Independent chemical supply system of gluing developer

Abstract

The independent chemical supply system of the gluing developer comprises at least two liquid medicine tanks and an air pump, and the liquid supply amount of the liquid medicine tanks is controlled through the input gas amount; the communicating container is connected to the output end of the air pump and is used for carrying out gas-liquid separation on the liquid medicine; the liquid discharging pipe is connected to the gas conveying end of the communicating container; the filter is connected to the liquid conveying end of the communicating container, a liquid supply pipe, a filter liquid discharging pipeline and a filter gas discharging pipeline are arranged on the filter, and the filter liquid discharging pipeline is connected with the liquid discharging pipe and discharges bubbles in the filter. The chemical supply device is compact and reasonable in structure and convenient to operate, stable and continuous supply of chemicals in the gluing and developing process is realized, and the use efficiency and the production benefit of the gluing and developing machine are greatly improved. The system has the functions of automatic monitoring, automatic switching and alarm reminding, so that the convenience and safety of operation are remarkably improved.

Description

Technical Field

[0001] The utility model relates to the technical field of liquid supply for a developer, in particular to an independent chemical supply system for a glue coating developer. Background Art

[0002] In the semiconductor production process, the photoresist coating and developing machine is a key equipment, which is used to evenly apply photoresist on the wafer and transfer the pattern on the mask to the wafer through the developing step. The chemicals used in this process, such as solvent, are key factors to ensure the coating and developing effects. However, the storage and use of these chemicals also bring a series of technical and safety challenges.

[0003] Traditional liquid supply systems usually use 20L liquid tanks as liquid supply containers. These containers need to be regularly refilled with liquid to ensure the continuity of production. However, due to the high efficiency requirements of semiconductor production, such small-capacity liquid tanks often cannot meet the needs of long-term continuous production, making frequent refilling necessary. This not only affects production efficiency, but also increases operational complexity and the possibility of errors.

[0004] In order to simplify the process of supplying chemical liquids, there is also a practice in the market to directly use large-capacity tanks provided by chemical liquid manufacturers for chemical liquid supply. Although this method reduces the frequency of refilling, it lacks necessary safety measures, such as exhaust systems, leakage alarms, and explosion-proof measures, so there are significant safety hazards. Most of the chemical agents used in semiconductor production are flammable, explosive, and harmful to the human body. Once a leak or explosion occurs, the consequences will be disastrous.

[0005] There are the following problems:

[0006] Frequent refilling problem: The traditional 20L liquid medicine tank has a small capacity and cannot meet the needs of long-term continuous production, resulting in the need for frequent refilling of liquid medicine, affecting production efficiency.

[0007] Security Question:

[0008] Lack of exhaust system: When using large-capacity tanks provided by liquid manufacturers directly for liquid supply, dangerous gas pressure may be generated in the tank, and the lack of an effective exhaust system may lead to the risk of explosion.

[0009] No leakage alarm: Liquid leakage may cause serious safety accidents. Without a leakage alarm system, leakage cannot be detected and handled in time.

[0010] Lack of explosion-proof measures: For flammable and explosive chemicals, the lack of necessary explosion-proof measures will significantly increase safety risks in the production process.

[0011] Balancing production efficiency and safety issues: How to ensure the safety of the production process and the health of operators while ensuring production efficiency is a key challenge facing current technology.

[0012] Low degree of automation in drug solution management: The existing liquid supply system, whether it uses small-capacity or large-capacity tanks, lacks an intelligent drug solution management system and is unable to monitor the usage and safety status of the drug solution in real time.

[0013] In summary, there are many technical and safety issues in the liquid supply system of the coating and developing machine in semiconductor production, which urgently need to be solved through technological innovation and system integration.

[0014] Therefore, we propose an independent chemical supply system for the coating and developing machine. Utility Model Content

[0015] In view of the shortcomings of the above-mentioned existing production technology, the applicant provides an independent chemical supply system for a glue developer, which realizes the stable and continuous supply of chemicals during the glue development process, greatly improving the use efficiency and production benefits of the glue developer.

