Silicon wafer conveying structure with deviation rectifying function
By using the conveying line adjustment mechanism to increase the pitch of the conveyor line in the transmission structure of solar cell chips, the problem of correction interference between the spacing of the silicon wafer is too small or the angle deviation is large, and the more efficient correction effect and position accuracy are achieved.
Patent Information
- Application Number
- CN202421218164.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-30
- Publication Date
- 2025-01-28
- Estimated Expiration
- 2034-05-30
AI Technical Summary
During the transportation process of solar cell, the spacing between the silicon wafers is too small or the angle deviation is large, which causes the silicon wafer to interfere with the silicon wafer when clamping, affecting the deviation correction effect.
By adding the spacing of two conveying lines by adjusting the conveying line, the correction mechanism can separate the silicon wafers separately to avoid interference.
Effectively avoid the problem of interference in the silicon wafer under abnormal situation, increase the range of correction, and ensure that the location accuracy of the silicon wafers meets the requirements.
Smart Images
Figure CN222409910U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of solar cell manufacturing, and in particular relates to a silicon slice conveying structure with a deviation correction function. Background Art
[0002] At present, during the transportation process of solar cells, there is a demand for two half-piece silicon wafers (hereinafter referred to as silicon wafers) to be transported and processed in parallel. In addition, the processing station and some operation stations have certain requirements for the position accuracy of the silicon wafers. If it exceeds a certain range, the processing station will be unable to process or be unable to operate to some transfer and buffer stations. Therefore, the silicon wafers will be clamped and straightened in advance through the correction mechanism.
[0003] However, before entering the above-mentioned workstation, there may be abnormal situations such as the distance between the two silicon wafers is too small, the angle deviation between the two silicon wafers is large, or the distance between the two silicon wafers is not centered relative to the two conveyor lines. At this time, the conventional correction mechanism will interfere with the silicon wafers during clamping and affect the correction. Utility Model Content
[0004] In response to the above defects or improvement needs of the prior art, the utility model provides a silicon wafer conveying structure with a correction function, the purpose of which is to increase the distance between the two conveyor lines through a conveyor line adjustment mechanism, so that the correction mechanism can clamp the corresponding silicon wafers respectively, avoiding the problem of interference with the silicon wafers when clamping the correction mechanism under abnormal circumstances.
[0005] To achieve the above-mentioned purpose, the utility model provides a silicon wafer conveying structure with a deflection correction function, comprising two conveying lines and two deflection correction mechanisms arranged one by one corresponding to the two conveying lines, the two conveying lines are arranged in parallel and spaced apart, and both extend along a first direction, the deflection correction mechanism comprises a deflection correction drive module and two clamping members connected to the deflection correction drive module and separately arranged along a second direction, the second direction is perpendicular to the first direction, the deflection correction drive module drives the two clamping members to move toward or away from the silicon wafer along the second direction,
[0006] The silicon wafer conveying structure also includes a conveyor line adjustment mechanism, which includes an adjusting drive actuator, a first moving part connected to the adjusting drive actuator, the two conveyor lines are connected to the first moving part, and the adjusting drive actuator drives the first moving part to move in a second direction, thereby driving the two conveyor lines to move towards or away from each other.
[0007] Optionally, the silicon wafer conveying structure further includes a base, the first moving member includes two first sliders slidably arranged on the base along the second direction, and the conveying line adjustment mechanism further includes a first rotating block connected to the output shaft of the adjustment drive actuator and two first connecting rods;
[0008] Among them, one end of the two first connecting rods is connected to the first rotating block, and the other end is respectively connected to the two first sliding blocks, and the two conveying lines are respectively connected to the two first sliding blocks.
[0009] Optionally, the first moving member includes a synchronous belt structure or a forward and reverse screw rod structure;
[0010] Wherein, the synchronous belt structure comprises a driving sprocket, a driven sprocket and a synchronous belt, the adjusting driving actuator is connected to the driving sprocket to drive the driving sprocket to rotate, the synchronous belt is sleeved on the driving sprocket and the driven sprocket, and the conveyor belts located on the upper and lower layers of the synchronous belt are respectively connected to the two conveyor lines;
[0011] Among them, the forward and reverse screw structure includes a screw, a seat body and two sliders. The adjusting drive actuator is connected to the screw to drive the screw to rotate. The two ends of the screw have opposite threads. The two sliders are respectively matched with the two end threads of the screw, and each slider is slidably matched with the seat body. Each slider is connected to the corresponding conveying line.
