewatering mechanism and a discharging conveying module which are sequentially arranged, a plurality of basket grooves are formed in the rotary dewatering mechanism and used for containing baskets containing wafers, the mechanical arm is used for grabbing the baskets to be arranged at the feeding end of the feeding conveying module, the feeding conveying module is used for conveying the baskets into the basket grooves, and the discharging conveying module is used for conveying the baskets into the basket grooves. The discharging conveying module is used for taking the flower basket out of the flower basket groove. Based on the arrangement of a mechanical arm, a feeding conveying module, a rotary dewatering mechanism and a discharging conveying module, at least one of the problems that in the prior art, after being cleaned and dried, a wafer is manually moved to independent dewatering equipment to be dewatered, the residual time of residual liquid on the surface of the wafer is too long, the wafer is damaged, and the production efficiency is low is solved. The automatic dehydration of the wafer can be realized.

Description

Technical Field

[0001] The utility model belongs to the technical field of cleaning equipment for photovoltaic components, and in particular relates to a wafer dehydration device and a wafer cleaning machine. Background Art

[0002] Wafers are the basic materials of semiconductor devices. In order to ensure the cleanliness of the wafers, the produced wafers need to be cleaned, pre-dried and dehydrated to ensure the cleanliness and dryness of the wafers.

[0003] Existing wafer cleaning equipment usually only has cleaning and pre-drying functions. After pre-drying, there is still a certain amount of residual liquid on the surface of the wafer, which needs to be manually transported to an independent dehydration device for dehydration. Manual transportation will not only cause damage to the wafer, but also affect the degree of automation and efficiency of wafer production, causing the residual liquid to remain on the wafer surface for too long. Utility Model Content

[0004] In view of the above analysis, the utility model aims to provide a wafer dehydration device and a wafer cleaning machine, which solves at least one of the problems in the prior art that after the wafers are cleaned and dried, they are manually moved to independent dehydration equipment for dehydration, resulting in residual liquid remaining on the wafer surface for too long, wafer damage, and low production efficiency.

[0005] The purpose of this utility model is mainly achieved through the following technical solutions:

[0006] The utility model provides a wafer dehydration device, comprising a manipulator, a loading and conveying module, a rotary dehydration mechanism and a unloading and conveying module which are arranged in sequence, wherein a plurality of flower basket slots are arranged in the rotary dehydration mechanism, the flower basket slots are used to accommodate flower baskets with wafers, the manipulator is used to grab the flower basket and place it at the loading end of the loading and conveying module, the loading and conveying module is used to transport the flower basket to the flower basket slot, and the unloading and conveying module is used to take the flower basket out of the flower basket slot.

[0007] Optionally, the rotary dehydration mechanism includes a dehydration bin, a rotary drive assembly and a rotating frame arranged in the dehydration bin, a bin cover is provided on the upward end face of the dehydration bin, a loading opening and closing bin door is provided on the side of the dehydration bin facing the loading and conveying module, a unloading opening and closing bin door is provided on the side of the dehydration bin facing the unloading and conveying module, a flower basket groove is opened on the rotating frame, and the rotary drive assembly is used to drive the rotating frame to rotate.

[0008] Optionally, the rotating frame is in the shape of a polygonal column, and each side of the polygonal column is provided with at least one flower basket groove.

[0009] Optionally, the flower basket groove is a U-shaped groove; a supporting protrusion is provided at the lower end of the two opposite side walls of the U-shaped groove, and the flower basket is placed on the supporting protrusion; a limiting protrusion is provided at the lower end of the opening end opposite to the bottom surface of the U-shaped groove, and the limiting protrusion is connected to the lower ends of the two opposite side walls in the U-shaped groove, and the flower basket is placed between the limiting protrusion and the bottom surface of the U-shaped groove.

[0010] Optionally, the loading opening and closing bin door and the unloading opening and closing bin door both include a door body, an opening and closing drive, a gear fixedly connected to the output shaft of the opening and closing drive, and a rack cooperating with the gear, and the rack is fixedly connected to the door body; the rotary drive assembly includes a rotary drive and a rotating shaft fixedly connected to the output shaft of the rotary drive, and the rotating frame is sleeved on the outer wall of the rotating shaft and fixedly connected to the rotating shaft.

[0011] Optionally, the rotary dehydration mechanism further includes a lifting drive, and an output shaft of the lifting drive is fixedly connected to the rotating frame.

[0012] Optionally, the rotary dehydration mechanism further comprises a positioning pin, a positioning hole is provided on one of the flower basket and the bin cover, the positioning pin is provided on the other of the flower basket and the bin cover, and the positioning pin can be inserted into the positioning hole.

