Clamp of push-pull force test equipment

Abstract

The utility model is applicable to the technical field of semiconductor chip processing, and provides a clamp of push-pull force test equipment, which comprises an assembly plate, and a clamp base is fixedly mounted at the top of the assembly plate; the two-way screw rod is rotatably installed on the clamp base, two sleeve blocks are arranged on the two-way screw rod in a threaded and sleeving mode, and clamping blocks used for clamping and fixing a semiconductor chip to be tested are fixedly installed at the top ends of the two sleeve blocks; the knob is fixed at one end of the two-way screw rod, and a rotary scale bar is arranged on the knob; the plurality of suction nozzles are arranged on the clamping block and are used for sucking and collecting chippings; and the vacuum pump is arranged below the assembly plate and is used for sucking air. The clamp of the push-pull force test equipment provided by the scheme has a conventional clamping and fixing function, can also absorb and collect scraps, and is beneficial to the cleanness of a test environment.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor chip processing, and in particular relates to a clamp for push-pull force testing equipment. Background Art

[0002] In the semiconductor chip packaging industry, push-pull force testing is an important step in evaluating the chip welding quality. Currently, when using push-pull force testing equipment to test chips, the chip is mainly fixed by a simple clamping device.

[0003] However, during the test process, traditional push-pull force testing equipment will generate a large number of particles due to chip breakage. These particles will not only affect the test results, but also pollute the surrounding environment. The existing push-pull force testing equipment fixtures cannot effectively remove the generated particles, resulting in inaccurate test results. Utility Model Content

[0004] The utility model provides a clamp for a push-pull force testing device, aiming to solve the problem that during the test process of the current push-pull force testing device, chip breakage may affect the test result.

[0005] The utility model is realized in this way. A clamp for a push-pull force testing device comprises: an assembly plate, a clamp base is fixedly installed on the top of the assembly plate; a bidirectional screw rod rotatably installed on the clamp base, two sleeve blocks are threadedly sleeved on the bidirectional screw rod, and clamp blocks for clamping and fixing a semiconductor chip to be tested are fixedly installed on the top of the two sleeve blocks; a knob fixed on one end of the bidirectional screw rod, a rotation scale bar is arranged on the knob; a plurality of suction nozzles arranged on the clamp block for absorbing and collecting debris; a vacuum pump for air suction arranged below the assembly plate; a collection connection mechanism for air suction, collection and filtering of debris, and the collection connection mechanism is arranged on the assembly plate and the vacuum pump.

[0006] Preferably, the collecting and connecting mechanism includes: an air suction pipe fixed on the air inlet end of the vacuum pump; a filter box fixedly connected to the air inlet end of the air suction pipe; an air inlet pipe fixedly connected to the top of the filter box; a three-way pipe fixed on the air inlet end of the air inlet pipe; a connecting pipe fixed on the air inlet end of the three-way pipe, the air inlet end of the connecting pipe being fixedly connected to the air outlet end of the corresponding suction nozzle; and a filter bag arranged in the filter box for filtering debris.

[0007] Preferably, the air intake pipe is provided with an electromagnetic valve for controlling the opening and closing of the pipeline, the clamp base is provided with a limit groove, a pull-out and detachable baffle for shielding debris is provided in the limit groove, and a through hole is provided on the baffle.

[0008] Preferably, a guide rod for limiting guidance is slidably mounted on the sleeve block, and both ends of the guide rod are fixedly connected to the clamp base.

[0009] Preferably, a base frame is fixedly mounted on the bottom of the assembly plate, and the base frame is provided with a plurality of assembly holes into which bolts can be inserted.

[0010] Preferably, a plurality of connecting columns are fixedly mounted on the top of the filter box, and the top ends of the plurality of connecting columns are fixedly connected to the bottom of the assembly plate.

[0011] Preferably, a cleaning port is opened on one side of the filter box, a sealing door is arranged in the cleaning port, a hinge and a screw handle lock are arranged on the sealing door, and the hinge is fixedly connected to the filter box.

[0012] Preferably, the clamp base is provided with scale lines, the bottom end of the sleeve block is inlaid with a ball, and the clamp base is provided with a mounting groove adapted to the bidirectional screw and the sleeve block.