[0016] The technical solution adopted by the utility model is as follows:

[0017] include:

[0018] At least two liquid medicine tanks,

[0019] An air pump, which is respectively connected to the plurality of liquid medicine tanks and drives the liquid supply, and the air pump controls the liquid supply amount of the liquid medicine tank by the amount of gas input;

[0020] A communication container, which is connected to the output end of the air pump and is used for gas-liquid separation of the drug liquid;

[0021] A liquid discharge pipe, which is connected to the gas delivery end of the communication container and is used to discharge the gas;

[0022] The filter is connected to the liquid delivery end of the communication container and is used to filter the liquid medicine. The filter is provided with:

[0023] A liquid supply pipe, which is used to transport the filtered liquid medicine;

[0024] The filter drainage pipeline is connected to the drainage pipe and discharges the liquid filtered by the filter for pre-filtration of pipeline cleaning;

[0025] The filter exhaust pipeline is connected to the drain pipe to discharge the bubbles in the filter.

[0026] It is further characterized by:

[0027] The connecting pipeline of each of the liquid medicine tanks is provided with a vacancy sensor and a liquid medicine control valve.

[0028] The liquid medicine tank is also provided with a nitrogen supply pipeline, and the nitrogen supply pipeline is provided with a nitrogen valve and a nitrogen pressure gauge.

[0029] The air pump is connected to a signal control terminal, and the signal control terminal includes:

[0030] Air valve, controlling the flow of gas;

[0031] Manual valve, manually controlling the delivery of gas;

[0032] Liquid supply signal source, used to provide gas delivery volume.

[0033] It also includes a protective cover that covers all equipment, and the protective cover is a multi-layer metal structure to improve the overall strength.

[0034] A leakage disk is arranged on the inner bottom wall of the protective cover, and an exhaust pipe is connected to the side wall of the protective cover.

[0035] It also includes a controller whose battery cells are connected to all electrical equipment, valves and sensors, which can monitor the capacity of the liquid medicine tanks and automatically switch when one of the liquid medicine tanks is empty, and issue an alarm when all the liquid medicine tanks are empty.

[0036] The liquid discharge pipe is also provided with an exhaust valve.

[0037] The top of the controller is connected with a warning light.

[0038] The beneficial effects of the utility model are as follows:

[0039] The utility model has a compact and reasonable structure and is easy to operate. It realizes the stable and continuous supply of chemicals during the coating and developing process, greatly improving the use efficiency and production benefits of the coating and developing machine. The system is equipped with automatic monitoring, automatic switching and alarm reminder functions, which significantly improves the convenience and safety of operation.

[0040] At the same time, the utility model also has the following advantages:

[0041] 1. Improve the efficiency of liquid medicine use and resource utilization, and reduce waste.

[0042] 2. The intelligent control system reduces the complexity and error rate of manual operation.

[0043] 3. Environmentally friendly design reduces pollution to the environment and meets the requirements of green production.

[0044] 4. The multi-layer metal structure of the protective cover enhances the stability and durability of the overall equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0045] Figure 1 It is a structural schematic diagram of the utility model.

[0046] in:

[0047] 1. Medicine liquid tank; 2. Empty position sensor; 3. Medicine liquid control valve; 4. Air pump; 5. Air valve; 6. Manual valve; 7. Connecting container; 8. Filter; 9. Liquid supply pipe; 10. Drain pipe; 11. Filter drain line; 12. Filter exhaust line; 13. Exhaust valve; 14. Leakage tray; 15. Liquid supply signal source; 16. Controller; 17. Exhaust pipe; 18. Nitrogen valve; 19. Nitrogen pressure gauge; 20. Protective cover. DETAILED DESCRIPTION

[0048] The specific implementation of the present utility model is described below in conjunction with the accompanying drawings.