[0013] Optionally, the rotary dehydration mechanism further includes a drainage pipe, a drainage port is provided at the bottom of the dehydration bin, and the drainage port is connected to the drainage pipe.

[0014] Optionally, the manipulator includes a gripper and a corrosion-resistant layer covering an outer wall of the gripper.

[0015] The present invention also provides a wafer cleaning machine, comprising a wafer cleaning device and the wafer dehydrating device which are arranged in sequence.

[0016] Compared with the prior art, the present invention can achieve at least one of the following beneficial effects:

[0017] The wafer dehydration device provided by the utility model can directly dehydrate the wafers after cleaning, adopts a mechanical arm to grab the flower basket, adopts a flower basket loading and conveying module to load the flower basket, and adopts a flower basket loading and conveying module to unload the flower basket, and no manual operation is required for loading before dehydration, during dehydration, and unloading after dehydration, thereby realizing automatic dehydration of the wafers, reducing the residual time of residual liquid on the wafers and the generation of watermarks, avoiding damage to the wafers caused by manual handling, and effectively improving the production efficiency and yield of the wafers.

[0018] Other features and advantages of the utility model will be described in the following description, and some will become apparent from the description, or understood by practicing the utility model. The purpose and other advantages of the utility model can be realized and obtained by the structures specifically pointed out in the written description and the drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The accompanying drawings are only used for the purpose of illustrating specific utility models and are not considered to be limiting of the present utility model. In the entire drawings, the same reference symbols represent the same components.

[0020] Figure 1 A schematic diagram of the structure of a wafer dehydration device provided in Embodiment 1 of the present utility model;

[0021] Figure 2 A schematic diagram of the internal structure of a wafer dehydration device provided in Embodiment 1 of the present utility model;

[0022] Figure 3 A top view of a wafer dehydration device provided in Embodiment 1 of the utility model;

[0023] Figure 4 A side view of a wafer dehydration device provided in Embodiment 1 of the utility model;

[0024] Figure 5 A partial schematic diagram of a wafer dehydration device provided in Embodiment 1 of the utility model;

[0025] Figure 6 It is a schematic diagram of the assembly of the rotating frame and the flower basket in the wafer dehydration device provided in the first embodiment of the utility model;

[0026] Figure 7 This is a schematic diagram of the structure of a robot in a wafer dehydration device provided in Example 1 of the utility model.

[0027] Reference numerals:

[0028] 1-manipulator; 101-hand grip; 102-posture adjustment motor; 103-posture adjustment component; 2-feeding conveying module; 3-feeding opening and closing bin door; 4-unloading opening and closing bin door; 5-unloading conveying module; 6-rotating dehydration mechanism; 601-dehydration bin; 602-bin cover; 603-rotating frame; 604-positioning hole; 605-lifting drive; 7-flower basket; 8-flower basket slot; 9-support protrusion; 10-limiting protrusion; 11-rotating shaft; 12-drainage pipe; 13-rotating drive. DETAILED DESCRIPTION

[0029] The preferred embodiment of the present invention will be described in detail below in conjunction with the accompanying drawings, wherein the accompanying drawings constitute a part of the present invention and are used together with the present invention to explain the principle of the present invention.

[0030] Embodiment 1

[0031] This embodiment provides a wafer dehydration device, see Figures 1 to 5, including a manipulator 1, a loading and conveying module 2, a rotary dehydration mechanism 6 and a unloading and conveying module 5 which are arranged in sequence. The rotary dehydration mechanism 6 is provided with a plurality of flower basket slots 8, and the flower basket slots 8 are used to accommodate a flower basket 7 containing wafers. The manipulator 1 is used to grab the flower basket 7 and place it at the loading end of the loading and conveying module 2. The loading and conveying module 2 is used to transport the flower basket 7 to the flower basket slot 8, and the unloading and conveying module 5 is used to take the flower basket 7 out of the flower basket slot 8.

