Ultrasonic scribing air static pressure electric spindle
By setting gas static voltage electrococcular bearings on the spindle of silicon carbide, and using different pore density to drive a shaft shoulder to form a high -frequency shock, solving the problem of slow silicon carbide cutting process in existing technologies, and realized rapid and efficient strokes. Cut the effect.
Patent Information
- Application Number
- CN202323608689.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2023-12-28
- Publication Date
- 2025-01-28
- Estimated Expiration
- 2033-12-28
AI Technical Summary
The prior art is difficult to cut the third generation semiconductor silicon carbide quickly and efficiently, resulting in a slow and time-consuming cutting process.
Design an ultrasonic chip gas static voltage voltage electrococcular axis, set the first axis bearings and the second axis bearings by setting up the first axis bearing and the second axis bearing on both sides of the shaft, and to ventilate it through the bearing air. Form high -frequency shocks to improve the cutting speed and quality of the wheel.
The rapid and efficient cutting of the third -generation silicon carbide is achieved, and the scratch and quality of the wheel on the high hardness substrate is improved.
Smart Images
Figure CN222405086U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the field of silicon carbide scribing slices, in particular to an ultrasonic scribing gas static pressure electric spindle. Background Art
[0002] Since the third-generation semiconductor silicon carbide has a high hardness, its average Mohs hardness is distributed between 9.2 and 9.6, which means that the dicing of silicon carbide substrates is very difficult. The existing dicing spindle can only drive the grinding wheel to cut vertically downward along the silicon carbide surface during the cutting process, which can easily cause the blade of the grinding wheel to break, so the only option is to slowly move the grinding wheel downward for cutting. This makes the dicing of the silicon carbide substrate take a lot of time, so the existing dicing spindle cannot achieve fast and efficient dicing of the substrate. Utility Model Content
[0003] The utility model aims to provide an ultrasonic scribing gas static pressure electric spindle to meet the requirements of fast and efficient scribing of third-generation semiconductor silicon carbide.
[0004] In order to solve the above technical problems, the specific solution adopted by the utility model is:
[0005] An ultrasonic scribing pneumatic electric spindle comprises a shell, a rotating shaft driven by a motor is installed in the shell, a grinding wheel for grinding a substrate is provided on the output end of the rotating shaft, the rotating shaft has a shoulder, a first axial bearing and a second axial bearing are respectively provided on both sides of the shoulder in the shell, air holes are distributed on the bearing bodies of the first axial bearing and the second axial bearing, and the air holes are distributed in different densities on the bearing bodies of the first axial bearing and the second axial bearing, a bearing air inlet is provided outside the shell, an air inlet channel connected with the bearing air inlet is provided inside the shell, a front air inlet is provided on the air inlet channel for supplying air to the first axial bearing to push the shoulder to move, and a rear air inlet is also provided on the air inlet channel for supplying air to the second axial bearing to cooperate with the front air inlet to make the shoulder form a reciprocating motion.
[0006] A cooling water jacket for cooling the motor is arranged inside the shell, and a cooling water inlet for supplying water to the cooling water jacket and a cooling water outlet for cooling water to flow out are arranged on the top of the shell.
[0007] A front bearing for supporting the rotating shaft is arranged inside the shell, and the air intake passage is connected with a front bearing air intake for supplying air to the front bearing.
[0008] The front bearing is arranged on the right side of the shaft shoulder.
[0009] A rear bearing for supporting the rotating shaft is arranged inside the shell, and the air intake passage is connected with a rear bearing air intake for supplying air to the rear bearing.
[0010] The grinding wheel is detachably connected to the output end of the rotating shaft.
[0011] A power inlet is arranged on the top of the shell, and the wires of the motor pass through the power inlet to be electrically connected to an external power source.
[0012] The motor is arranged at an output end away from the rotating shaft.