[0013] Compared with the related art, the clamp of the push-pull force testing device provided by the utility model has the following beneficial effects:

[0014] Through the cooperation of the bidirectional screw, sleeve block and clamping block, the semiconductor chip can be clamped and released quickly and effectively; through the rotating scale bar on the knob, the operator can accurately control the clamping force; the design of the suction nozzle cooperates with the vacuum pump to effectively absorb the debris generated during the test, keep the test environment clean, and filter the debris through the collection connection mechanism to further improve the reliability and safety of the test; the filter bag is used to filter the debris, which can effectively prevent the debris from flying around; the pull-and-detachable baffle can block the debris to prevent large particles from splashing out and injuring people, and the transparent baffle does not affect the operator's observation. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 A structural schematic diagram of a preferred embodiment of a clamp for a push-pull force testing device provided by the utility model;

[0016] Figure 2 A schematic diagram of the main structure of a clamp for a push-pull force testing device provided by the utility model;

[0017] Figure 3 This is a schematic diagram of the main cross-sectional structure of the utility model;

[0018] Figure 4 This is a schematic diagram of the main cross-sectional structure of the fixture base in the utility model;

[0019] Figure 5 It is a schematic structural diagram of the middle baffle of the utility model.

[0020] Figure numerals: 1. Assembly plate; 2. Clamp base; 3. Bidirectional screw; 4. Bushing; 5. Clamp block; 6. Knob; 7. Suction nozzle; 8. Vacuum pump; 9. Suction pipe; 10. Filter box; 11. Inlet pipe; 12. Tee pipe; 13. Connecting pipe; 14. Filter bag; 15. Solenoid valve; 16. Limiting groove; 17. Baffle; 18. Guide rod; 19. Base frame. DETAILED DESCRIPTION

[0021] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by technicians in the technical field of this application; the terms used in the specification of the application herein are only for the purpose of describing specific embodiments and are not intended to limit this application; the terms "including" and "having" and any variations thereof in the specification and claims of this application and the above-mentioned drawings are intended to cover non-exclusive inclusions. The terms "first", "second", etc. in the specification and claims of this application or the above-mentioned drawings are used to distinguish different objects, not to describe a specific order.

[0022] Reference to "embodiments" herein means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0023] The present invention provides a clamp for a push-pull force testing device. Figure 1-5 As shown, the fixture of the push-pull force testing equipment includes: an assembly plate 1, a fixture base 2 is fixedly installed on the top of the assembly plate 1; a bidirectional screw 3 rotatably installed on the fixture base 2, two sleeves 4 are threadedly sleeved on the bidirectional screw 3, and the tops of the two sleeves 4 are fixedly installed with clamping blocks 5 for clamping and fixing the semiconductor chip to be tested; a knob 6 fixed on one end of the bidirectional screw 3, and a rotation scale bar is provided on the knob 6; a plurality of suction nozzles 7 are arranged on the clamping block 5 for absorbing and collecting debris; a vacuum pump 8 is arranged below the assembly plate 1 for suction; a collecting connection mechanism for suctioning and collecting filtered debris, and the collecting connection mechanism is arranged on the assembly plate 1 and the vacuum pump 8.

[0024] It should be noted that during the test process, traditional push-pull force testing equipment will generate a large number of particles due to the contact and separation between the chip and the push knife. These particles will not only adhere to the chip and the push knife, affecting the accuracy of the test results, but will also spread to the surrounding environment, causing potential harm to the testers and the surrounding environment. The existing push-pull force testing equipment fixtures usually only have a simple clamping function and cannot effectively remove these particles. Even if some fixtures are equipped with dust suction devices, due to design limitations, their dust suction effect is not ideal and the particles cannot be completely removed, resulting in inaccurate test results. In addition, traditional fixtures lack control over the consistency of the pressure of the material being tested, which will also affect the accuracy of the push-pull force test. When the pressure on the chip is inconsistent, its contact area will also change, affecting the accuracy of the push-pull force test. Therefore, traditional push-pull force testing equipment and its fixtures have problems with particle contamination and inaccurate test results during the test process. This not only affects the accuracy of product quality and reliability assessment, but also poses potential hazards to testers and the surrounding environment.

[0025] In this embodiment, the semiconductor chip is quickly clamped and released through the cooperation of the bidirectional screw 3, the sleeve block 4 and the clamping block 5. The rotating scale bar on the knob 6 can be read to ensure the consistency of the COS clamping force; the suction nozzle 7 cooperates with the vacuum pump 8 to effectively absorb debris and keep the test environment clean. The debris is filtered by the collecting connection mechanism, thereby improving the reliability and safety of the test.

[0026] In a further preferred embodiment of the utility model, the collecting and connecting mechanism includes: an air suction pipe 9 fixed on the air inlet end of the vacuum pump 8; a filter box 10 fixedly connected to the air inlet end of the air suction pipe 9; an air inlet pipe 11 fixedly connected to the top of the filter box 10; a three-way pipe 12 fixed on the air inlet end of the air inlet pipe 11; a connecting pipe 13 fixed on the air inlet end of the three-way pipe 12, the air inlet end of the connecting pipe 13 is fixedly connected to the corresponding air outlet end of the suction nozzle 7; and a filter bag 14 arranged in the filter box 10 for filtering debris.

