Etching liquid supply pipe structure
By adopting the correction liquid supply pipe structure of stainless steel and multi -stage filtering system, the problem of poor corrosion resistance and lack of filtering systems in existing technologies in the existing technology, and achieve higher corrosion resistance and filtration effects, extending the extension The transportation efficiency of the etching solution was improved.
Patent Information
- Application Number
- CN202421049316.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-15
- Publication Date
- 2025-01-24
- Estimated Expiration
- 2034-05-15
AI Technical Summary
Due to the lack of filtration system and corrosion resistance, the existing etching liquid supply pipe structures lead to damage to materials and aging of equipment, which affects the conveying efficiency and accuracy of etching liquid.
The etching solution supply pipe structure is made of stainless steel, and multiple filter plates are installed in the pipe, including the second filter plate, the final filter plate and the first filter plate. Through the cooperation of the shunt texture and the mud blocking plate, multi-stage filtration and impurity removal are achieved Remove.
Through the corrosion resistance and multi -stage filtering system of stainless steel, the corrosion resistance and filtering effect of the etching solution supply tube are significantly improved, the service life of the equipment is extended, and the transportation efficiency and accuracy of the etching solution is improved.
Smart Images

Figure CN222395880U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of chemical engineering, in particular to an etching liquid supply pipe structure. Background Art
[0002] The etching liquid supply pipe structure is a device used in the etching process, which is usually used in the semiconductor or printed circuit board (PCB) manufacturing process. The etching liquid supply pipe is a pipe with etching liquid flowing inside, which is used to accurately supply the etching liquid to the etching reaction chamber or reaction tank for etching reaction.
[0003] The existing etching liquid supply pipe structure is corrosive and lacks a filtration system. The etching liquid usually contains chemical substances such as strong acids or strong alkalis. These substances are highly corrosive, which will cause damage to the material of the etching liquid supply pipe, aging of the equipment, and even affect the transportation efficiency and accuracy of the etching liquid. Impurities in the supply pipe structure without a filtration system will clog key components such as the supply pipeline and valves, which will reduce the flow rate of the etching liquid, increase the etching liquid supply pressure, and even cause equipment shutdown and maintenance. Utility Model Content
[0004] The utility model aims to provide an etching liquid supply pipe structure to solve the problems raised in the above background technology.
[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: an etching liquid supply pipe structure, comprising a main body, a first support column fixedly connected to the upper surface of the main body, a control button fixedly connected to the front of the main body, a second support column fixedly connected to the upper surface of the main body, a liquid inlet fixedly connected to the right side of the main body, a liquid outlet fixedly connected to the front of the main body, a first filter plate fixedly connected to the inner wall of the main body, a second filter plate fixedly connected to the inner wall of the main body, a diversion texture fixedly connected to the inner wall of the main body, and a final filter plate fixedly connected to the inner wall of the main body.
[0006] Wherein, a reinforcement ring is fixedly connected to the upper surface of the main body, and a bolt is threadedly connected to the upper surface of the reinforcement ring.
[0007] Wherein, a first bearing is fixedly connected to the upper surface of the first support column, and a liquid inlet tightening valve is clamped on the upper surface of the first bearing.
[0008] Wherein, a second bearing is fixedly connected to the upper surface of the second support column, and a liquid outlet tightening valve is clamped on the upper surface of the second bearing.
[0009] Wherein, a connecting port is fixedly connected to the inner wall of the main body, and a first rubber ring is fixedly connected to the inner wall of the main body.
[0010] Wherein, a first mud stopper is fixedly connected to the inner wall of the main body, and a fixing thread is fixedly connected to the inner wall of the main body.
[0011] Wherein, a connecting plate is fixedly connected to the inner wall of the main body, and a second mud stopper is fixedly connected to the inner wall of the main body.
[0012] Compared with the prior art, the beneficial effects of the utility model are:
[0013] The utility model uses a main body entirely of stainless steel material and a second filter plate for primary filtration, then guides the etching liquid to the liquid outlet through a shunt texture, when the etching liquid reaches the middle section of the main body, it will be secondary filtered through a final filter plate and finally filtered through a first filter plate, and finally discharged from the liquid outlet, by installing a stainless steel material, corrosion resistance can be achieved, stainless steel has excellent corrosion resistance, can resist chemical erosion by etching liquid, it can maintain its mechanical properties and corrosion resistance for a long time, the mutual cooperation of the first filter plate, the second filter plate and the final filter plate can improve the filtering effect, through a plurality of filter plates, impurities in the etching liquid can be filtered step by step, the filtering effect is improved, the first, second and final filter plates can filter particles of different sizes, so as to improve the filtering efficiency. BRIEF DESCRIPTION OF THE DRAWINGS
[0014] Figure 1 This is a three-dimensional structural schematic diagram of an etching liquid supply pipe structure of the utility model;
[0015] Figure 2 It is a right-angle perspective three-dimensional structural schematic diagram of an etching liquid supply pipe structure of the utility model;
[0016] Figure 3 This is a front cross-sectional view of an etching liquid supply pipe structure of the utility model;
[0017] Figure 4 The utility model is a side sectional view of an etching liquid supply pipe structure.