[0012] Optionally, the conveyor line adjustment mechanism is located below the two conveyor lines.
[0013] Optionally, the adjustment drive actuator drives the two conveying lines to move away from the end position where the two conveying lines are located in the middle of their corresponding two clamping members.
[0014] Optionally, the deviation correction drive module further drives the clamping ends of the two clamping members to move up and down in the vertical direction, so that the clamping members are lower than the conveying line or the clamping ends of the clamping members are higher than the conveying line.
[0015] Optionally, each of the deflection correction drive modules includes a deflection correction drive actuator and a second moving part, and the silicon wafer conveying structure also includes a base;
[0016] The second moving member further comprises a second slider slidably arranged on the base along the second direction, a second rotating block connected to the output shaft of the deviation correction driving actuator, a second connecting rod and a guide member, one end of the second connecting rod is connected to the second rotating block, and the other end is connected to the second slider, and one end of the clamping member close to the second rotating block is connected to the second slider through a rotating shaft;
[0017] The guide member includes a guide block and a motion shaft extending along the first direction. The guide block is provided with a guide hole descending in a direction away from the second rotating block. The motion shaft passes through the guide hole and through the other end of the clamping member relatively away from the second rotating block.
[0018] Optionally, the guide hole is horizontally arranged close to a side of the second rotating block.
[0019] Optionally, the number of the guide blocks in the guide member is two, and the two guide blocks are symmetrically arranged on both sides of the corresponding second sliding block, and both ends of the moving shaft pass through the two guide blocks on both sides respectively.
[0020] Optionally, the conveying line is located between the clamping ends of the two corresponding clamping members, and the clamping member includes at least one L-shaped support arm and a guide wheel connected to the top end of the support arm.
[0021] The above-mentioned improved technical features can be combined with each other as long as they do not conflict with each other.
[0022] In general, compared with the prior art, the above technical solutions conceived by the utility model have the following beneficial effects:
[0023] For a silicon wafer conveying structure with a correction function provided by an embodiment of the utility model, two conveying lines 1 respectively receive two silicon wafers conveyed from the upstream (at this time, the position accuracy between the two silicon wafers does not meet the requirements). Then, by adjusting the driving actuator 31, the first moving part 32 is driven to move along the second direction to increase the spacing between the two conveying lines 1 to increase the spacing between the two silicon wafers, and then the correction driving module 21 of the correction mechanism 2 drives the two clamping parts 24 to move toward each other to clamp the corresponding silicon wafers, thereby clamping and aligning. It can also avoid abnormal situations such as the spacing between the two silicon wafers is too small, the angle deviation between the two silicon wafers is large, or the spacing between the two silicon wafers is not centered relative to the two conveying structures. The correction mechanism 2 will interfere with the silicon wafer and affect the clamping and alignment, thereby increasing the correction range of the correction mechanism 2. In addition, when the correction is completed, the clamping member 24 of the correction mechanism 2 is reset, and the distance between the two conveyor lines 1 is reduced by adjusting the driving actuator 31 and the first moving member 32, so that the distance between the two conveyor lines 1 is reset. At this time, the distance between the two conveyor lines 1 is consistent with the distance between the two conveyor lines 1 in the upstream and downstream, and the position accuracy between the two silicon wafers meets the requirements, thereby realizing the transportation to the downstream.
[0024] That is to say, the embodiment of the utility model provides a silicon wafer conveying structure with a correction function, which increases the distance between the two conveying lines through a conveying line adjustment mechanism, so that the correction mechanism can clamp the corresponding silicon wafers respectively, avoiding the problem of the correction mechanism interfering with the silicon wafer when clamping under abnormal circumstances. BRIEF DESCRIPTION OF THE DRAWINGS
[0025] Figure 1 This is a first view of a silicon wafer conveying structure with a deviation correction function provided by an embodiment of the utility model;
[0026] Figure 2 This is a second view of a silicon wafer conveying structure with a deviation correction function provided by an embodiment of the utility model;
[0027] Figure 3 It is a structural schematic diagram of a synchronous belt structure provided by an embodiment of the utility model;
[0028] Figure 4 It is a structural schematic diagram of a deviation correction mechanism provided in an embodiment of the utility model.