[0049] like Figure 1 As shown, the utility model relates to the technical field of glue developer, specifically, an independent chemical supply system for glue developer. The system can realize the stable and continuous supply of chemicals during the glue development process, and has functions such as automatic monitoring, automatic switching and alarm reminder, which greatly improves the use efficiency and safety of the glue developer. The utility model will be described in detail below in conjunction with the accompanying drawings and embodiments.

[0050] Embodiment 1

[0051] The present embodiment provides an independent chemical supply system for a coating and developing machine, which includes at least two chemical liquid tanks 1, an air pump 4, a connecting container 7, a drain pipe 10, a filter 8 and other key components.

[0052] The liquid medicine tank 1 is used to store the chemical liquid medicine required in the process of coating and developing. In order to ensure the continuity and stability of the liquid supply, the system is equipped with at least two liquid medicine tanks 1. When the liquid medicine in one liquid medicine tank 1 is exhausted, it can automatically switch to another liquid medicine tank 1 to continue the liquid supply. An empty position sensor 2 and a liquid medicine control valve 3 are installed on the connecting pipeline of each liquid medicine tank 1. The empty position sensor 2 is used to monitor the remaining liquid medicine in the liquid medicine tank 1 in real time. When the remaining liquid medicine is lower than the set value, it will trigger the automatic switching mechanism and sound an alarm to remind the operator to replenish the liquid medicine in time. The liquid medicine control valve 3 is used to control the flow of the liquid medicine. When it is necessary to switch the liquid medicine or stop the liquid supply, the liquid medicine control valve 3 will automatically close or open.

[0053] The air pump 4 is a key component for driving the flow of the medicine liquid, and it controls the liquid supply of the medicine liquid tank 1 by the amount of gas input. The air pump 4 is connected to multiple medicine liquid tanks 1 respectively, and can provide power to different medicine liquid tanks 1 as needed. The air pump 4 is connected to a signal control terminal, including an air valve 5, a manual valve 6 and a liquid supply signal source 15. The air valve 5 is used to control the circulation of gas. When liquid supply is required, the air valve 5 will open to allow gas to enter the air pump 4; when the liquid supply is stopped, the air valve 5 will close to cut off the gas source. The manual valve 6 provides a way to manually control gas delivery, which is convenient for operators to manually intervene in special circumstances. The liquid supply signal source 15 is used to provide a signal of the gas delivery amount. By adjusting the output signal of the liquid supply signal source 15, the working state of the air pump 4 can be controlled, and then the supply amount of the medicine liquid can be controlled.

[0054] The communication container 7 is connected to the output end of the air pump 4 and is used to separate the liquid medicine from gas and liquid. Under the action of the air pump 4, the liquid medicine and gas mixture enters the communication container 7. Since the density of the gas is less than that of the liquid medicine, the gas will rise to the top of the communication container 7, while the liquid medicine will remain at the bottom. In this way, the gas-liquid separation is achieved, and the purity and stability of the liquid supply are guaranteed.

[0055] The drain pipe 10 is connected to the gas delivery end of the communication container 7 to discharge the separated gas. The drain pipe 10 is also provided with an exhaust valve 13 to control the discharge of the gas. When the gas in the communication container 7 accumulates to a certain extent, the exhaust valve 13 will automatically open to discharge the gas out of the system.

[0056] The filter 8 is connected to the liquid delivery end of the communication container 7 and is used to filter impurities and particulate matter in the liquid medicine. The filter 8 is provided with a liquid supply pipe 9, a filter drain pipe 11 and a filter exhaust pipe 12. The liquid supply pipe 9 is used to deliver the filtered liquid medicine to the use point of the glue coating developer. The filter drain pipe 11 is connected to the drain pipe 10 and is used to discharge the liquid medicine after being filtered by the filter. This part of the liquid medicine can be used for cleaning and pre-filtration of the pipeline. The filter exhaust pipe 12 is also connected to the drain pipe 10 and is used to discharge the bubbles in the filter to ensure the continuity and stability of the liquid supply.

