Defoaming mechanism for wet process equipment

Abstract

The utility model belongs to the technical field of liquid conveying, and relates to a defoaming mechanism for wet-process equipment, which comprises a buffer container, a liquid inlet component, an exhaust component and a liquid outlet component, wherein the liquid inlet component and the exhaust component are arranged at the upper part of the buffer container, and the liquid outlet component is arranged at the lower part of the buffer container; the buffer container comprises a hollow shell and an air filtering hole plate vertically arranged in the shell, the bottom edge and the side edge of the air filtering hole plate are connected with the inner wall of the shell and divide an inner cavity of the shell into a liquid inlet cavity and a liquid outlet cavity, and a plurality of small holes are evenly formed in the air filtering hole plate; the liquid inlet assembly comprises a liquid inlet pipe penetrating through the top face of the shell, and an outlet of the liquid inlet pipe extends to the position, close to the bottom face, in the liquid inlet cavity. The mechanism can help liquid with large flow and many bubbles to thoroughly remove the bubbles, and the accuracy of the liquid batching amount is ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of liquid transportation, in particular to a defoaming mechanism for wet process equipment. Background Art

[0002] In the field of photovoltaic cell manufacturing, the stability of the plant service liquid supply system required by wet process equipment is also an important factor affecting the performance of the equipment. The pressure stability of the liquid supply system and whether there are bubbles in the pipeline solution are important factors affecting the accuracy of equipment addition. When there are bubbles in the pipeline, the flow meter in the equipment will become inaccurate and unable to accurately add liquid replenishment, which will affect the silicon wafer cleaning process and cause defects. At present, the industry mostly avoids this problem by upgrading the plant service system, but for small battery cell manufacturers, their usage is limited and the cost of transformation is too high, so the bubbles in the liquid from the plant service end to the equipment end cannot be solved. Some manufacturers can only eliminate some of the effects of bubbles by setting the flow meter, but when the bubbles are large and the number is large, the capacity of the flow meter is limited, which will affect the accuracy of its addition to the tank.

[0003] Chinese patent CN218130122U discloses a gas-liquid separation device suitable for a chemical supply system, including a container with a hollow cavity, a liquid inlet pipeline extending from the bottom of the container into the hollow cavity and opening an overflow near the top, a liquid outlet pipeline located at the bottom of the hollow cavity, and a gas exhaust component at the top of the hollow cavity. The liquid inlet pipeline delivers a gas-liquid mixture into the container. Because the density of bubbles is lighter than that of water, theoretically, the bubbles in the container will rise and then be discharged from the gas exhaust component, and the liquid will fall and then be delivered from the liquid outlet pipeline. However, when there are a lot of bubbles and the liquid flow is large, the bubbles will not be separated in time and will be washed into the liquid outlet pipeline by the liquid, and the bubbles will not be completely removed.

[0004] Therefore, it is necessary to improve the defoaming mechanism to solve the above problems. Utility Model Content

[0005] The main purpose of the utility model is to provide a defoaming mechanism for wet process equipment, which can help to completely remove bubbles from liquid with large flow and many bubbles, and ensure the accuracy of liquid dosage.

[0006] The utility model achieves the above-mentioned purpose through the following technical scheme: a defoaming mechanism for wet process equipment, comprising a buffer container, a liquid inlet component and an exhaust component arranged at the upper part of the buffer container, and a liquid outlet component arranged at the lower part of the buffer container.

[0007] The cache container includes a hollow shell and an air filter plate vertically arranged in the shell, the bottom and side edges of the air filter plate are connected to the inner wall of the shell and divide the inner cavity of the shell into a liquid inlet cavity and a liquid outlet cavity, and a plurality of small holes are evenly arranged on the air filter plate;

[0008] The liquid inlet assembly includes a liquid inlet pipe passing through the top surface of the shell, and the outlet of the liquid inlet pipe extends to a position close to the bottom surface in the liquid inlet cavity;

[0009] The exhaust assembly includes an exhaust pipe connected to the top of the shell;

[0010] The liquid outlet component comprises a liquid outlet pipe connected to the bottom surface of the liquid outlet cavity.

[0011] Specifically, the exhaust assembly also includes a liquid level tube connecting the exhaust pipe and the side wall of the shell, the liquid level tube is provided with a liquid level switch whose detection position is lower than the highest position of the air filter plate, and an exhaust valve is provided at the end of the exhaust pipe, and the liquid level switch is used to control the opening and closing of the exhaust valve.