[0029] In all the drawings, the same reference numerals represent the same technical features, specifically:
[0030] 1. Conveyor line; 2. Correction mechanism; 21. Correction drive module; 22. Correction drive actuator; 23. Second moving part; 231. Second slider; 232. Second rotating block; 233. Second connecting rod; 234. Guide member; 2341. Guide block; 2342. Moving shaft; 2343. Guide hole; 24. Clamp; 241. Guide wheel; 242. Rotating shaft; 3. Conveyor line adjustment mechanism; 31. Adjustment drive actuator; 32. First moving part; 321. First slider; 3211. Movable plate; 322. First rotating block; 323. First connecting rod; 324. Driving sprocket; 325. Driven sprocket; 326. Synchronous belt; 4. Base; 41. First slide rail; 42. Second slide rail. DETAILED DESCRIPTION
[0031] In order to make the purpose, technical solution and advantages of the utility model more clear, the utility model is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the utility model and are not used to limit the utility model. In addition, the technical features involved in each embodiment of the utility model described below can be combined with each other as long as they do not conflict with each other.
[0032] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.
[0033] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present utility model, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.
[0034] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
[0035] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.
[0036] Example:
[0037] Figure 1 This is a first view of a silicon wafer conveying structure with a deviation correction function provided by an embodiment of the utility model, such as Figure 1 As shown, the silicon wafer conveying structure includes two conveying lines 1 and two deviation correction mechanisms 2 arranged one by one with the two conveying lines 1. The two conveying lines 1 are arranged in parallel and spaced apart, and both are arranged along the first direction ( Figure 1 The correction mechanism 2 includes a correction driving module 21 and a correction driving module 21 connected to the correction driving module 21 and extending along the second direction ( Figure 1 The two clamping members 24 are arranged separately in the Y-axis direction, and the second direction is perpendicular to the first direction. The correction drive module 21 drives the two clamping members 24 to move toward or away from the silicon wafer along the second direction. In order to facilitate the clamping of the silicon wafer, the conveyor line 1 is located between the clamping ends of the two clamping members 24 in the corresponding correction mechanism 2.
[0038] The silicon wafer conveying structure also includes a conveying line adjustment mechanism 3, such as Figure 2As shown, the conveyor line adjustment mechanism 3 includes an adjusting drive actuator 31, a first movable member 32 connected to the adjusting drive actuator 31, and two conveyor lines 1 are connected to the first movable member 32. The adjusting drive actuator 31 drives the first movable member 32 to move in the second direction, thereby driving the two conveyor lines 1 towards or away from each other.
[0039] For a silicon wafer conveying structure with a correction function provided by an embodiment of the utility model, two conveying lines 1 respectively receive two silicon wafers conveyed from the upstream (at this time, the position accuracy between the two silicon wafers does not meet the requirements). Then, by adjusting the driving actuator 31, the first moving part 32 is driven to move along the second direction to increase the spacing between the two conveying lines 1 to increase the spacing between the two silicon wafers, and then the correction driving module 21 of the correction mechanism 2 drives the two clamping parts 24 to move toward each other to clamp the corresponding silicon wafers, thereby clamping and aligning. It can also avoid abnormal situations such as the spacing between the two silicon wafers is too small, the angle deviation between the two silicon wafers is large, or the spacing between the two silicon wafers is not centered relative to the two conveying structures. The correction mechanism 2 will interfere with the silicon wafer and affect the clamping and alignment, thereby increasing the correction range of the correction mechanism 2. In addition, when the correction is completed, the clamping member 24 of the correction mechanism 2 is reset, and the distance between the two conveyor lines 1 is reduced by adjusting the driving actuator 31 and the first moving member 32, so that the distance between the two conveyor lines 1 is reset. At this time, the distance between the two conveyor lines 1 is consistent with the distance between the two conveyor lines 1 in the upstream and downstream, and the position accuracy between the two silicon wafers meets the requirements, thereby realizing the transportation to the downstream.
