Argon drying device

Abstract

The utility model discloses an argon drying device which comprises a supporting frame, an input cylinder, an output cylinder and a fixing frame fixedly installed between the input cylinder and the output cylinder, a supporting column is fixedly installed at the bottom end of the fixing frame, a discharging hopper is installed at the top end of the input cylinder in a communicated mode, and a storage cylinder is installed at the bottom end of the output cylinder in a communicated mode. A stand column is arranged between the supporting frame and the input barrel, a motor is fixedly installed at the top end of the stand column, the output end of the motor is in transmission connection with a rotating plate, drying barrels are fixedly installed at the two ends of the rotating plate, and one drying barrel is arranged between the input barrel and the output barrel. And the other drying cylinder is arranged below the supporting frame, and a filter screen is arranged in the drying cylinder. According to the silica gel drying device, the silica gel drying agent can be rapidly replaced, the saturated silica gel drying agent is dried, and subsequent repeated replacement is facilitated.

Description

Technical Field

[0001] The utility model relates to the technical field of argon drying, in particular to an argon drying device. Background Art

[0002] Argon is a colorless, odorless monatomic gas with a relative atomic mass of 39.948 and a density 1.4 times that of air and 10 times that of helium. As an inert gas, argon does not react chemically with other substances at room temperature and is insoluble in liquid metal at high temperatures. This property makes it superior in welding non-ferrous metals.

[0003] Argon plays a vital role in the semiconductor industry. First, it can be used as a protective gas. When semiconductor materials are deposited through chemical vapor deposition and other techniques in the process of manufacturing transistors and integrated circuits, argon can prevent the materials from being affected by air oxidation and ensure the purity and quality of the product. Secondly, argon also acts as a carrier gas in the reaction chamber, especially in the high-temperature chemical vapor deposition process of solar cells, it ensures the stability and controllability of the reaction. In addition, in many links of semiconductor device preparation, such as crystal growth, thermal oxidation, epitaxy, diffusion, etc., argon plays an important role and helps to improve the quality and performance of the product. In summary, the wide application of argon in the semiconductor industry has not only improved production efficiency, but also significantly improved the reliability and durability of products.

[0004] Argon usually needs to be dried before use to ensure its purity and quality. Common drying methods include using desiccants such as silica gel, NaOH, quicklime, etc. to absorb the moisture in it, or directly drying it through a device filled with concentrated sulfuric acid. These measures are aimed at removing moisture from argon and meeting the demand for dry gas in specific applications, thereby improving process stability and product quality.

[0005] Patent document CN207856635U discloses an argon drying device for aluminum alloy refining, including a drying box, a transparent observation window is embedded in the front surface of the drying box, a cooling interlayer is provided on the outer surface of the drying box, a first sealing end cover and a second sealing end cover are installed at both ends of the drying box by fastening bolts, a sealing ring is provided between the first sealing end cover and the second sealing end cover and the drying box, an air inlet pipe and a fixing frame are installed on the first sealing end cover, an air outlet pipe and a fixing frame are installed on the second sealing end cover, a fixing device is installed on the lower side of the fixing frame, and the fixing device is located on the air inlet pipe and the air outlet pipe, a filter screen is installed inside the filter box, and a silica gel desiccant is filled inside the drying box. The utility model can remove impurities in argon gas well by detachably installing the filter screen inside the filter box, and can well improve the dehumidification effect by respectively providing a liquid inlet pipe and a liquid outlet pipe on the upper and lower sides of the cooling interlayer.

[0006] As in the prior art of the above-mentioned patent, the above-mentioned argon drying device passes the argon gas to be dried into the interior of the drying box, and then the silica gel desiccant inside the drying box absorbs the moisture inside the argon gas to achieve drying of the argon gas. As the silica gel desiccant continues to absorb moisture, its adsorption capacity will gradually reach its limit, that is, saturation will occur, and the silica gel desiccant will lose the ability to continue to adsorb moisture and can no longer effectively reduce the humidity of the environment. At this time, the silica gel desiccant needs to be replaced, and the above-mentioned device needs to be disassembled, and then the new silica gel desiccant is installed in the interior of the drying box. During this process, the operation of drying the argon gas needs to be stopped, and the drying operation is continued after the installation is completed. The process of disassembling, replacing and installing the silica gel desiccant consumes too much time, which will delay the process of drying the argon gas. Utility Model Content

[0007] The purpose of the utility model is to provide an argon drying device to solve the above-mentioned deficiencies in the prior art.

