Novel material supporting structure

Abstract

The utility model relates to the technical field of semiconductor material production, and discloses a novel material supporting structure which comprises a feeding and discharging cavity, a supporting plate is installed on the right side of the bottom of an inner cavity of the feeding and discharging cavity, a supporting base is installed on the top of the supporting plate, and a silicon carbide rod is installed in the supporting base. A quartz tube body is fixedly connected to the left side of an inner cavity of the feeding and discharging cavity, the left side of the silicon carbide rod penetrates into an inner cavity of the quartz tube body, a material cavity door is installed on the right side of the feeding and discharging cavity, and the left side of the material cavity door is detachably connected with the right side of the feeding and discharging cavity through bolts. According to the novel material supporting structure, a product is placed on the silicon carbide rod and pushed into the quartz tube body, the product is pulled out of the quartz tube body after the product process is finished, and the product is not in contact with the quartz tube body in the whole process, so that the phenomenon that the quartz tube body is not in contact with the quartz tube body due to the weight factor of the product in a high-temperature environment is avoided; and the problem of deformation is solved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor material production, in particular to a new material supporting structure. Background Art

[0002] Semiconductor materials are a type of electronic materials that have semiconductor properties and can be used to make semiconductor devices and integrated circuits.

[0003] The vacuum welding furnace is mainly used for the core welding process of diodes, triodes, etc. It can also be used for the vacuum welding process of other materials. After the product is placed in a quartz vacuum chamber and evacuated, it is welded in a high-temperature environment. Due to the influence of high temperature and vacuum environment, the quartz tube will deform after a period of use, and the quartz tube needs to be replaced frequently. In addition, the load-bearing capacity of the quartz tube is limited, and the number of products made each time is limited. The cost of equipment maintenance and replacement of quartz tubes is high, and the output cannot be improved.

[0004] Therefore, those skilled in the art provide a novel material support structure to solve the problems raised in the above background technology. Utility Model Content

[0005] The purpose of the utility model is to provide a new material support structure to solve the problems raised in the above background technology.

[0006] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0007] A novel material support structure comprises an inlet and outlet cavity, a support plate is installed on the right side of the bottom of the inner cavity of the inlet and outlet cavity, a support base is installed on the top of the support plate, a silicon carbide rod is installed inside the support base, a quartz tube body is fixedly connected to the left side of the inner cavity of the inlet and outlet cavity, and the left side of the silicon carbide rod penetrates into the inner cavity of the quartz tube body.

[0008] As a further solution of the utility model: a material chamber door is installed on the right side of the material inlet and outlet chamber, and the left side of the material chamber door is detachably connected to the right side of the material inlet and outlet chamber by bolts.

[0009] As a further solution of the utility model: adjusting bolts are installed between the support plate and the support base, and the number of the adjusting bolts is three and they are distributed at the front, rear and middle of the support base.

[0010] As a further solution of the utility model: a gland is installed on the right side of the top of the silicon carbide rod, the inner cavity of the gland is threadedly connected with a connecting bolt, and the gland and the support base are connected by the connecting bolt.

[0011] As a further solution of the utility model: a cushion seat is fixedly connected to the bottom of the inlet and outlet cavity, and a support block is fixedly connected to the surface of the inlet and outlet cavity. The support blocks are arranged in multiple numbers and are distributed around the surface of the inlet and outlet cavity.

[0012] Compared with the prior art, the beneficial effects of the utility model are:

[0013] 1. The utility model places the product on a silicon carbide rod and pushes it into the quartz tube body. After the product process is completed, the product is pulled out of the quartz tube body. During the whole process, the product does not contact the quartz tube body, thus avoiding the problem of deformation of the quartz tube body due to the weight of the product in a high temperature environment.

[0014] 2. The utility model can adjust the setting of the bolts to facilitate the connection and stability of the support plate and the support base, and can also adjust the position of the support base, thereby adjusting the height of the silicon carbide rod according to the weight of the product. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a structural schematic diagram of a new type of material support structure;

[0016] Figure 2 A new type of material support structure Figure 1 Cross-sectional view at AA in the middle.

[0017] In the figure: 1. Inlet and outlet chamber; 2. Quartz tube body; 3. Chamber door; 4. Support plate; 5. Silicon carbide rod; 6. Support base; 7. Pressure cover; 8. Adjustment bolt; 9. Pad; 10. Connecting bolt; 11. Support block. DETAILED DESCRIPTION

[0018] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0019] See also Figure 1-2 A new type of material support structure includes an inlet and outlet chamber 1, a support plate 4 is installed on the right side of the bottom of the inner cavity of the inlet and outlet chamber 1, a support base 6 is installed on the top of the support plate 4, a silicon carbide rod 5 is installed inside the support base 6, and a quartz tube body 2 is fixedly connected to the left side of the inner cavity of the inlet and outlet chamber 1, and the left side of the silicon carbide rod 5 penetrates into the inner cavity of the quartz tube body 2.