[0040] That is to say, the embodiment of the utility model provides a silicon wafer conveying structure with a correction function, which increases the distance between the two conveying lines 1 through the conveying line adjustment mechanism 3, so that the correction mechanism 2 can clamp the corresponding silicon wafers respectively, avoiding the problem of the correction mechanism 2 interfering with the silicon wafer when clamping under abnormal circumstances.
[0041] Exemplarily, each conveying line 1 may be two narrow belts arranged at intervals along the second direction.
[0042] Figure 2 This is a second view of a silicon wafer conveying structure with a deviation correction function provided by an embodiment of the utility model, such as Figure 2 As shown, the silicon wafer conveying structure also includes a base 4, the first moving member 32 includes two first sliders 321 slidably arranged on the base 4 along the second direction, and the conveying line adjustment mechanism 3 also includes a first rotating block 322 connected to the output shaft of the adjustment drive actuator 31 and two first connecting rods 323.
[0043] One end of the two first connecting rods 323 is connected to the first rotating block 322, and the other end is connected to the two first sliders 321, and the two conveyor lines 1 are connected to the two first sliders 321. Therefore, when the first rotating block 322 rotates under the drive of the adjustment drive actuator 31, the first rotating block 322 drives the two first connecting rods 323 to move, and then drives the two first sliders 321 to move along the second direction.
[0044] Specifically, when the distance between the two conveyor lines 1 needs to be increased, the first rotating block 322 is driven to rotate forward by adjusting the driving actuator 31, so that the distance between the two first connecting rods 323 in the second direction increases, and then the distance between the two first sliders 321 increases, and finally the distance between the two conveyor lines 1 can be increased. When the distance between the two conveyor lines 1 needs to be reduced (so that the distance between the two conveyor lines 1 is reset), the first rotating block 322 is driven to rotate reversely by adjusting the driving actuator 31, so that the distance between the two first connecting rods 323 in the second direction decreases, and then the distance between the two first sliders 321 decreases, and finally the distance between the two conveyor lines 1 can be reduced.
[0045] Exemplarily, the adjustment drive actuator 31 can be a motor. The output shaft of the adjustment drive actuator 31 extends along the first direction, that is, the adjustment drive actuator 31 is arranged horizontally at this time, thereby reducing the volume of the entire conveyor line adjustment mechanism 3. A movable plate 3211 is provided on the first slider 321, the first connecting rod 323 is hinged on the movable plate 3211, and the top of the movable plate 3211 is fixedly connected to the corresponding conveyor line 1, that is, the conveyor line 1 is connected to its corresponding first slider 321 through a movable plate 3211, wherein the movable plate 3211 is arranged in the vertical direction.
[0046] Exemplarily, the first slider 321 slides on the base 4 by means of a first slide rail 41 connected to the base 4 .
[0047] In another implementation of the present invention, the first moving part 32 includes a synchronous belt structure or a forward and reverse screw structure; it should be noted that the movement of the first moving part 32 along the second direction mentioned above means that at least part of the first moving part 32 moves along the second direction, which does not mean that all parts must move along the second direction.
[0048] The synchronous belt structure includes a driving sprocket 324, a driven sprocket 325 and a synchronous belt 326. The drive actuator 31 is connected to the driving sprocket 324 to drive the driving sprocket 324 to rotate. The synchronous belt 326 is sleeved on the driving sprocket 324 and the driven sprocket 325, and the conveyor belts located on the upper and lower layers of the synchronous belt 326 are respectively connected to the two conveyor lines 1 (see Figure 3). In order to better enable the synchronous belt 326 to move the two conveyor lines 1 toward or away from each other, the two conveyor lines 1 are respectively connected to the conveyor line 1 through a slider and an intermediate connecting piece, and the conveyor line 1 is connected to the slider through the intermediate connecting piece, and the slider is connected to the synchronous belt 326. Specifically, when the conveyor belt on the upper layer of the synchronous belt 326 drives one conveyor line 1 to move left, and the conveyor belt on the lower layer of the synchronous belt 326 drives another conveyor line 1 to move right, the distance between the two conveyor lines 1 becomes smaller (see Figure 3 ). When the conveyor on the upper layer of the synchronous belt 326 drives one conveyor line 1 to move right, and the conveyor on the lower layer of the synchronous belt 326 drives another conveyor line 1 to move left, the distance between the two conveyor lines 1 becomes larger. It should be noted that the connection positions of the two conveyor lines 1 and the upper and lower conveyor belts of the synchronous belt 326 are spaced apart in the horizontal direction.