[0008] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: an argon drying device, comprising a support frame, an input cylinder, an output cylinder and a fixed frame fixedly installed between the input cylinder and the output cylinder, the bottom end of the fixed frame is fixedly installed with a support column, the top end of the input cylinder is connected and installed with a lower hopper, the bottom end of the output cylinder is connected and installed with a storage cylinder, a column is arranged between the support frame and the input cylinder, the top end of the column is fixedly installed with a motor, the output end of the motor is transmission-connected with a rotating plate, both ends of the rotating plate are fixedly installed with drying cylinders, one of the drying cylinders is arranged between the input cylinder and the output cylinder, and the other drying cylinder is arranged below the support frame, a filter is arranged inside the drying cylinder, a drying mechanism is arranged below the support frame, and an automatic sealing mechanism is arranged between the input cylinder, the output cylinder and the drying cylinder.

[0009] As a further description of the above technical solution: the automatic sealing mechanism includes a plurality of electrode sheets, which are respectively fixedly mounted on the side walls of the two drying cylinders, an electromagnet is fixedly connected between the two electrode sheets, magnetic suction grooves are respectively fixedly mounted on the top and bottom ends of the plurality of electrode sheets, two slide grooves are respectively provided on the side walls of the input cylinder and the output cylinder, sliders are slidably mounted inside the plurality of slide grooves, tension springs are arranged inside the plurality of slide grooves, one end of the plurality of tension springs is fixedly connected to the inner wall of the slide groove, and the other end of the plurality of tension springs is fixedly connected to the slider, sealing rings are slidably mounted on the side walls of the input cylinder and the output cylinder, the two sealing rings are respectively fixedly connected to the plurality of sliders, and limiting blocks are fixedly mounted on the ends of the two sealing rings close to the drying cylinder, and the two limiting blocks are adapted to the magnetic suction grooves.

[0010] As a further description of the above technical solution: the drying mechanism includes a support ring and a blowing fan, the support ring is fixedly installed on the bottom end of the support frame, the blowing fan is fixedly installed inside the support ring, and the blowing fan is arranged directly above the drying cylinder.

[0011] As a further description of the above technical solution: a plurality of heating wires are arranged inside the support ring, and the plurality of heating wires are arranged between the blowing fan and the drying cylinder.

[0012] As a further description of the above technical solution: the bottom end of the drying cylinder is connected to and installed with a collecting cylinder.

[0013] As a further description of the above technical solution: a one-way valve is arranged inside the output cylinder.

[0014] The utility model provides an argon drying device. It has the following beneficial effects: when drying argon, argon is input through a lower hopper and enters an output cylinder, and then enters a drying cylinder. A silica gel desiccant is arranged on a filter screen inside the drying cylinder, and the silica gel desiccant can dry the argon. After drying, the argon is output through the output cylinder and enters the interior of a storage cylinder, and the dried argon is collected. When the silica gel desiccant inside the drying cylinder is close to saturation, the lock of the automatic sealing mechanism is released, and the motor is started, and the motor drives the rotating plate to rotate, and the rotating plate drives the drying cylinders at both ends to rotate, and the drying cylinder under the support frame is moved between the input cylinder and the output cylinder, and then the automatic sealing mechanism realizes automatic sealing, and the operation of continuing argon drying can be realized subsequently, and the drying cylinder where the nearly saturated silica gel desiccant is placed is moved to the bottom of the support frame, and then the drying mechanism dries the saturated silica gel desiccant to remove the moisture inside the silica gel desiccant, so as to facilitate the replacement of the silica gel desiccant next time. The above operation realizes the rapid replacement of the silica gel desiccant, and dries the saturated silica gel desiccant, so as to facilitate the subsequent repeated replacement.

[0015] It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the disclosure.

[0016] This application document provides an overview of various implementations or examples of the technology described in the present disclosure, and is not a comprehensive disclosure of the entire scope or all features of the disclosed technology. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a schematic diagram of the overall three-dimensional structure of an argon drying device proposed by the utility model;

[0018] Figure 2 This is a schematic diagram of the main structure of the utility model;

[0019] Figure 3It is a schematic diagram of the three-dimensional explosion structure of the drying cylinder, storage cylinder and sealing ring of the utility model;

[0020] Figure 4 For the utility model Figure 3 A schematic diagram of the enlarged structure at point A;

[0021] Figure 5 It is a three-dimensional structural schematic diagram of the drying mechanism of the utility model;

[0022] Figure 6 It is a schematic diagram of the main structure of the electrode sheet, electromagnet and magnetic suction groove of the utility model;

[0023] Figure 7 The utility model is a cross-sectional structural diagram of a one-way valve disposed inside the output cylinder.

