High-sealing single crystal furnace with lengthened furnace chamber

Abstract

The utility model relates to the technical field of single crystal furnaces, and discloses a high-sealing single crystal furnace with an extended furnace chamber, which comprises a single crystal furnace component, a heating field component is mounted at the bottom of the single crystal furnace component, and the heating field component comprises a damping and reinforcing component. The damping and reinforcing assembly is installed at the bottom of the device, so that when the device is used, a certain damping and anti-seismic effect can be provided through the arrangement of the bottom, and the situations that certain instability is caused to the device due to vibration or internal parts are damaged are avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal furnaces, in particular to a highly sealed single crystal furnace with an extended furnace chamber. Background Art

[0002] A single crystal furnace is a device that uses a graphite heater to melt polycrystalline materials such as polysilicon in an inert gas (mainly nitrogen and helium) environment and grows single crystals without dislocation using the Czochralski method. The diameter of the single crystal during the growth process can be affected by factors such as temperature, pulling speed and rotation speed, crucible tracking speed and rotation speed, and the flow rate of the protective gas. Among them, temperature mainly determines whether crystallization can be achieved, while speed will directly affect the intrinsic quality of the crystal. This influence can only be detected after the single crystal is pulled out. A thermal field with appropriate temperature distribution not only makes the single crystal grow smoothly, but also has high quality. If the temperature distribution of the thermal field is not very reasonable, various defects are likely to occur during the growth of the single crystal, affecting the quality. In severe cases, the phenomenon of crystallization will occur and the single crystal cannot be grown. Therefore, in the early stage of investing in a single crystal growth enterprise, it is necessary to configure the most reasonable thermal field according to the growth equipment to ensure the quality of the single crystal produced. In crystal growth analysis and design, experiments and numerical simulations complement each other. The process can be divided into two parts: (1) In the first stage, the numerical simulation parameters are adjusted using the crystal growth experiment of the pull-up method. (2) In the second stage, numerical simulation is used to determine the optimal crystal growth process parameters.

[0003] The application number is CN202320695787.2, which discloses a high-sealing single crystal furnace auxiliary furnace chamber, which includes a base, a column vertically installed on the top of the base, a lifting groove formed by an inward concave on one side of the upper part of the column, a lifting screw installed in the lifting groove, a lifting motor installed on the top of the column, a transmission shaft of the lifting motor connected to the lifting screw, a lifting seat meshed on the lifting screw, an auxiliary furnace chamber installed on the lifting seat, a shell installed on the outside of the auxiliary furnace chamber, a cooling chamber reserved between the shell and the outer wall of the auxiliary furnace chamber after installation, a water inlet pipe installed on one side of the upper part of the shell, a water outlet pipe installed on one side of the lower part of the shell, a main furnace chamber installed on the top of the base, a discharge end formed by shrinking the upper part of the main furnace chamber, a lower sealing ring installed on the top of the main furnace chamber, a water storage area reserved between the lower sealing ring and the discharge end after installation, an upper sealing ring installed on the outer side of the lower part of the shell, and a sealing area reserved between the upper sealing ring and the shell. The utility model has a reasonable structure and good use effect after adopting the above scheme.

[0004] Although the above utility model is connected to the lifting screw by the transmission shaft of the lifting motor, the lifting screw is meshed with a lifting seat, an auxiliary furnace chamber is installed on the lifting seat, an outer shell is installed on the outside of the auxiliary furnace chamber, a cooling chamber is reserved between the outer shell and the outer wall of the auxiliary furnace chamber after installation, a water inlet pipe is installed on one side of the upper part of the outer shell, a water outlet pipe is installed on one side of the lower part of the outer shell, a main furnace chamber is installed on the top of the base, the upper part of the main furnace chamber is contracted to form a discharge end, a lower sealing ring is installed on the top of the main furnace chamber, a water storage area is reserved between the lower sealing ring and the discharge end after installation, an upper sealing ring is installed on the outer side of the lower part of the outer shell, and a sealing area is reserved between the upper sealing ring and the outer shell. After adopting the above scheme, the utility model has a reasonable structure and good use effect, but there is a disadvantage that when the device is in use, the vibration generated by the outside world will have a certain impact on its decoration, or affect the loosening of internal parts.