[0049] The forward and reverse screw structure includes a screw, a seat and two sliders. The adjusting driving actuator 31 is connected to the screw to drive the screw to rotate. The two ends of the screw have opposite threads. The two sliders are respectively matched with the threads at the two ends of the screw, and each slider is slidably matched with the seat, and each slider is connected to the corresponding conveyor line 1. In other words, the adjusting driving actuator 31 drives the screw to rotate, and the rotation of the screw is finally converted into the sliding of the two sliders in the same direction or opposite direction, so as to finally adjust the spacing between the two conveyor lines 1.
[0050] In this embodiment, the conveyor line adjustment mechanism 3 is located below the two conveyor lines 1, so that the adjustment drive actuator 31 and the first moving part 32 are always below the conveyor line 1 without interfering with the silicon wafers on the conveyor line 1, and also makes the structure of the silicon wafer conveying structure compact.
[0051] In addition, the end position when the two conveyor lines 1 are driven away from the end of the movement by adjusting the driving actuator 31 is that the two conveyor lines 1 are respectively located in the middle of their corresponding two clamps 24. That is, when the driving actuator 31 is adjusted to drive the end point, each conveyor line 1 is exactly located between the two clamps 24, and because the silicon wafer is located in the middle of the two clamps 24 after clamping, the silicon wafer on the conveyor line 1 is centered relative to the conveyor line 1 after clamping, thereby achieving the effect of precise adjustment. It is easy to understand that in the initial state, when the conveyor line 1 is not driven, the clamp 24 located between the two conveyor lines 1 is closer to the conveyor line 1 than the clamp 24 located outside the conveyor line 1, so that after the conveyor line 1 is driven, the two conveyor lines 1 are respectively located in the middle of their corresponding two clamps 24.
[0052] In one implementation of the utility model, the deviation correction driving module 21 also drives the clamping ends of the two clamping members 24 to move up and down in the vertical direction, so that the clamping members 24 are lower than the conveyor line 1 (non-clamped state) or the clamping ends of the clamping members 24 are higher than the conveyor line 1 (clamped state). It is easy to understand that in the non-clamped state, the two clamping members 24 are located below the corresponding conveyor line 1 and will not interfere with the conveyor line 1 receiving the silicon wafer. After receiving, when the two silicon wafers need to be rectified, the spacing between the two conveyor lines 1 is increased by the conveyor line adjustment mechanism 3, so that the spacing between the two silicon wafers is increased, and there is enough space, and the range of the clamping positioning of the clamping member 24 is also larger. On this basis, the deviation correction driving module 21 drives the clamping end of the clamping member 24 to be higher than the conveyor line 1 and clamp the silicon wafer (that is, the clamping member 24 is in a clamped state), and at this time, the silicon wafer will not be interfered with during the clamping process.
[0053] Specifically, in this embodiment, Figure 4 Schematic diagram of a correction mechanism provided by an embodiment of the utility model. Figure 4 As shown, each deviation correction driving module 21 includes a deviation correction driving actuator 22 and a second moving member 23, and the silicon wafer conveying structure also includes a base 4;
[0054] The second moving member 23 further comprises a second slider 231 slidably arranged on the base 4 along the second direction, a second rotating block 232 connected to the output shaft of the deviation-correcting driving actuator 22, a second connecting rod 233 and a guide member 234. One end of the second connecting rod 233 is connected to the second rotating block 232, and the other end is connected to the second slider 231. One end of the clamping member 24 close to the second rotating block 232 is connected to the second slider 231 through a rotating shaft 242. The guide member 234 comprises a guide block 2341 and a moving shaft 2342 extending along the first direction. The guide block 2341 is provided with a guide hole 2343 descending in a direction away from the second rotating block 232. The moving shaft 2342 passes through the guide hole 2343 and passes through the other end of the clamping member 24 relatively away from the second rotating block 232.