[0024] Legend:

[0025] 1. Support column; 2. Fixed frame; 3. Input cylinder; 4. Output cylinder; 5. Storage cylinder; 6. Lower hopper; 7. Column; 8. Motor; 9. Rotating plate; 10. Drying cylinder; 11. Support frame; 12. Collecting cylinder; 13. Blowing fan; 14. Support ring; 15. Heating wire; 16. Electromagnet; 17. Electrode sheet; 18. Magnetic suction groove; 19. Slide; 20. Tension spring; 21. Sliding block; 22. Sealing ring; 23. Limit block; 24. Filter; 25. One-way valve. DETAILED DESCRIPTION

[0026] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0027] Reference Figure 1-7, an argon drying device, comprising a support frame 11, an input tube 3, an output tube 4 and a fixed frame 2 fixedly installed between the input tube 3 and the output tube 4, the bottom end of the fixed frame 2 is fixedly installed with a support column 1, the top end of the input tube 3 is connected and installed with a lower hopper 6, the bottom end of the output tube 4 is connected and installed with a storage tube 5, a column 7 is arranged between the support frame 11 and the input tube 3, a motor 8 is fixedly installed on the top of the column 7, the output end of the motor 8 is transmission-connected with a rotating plate 9, and drying tubes 10 are fixedly installed at both ends of the rotating plate 9, one of the drying tubes 10 is arranged between the input tube 3 and the output tube 4, and the other drying tube 10 is arranged below the support frame 11, a filter screen 24 is arranged inside the drying tube 10, a drying mechanism is arranged below the support frame 11, and an automatic sealing mechanism is arranged between the input tube 3, the output tube 4 and the drying tube 10; when drying argon, argon is input into the output tube 4 through the lower hopper 6 and enters the drying tube 1 0, a silica gel desiccant is arranged on the filter screen 24 inside the drying cylinder 10, and the silica gel desiccant can dry the argon gas. After the drying is completed, the argon gas is output through the output cylinder 4 and enters the interior of the storage cylinder 5, and the dried argon gas is collected. When the silica gel desiccant inside the drying cylinder 10 is close to saturation, the lock of the automatic sealing mechanism is released, and the motor 8 is started. The motor 8 drives the rotating plate 9 to rotate, and the rotating plate 9 drives the drying cylinders 10 at both ends to rotate, and the drying cylinder 10 under the support frame 11 is moved between the input cylinder 3 and the output cylinder 4, and then the automatic sealing mechanism realizes automatic sealing, and the operation of continuing the argon drying can be realized subsequently. The drying cylinder 10 where the silica gel desiccant is placed close to saturation is moved to the bottom of the support frame 11, and then the drying mechanism dries the saturated silica gel desiccant to remove the moisture inside the silica gel desiccant, so as to facilitate the replacement of the silica gel desiccant next time. The above operation realizes the rapid replacement of the silica gel desiccant and dries the saturated silica gel desiccant, so as to facilitate the subsequent repeated replacement.

[0028] As a preferred technical solution of this embodiment, the automatic sealing mechanism includes a plurality of electrode sheets 17, and the plurality of electrode sheets 17 are respectively fixedly installed on the side walls of the two drying cylinders 10, an electromagnet 16 is fixedly connected between the two electrode sheets 17, and magnetic suction grooves 18 are respectively fixedly installed on the top and bottom ends of the plurality of electrode sheets 17, and the side walls of the input cylinder 3 and the output cylinder 4 are respectively provided with two slide grooves 19, and sliders 21 are slidably installed inside the plurality of slide grooves 19, and tension springs 20 are arranged inside the plurality of slide grooves 19, and one end of the plurality of tension springs 20 is fixedly connected to the inner wall of the slide groove 19, and the other end of the plurality of tension springs 20 is fixedly connected to the slider 21, and the side walls of the input cylinder 3 and the output cylinder 4 are both slidably installed with sealing rings 22, and the two sealing rings 22 are respectively fixedly connected to the plurality of sliders 21, and the two sealing rings 22 are close to the drying cylinder. One end of each of the electrodes 10 is fixedly installed with a limit block 23, and the two limit blocks 23 are adapted to the magnetic suction grooves 18; the magnetic suction grooves 18 at both ends of the electrode sheet 17 attract the limit blocks 23 at both ends of the two sealing rings 22, and the two limit blocks 23 drive the sealing rings 22 to move under the action of the magnetic suction grooves 18, and the two sealing rings 22 seal the connection between the input cylinder 3, the output cylinder 4 and the drying cylinder 10, thereby increasing the sealing performance of the drying process and preventing argon gas from leaking. When it is necessary to release the attraction between the limit blocks 23 and the magnetic suction grooves 18, the electrode sheets 17 at both ends are energized. After the electrode sheets 17 are energized, the electromagnets 16 have magnetism, which can make the magnetic suction grooves 18 at both ends generate a repulsive force on the limit blocks 23. The repulsive force is greater than the attractive force of the magnetic suction grooves 18 on the limit blocks 23, so that the two sealing rings can be ejected, and the drying cylinder 10 can be replaced.