[0027] In this embodiment, the suction pipe 9 and the filter box 10, the air inlet pipe 11, the three-way pipe 12, and the connecting pipe 13 connected to the suction pipe can be connected to the air outlet end of each suction nozzle and the vacuum pump 8, and the filter bag 14 is used to filter debris. Through this design, in conjunction with the operation of the vacuum pump 8, the debris can be absorbed and filtered to prevent the debris from floating around, and the filter bag 14 is detachable for easy replacement.

[0028] In a further preferred embodiment of the utility model, the air intake pipe 11 is provided with an electromagnetic valve 15 for controlling the opening and closing of the pipeline, the clamp base 2 is provided with a limit groove 16, the limit groove 16 is provided with a pull-out and detachable baffle 17 for shielding debris, and the baffle 17 is provided with a through hole.

[0029] In this embodiment, the opening and closing of the air intake pipe 11 can be controlled by the electromagnetic valve, and the limit groove 16 is used to install a baffle 17 made of transparent acrylic material. The baffle 17 can effectively block debris and prevent large particles from splashing out and injuring people, which is beneficial to safety. The transparent material does not affect the operator's observation, and the opened through hole can be stuck in the positioning ring of the microscope objective to improve stability.

[0030] In a further preferred embodiment of the utility model, a guide rod 18 for limiting and guiding is slidably mounted on the sleeve block 4 , and both ends of the guide rod 18 are fixedly connected to the clamp base 2 .

[0031] In this embodiment, the guide rod 18 is provided to limit and guide the sleeve block 4 during movement, thereby preventing the sleeve block 4 from deflecting or shaking during movement.

[0032] In a further preferred embodiment of the present invention, a base frame 19 is fixedly mounted on the bottom of the assembly plate 1, and the base frame 19 is provided with a plurality of assembly holes for inserting bolts.

[0033] In this embodiment, the base frame 19 and the assembly holes are provided so that the assembly plate can be more stably mounted on the test equipment, thereby improving the overall stability and reliability of the test equipment.

[0034] In a further preferred embodiment of the present invention, a plurality of connecting columns are fixedly installed on the top of the filter box 10 , and the top ends of the plurality of connecting columns are fixedly connected to the bottom of the assembly plate 1 .

[0035] In this embodiment, the filter box can be more stably installed on the test equipment through the fixed connection between the connecting column and the assembly plate.

[0036] In a further preferred embodiment of the utility model, a cleaning port is opened on one side of the filter box 10, a sealing door is arranged in the cleaning port, a hinge and a screw handle lock are arranged on the sealing door, and the hinge is fixedly connected to the filter box 10.

[0037] In this embodiment, the design of the cleaning port facilitates the cleaning and maintenance of the interior of the filter box, thereby improving the ease of use; the sealing door can ensure the sealing of the cleaning port when it is closed, preventing dust, impurities, etc. from entering the interior of the filter box, thereby maintaining the cleanliness and filtering effect of the filter box; the setting of the handle lock allows the sealing door to be locked by turning the handle lock after closing, thereby enhancing the stability and safety of the sealing door.

[0038] In a further preferred embodiment of the utility model, the clamp base 2 is provided with scale lines, the bottom end of the sleeve block 4 is inlaid with balls, and the clamp base 2 is provided with mounting grooves adapted to the bidirectional screw 3 and the sleeve block 4.

[0039] In this embodiment, the design of the scale line can be used to refer to the adjustment spacing of the observation clamp block 5, and the set ball can roll with the movement of the sleeve block 4, reducing friction and resistance, making the clamp smoother when adjusting or positioning.

[0040] To sum up, the fixture of the push-pull force testing equipment provided by this technical solution has the characteristics of fast clamping, accurate control of clamping force, effective absorption of debris and keeping the test environment clean, which improves the accuracy and reliability of the test, reduces potential hazards, and provides a more advanced and reliable push-pull force testing equipment fixture for the semiconductor chip packaging industry.

[0041] Compared with the related art, through the cooperation of the bidirectional screw 3, the sleeve block 4 and the clamping block 5, the semiconductor chip can be clamped and released quickly and effectively; through the rotating scale bar on the knob 6, the operator can accurately control the clamping force; the design of the suction nozzle 7 cooperates with the vacuum pump 8, which can effectively absorb the debris generated during the test and keep the test environment clean, and can also filter the debris through the collecting connection mechanism to further improve the reliability and safety of the test; the filter bag 14 is used to filter the debris, which can effectively prevent the debris from flying around; the pull-and-detachable baffle 17 can block the debris to prevent large particles from splashing out and injuring people, and the transparent baffle 17 does not affect the operator's observation.

