Chemical filtration platform suitable for ion chromatography automatic sampler

Abstract

The utility model relates to the technical field of ion chromatograph testing, in particular to a chemical filtering platform suitable for an ion chromatography automatic sampler, which comprises a frame, a chemical filter and an FFU (Fan Filter Unit), doors are arranged on the front side and the left side of the frame, fixing plates are fixedly arranged on the back side and the right side of the frame, and the FFU is arranged on the frame. A plurality of holes are formed in the fixing plate, a chemical filter is arranged at the top of the frame, and an FFU is fixedly arranged at the upper part of the chemical filter. According to the chemical filtration platform suitable for the ion chromatography automatic sampler, on the premise of ensuring the removal rate of zwitterions in the ion chromatography automatic sampler, compared with a traditional mode, the cost is greatly saved.

Description

Technical Field

[0001] The utility model relates to the technical field of ion chromatograph testing, in particular to a chemical filtering platform suitable for an ion chromatograph automatic sample injector. Background Art

[0002] In the semiconductor industry, the requirements for surface ion control of key components on process equipment are becoming increasingly stringent. As the main detection method for anions and cations on the surface of components, the detection limit, stability and accuracy of ion chromatograph are particularly important. Chemical filtration devices can effectively remove anions and cations in the test environment to ensure that the test detection limit, stability and accuracy meet the test requirements. Generally, the ion chromatograph autosampler is placed above the room, which requires the addition of a chemical filtration device as a whole. This method is expensive, subject to many restrictions, and the filtration effect is unstable. Therefore, a chemical filtration platform suitable for ion chromatograph autosampler is proposed. Utility Model Content

[0003] In order to solve the above problems, the utility model provides a chemical filtration platform suitable for an ion chromatographic autosampler. The chemical filtration platform suitable for an ion chromatographic autosampler significantly saves costs compared with traditional methods while ensuring the anion and cation removal rate in the ion chromatographic autosampler.

[0004] The technical solution of the utility model is as follows:

[0005] A chemical filtration platform suitable for an ion chromatographic automatic sample injector comprises a frame, a chemical filter and an FFU, wherein doors are arranged on the front and left sides of the frame, a fixing plate is fixedly arranged on the back and right sides of the frame, a plurality of holes are arranged on the fixing plate, a chemical filter is arranged on the top of the frame, and the FFU is fixedly arranged on the upper part of the chemical filter.

[0006] The doors are double doors.

[0007] The double doors are made of acrylic.

[0008] The frame is a rectangular frame structure made of stainless steel square tubes.

[0009] The stainless steel square tube is made of 316L material.

[0010] The fixing plate is made of acrylic.

[0011] The fan material of FFU is PP.

[0012] The wind speed of FFU is adjustable.

[0013] The wind speed adjustment range of FFU is 0.45-1m / s.

[0014] The wind speed of FFU can be adjusted in three levels within the adjustment range.

[0015] The beneficial effects of the utility model are:

[0016] 1. The utility model discloses a chemical filtration platform suitable for an ion chromatographic automatic sampler. The chemical filtration platform suitable for an ion chromatographic automatic sampler significantly saves costs compared with traditional methods while ensuring the removal rate of anions and cations in the ion chromatographic automatic sampler.

[0017] 2. The utility model discloses a chemical filtration platform suitable for an ion chromatographic automatic sample injector. The chemical filtration platform suitable for an ion chromatographic automatic sample injector adopts an acrylic plate and a 316L stainless steel frame to effectively reduce the release of particles and anions and cations;

[0018] 3. The utility model discloses a chemical filtration platform suitable for an ion chromatograph automatic sample injector. The chemical filtration platform suitable for an ion chromatograph automatic sample injector generates negative pressure through FFU. The airflow enters the chemical filter through the FFU for filtration. The filtered gas is discharged through the openings on the back and right acrylic plates, effectively removing anions and cations in the air in the device and reducing interference in the detection process of the ion chromatograph. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] By reading the detailed description of the preferred embodiment below, the scheme and advantages of the present application will become clear to those skilled in the art. The accompanying drawings are only used to illustrate the preferred embodiment and are not considered to be limiting of the present invention.

[0020] In the attached picture:

[0021] Figure 1 A three-dimensional structural schematic diagram (front and left side) of a chemical filtration platform suitable for an ion chromatography automatic sample injector according to an embodiment of the utility model;

[0022] Figure 2 A three-dimensional structural schematic diagram of a chemical filtration platform suitable for an ion chromatography automatic sample injector according to an embodiment of the utility model (back and right side);

[0023] Figure 3 This is a three-dimensional structural schematic diagram of a frame of a chemical filtration platform suitable for an ion chromatography automatic sample injector according to an embodiment of the utility model;

[0024] The components represented by the reference numerals in the figure are:

[0025] The utility model comprises: 1. a frame, 1a. a stainless steel square tube, 2. a double-door, 3. a fixing plate, 3a. a hole, 4. a chemical filter, and 5. a FFU. DETAILED DESCRIPTION

[0026] like Figure 1 and Figure 2 As shown, the chemical filtration platform suitable for the ion chromatography autosampler includes a frame 1, a chemical filter 4 and a FFU5. The full name of FFU is Fan Filter Units.