[0055] In the above embodiment, the deviation correction driving actuator 22 drives the second rotating block 232 to rotate, thereby driving the two second sliders 231 toward or away from each other through the second connecting rod 233. When the two second sliders 231 are driven to move toward each other, under the guidance of the guide hole 2343 and the moving shaft 2342 on the guide block 2341, the other end of the clamping member 24 will move relatively along the guide hole 2343, so that the clamping end of the clamping member 24 moves toward the direction close to the conveyor line 1 and moves in an arc obliquely upward, so that the clamping end of the clamping member 24 is extended to the corresponding height of the conveyor line 1, and the clamping positioning of the silicon wafer is completed. Similarly, when the two second sliders 231 are driven away from each other, the clamping end of the clamping member 24 moves toward the direction away from the conveyor line 1 and moves in an arc obliquely downward to achieve reset. At this time, the clamping end of the clamping member 24 is also lower than the conveyor line 1 so as not to interfere with the silicon wafer conveying work of the conveyor line 1.
[0056] Exemplarily, the guide block 2341 is located on the base 4 , and the second sliding block 231 slides on the base 4 via the second sliding rail 42 .
[0057] Exemplarily, the deviation-correcting driving actuator 22 may be a motor.
[0058] Furthermore, the guide hole 2343 is horizontally arranged near one side of the second rotating block 232, so that the moving shaft 2342 and the corresponding clamping member 24 can be guided in the horizontal direction when they move, so that the clamping end of the clamping member 24 moves horizontally after making an arc movement obliquely upward, thereby realizing horizontal clamping and positioning of the silicon wafer during the horizontal movement, and the positioning effect is better and the accuracy is higher.
[0059] In order to improve the stability of the movement of the moving shaft 2342 in the guide hole 2343, in this embodiment, the number of the guide blocks 2341 in the guide member 234 is two, and the two guide blocks 2341 are symmetrically arranged on both sides of the corresponding second slider 231, and the two ends of the moving shaft 2342 pass through the two guide blocks 2341 on both sides respectively.
[0060] It should be noted that in other embodiments of the present invention, the correction drive module 21 can also be in other forms, for example, including a lifting member (such as a cylinder or a linear module) and a clamping drive member (such as a finger cylinder). The lifting member drives the clamping drive member to lift and lower along a third direction (Z direction), and the clamping drive member drives the clamping member 24 to perform a clamping operation, thereby also avoiding interference between the front and rear silicon wafers.
[0061] In another implementation of the utility model, the correction drive module 21 can also drive the clamping ends of the two clamping members 24 to move up and down in the vertical direction, so that the clamping members 24 are higher than the conveyor line 1 (non-clamped state) or the clamping ends of the clamping members 24 are lower than the conveyor line 1 (clamped state), that is, the clamping ends of the clamping members 24 move from top to bottom to achieve correction, which can also avoid interference with silicon wafers.
[0062] Continue to see Figure 4 , the conveyor line 1 is located between the clamping ends of the two corresponding clamping members 24, and the clamping member 24 includes at least one L-shaped support arm and a guide wheel 241 connected to the top of the support arm. Among them, the horizontal part of the L-shaped support arm is convenient for connecting to the second slider 231, and at the same time, the vertical part of the L-shaped support arm is convenient for setting the clamping end on the side of the conveyor line 1 to clamp or release the silicon wafer. Among them, in the embodiment of the present application, the guide wheel 241 is the clamping end of the clamping member 24. Since the guide wheel 241 is wheel-shaped, it can rotate during the process of clamping the silicon wafer, thereby reducing the friction between it and the silicon wafer and avoiding damage to the silicon wafer.
[0063] Furthermore, the clamping member 24 includes at least two separately arranged support arms, so that the side edge of each silicon wafer is clamped by two clamping points, and the clamping reliability is higher.
[0064] It is easy for those skilled in the art to understand that the above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.
