Ceramic disc dust removal mechanism

Abstract

The utility model discloses a dust removal mechanism for a ceramic plate. Comprising a negative pressure dust collection part and a positive pressure blowing part, and the negative pressure dust collection part is located above the disc face of the ceramic disc; the negative pressure dust collection part comprises a vacuum suction device and a dust collection head, the vacuum suction device is connected with an external dust discharge pipe, the dust collection head is arranged at an inlet of the vacuum suction device, and the dust collection head is arranged perpendicular to the disc surface of the ceramic disc; the positive pressure blowing part is arranged on the dust collection head, a blowing port of the positive pressure blowing part is rotatably arranged towards the disc surface of the ceramic disc, the included angle between the blowing direction of the blowing port and the disc surface of the ceramic disc is an obtuse angle, and the included angle between the blowing direction of the blowing port and the air suction direction of the dust collection head is an acute angle. The negative-pressure dust collection part is matched with the positive-pressure blowing part, particles on the surface of the ceramic plate are adsorbed and cleaned under the condition that the negative-pressure dust collection part is not in contact with the surface of the ceramic plate, the surface of the ceramic plate is not damaged during cleaning, and the precision of the ceramic plate is not influenced; after being adsorbed by the negative-pressure dust collection part, the negative-pressure dust collection part is matched with the positive-pressure blowing part for cleaning, so that the dust collection efficiency is high and the cleaning effect is good.

Description

Technical field:

[0001] The utility model belongs to the technical field of semiconductor wafer production, and particularly relates to a ceramic disc dust removal mechanism. Background technology:

[0002] During the production process of semiconductor wafers, the wafers need to be diced and divided, which is usually done by back-cutting through a film. The wafer is placed on a ceramic plate, and then a film is attached to the surface of the wafer. The cutter is used to cut along the cutting path on the wafer. The wafer is split along the cutting path, completing the wafer division.

[0003] During the cutting process, micron-sized particles will be generated. When the wafer is cut and unloaded, these particles will fall on the ceramic disk. When the next wafer is placed on the ceramic disk for segmentation, these particles will damage the surface of the wafer. In order to solve this problem, people set up a cleaning device on the ceramic disk to clean these particles from the ceramic disk to prevent damage to the wafer surface. These cleaning devices are all cleaned by direct contact with the ceramic disk. During the cleaning process, the particles rub against the surface of the ceramic disk, which can easily cause the surface of the ceramic disk to be scratched, affecting the accuracy of the ceramic disk.

[0004] The information disclosed in this background technology section is only intended to increase the understanding of the overall background of the present invention, and should not be regarded as acknowledging or suggesting in any form that the information constitutes the prior art already known to a person skilled in the art. Utility model content:

[0005] The utility model aims to provide a ceramic disc dust removal mechanism which can clean particles without contacting the surface of the ceramic disc, thereby overcoming the defects in the above-mentioned prior art.

[0006] To achieve the above-mentioned purpose, the utility model provides a ceramic plate dust removal mechanism, including a negative pressure dust suction part and a positive pressure blowing part, wherein the negative pressure dust suction part is located above the surface of the ceramic plate; the negative pressure dust suction part includes a vacuum suction device and a dust suction head, the vacuum suction device is connected to an external dust exhaust pipe, a dust suction head is arranged at the inlet of the vacuum suction device, and the dust suction head is arranged perpendicular to the surface of the ceramic plate; the positive pressure blowing part is arranged on the dust suction head, and the blowing port of the positive pressure blowing part can be rotatably arranged toward the surface of the ceramic plate, the blowing direction of the blowing port and the surface of the ceramic plate are at an obtuse angle, and the blowing direction of the blowing port and the suction direction of the dust suction head are at an acute angle; through the cooperation of the positive pressure blowing part and the negative pressure dust suction part, the particles on the surface of the ceramic plate are blown up and adsorbed, so that the particles are separated from the surface of the ceramic plate.

[0007] Preferably, in the technical solution, the positive pressure blowing part includes a connecting plate, a fixed plate, and a blowing core. The connecting plate is horizontally arranged on the dust collector head, and the fixed plates are connected to the connecting plates. The angle between the top surface of the fixed plate and the connecting plate is an obtuse angle. The blowing core can be movably arranged in the fixed plate, and both ends of the blowing core are connected to the fixed plate, and the blowing core swings around the connection point; the blowing core is connected to an external positive pressure air source, and a blowing part is arranged on the blowing core, and the blowing part is parallel to the top surface of the fixed plate. A groove is arranged on the inner side surface of the blowing part, and blowing ports are evenly distributed in the groove. The angle between the blowing direction of the blowing port and the surface of the ceramic plate is an obtuse angle.