[0018] In the figure: 1. main body; 2. tighten the valve for liquid outlet; 3. second support column; 4. reinforcement ring; 5. control button; 6. tighten the valve for liquid inlet; 7. first support column; 8. bolt; 9. liquid outlet; 10. liquid inlet; 11. first rubber ring; 12. connecting port; 13. first filter plate; 14. first mud stop plate; 15. second bearing; 16. final filter plate; 17. second mud stop plate; 18. diversion texture; 19. fixing thread; 20. second filter plate; 21. first bearing; 22. connecting plate. DETAILED DESCRIPTION
[0019] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0020] See also Figure 1-4 The utility model provides a technical solution: an etching liquid supply pipe structure, including a main body 1, a first support column 7 is fixedly connected to the upper surface of the main body 1, a control button 5 is fixedly connected to the front of the main body 1, a second support column 3 is fixedly connected to the upper surface of the main body 1, a liquid inlet 10 is fixedly connected to the right side of the main body 1, a liquid outlet 9 is fixedly connected to the front of the main body 1, a first filter plate 13 is fixedly connected to the inner wall of the main body 1, a second filter plate 20 is fixedly connected to the inner wall of the main body 1, a diversion texture 18 is fixedly connected to the inner wall of the main body 1, and a final filter plate 16 is fixedly connected to the inner wall of the main body 1.
[0021] Among them, a reinforcement ring 4 is fixedly connected to the upper surface of the main body 1, and a bolt 8 is threadedly connected to the upper surface of the reinforcement ring 4. The bolt 8 is used to connect and fix different components to ensure the integrity and stability of the structure.
[0022] The first bearing 21 is fixedly connected to the upper surface of the first support column 7 , and the liquid inlet tightening valve 6 is clamped on the upper surface of the first bearing 21 .
[0023] Among them, the upper surface of the second support column 3 is fixedly connected with the second bearing 15, and the upper surface of the second bearing 15 is clamped with the liquid outlet tightening valve 2, and the liquid inlet tightening valve 2 is used to adjust the amount and flow rate of the etching liquid entering, providing more precise control.
[0024] Among them, a connecting port 12 is fixedly connected to the inner wall of the main body 1, and a first rubber ring 11 is fixedly connected to the inner wall of the main body 1. The first rubber ring 11 is used to seal the liquid inlet to prevent liquid leakage.
[0025] The first mud blocking plate 14 is fixedly connected to the inner wall of the main body 1 , and the fixing thread 19 is fixedly connected to the inner wall of the main body 1 . The fixing thread 19 is used to fix the filter plate and other components to ensure the tightness of the structure.
[0026] The inner wall of the main body 1 is fixedly connected with a connecting plate 22, and the inner wall of the main body 1 is fixedly connected with a second mud blocking plate 17, and the second mud blocking plate 17 is used to prevent solid impurities from entering subsequent components to improve the filtering effect.
[0027] Working principle: the main body 1 is made entirely of stainless steel. First, open the outlet valve 2 and the inlet valve 6 to allow the etching liquid to enter the main body 1. Then the etching liquid flows into the main body from the liquid inlet 10, passes through the second filter plate 16 for primary filtration, and then passes through the diversion texture 18 to guide the etching liquid to the liquid outlet 9. When the etching liquid reaches the middle section of the main body 1, it will pass through the final filter plate 16 for secondary filtration. The operator needs to check whether the second mud stop plate 17 is firm to avoid loosening during transportation. The function of the mud stop plate is to prevent large particles of impurities from entering the pipeline to ensure the purity of the etching liquid. Then the etching liquid passes through the first filter plate for final filtration and is finally discharged from the liquid outlet 9.
[0028] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.
Claims
1. An etching liquid supply pipe structure, comprising a main body (1), characterized in that: The upper surface of the main body (1) is fixedly connected to a first support column (7), the front surface of the main body (1) is fixedly connected to a control button (5), the upper surface of the main body (1) is fixedly connected to a second support column (3), the right side surface of the main body (1) is fixedly connected to a liquid inlet (10), the front surface of the main body (1) is fixedly connected to a liquid outlet (9), the inner wall of the main body (1) is fixedly connected to a first filter plate (13), the inner wall of the main body (1) is fixedly connected to a second filter plate (20), the inner wall of the main body (1) is fixedly connected to a diversion texture (18), and the inner wall of the main body (1) is fixedly connected to a final filter plate (16).
2. The etching liquid supply pipe structure according to claim 1, characterized in that: A reinforcement ring (4) is fixedly connected to the upper surface of the main body (1), and a bolt (8) is threadedly connected to the upper surface of the reinforcement ring (4).
3. The etching liquid supply pipe structure according to claim 1, characterized in that: The upper surface of the first support column (7) is fixedly connected to a first bearing (21), and the upper surface of the first bearing (21) is clamped with a liquid inlet tightening valve (6).
4. The etching liquid supply pipe structure according to claim 1, characterized in that: The upper surface of the second support column (3) is fixedly connected to a second bearing (15), and the upper surface of the second bearing (15) is clamped with a liquid outlet tightening valve (2).
5. The etching liquid supply pipe structure according to claim 1, characterized in that: The inner wall of the main body (1) is fixedly connected with a connection port (12), and the inner wall of the main body (1) is fixedly connected with a first rubber ring (11).
6. The etching liquid supply pipe structure according to claim 1, characterized in that: A first mud stopper (14) is fixedly connected to the inner wall of the main body (1), and a fixing thread (19) is fixedly connected to the inner wall of the main body (1).
7. The etching liquid supply pipe structure according to claim 1, characterized in that: A connecting plate (22) is fixedly connected to the inner wall of the main body (1), and a second mud blocking plate (17) is fixedly connected to the inner wall of the main body (1).