[0013] Due to the adoption of the above technical solution, the utility model has the following beneficial effects:
[0014] The first axial bearing and the second axial bearing are arranged on both sides of the shaft shoulder of the rotating shaft, and the first axial bearing and the second axial bearing are ventilated through the bearing air intake. Due to the different pore density distributions on the first axial bearing and the second axial bearing, when the first axial bearing is ventilated, it will push the shaft shoulder to move in the direction of the second axial bearing. After moving a certain distance, the thrust generated by the first axial bearing becomes smaller. At the same time, the thrust of the shaft shoulder received by the second axial bearing will become larger, and high-frequency oscillation can be formed by reciprocating in this way. When the rotating shaft can oscillate at high frequency in the axial direction, the grinding wheel can not only perform cutting along its own cutting trajectory, but also grind along its own axial direction. When the two are combined, the cutting work of the third-generation silicon carbide can be completed more efficiently and quickly. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] Figure 1 It is a side view of the utility model;
[0016] Figure 2 It is a top view of the utility model;
[0017] Front air inlet 1; rear air inlet 2; housing 3; front bearing air inlet 4; air inlet channel 5; rear bearing air inlet 6; bearing air inlet 7; rotating shaft 8; motor 9; cooling water outlet 11; power inlet 12; cooling water inlet 15; grinding wheel 17; first axial bearing 18; second axial bearing 19; front bearing 20; rear bearing 21; shaft shoulder 21; rear bearing 22. DETAILED DESCRIPTION
[0018] The utility model arranges a first axial bearing 18 and a second axial bearing 19 on both sides of the shaft shoulder of the rotating shaft 8, and supplies air to the first axial bearing 18 and the second axial bearing 19 so that the rotating shaft 8 generates high-frequency oscillations along the axial direction, thereby improving the cutting speed and cutting quality of the grinding wheel 17 driven by the rotating shaft 8 on the high-hardness substrate.
[0019] like Figure 1 and Figure 2As shown, an ultrasonic scribing air-static electric spindle includes a housing 3, a rotating shaft 8 is provided inside the housing 3, and the rotating shaft 8 is driven by a motor 9 inside the housing 3. A power inlet 12 is provided on the top of the housing 3, and the wires of the motor 9 pass through the power inlet 12 to be electrically connected to an external power source. The output end of the rotating shaft 8 extends to the outside of the housing 3, and the rotating shaft 8 has a shoulder 21. The housing 3 is provided with axial bearings on both sides of the shoulder 21. The number of axial bearings is two, namely, a first axial bearing 18 and a second axial bearing 19. The bearing bodies of the first axial bearing 18 and the second axial bearing 19 are provided with air holes, and the air hole densities on the first axial bearing 18 and the second axial bearing 19 are different. An air inlet channel 5 is provided inside the housing 3, and a bearing air inlet 7 is provided outside the housing 3. The bearing air inlet 7 is used to supply air to the air inlet channel 5. The air inlet channel 5 is provided with a front air inlet 1 and a rear air inlet 2, and the front air inlet 1 and the rear air inlet 2 are used to supply air to the bearings of the first axial bearing 18 and the second axial bearing 19, respectively. Since the pore density distribution on the bearings of the first axial bearing 18 and the second axial bearing 19 is different, when the front air inlet 1 and the rear air inlet 2 supply air, the axial bearing with a large pore density will drive the shoulder 21 to move toward the axial bearing with a small pore density. After moving a certain distance, the thrust generated by the axial bearing with a large pore density will decrease. At the same time, the axial bearing with a small pore density will drive the shoulder 21 to move in the opposite direction. By performing a reciprocating cycle, dynamic balance can be achieved and the rotating shaft 8 can oscillate at a high frequency along the axial direction.
[0020] A detachable grinding wheel 17 is provided on the output end of the rotating shaft 8 , and different types of grinding wheels 17 can be replaced by disassembling the grinding wheel 17 . The grinding wheel 17 is used for slicing and cutting the substrate.
[0021] Since the motor 9 drives the rotating shaft 8 to rotate at a high speed for a long time, it is necessary to cool the motor inside the housing 3. The motor 9 is cooled by setting a cooling water jacket inside the housing 3. A cooling water inlet 15 and a cooling water outlet 11 are respectively provided on the outside of the housing 3. The cooling water enters the cooling water jacket from the cooling water inlet 15 to cool the motor 9, and flows out from the cooling water outlet 11 after the cooling is completed.