[0008] Preferably, in the technical solution, arc grooves are provided on both sides of the fixed plate, and each side includes two arc grooves. Fixed holes are provided at corresponding positions at both ends of the blowing core. By adjusting the position of the fixed hole on the blowing core in the arc groove, the angle of the blowing port is adjusted, and then the direction in which the particles on the surface of the ceramic disk are blown up is adjusted.

[0009] Preferably, in the technical solution, a positive pressure jet structure is provided in the ceramic disk to break the vacuum on the surface of the ceramic disk, prevent particulate matter from being adsorbed on the surface of the ceramic disk, and improve the dust removal efficiency of the dust removal mechanism of the ceramic disk.

[0010] Compared with the prior art, the utility model has the following beneficial effects:

[0011] The negative pressure suction unit cooperates with the positive pressure blowing unit to absorb and clean the particles on the surface of the ceramic plate without contacting the surface of the ceramic plate. This will not damage the surface of the ceramic plate during cleaning and will not affect the precision of the ceramic plate. After the negative pressure suction unit absorbs the particles, it cooperates with the positive pressure blowing unit for secondary cleaning, which has high dust removal efficiency and good cleaning effect. Description of the drawings:

[0012] Figure 1 This is a schematic diagram of the structure of the ceramic disc dust removal mechanism of the utility model;

[0013] Figure 2 for Figure 1 A magnified view of part A;

[0014] Figure 3 This is a schematic diagram of the structure of the positive pressure blowing part of the utility model;

[0015] Figure 4 This is a schematic diagram of the assembly of the ceramic disc dust removal mechanism of the utility model. Specific implementation method:

[0016] The specific implementation modes of the present invention are described in detail below, but it should be understood that the protection scope of the present invention is not limited by the specific implementation modes.

[0017] Unless explicitly stated otherwise, throughout the specification and claims, the term “comprise” or variations such as “include” or “comprising”, etc., will be understood to include the stated elements or components but not to exclude other elements or components.

[0018] like Figure 1-4 As shown, a ceramic disk dust removal mechanism includes a negative pressure dust suction part 1 and a positive pressure air blowing part 2, wherein the negative pressure dust suction part 1 is located above the disk surface of the ceramic disk 3; the negative pressure dust suction part 1 includes a vacuum suction device 10 and a dust suction head 11, wherein the vacuum suction device 10 is connected to an external dust exhaust pipe, and a dust suction head 11 is arranged at the inlet of the vacuum suction device 10, and the dust suction head 11 is arranged perpendicular to the disk surface of the ceramic disk 3;

[0019] The positive pressure blowing part 2 includes a connecting plate 20, a fixing plate 21, and a blowing core 22. The connecting plate 20 is horizontally arranged on the dust collector head 11, and the fixing plate 21 is connected to the connecting plate 20. The angle between the top surface of the fixing plate 21 and the connecting plate 20 is an obtuse angle. The two side surfaces of the fixing plate 21 are provided with arc grooves 23, and each side surface includes two arc grooves 23. The two ends of the blowing core 22 are provided with fixing holes 24 at corresponding positions. The blowing core 22 is movably fixed in the arc groove 23 by screws, and the blowing core 22 swings around the fixing hole 24 as the center; The body 22 is connected to an external positive pressure air source, and a blowing part 25 is arranged on the blowing core 22, and the blowing part 25 is parallel to the top surface of the fixing plate 21, and a groove 26 is arranged on the inner side surface of the blowing part 25, and blowing ports 27 are evenly distributed in the groove 26, and the angle between the blowing direction of the blowing port 27 and the disk surface of the ceramic disk 3 is an obtuse angle, and the angle between the blowing direction of the blowing port 27 and the suction direction of the dust collector 11 is an acute angle; by adjusting the position of the fixing hole 24 on the blowing core 22 in the arc groove 23, the angle of the blowing port 27 is adjusted, and then the direction in which the particles on the disk surface of the ceramic disk 3 are blown up is adjusted;