Claims
1. A silicon wafer conveying structure with a deflection correction function, comprising two conveying lines and two deflection correction mechanisms arranged one-to-one with the two conveying lines, wherein the two conveying lines are arranged in parallel and spaced apart and both extend along a first direction, wherein the deflection correction mechanism comprises a deflection correction drive module and two clamping members connected to the deflection correction drive module and separately arranged along a second direction, wherein the second direction is perpendicular to the first direction, and wherein the deflection correction drive module drives the two clamping members to move toward or away from the silicon wafer along the second direction, ... The silicon wafer conveying structure also includes a conveyor line adjustment mechanism, which includes an adjusting drive actuator, a first moving part connected to the adjusting drive actuator, the two conveyor lines are connected to the first moving part, and the adjusting drive actuator drives the first moving part to move in a second direction, thereby driving the two conveyor lines to move towards or away from each other.
2. The silicon wafer conveying structure with a deviation correction function according to claim 1, characterized in that: The silicon wafer conveying structure further includes a base, the first moving member includes two first sliders slidably arranged on the base along the second direction, and the conveying line adjustment mechanism further includes a first rotating block connected to the output shaft of the adjustment driving actuator and two first connecting rods; Among them, one end of the two first connecting rods is connected to the first rotating block, and the other end is respectively connected to the two first sliding blocks, and the two conveying lines are respectively connected to the two first sliding blocks.
3. The silicon wafer conveying structure with a deviation correction function according to claim 1, characterized in that: The first moving part includes a synchronous belt structure or a forward and reverse screw rod structure; Wherein, the synchronous belt structure comprises a driving sprocket, a driven sprocket and a synchronous belt, the adjusting driving actuator is connected to the driving sprocket to drive the driving sprocket to rotate, the synchronous belt is sleeved on the driving sprocket and the driven sprocket, and the conveyor belts located on the upper and lower layers of the synchronous belt are respectively connected to the two conveyor lines; Among them, the forward and reverse screw structure includes a screw, a seat body and two sliders. The adjusting drive actuator is connected to the screw to drive the screw to rotate. The two ends of the screw have opposite threads. The two sliders are respectively matched with the two end threads of the screw, and each slider is slidably matched with the seat body. Each slider is connected to the corresponding conveying line.
4. The silicon wafer conveying structure with a deviation correction function according to claim 1, characterized in that: The conveying line adjustment mechanism is located below the two conveying lines.
5. The silicon wafer conveying structure with a deviation correction function according to claim 1, characterized in that: The adjustment drive actuator drives the two conveying lines to move away from the end position where the two conveying lines are located in the middle of their corresponding two clamping members.
6. The silicon wafer conveying structure with a deviation correction function according to claim 1, characterized in that: The deviation correction driving module also drives the clamping ends of the two clamping members to move up and down in the vertical direction, so that the clamping members are lower than the conveying line or the clamping ends of the clamping members are higher than the conveying line.
7. The silicon wafer conveying structure with a deviation correction function according to claim 6, characterized in that: Each of the deflection correction drive modules includes a deflection correction drive actuator and a second moving part, and the silicon wafer conveying structure also includes a base; The second moving member further comprises a second slider slidably arranged on the base along the second direction, a second rotating block connected to the output shaft of the deviation correction driving actuator, a second connecting rod and a guide member, one end of the second connecting rod is connected to the second rotating block, and the other end is connected to the second slider, and one end of the clamping member close to the second rotating block is connected to the second slider through a rotating shaft; The guide member includes a guide block and a motion shaft extending along the first direction. The guide block is provided with a guide hole descending in a direction away from the second rotating block. The motion shaft passes through the guide hole and through the other end of the clamping member relatively away from the second rotating block.
8. The silicon wafer conveying structure with a deviation correction function according to claim 7, characterized in that: The guide hole is horizontally arranged close to one side of the second rotating block.
9. The silicon wafer conveying structure with a deviation correction function according to claim 7, characterized in that: There are two guide blocks in the guide member, and the two guide blocks are symmetrically arranged on both sides of the corresponding second sliding block, and two ends of the moving shaft pass through the two guide blocks on both sides respectively.
10. The silicon wafer conveying structure with a deviation correction function according to claim 1, characterized in that: The conveying line is located between the clamping ends of the two corresponding clamping members, and the clamping member includes at least one L-shaped support arm and a guide wheel connected to the top end of the support arm.