[0020] Specifically, a material chamber door 3 is installed on the right side of the inlet and outlet material chamber 1, and the left side of the material chamber door 3 is detachably connected to the right side of the inlet and outlet material chamber 1 by bolts. Through the above technical scheme, through the setting of the material chamber door 3, it is convenient to open and close the inlet and outlet material chamber 1, and at the same time, it is connected to the right side of the inlet and outlet material chamber 1 by bolts, which makes it convenient to remove and install the material chamber door 3. Adjustment bolts 8 are installed between the support plate 4 and the support base 6. There are three adjustment bolts 8, which are distributed at the front, rear and middle of the support base 6. Through the above technical scheme, through the setting of the adjustment bolts 8, it is convenient to connect the support plate 4 and the support base 6 firmly, and at the same time, the position of the support base 6 can be adjusted, and then the height of the silicon carbide rod 5 can be adjusted according to the weight of the product.

[0021] Specifically, a pressure cap 7 is installed on the right side of the top of the silicon carbide rod 5, and the inner cavity of the pressure cap 7 is threadedly connected with a connecting bolt 10, and the pressure cap 7 and the supporting base 6 are connected by the connecting bolt 10. Through the above technical scheme, through the setting of the pressure cap 7, the position of the silicon carbide rod 5 is clamped, thereby ensuring the stability of the silicon carbide rod 5 during operation, and avoiding the silicon carbide rod 5 from shaking during operation. The bottom of the inlet and outlet chamber 1 is fixedly connected with a cushion seat 9, and the surface of the inlet and outlet chamber 1 is fixedly connected with a support block 11. The number of support blocks 11 is set in multiples, and they are distributed in a surrounding manner on the surface of the inlet and outlet chamber 1. Through the above technical scheme, through the setting of the cushion seat 9, the inlet and outlet chamber 1 is supported, and through the setting of the support block 11, the outside of the inlet and outlet chamber 1 is supported and stabilized.

[0022] The working principle of the utility model is: first, the support base 6 is installed on the top of the support plate 4 by adjusting the bolts 8, and then the pressure cover 7 is installed on the top of the silicon carbide rod 5 by connecting the bolts 10, and the silicon carbide rod 5 extends into the interior of the quartz tube body 2, and then the product is placed on the silicon carbide rod 5 and pushed into the quartz tube body 2, and the product is pulled out of the quartz tube body 2 after the product process is completed. During the whole process, the product does not contact the quartz tube body 2, avoiding the problem of deformation of the quartz tube body 2 due to the weight of the product in a high temperature environment, so that more product materials can be produced and processed each time.

[0023] The above are only preferred specific implementation methods of the utility model, but the protection scope of the utility model is not limited to this. Any technician familiar with the technical field within the technical scope disclosed by the utility model, who makes equivalent replacements or changes based on the technical scheme and utility model concept of the utility model, should be covered by the protection scope of the utility model.

Claims

1. A novel material support structure, comprising a material inlet and outlet cavity (1), characterized in that: A support plate (4) is installed on the right side of the bottom of the inner cavity of the inlet and outlet cavity (1), a support base (6) is installed on the top of the support plate (4), a silicon carbide rod (5) is installed inside the support base (6), and a quartz tube body (2) is fixedly connected to the left side of the inner cavity of the inlet and outlet cavity (1), and the left side of the silicon carbide rod (5) penetrates into the inner cavity of the quartz tube body (2).

2. A new material support structure according to claim 1, characterized in that: A material chamber door (3) is installed on the right side of the material inlet and outlet chamber (1), and the left side of the material chamber door (3) is detachably connected to the right side of the material inlet and outlet chamber (1) via bolts.

3. A novel material support structure according to claim 1, characterized in that: Adjustment bolts (8) are installed between the support plate (4) and the support base (6); there are three adjustment bolts (8) distributed at the front, rear and middle of the support base (6).

4. A new material support structure according to claim 1, characterized in that: A gland (7) is installed on the right side of the top of the silicon carbide rod (5), and the inner cavity of the gland (7) is threadedly connected with a connecting bolt (10), and the gland (7) and the supporting base (6) are connected via the connecting bolt (10).

5. A novel material support structure according to claim 1, characterized in that: A cushion seat (9) is fixedly connected to the bottom of the inlet and outlet cavity (1), and a support block (11) is fixedly connected to the surface of the inlet and outlet cavity (1). The support blocks (11) are provided in a plurality and are distributed around the surface of the inlet and outlet cavity (1).

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