[0012] Furthermore, the edge of the liquid inlet pipe outlet is inclined toward a side away from the liquid level tube, a liquid blocking plate is provided between the air filter plate and the liquid inlet pipe outlet, and the height of the liquid blocking plate is smaller than the height of the air filter plate.

[0013] Specifically, the diameter of the small hole is 2-6 mm.

[0014] Specifically, a liquid inlet valve is provided at the inlet of the liquid inlet pipe, and a liquid outlet valve is provided at the end of the liquid outlet pipe.

[0015] The beneficial effects of the technical solution of the utility model are:

[0016] This defoaming mechanism can make most of the bubbles float to the space above the liquid inlet chamber because their density is smaller than that of water. Even if a small part of the bubbles flow to the liquid outlet chamber, they will be blocked by the air filter plate. The bubbles will gather and merge at the edge of the small hole, grow from small to large, and finally overcome the surface tension of the liquid and float up. Even if there are smaller bubbles passing through the small hole, they will float up because the liquid flow rate drops lower, so these gases will eventually gather at the top of the shell and then be discharged from the exhaust pipe. The gas content in the liquid in the liquid inlet chamber will drop to an extremely low level, which can meet the defoaming requirements. Therefore, this mechanism can help liquids with large flow and many bubbles to completely remove bubbles and ensure the accuracy of liquid batching. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a cross-sectional view of the defoaming mechanism for wet process equipment.

[0018] The numbers in the figure represent:

[0019] 1- cache container, 11- shell, 11a- liquid inlet chamber, 11b- liquid outlet chamber, 12- air filter plate, 121- small hole, 13- liquid blocking plate;

[0020] 2-liquid inlet assembly, 21-liquid inlet pipe, 211-outlet, 22-liquid inlet valve;

[0021] 3-exhaust assembly, 31-exhaust pipe, 32-exhaust valve, 33-liquid level pipe, 34-liquid level switch;

[0022] 4-liquid outlet assembly, 41-liquid outlet pipe, 42-liquid outlet valve. DETAILED DESCRIPTION

[0023] The utility model is further described in detail below in conjunction with specific embodiments.

[0024] Example:

[0025] like Figure 1 As shown, the defoaming mechanism for wet equipment of the utility model comprises a buffer container 1, a liquid inlet assembly 2 and an exhaust assembly 3 arranged at the upper part of the buffer container 1, and a liquid outlet assembly 4 arranged at the lower part of the buffer container 1; the buffer container 1 comprises a hollow shell 11 and an air filter plate 12 vertically arranged in the shell 11, the bottom and side edges of the air filter plate 12 are connected to the inner wall of the shell 11 and divide the inner cavity of the shell 11 into a liquid inlet cavity 11a and a liquid outlet cavity 11b, and a plurality of small holes 121 are evenly arranged on the air filter plate 12; the liquid inlet assembly 2 comprises a liquid inlet pipe 21 passing through the top surface of the shell, the outlet 211 of the liquid inlet pipe 21 extends to a position close to the bottom surface of the liquid inlet cavity 11a, and a liquid inlet valve 22 is provided at the inlet of the liquid inlet pipe 21; the liquid outlet assembly 4 comprises a liquid outlet pipe 41 connected to the bottom surface of the liquid outlet cavity 11b, and a liquid outlet valve 42 is provided at the end of the liquid outlet pipe 41.

[0026] At the beginning of operation, the inlet valve 22 is opened, and the liquid containing bubbles is injected into the inlet chamber 11a through the inlet pipe 21. After the outlet valve 42 is opened, the liquid can only flow out of the housing 11 through the outlet pipe 41. Because the small hole 121 maintains the connection between the inlet chamber 11a and the outlet chamber 11b, as the liquid level of the inlet chamber 11a rises, the liquid level of the outlet chamber 11b will also rise. Under the premise that the liquid level is not higher than the air filter plate 12, the liquid must pass through the small hole 121 to flow from the inlet chamber 11a to the outlet chamber 11b. When the liquid just enters the liquid inlet chamber 11a, the flow rate will be greatly reduced. At this time, most of the bubbles will float to the upper space of the liquid inlet chamber 11a because their density is smaller than that of water. Even if a small part of the bubbles flow to the liquid outlet chamber 11b, they will be blocked by the air filter plate 12. The bubbles will gather and merge at the edge of the small hole 121, grow from small to large, and finally overcome the surface tension of the liquid and float up. Even if there are smaller bubbles passing through the small hole 121, they will float up because the liquid flow rate drops lower, so these gases will eventually gather at the top of the shell 11 and then be discharged from the exhaust pipe 31. The gas content in the liquid in the liquid inlet chamber 11a will drop to an extremely low level, so that the defoaming requirements can be met. Therefore, this mechanism can help liquids with large flow and many bubbles to thoroughly remove bubbles and ensure the accuracy of the liquid dosage. Experience has found that the diameter of the small hole 12 is 2-6mm, and the treatment effect is better, because the aperture is too large, the bubble interception effect is poor, and the aperture is too small, the liquid flow resistance is large, and the treatment volume is small.