[0057] In addition, the entire system also includes a protective cover 20, which covers all the equipment and is a multi-layer metal structure to improve the overall strength. A leakage tray 14 is set on the inner bottom wall of the protective cover 20 to collect possible drug liquid leakage and prevent the drug liquid from polluting the environment. An exhaust pipe 17 is connected to the side wall of the protective cover 20 to discharge harmful gases generated inside the system to ensure the safety of the system.

[0058] In order to realize intelligent control of the system, a controller 16 is also equipped. The battery of the controller 16 is connected to all electrical equipment, valves and sensors, and can monitor the capacity of the liquid medicine tank 1, the working status of the air pump 4, the blockage of the filter 8 and other information in real time. When one of the liquid medicine tanks 1 is empty, the controller 16 will automatically switch to another liquid medicine tank 1 for liquid supply; when all liquid medicine tanks 1 are empty, the controller 16 will sound an alarm to remind the operator to replenish the liquid medicine in time. At the same time, a warning light is also connected to the top of the controller 16. When the system fails or an abnormal situation occurs, the warning light will flash or change color to remind the operator to pay attention.

[0059] Embodiment 2

[0060] Based on the first embodiment, this embodiment further describes the workflow and operation steps of the independent chemical supply system of the coating and developing machine in actual application.

[0061] First, the operator needs to check whether the remaining amount of liquid medicine in each liquid medicine tank 1 is sufficient. If it is insufficient, it needs to be replenished in time. Then, the controller 16 is turned on to start the system. At this time, the air valve 5 will automatically open to allow gas to enter the air pump 4. After the air pump 4 starts working, it extracts the liquid medicine from the liquid medicine tank 1 and transports it to the connecting container 7 for gas-liquid separation. The separated liquid medicine is filtered by the filter 8 and then transported to the use point of the glue coating and developing machine through the liquid supply pipe 9.

[0062] The manual valve 6 can autonomously control the operation of the air pump 4 when the equipment is started, which can achieve the effect of emptying the equipment and avoid mutual influence and interference between different liquid medicines.

[0063] During the liquid supply process, the controller 16 will monitor the capacity of the liquid medicine tank 1 and the working status of the air pump 4 in real time. When one of the liquid medicine tanks 1 is empty, the controller 16 will automatically switch to the other liquid medicine tank 1 for liquid supply; at the same time, an alarm will be issued to remind the operator to replenish the liquid medicine in time. If the filter 8 is blocked and the liquid supply is not smooth, the controller 16 will also issue an alarm and automatically switch to the spare filter or stop the liquid supply to prevent damage to the equipment.

[0064] When it is necessary to stop the liquid supply, the operator can close the air valve 5 and the manual valve 6 through the controller 16 to cut off the gas source and the power input of the air pump 4; at the same time, open the exhaust valve 13 to discharge the gas in the connecting container 7 and the filter 8 out of the system to ensure the safety and stability of the system.

[0065] Embodiment 3

[0066] On the basis of the first and second embodiments, this embodiment further considers the safety and environmental protection design of the independent chemical supply system of the coating and developing machine.

[0067] In order to improve the safety of the system, in addition to setting up a leakage tray 14 in the protective cover 20 to collect liquid leakage, a harmful gas detector can also be installed on the exhaust pipe 17 to monitor in real time whether the content of harmful components in the exhaust gas exceeds the standard. If it exceeds the standard, the exhaust pipe 17 will be automatically closed and an alarm will be issued to remind the operator to deal with it in time.

[0068] At the same time, in order to reduce environmental pollution and improve resource utilization, a recovery device can be set on the filter discharge pipeline 11 to collect the liquid medicine filtered by the filter for reuse or centralized treatment; the liquid medicine that cannot be reused needs to be harmlessly treated before being discharged into the environment.