[0027] like Figure 3 As shown, the frame 1 is a rectangular parallelepiped frame structure made of stainless steel square tubes 1a as edges, and the stainless steel square tubes 1a are made of 316L material.

[0028] Doors are arranged on the front and left sides of the frame 1, fixed plates 3 are fixedly arranged on the back and right sides of the frame 1, a plurality of holes 3a are arranged on the fixed plates 3, a chemical filter 4 is arranged on the top of the frame 1, the chemical filter belongs to the adsorbent filtration method, and the anion and cation removal efficiency can reach more than 90%, and the FFU5 is fixedly arranged on the upper part of the chemical filter 4; the door is a double door 2; the double door 2 is made of acrylic material.

[0029] The fixing plate 3 is made of acrylic.

[0030] In a specific embodiment, the acrylic double doors 2 on the front and left sides are fixed to the stainless steel square tube 1a by a magnetic device; the acrylic fixing plate 3 fixed on the back and right sides is fixed to the stainless steel square tube 1a by sealant.

[0031] The material of the stainless steel square tube 1a is 316L, and all the hinges and door handles of the front and left acrylic double doors 2 are made of high-cleanliness 316L material, which greatly reduces the generation of particle pollution during the door opening and closing process.

[0032] The fan material of FFU5 is PP; the wind speed of FFU5 is adjustable; the wind speed adjustment range of FFU5 is 0.45-1m / s; the wind speed of FFU5 is adjusted in three gears within the adjustment range.

[0033] FFU (Fan Filter Unit) is a self-powered, modular terminal air supply device with filtering function, usually installed in a clean room or clean environment to provide clean air. This device is mainly composed of a fan, a high-efficiency filter and a box, and some are also equipped with an electric heater and / or an additional insulation layer on the shell. The wind speed of the FFU inlet is uniform, and the wind speed on the air outlet is also uniform, which allows the space of the clean room to meet the cleanliness level requirements.

[0034] When the chemical filtration device is turned on, the airflow enters the chemical filter 4 through FFU5 for filtration, and the filtered gas is discharged through the holes 3a on the back and right acrylic plates, effectively removing anions and cations in the air in the device and reducing interference in the detection process of the ion chromatograph.

[0035] When the sample needs to be placed in the ion chromatograph autosampler, the acrylic double door 2 is opened to deliver the sample.

[0036] The data transmission line and the power line of the ion chromatograph mainframe and the automatic sampling device are connected through the hole 3a, and the air flow is discharged through the hole 3a.

[0037] The chemical filtration platform suitable for ion chromatography autosamplers significantly saves costs compared to traditional methods while ensuring the removal rate of anions and cations in ion chromatography autosamplers; by using acrylic plates and 316L stainless steel frames, the release of particles and anions and cations is effectively reduced.

Claims

1. A chemical filtration platform suitable for an ion chromatography autosampler, characterized in that: The invention comprises a frame (1), a chemical filter (4) and an FFU (5), wherein doors are arranged on the front and left sides of the frame (1), a fixing plate (3) is fixedly arranged on the back and right sides of the frame (1), a plurality of holes (3a) are arranged on the fixing plate (3), a chemical filter (4) is arranged on the top of the frame (1), and the FFU (5) is fixedly arranged on the upper part of the chemical filter (4).

2. A chemical filtration platform suitable for an ion chromatography autosampler according to claim 1, characterized in that: The door is a double door (2).

3. A chemical filtration platform suitable for an ion chromatography autosampler according to claim 2, characterized in that: The double doors (2) are made of acrylic material.

4. A chemical filtration platform suitable for an ion chromatography autosampler according to claim 1, characterized in that: The frame (1) is a rectangular parallelepiped frame structure made with stainless steel square tubes (1a) as edges.

5. A chemical filtration platform suitable for an ion chromatography autosampler according to claim 4, characterized in that: The stainless steel square tube (1a) is made of 316L material.

6. The chemical filtration platform suitable for an ion chromatography autosampler according to claim 1, characterized in that: The fixing plate (3) is made of acrylic.

7. The chemical filtration platform suitable for an ion chromatography autosampler according to claim 1, characterized in that: The fan of the FFU (5) is made of PP.

8. The chemical filtration platform suitable for an ion chromatography autosampler according to claim 1, characterized in that: The wind speed of the FFU (5) is adjustable.

9. A chemical filtration platform suitable for an ion chromatography autosampler according to claim 8, characterized in that: The wind speed adjustment range of the FFU (5) is 0.45-1 m / s.

10. The chemical filtration platform suitable for an ion chromatography autosampler according to claim 9, characterized in that: The wind speed of the FFU (5) is adjusted in three levels within the adjustment range.

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