[0032] During the implementation, the flower basket 7 with residual liquid is slowly pulled out of the pure water tank after being soaked in the pure water tank, and the manipulator 1 is turned on. The manipulator 1 clamps one end of the flower basket 7 so that the flower basket 7 changes from a horizontal state to a vertical state. The manipulator 1 moves and places the flower basket 7 on the feeding end of the loading and conveying module 2, and releases the flower basket 7; the loading and conveying module 2 is turned on, and the loading and conveying module 2 conveys the flower basket 7 from its loading end to the unloading end, and uses its own conveying tongue to place the flower basket 7 in the flower basket groove 8, and repeats the above actions until multiple flower baskets 7 are respectively placed in multiple flower basket grooves 8; the rotary dehydration mechanism 6 is turned on, and the rotary dehydration mechanism 6 rotates at a high speed, and drives the flower basket 7 to rotate at a high speed, generating centrifugal force, so that the residual liquid in the wafer is separated from the wafer, and the wafer is dehydrated; after the wafer is dehydrated, the unloading and conveying module 5 uses its own conveying tongue to take the flower basket 7 out of the flower basket groove 8, and convey it to the unloading end of the unloading and conveying module 5, waiting for the automatic guided vehicle (Automated Guided Vehicle) Guided Vehicle, AGV for short) grabs the vehicle and moves it to the next process.

[0033] Compared with the prior art, the wafer dehydration device provided in the present embodiment can directly dehydrate the wafers after cleaning, adopt a robot 1 to grab the flower basket 7, adopt the flower basket 7 loading and conveying module 2 to load the flower basket 7, and adopt the flower basket 7 loading and conveying module 2 to unload the flower basket 7, and no manual operation is required for loading before dehydration, during dehydration, and unloading after dehydration, thereby realizing automatic dehydration of the wafers, reducing the residual time of residual liquid on the wafers and the generation of watermarks, avoiding damage to the wafers caused by manual handling, and effectively improving the production efficiency and yield of the wafers.

[0034] Specifically, the structure of the rotary dehydration mechanism 6 includes a dehydration bin 601, a rotary drive assembly, and a rotary frame 603 disposed in the dehydration bin 601. A bin cover 602 is disposed on an upward end face of the dehydration bin 601. A flower basket groove 8 is provided on the rotary frame 603. The rotary drive assembly is used to drive the rotary frame 603 to rotate.

[0035] In order to facilitate the loading and unloading of the flower basket 7, the dehydration bin 601 is provided with a loading opening and closing door 3 on the side facing the loading conveying module 2, and the dehydration bin 601 is provided with a unloading opening and closing door on the side facing the unloading conveying module 5.

[0036] Exemplarily, the structures of the loading opening and closing bin door 3 and the unloading opening and closing bin door 4 are basically the same, both of which include a door body, an opening and closing drive (for example, a motor), a gear fixedly connected to the output shaft of the opening and closing drive, and a rack cooperating with the gear, and the rack is fixedly connected to the door body. In this way, the opening and closing drive drives the rack to reciprocate through the gear, thereby realizing the opening and closing of the loading opening and closing bin door 3 and the unloading opening and closing bin door 4.

[0037] The above-mentioned rotation driving assembly includes a rotation driver 13 (for example, a rotation motor) and a rotation shaft 11 fixedly connected to the output shaft of the rotation driver 13. The rotation frame 603 is sleeved on the outer wall of the rotation shaft 11 and fixedly connected to the rotation shaft 11. The rotation driver 13 drives the rotation frame 603 to rotate through the rotation shaft 11.

[0038] Exemplarily, the shape of the rotating frame 603 is a polygonal column, see Figure 6 , at least one basket groove 8 is provided on each side of the polygonal column. Thus, on the one hand, placing the rotating frame 603 in the dehydration bin 601 can isolate the residual liquid thrown out during the rotation of the rotating frame 603, thereby preventing the residual liquid from contaminating other components; on the other hand, setting the shape of the rotating frame 603 to a polygonal column and providing a basket groove 8 on each side can effectively increase the number of basket grooves 8 provided, thereby further improving the dehydration efficiency.

[0039] Exemplarily, the rotating frame 603 has 4 to 8 sides, and each side is provided with a flower basket slot 8, that is, the number of flower basket slots 8 is 4 to 8, and each dehydration can process 4 to 8 flower baskets 7. The width of the flower basket slot 8 is 156 to 182 mm, so that it can be compatible with wafers with a size of 156 to 182 mm.

[0040] Taking into account that the flower basket 7 will be subjected to a large centrifugal force during the dehydration process, in order to ensure a stable connection between the flower basket 7 and the flower basket groove 8, the above-mentioned flower basket groove 8 is a U-shaped groove, and the lower ends of the two opposite side walls of the U-shaped groove are provided with supporting protrusions 9. The flower basket 7 is placed on the supporting protrusions 9, and the lower end of the open end opposite to the bottom surface of the U-shaped groove is provided with a limiting protrusion 10. The limiting protrusion 10 is connected to the lower ends of the two opposite side walls in the U-shaped groove. The flower basket 7 is placed between the limiting protrusion 10 and the bottom surface of the U-shaped groove, and the flower basket 7 is limited in the flower basket groove 8 by the limiting protrusion 10.