[0069] In addition, an energy consumption monitoring module can be set in the controller 16 to monitor the energy consumption of the system in real time and make adjustments according to the actual situation to achieve the purpose of energy saving and emission reduction. For example, during the switching process of the liquid medicine tank 1, the switching algorithm can be optimized to reduce the waste of liquid medicine; when the air pump 4 is working, its working frequency can be adjusted according to the actual liquid supply demand to reduce energy consumption, etc.

[0070] To sum up, the independent chemical supply system for the coating and developing machine provided by the utility model has the functions of stability, continuity, automatic monitoring, automatic switching and alarm reminder; at the same time, the safety and environmental protection design are taken into consideration, so that the system has better use effect and broader application prospects in practical applications.

[0071] The above description is an explanation of the utility model, not a limitation of the utility model. The scope of the utility model is defined by the claims. Any form of modification can be made within the protection scope of the utility model.

Claims

1. Independent chemical supply system for glue coating and developing machine, characterized by: include: At least two liquid medicine tanks (1); An air pump (4) which is respectively connected to the plurality of liquid medicine tanks (1) and drives the liquid supply, and the air pump (4) controls the liquid supply amount of the liquid medicine tank (1) by the amount of gas input; A communication container (7) connected to the output end of the air pump (4) and used for gas-liquid separation of the drug liquid; A liquid discharge pipe (10), which is connected to the gas delivery end of the communication container (7) and is used to discharge the gas; The filter (8) is connected to the liquid delivery end of the communication container (7) and is used to filter the liquid medicine. The filter (8) is provided with: A liquid supply pipe (9), which is used to transport the filtered liquid medicine; A filter drainage pipeline (11), which is connected to the drainage pipe (10) and discharges the liquid medicine after being filtered by the filter, and is used for pre-filtration for pipeline cleaning; The filter exhaust pipe (12) is connected to the drain pipe (10) to discharge the bubbles in the filter.

2. The independent chemical supply system for a coating and developing machine as claimed in claim 1, characterized in that: The connecting pipeline of each of the liquid medicine tanks (1) is provided with a vacancy sensor (2) and a liquid medicine control valve (3).

3. The independent chemical supply system for a coating and developing machine as claimed in claim 1, characterized in that: The liquid medicine tank (1) is also provided with a nitrogen supply pipeline, and the nitrogen supply pipeline is provided with a nitrogen valve and a nitrogen pressure gauge.

4. The independent chemical supply system for a coating and developing machine as claimed in claim 1, characterized in that: The air pump (4) is connected to a signal control terminal, and the signal control terminal comprises: Air valve (5), controlling the flow of gas; A manual valve (6) for manually controlling the delivery of gas; The liquid supply signal source (15) is used to provide the gas delivery amount.

5. The independent chemical supply system for a coating developer according to any one of claims 1 to 4, characterized in that: It also includes a protective cover (20) which covers all the equipment, and the protective cover (20) is a multi-layer metal structure to improve the overall strength.

6. The independent chemical supply system for a coating developer as claimed in claim 5, characterized in that: A leakage disk (14) is provided on the inner bottom wall of the protective cover (20), and an exhaust pipe (17) is connected to the side wall of the protective cover (20).

7. The independent chemical supply system for a coating developer as claimed in claim 5, characterized in that: It also includes a controller (16), whose battery cell is connected to all electrical devices, valves and sensors, and is capable of monitoring the capacity of the liquid medicine tanks (1), automatically switching when one of the liquid medicine tanks (1) is empty, and issuing an alarm when all the liquid medicine tanks (1) are empty.

8. The independent chemical supply system for a coating and developing machine as claimed in claim 1, characterized in that: The liquid discharge pipe (10) is also provided with an exhaust valve (13).

9. The independent chemical supply system for a coating and developing machine as claimed in claim 7, characterized in that: The top of the controller (16) is connected to a warning light.

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