[0020] The surface of the ceramic plate 3 is provided with an anti-stick coating, and a positive pressure jet structure is provided inside the ceramic plate 3. According to the distance between the dust collector 11 and the surface of the ceramic plate 3, the position of the fixing hole 24 in the arc groove 23 is adjusted in advance, that is, the angle of the air port 27 is adjusted in advance to adapt to the dust collector 11 and fix the air blowing core 22; there is a flow regulating valve on the external positive pressure air source, and the air intake flow is set in advance according to the needs; when the previous wafer is diced and unloaded, the positive pressure jet structure is started to break the vacuum on the surface of the ceramic plate 3, and micron-sized particles will not be adsorbed on the surface of the ceramic plate, the vacuum suction device 10 is started, the dust collector 11 generates adsorption force, and the ceramic plate 3 moves in the X-axis direction and the Y-axis direction under the drive of the motion platform, ensuring that the entire surface of the ceramic plate 3 passes under the dust collector 11, and a part of the particles on the surface of the ceramic plate 3 are adsorbed by the dust collector 11 2mm above and discharged by the external dust exhaust pipe.

[0021] The external positive pressure air source is turned on, and the air outlet 27 blows air toward the surface of the ceramic disk 3 to blow the remaining particles on the surface of the ceramic disk 3 toward the dust collector head 11. The dust collector head 11 absorbs the blown particles and discharges them through the external dust exhaust pipe. After the secondary cleaning, the dust removal efficiency is high and the cleaning effect is good. The entire surface of the ceramic disk 3 is passed through the positive pressure blowing part 2 and the negative pressure dust collection part 1. The particles on the surface of the ceramic disk 3 are absorbed and cleaned without contacting the surface of the ceramic disk 3. The surface of the ceramic disk 3 will not be damaged during cleaning, and the accuracy of the ceramic disk will not be affected.

[0022] The foregoing description of specific exemplary embodiments of the utility model is for the purpose of illustration and illustration. These descriptions are not intended to limit the utility model to the precise form disclosed, and it is clear that many changes and variations can be made based on the above teachings. The purpose of selecting and describing the exemplary embodiments is to explain the specific principles of the utility model and its practical application, so that those skilled in the art can realize and utilize various different exemplary embodiments of the utility model and various different options and changes. The scope of the utility model is intended to be defined by the claims and their equivalents.

Claims

1. A ceramic disc dust removal mechanism, characterized in that: It includes a negative pressure dust suction part and a positive pressure air blowing part, the negative pressure dust suction part is located above the ceramic plate surface; the negative pressure dust suction part includes a vacuum suction device and a dust suction head, the vacuum suction device is connected to an external dust exhaust pipe, a dust suction head is arranged at the inlet of the vacuum suction device, and the dust suction head is arranged perpendicular to the ceramic plate surface; the positive pressure air blowing part is arranged on the dust suction head, the air blowing port of the positive pressure air blowing part is rotatably arranged toward the ceramic plate surface, the angle between the air blowing direction of the air blowing port and the ceramic plate surface is an obtuse angle, and the angle between the air blowing direction of the air blowing port and the air suction direction of the dust suction head is an acute angle.

2. The ceramic disc dust removal mechanism according to claim 1 is characterized in that: The positive pressure blowing part includes a connecting plate, a fixed plate, and a blowing core. The connecting plate is horizontally arranged on the dust collector head, and the fixed plates are connected to the connecting plates. The angle between the top surface of the fixed plate and the connecting plate is an obtuse angle. The blowing core can be movably arranged in the fixed plate. Both ends of the blowing core are connected to the fixed plate, and the blowing core swings around the connection point. The blowing core is connected to an external positive pressure air source. A blowing part is arranged on the blowing core. The blowing part is parallel to the top surface of the fixed plate. A groove is arranged on the inner side surface of the blowing part. Blowing ports are evenly distributed in the groove. The angle between the blowing direction of the blowing port and the surface of the ceramic plate is an obtuse angle.

3. The ceramic disc dust removal mechanism according to claim 2 is characterized in that: Arc grooves are arranged on both sides of the fixing plate, each side includes two arc grooves, and fixing holes are arranged at corresponding positions at both ends of the blowing core. The angle of the blowing port can be adjusted by adjusting the position of the fixing hole on the blowing core in the arc groove.

4. The ceramic disc dust removal mechanism according to claim 1, characterized in that: A positive pressure jet structure is arranged inside the ceramic disk.

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