[0042] It is worth noting that the circuits, electronic components and modules involved in the present utility model are all prior art and can be fully implemented by those skilled in the art. Needless to say, the content protected by the present utility model does not involve improvements to software and methods.

[0043] In the several embodiments provided in the present application, it should be understood that the disclosed device can be implemented in other ways. For example, the device embodiments described above are only schematic, such as the division of the above-mentioned units, which is only a logical function division. There may be other division methods in actual implementation, such as multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or communication connection shown or discussed can be through some interfaces, and the indirect coupling or communication connection between devices or units can be in the form of telecommunication or other forms.

[0044] The above embodiments are only used to illustrate the technical solutions of the utility model, rather than to limit the protection scope of the utility model. Obviously, the described embodiments are only some embodiments of the utility model, rather than all embodiments. Based on these embodiments, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the utility model. Although the utility model has been described in detail with reference to the above embodiments, ordinary technicians in this field can still combine, add, delete or make other adjustments to the features in the various embodiments of the utility model according to the circumstances without conflict, without making creative work, so as to obtain different other technical solutions that do not deviate from the concept of the utility model in essence, and these technical solutions also belong to the scope of protection of the utility model.

Claims

1. A clamp for a push-pull force testing device, characterized in that: include: An assembly plate (1), a fixture base (2) being fixedly mounted on the top of the assembly plate (1); A bidirectional screw (3) is rotatably mounted on the fixture base (2), two sleeves (4) are threadedly sleeved on the bidirectional screw (3), and clamps (5) for clamping and fixing the semiconductor chip to be tested are fixedly mounted on the top ends of the two sleeves (4); A knob (6) fixed to one end of the bidirectional screw (3), wherein the knob (6) is provided with a rotation scale bar; A plurality of suction nozzles (7) arranged on the clamping block (5) for sucking and collecting debris; A vacuum pump (8) for suction arranged below the assembly plate (1); A collecting connection mechanism for collecting filtered debris by suction, wherein the collecting connection mechanism is arranged on the assembly plate (1) and the vacuum pump (8).

2. The clamp of the push-pull force testing device according to claim 1, characterized in that: The collecting and connecting mechanism comprises: An air intake pipe (9) fixed to the air intake end of the vacuum pump (8); A filter box (10) fixedly connected to the air inlet end of the air intake pipe (9); An air inlet pipe (11) fixedly connected to the top of the filter box (10); A three-way pipe (12) fixed to the air inlet end of the air inlet pipe (11); A connecting pipe (13) fixed to the air inlet end of the three-way pipe (12), the air inlet end of the connecting pipe (13) being fixedly connected to the air outlet end of the corresponding suction nozzle (7); A filter bag (14) is arranged in the filter box (10) and is used to filter debris.

3. The clamp of the push-pull force testing device as claimed in claim 2, characterized in that: The air intake pipe (11) is provided with an electromagnetic valve (15) for controlling the opening and closing of the pipeline, the clamp base (2) is provided with a limit groove (16), a pull-out detachable baffle (17) for shielding debris is provided in the limit groove (16), and a through hole is provided in the baffle (17).

4. The clamp of the push-pull force testing device according to claim 1, characterized in that: A guide rod (18) for limiting and guiding is slidably mounted on the sleeve block (4), and both ends of the guide rod (18) are fixedly connected to the clamp base (2).

5. The clamp of the push-pull force testing device according to claim 1, characterized in that: A base frame (19) is fixedly mounted on the bottom of the assembly plate (1), and a plurality of assembly holes for inserting bolts are provided on the base frame (19).

6. The clamp of the push-pull force testing device according to claim 2, characterized in that: A plurality of connection columns are fixedly mounted on the top of the filter box (10), and the top ends of the plurality of connection columns are fixedly connected to the bottom of the assembly plate (1).

7. The clamp of the push-pull force testing device according to claim 2, characterized in that: A cleaning port is provided on one side of the filter box (10), a sealing door is provided in the cleaning port, a hinge and a screw handle lock are provided on the sealing door, and the hinge is fixedly connected to the filter box (10).

8. The clamp of the push-pull force testing device according to claim 1, characterized in that: The clamp base (2) is provided with scale lines, the bottom end of the sleeve block (4) is inlaid with a ball, and the clamp base (2) is provided with a mounting groove that is compatible with the bidirectional screw (3) and the sleeve block (4).

Images