[0041] It should be noted that the above-mentioned rotary dehydration mechanism 6 also includes a lifting driver 605 (for example, a lifting cylinder), and the output shaft of the lifting driver 605 is fixedly connected to the rotating frame 603 for driving the rotating frame 603 to rise and fall, so as to facilitate the loading and unloading of the flower basket 7.

[0042] Correspondingly, the rotating frame 603 will also be subjected to a large centrifugal force during the rotation process. In order to ensure the stable rotation of the rotating frame 603, the above-mentioned rotary dehydration mechanism 6 also includes a positioning hole 604 (positioning through hole or positioning blind hole) and a positioning pin. The positioning hole 604 is provided on one of the flower basket 7 and the bin cover 602, and the positioning pin is provided on the other of the flower basket 7 and the bin cover 602. The positioning pin is inserted into the positioning hole 604, and the positioning pin and the positioning hole 604 are coaxially arranged. In this way, by setting the positioning pin and the positioning hole 604, the rotation of the flower basket 7 and the rotating frame 603 can be limited to ensure the stable rotation of the flower basket 7.

[0043] In order to facilitate the timely discharge of residual liquid after dehydration from the dehydration chamber 601, the wafer dehydration device further includes a drainage pipe 12, and a drainage port is provided at the bottom of the dehydration chamber 601, and the drainage port is connected to the drainage pipe 12. Considering that the manipulator 1 is in a corrosive environment (acid mist environment) during the process of grabbing the flower basket 7, in order to improve the corrosion resistance of the manipulator 1, the manipulator 1 includes a grip 101 and a corrosion-resistant layer covering the outer wall of the grip 101. In this way, by setting the corrosion-resistant layer, the corrosion resistance of the manipulator 1 can be effectively improved, the grip 101 of the manipulator 1 can be protected, and the service life of the manipulator 1 can be extended.

[0044] In order to adjust the posture of the manipulator 1 to facilitate grasping the flower basket 7, the manipulator 1 further includes a posture adjustment motor 102 and a posture adjustment component 103, see Figure 7 One end of the posture adjustment component 103 is connected to the posture adjustment motor 102 , and the other end of the posture adjustment component 103 is connected to the gripper 101 .

[0045] Similarly, in order to improve the overall corrosion resistance of the wafer dehydration device, the loading conveyor module 2 and the unloading conveyor module 5 are both corrosion-resistant parts, that is, both are made of corrosion-resistant materials.

[0046] Based on the wafer dehydration device of the above specific structure, the dehydration process of the wafer is as follows:

[0047] A flower basket 7 with residual liquid is slowly pulled out of the pure water tank after being soaked in the pure water tank; the manipulator 1 is turned on, and the manipulator 1 clamps one end of the flower basket 7, so that the flower basket 7 changes from a horizontal state to a vertical state, and the manipulator 1 moves and places the flower basket 7 at the feeding end of the feeding conveying module 2, and releases the flower basket 7; the feeding conveying module 2 is turned on, and the feeding conveying module 2 conveys the flower basket 7 from its feeding end to the unloading end; the opening and closing drive is turned on, and the feeding opening and closing hatch is opened through the gears and racks that cooperate with each other, and the feeding conveying module 2 is used to open the feeding opening and closing hatch. The conveying tongue of the module 2 places the flower basket 7 in the flower basket slot 8; the lifting driver 605 is turned on to drive the rotating frame 603 to rise, thereby driving the flower basket 7 to separate from the conveying tongue of the feeding and conveying module 2, so that the flower basket 7 is placed on the supporting protrusion 9 and is stuck between the limiting protrusion 10 and the slot wall of the flower basket slot 8, and the flower basket 7 is separated from the conveying tongue of the feeding and conveying module 2; the rotating driver 13 is turned on to drive the rotating frame 603 to rotate, so that the next flower basket slot 8 is aligned with the feeding and conveying module 2, and the lifting driver 605 is turned on to drive the rotating frame 603 to descend and reset; repeat the above steps until all the flower basket slots 8 are filled; turn on the opening and closing driver to close the feeding opening and closing hatch; turn on the lifting driver 605, and the lifting driver 605 drives the rotating frame 603 and the flower basket 7 to rise until the positioning pin is inserted into the positioning hole 604; turn on the rotating driver 13, so that the rotating frame 603 drives the flower basket 7 to rotate at a high speed, generating centrifugal force, so that the residual liquid in the wafer is separated from the wafer, and the wafer is dehydrated; after the wafer is dehydrated, turn on The opening and closing drive is started to open the unloading opening and closing bin door 4; the conveying tongue of the unloading conveying module 5 is inserted under the flower basket 7, and the lifting drive 605 is started to drive the rotating frame 603 to descend and reset, and the flower basket 7 is separated from the limit protrusion 10 and the side wall of the flower basket groove 8, and placed on the conveying tongue, and the conveying tongue conveys the flower basket 7 to the loading end of the unloading conveying module 5; the unloading conveying module 5 is started, so that the flower basket 7 is transferred from the loading end of the unloading conveying module 5 to the unloading end, waiting for the automatic guided vehicle to grab it to the next process.