[0027] like Figure 1 As shown, the exhaust component 3 includes an exhaust pipe 31 connected to the top of the shell 11, and the exhaust component 3 also includes a liquid level pipe 33 connecting the exhaust pipe 31 and the side wall of the shell 11. The liquid level pipe 33 is provided with a liquid level switch 34 whose detection position is lower than the highest position of the air filter plate 12. An exhaust valve 32 is provided at the end of the exhaust pipe 31, and the liquid level switch 34 is used to control the switch of the exhaust valve 32.

[0028] During exhaust, the exhaust valve 32 is generally kept closed to prevent the liquid level from exceeding the height of the filter air hole plate 12 and causing a decrease in the defoaming effect. However, as the gas gathers, the liquid level will continue to drop under the action of the gas pressure. Once it is lower than a certain minimum value, the liquid can no longer be injected into the housing 11. Therefore, it is necessary to use a liquid level switch 34 to control the intermittent opening of the exhaust valve 32. At this time, the liquid level will rise again until it returns to the highest value of the set liquid level, thereby ensuring the continuous defoaming.

[0029] like Figure 1 As shown, the edge of the outlet 211 of the liquid inlet pipe 21 is inclined toward the side away from the liquid level pipe 33 , and a liquid blocking plate 13 is provided between the air filter plate 12 and the outlet of the liquid inlet pipe 21 .

[0030] When the liquid is ejected from the outlet 211 of the liquid inlet pipe 21, the initial velocity is very large, so it will splash in all directions. In order not to affect the stability of the liquid level in the liquid level pipe 33 and cause the exhaust valve 32 to switch frequently, the liquid outlet direction should be adjusted in the opposite direction; at the same time, the liquid flow rate in the direction of the filter plate 12 is too fast, which will cause more bubbles to pass through the small holes 121, which is not conducive to the defoaming effect. Therefore, the liquid blocking plate 13 is used here to reduce the initial velocity of the liquid in the direction of the filter plate 12, so that this problem can be avoided.

[0031] The above are only some embodiments of the present invention. For those skilled in the art, several modifications and improvements can be made without departing from the inventive concept of the present invention, which all belong to the protection scope of the present invention.

Claims

1. A defoaming mechanism for wet process equipment, comprising a buffer container, a liquid inlet assembly and an exhaust assembly arranged at the upper part of the buffer container, and a liquid outlet assembly arranged at the lower part of the buffer container, characterized in that: The cache container includes a hollow shell and an air filter plate vertically arranged in the shell, the bottom and side edges of the air filter plate are connected to the inner wall of the shell and divide the inner cavity of the shell into a liquid inlet cavity and a liquid outlet cavity, and a plurality of small holes are evenly arranged on the air filter plate; The liquid inlet assembly includes a liquid inlet pipe passing through the top surface of the shell, and the outlet of the liquid inlet pipe extends to a position close to the bottom surface in the liquid inlet cavity; The exhaust assembly includes an exhaust pipe connected to the top of the shell; The liquid outlet component comprises a liquid outlet pipe connected to the bottom surface of the liquid outlet cavity.

2. The defoaming mechanism for wet process equipment according to claim 1, characterized in that: The exhaust assembly also includes a liquid level tube connecting the exhaust pipe and the side wall of the shell, the liquid level tube is provided with a liquid level switch whose detection position is lower than the highest position of the air filter plate, and an exhaust valve is provided at the end of the exhaust pipe, and the liquid level switch is used to control the opening and closing of the exhaust valve.

3. The defoaming mechanism for wet process equipment according to claim 2, characterized in that: The edge of the liquid inlet pipe outlet is inclined toward a side away from the liquid level pipe, and a liquid blocking plate is provided between the air filter plate and the liquid inlet pipe outlet, and the height of the liquid blocking plate is smaller than the height of the air filter plate.

4. The defoaming mechanism for wet process equipment according to claim 1, characterized in that: The diameter of the small hole is 2-6 mm.

5. The defoaming mechanism for wet process equipment according to claim 1, characterized in that: The inlet of the liquid inlet pipe is provided with a liquid inlet valve, and the end of the liquid outlet pipe is provided with a liquid outlet valve.

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