[0029] As the preferred technical solution of this embodiment, the drying mechanism includes a support ring 14 and a blowing fan 13. The support ring 14 is fixedly mounted on the bottom end of the support frame 11, and the blowing fan 13 is fixedly mounted inside the support ring 14. The blowing fan 13 is arranged directly above the drying cylinder 10.

[0030] As a preferred technical solution of this embodiment, a plurality of heating wires 15 are arranged inside the support ring 14, and the plurality of heating wires 15 are arranged between the blowing fan 13 and the drying cylinder 10; the wind blown out by the blowing fan 13 can be heated by the heating wires 15, and the heated wind can dry the silica gel desiccant and evaporate the moisture inside the silica gel desiccant.

[0031] As a preferred technical solution of this embodiment, the bottom end of the drying cylinder 10 is connected to a collecting cylinder 12; the moisture inside the silica gel desiccant is dried by the drying mechanism, and the dried moisture falls into the collecting cylinder 12, so that the water inside the saturated silica gel desiccant can be collected and recycled, thereby increasing the environmental performance of the device.

[0032] As a preferred technical solution of this embodiment, a one-way valve 25 is provided inside the output tube 4; the one-way valve 25 enables the dried argon gas to flow from the output tube 4 to the inside of the storage tube 5 in one direction without backflow.

[0033] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the technical scope disclosed by the present invention according to the technical scheme and the utility model concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. An argon drying device, comprising a support frame (11), an input cylinder (3), an output cylinder (4) and a fixed frame (2) fixedly installed between the input cylinder (3) and the output cylinder (4), characterized in that: A support column (1) is fixedly mounted on the bottom end of the fixed frame (2); a lower hopper (6) is connected to the top end of the input cylinder (3); a storage cylinder (5) is connected to the bottom end of the output cylinder (4); a column (7) is arranged between the support frame (11) and the input cylinder (3); a motor (8) is fixedly mounted on the top end of the column (7); a rotating plate (9) is drivingly connected to the output end of the motor (8); drying cylinders (10) are fixedly mounted on both ends of the rotating plate (9); one of the drying cylinders (10) is arranged between the input cylinder (3) and the output cylinder (4); the other drying cylinder (10) is arranged below the support frame (11); a filter screen (24) is arranged inside the drying cylinder (10); a drying mechanism is arranged below the support frame (11); and an automatic sealing mechanism is arranged between the input cylinder (3), the output cylinder (4) and the drying cylinder (10).

2. The argon drying device according to claim 1, characterized in that: The automatic sealing mechanism comprises a plurality of electrode sheets (17), the plurality of electrode sheets (17) are respectively fixedly mounted on the side walls of the two drying cylinders (10), an electromagnet (16) is fixedly connected between the two electrode sheets (17), a magnetic suction groove (18) is respectively fixedly mounted on the top and bottom ends of the plurality of electrode sheets (17), two slide grooves (19) are respectively provided on the side walls of the input cylinder (3) and the output cylinder (4), a slider (21) is slidably mounted inside the plurality of slide grooves (19), and a pull rod (21) is arranged inside the plurality of slide grooves (19). A plurality of tension springs (20) are provided, one end of each of the tension springs (20) is fixedly connected to the inner wall of the slide groove (19), and the other end of each of the tension springs (20) is fixedly connected to the slider (21). The side walls of the input cylinder (3) and the output cylinder (4) are both slidably mounted with sealing rings (22). The two sealing rings (22) are respectively fixedly connected to the plurality of sliders (21). A limiting block (23) is fixedly mounted on one end of each of the two sealing rings (22) close to the drying cylinder (10), and the two limiting blocks (23) are mutually adapted to the magnetic suction groove (18).

3. The argon drying device according to claim 1, characterized in that: The drying mechanism comprises a support ring (14) and a blowing fan (13); the support ring (14) is fixedly mounted on the bottom end of the support frame (11); the blowing fan (13) is fixedly mounted inside the support ring (14); and the blowing fan (13) is arranged directly above the drying cylinder (10).

4. The argon drying device according to claim 3, characterized in that: A plurality of electric heating wires (15) are arranged inside the support ring (14), and the plurality of electric heating wires (15) are arranged between the blowing fan (13) and the drying cylinder (10).

5. The argon drying device according to claim 1, characterized in that: The bottom end of the drying cylinder (10) is connected to a collecting cylinder (12).

6. The argon drying device according to claim 1, characterized in that: A one-way valve (25) is arranged inside the output cylinder (4).

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