[0048] Embodiment 2

[0049] This embodiment provides a wafer cleaning machine, comprising a wafer cleaning device and a wafer dehydrating device provided in the first embodiment, which are arranged in sequence.

[0050] Compared with the prior art, the beneficial effects of the wafer cleaning machine provided in this embodiment are substantially the same as the beneficial effects of the wafer dehydration device provided in the first embodiment, and are not described in detail here.

[0051] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any changes or substitutions that can be easily thought of by any technician familiar with the technical field within the technical scope disclosed in the present invention should be included in the protection scope of the present invention.

Claims

1. A wafer dehydration device, characterized in that: It includes a manipulator, a loading and conveying module, a rotary dehydration mechanism and a unloading and conveying module which are arranged in sequence. The rotary dehydration mechanism is provided with a plurality of flower basket slots, the flower basket slots are used to accommodate flower baskets with chips, the manipulator is used to grab the flower basket and place it at the loading end of the loading and conveying module, the loading and conveying module is used to transport the flower basket to the flower basket slot, and the unloading and conveying module is used to take the flower basket out of the flower basket slot.

2. The wafer dehydration device according to claim 1, characterized in that: The rotary dehydration mechanism includes a dehydration bin, a rotary drive assembly and a rotary frame arranged in the dehydration bin, the upward end face of the dehydration bin is provided with a bin cover, the side of the dehydration bin facing the loading and conveying module is provided with a loading opening and closing bin door, the side of the dehydration bin facing the unloading and conveying module is provided with an unloading opening and closing bin door, the basket groove is opened on the rotary frame, and the rotary drive assembly is used to drive the rotary frame to rotate.

3. The wafer dehydration device according to claim 2, characterized in that: The rotating frame is in the shape of a polygonal column, and each side surface of the polygonal column is provided with at least one flower basket groove.

4. The wafer dehydration device according to claim 2, characterized in that: The flower basket groove is a U-shaped groove; The lower ends of the two opposite side walls of the U-shaped groove are provided with supporting protrusions, and the flower basket is placed on the supporting protrusions; A limiting protrusion is provided at the lower end of the opening end opposite to the bottom surface of the U-shaped groove, and the limiting protrusion is connected to the lower ends of two opposite side walls in the U-shaped groove, and the flower basket is placed between the limiting protrusion and the bottom surface of the U-shaped groove.

5. The wafer dehydration device according to claim 2, characterized in that: The loading opening and closing bin door and the unloading opening and closing bin door both include a door body, an opening and closing drive, a gear fixedly connected to the output shaft of the opening and closing drive, and a rack matched with the gear, wherein the rack is fixedly connected to the door body; The rotary drive assembly comprises a rotary drive and a rotary shaft fixedly connected to an output shaft of the rotary drive, and the rotary frame is sleeved on an outer wall of the rotary shaft and fixedly connected to the rotary shaft.

6. The wafer dehydration device according to claim 2, characterized in that: The rotary dehydration mechanism also includes a lifting driver, and an output shaft of the lifting driver is fixedly connected to the rotating frame.

7. The wafer dehydration device according to any one of claims 2 to 6, characterized in that: The rotary dehydration mechanism further comprises a positioning pin, a positioning hole is provided on one of the flower basket and the bin cover, the positioning pin is arranged on the other of the flower basket and the bin cover, and the positioning pin can be inserted into the positioning hole.

8. The wafer dehydration device according to any one of claims 2 to 6, characterized in that: The rotary dehydration mechanism also includes a drainage pipeline. A drainage port is provided at the bottom of the dehydration bin, and the drainage port is communicated with the drainage pipeline.

9. The wafer dehydration device according to claim 1, characterized in that: The manipulator comprises a gripper and a corrosion-resistant layer covering the outer wall of the gripper.

10. A wafer cleaning machine, characterized in that: It comprises a wafer cleaning device and a wafer dehydrating device as described in any one of claims 1 to 9 which are arranged in sequence.

Images