[0022] A front bearing 20 and a rear bearing 22 for supporting the rotating shaft 8 are provided inside the outer shell 3. The front bearing air intake 4 and the rear bearing air intake 6 are respectively connected to the air intake passage 5. The front bearing air intake 4 and the rear bearing air intake 6 are respectively used to supply air to the front bearing 20 and the rear bearing 22, so as to form an air model to support the parts of the front bearing 20 and the rear bearing 22 corresponding to the rotating shaft 8.
[0023] The method of using the utility model is briefly described as follows:
[0024] The motor 9 drives the rotating shaft 8 to rotate, and the bearing air inlet 7 supplies air to the air inlet channel 5. The air inlet channel 5 supplies air to the first axial bearing 18, the second axial bearing 19, the front bearing 20, the rear bearing 21 and the rear bearing 22 respectively. The first axial bearing 18 and the second axial bearing 19 can drive the rotating shaft 8 to generate high-frequency oscillations in the axial direction, and drive the grinding wheel 17 to perform high-frequency oscillations in the axial direction while performing slicing and grooving on the substrate. Since the grinding wheel 17 performs high-frequency oscillations, the grinding wheel 17 can be made to grind when cutting, thereby improving the cutting speed and cutting quality of the grinding wheel 17.
Claims
1. An ultrasonic scribing air-static pressure electric spindle, comprising a housing (3), a rotating shaft (8) driven by a motor (9) being mounted in the housing (3), wherein: A grinding wheel (17) for grinding the substrate is provided at the output end of the rotating shaft (8), the rotating shaft (8) has a shoulder (21), a first axial bearing (18) and a second axial bearing (19) are provided on both sides of the shoulder (21) in the housing (3), air holes are distributed on the bearing bodies of the first axial bearing (18) and the second axial bearing (19), and the air holes on the bearing bodies of the first axial bearing (18) and the second axial bearing (19) have different distribution densities, a bearing air inlet (7) is provided outside the housing (3), an air inlet channel (5) connected to the bearing air inlet (7) is provided inside the housing (3), a front air inlet (1) is provided on the air inlet channel (5) for supplying air to the first axial bearing (18) to push the shoulder (21) to move, and a rear air inlet (2) is also provided on the air inlet channel (5) for supplying air to the second axial bearing (19) to cooperate with the front air inlet (1) to make the shoulder (21) form a reciprocating motion.
2. The ultrasonic scribing gas-static pressure electric spindle according to claim 1 is characterized in that: A cooling water jacket for cooling the motor (9) is provided inside the housing (3), and a cooling water inlet (15) for supplying water to the cooling water jacket and a cooling water outlet (11) for cooling water to flow out are provided at the top of the housing (3).
3. The ultrasonic scribing gas-static pressure electric spindle according to claim 1 is characterized in that: A front bearing (20) for supporting the rotating shaft (8) is arranged inside the housing (3), and the air intake passage (5) is connected to a front bearing air intake (4) for supplying air to the front bearing (20).
4. The ultrasonic scribing gas-static pressure electric spindle according to claim 3 is characterized in that: The front bearing (20) is arranged on the right side of the shaft shoulder (21).
5. The ultrasonic scribing gas-static pressure electric spindle according to claim 1, characterized in that: A rear bearing (22) for supporting the rotating shaft (8) is arranged inside the housing (3), and the air intake passage (5) is connected to a rear bearing air intake (6) for supplying air to the rear bearing (22).
6. The ultrasonic scribing gas-static pressure electric spindle according to claim 1, characterized in that: The grinding wheel (17) is detachably connected to the output end of the rotating shaft (8).
7. The ultrasonic scribing gas-static pressure electric spindle according to claim 1 is characterized by: A power inlet (12) is provided on the top of the housing (3), and the electric wires of the motor (9) pass through the power inlet (12) and are electrically connected to an external power source.
8. The ultrasonic scribing gas-static pressure electric spindle according to claim 1, characterized in that: The motor (9) is arranged at an output end away from the rotating shaft (8).