[0005] Therefore, it is necessary to install a shock-absorbing and reinforcing component at the bottom of the device so that when the device is used, the bottom setting can provide a certain shock-absorbing and shock-resistant effect to avoid certain instability of the device and damage to internal parts due to vibration or device. Utility Model Content

[0006] The utility model aims to provide a highly sealed single crystal furnace with an extended furnace chamber to solve the problems raised in the above background technology.

[0007] In order to solve the above technical problems, the utility model is realized by the following technical solutions:

[0008] The utility model discloses a highly sealed single crystal furnace with an extended furnace chamber, comprising a single crystal furnace component, a heating field component is installed at the bottom of the single crystal furnace component, and the heating field component comprises a shock-absorbing and reinforcing component.

[0009] Furthermore, the single crystal furnace assembly includes a sealed furnace body, a sub-chamber upper flange is installed on the top of the sealed furnace body, a flow guide plug is installed on the upper side of the sealed furnace body, and an observation nozzle is installed on the bottom of the flow guide plug.

[0010] Furthermore, the shock-absorbing reinforcement component is installed at the bottom of the middle component, and a fixed end is installed at the top of the middle component.

[0011] Furthermore, the intermediate component comprises a protective sleeve, a heat insulation layer is installed inside the protective sleeve, a graphite thermal field layer is installed inside the heat insulation layer, and a central component is installed inside the graphite thermal field layer.

[0012] Furthermore, the shock-absorbing reinforcement component includes a shock-absorbing cavity, a tough spring is installed inside the shock-absorbing cavity, and a shock-absorbing filler is installed around the tough spring.

[0013] Furthermore, the central component includes a connecting pipe, reinforced ends are installed on both sides of the connecting pipe, and a heat expansion layer is installed at the bottom thereof, a heating layer is installed inside the heat expansion layer, and a supporting base is installed at the bottom of the heating layer.

[0014] The utility model has the following beneficial effects:

[0015] (1) The utility model is a highly sealed single crystal furnace with an extended furnace chamber. By installing a shock-absorbing reinforcement component at the bottom of the device, when the device is used, the bottom setting can provide a certain shock-absorbing and anti-vibration effect, thereby avoiding certain instability caused by vibration or the device and damage to internal parts.

[0016] (2) The utility model is a highly sealed single crystal furnace with an extended furnace chamber. By replacing the internal heating pipe of the device with a graphite thermal field layer, the service life of the device can be extended to a certain extent, the oxidation rate can be reduced, and a certain degree of protection can be provided when the device is used.

[0017] Of course, any product implementing the present invention does not necessarily need to achieve all of the advantages described above at the same time. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for describing the embodiments are briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0019] Figure 1 This is a schematic diagram of the overall structure of a highly sealed single crystal furnace with an extended furnace chamber according to the utility model;

[0020] Figure 2 This is a schematic diagram of the bottom structure of a highly sealed single crystal furnace with an extended furnace chamber according to the utility model;

[0021] Figure 3 This is a schematic diagram of the split structure of a highly sealed single crystal furnace with an extended furnace chamber according to the utility model;

[0022] Figure 4 for Figure 3 A schematic diagram of the structure enlargement of part A;

[0023] In the accompanying drawings, the components represented by the reference numerals are listed as follows:

[0024] In the figure: 1. single crystal furnace assembly; 2. heating field assembly; 101. sealed furnace body; 102. auxiliary chamber upper flange; 103. flow guide channel plug; 104. observation nozzle; 201. intermediate assembly; 202. shock-absorbing reinforcement assembly; 203. fixed end; 2011. protective pipe sleeve; 2012. thermal insulation layer; 2013. graphite thermal field layer; 2014. central assembly; 2021. shock-absorbing cavity; 2022. tough spring; 2023. shock-absorbing filler; 20141. connecting pipe; 20142. reinforcement end; 20143. heat expansion layer; 20144. heating layer; 20145. support base. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0026] See also Figure 1 - Figure 4 As shown, the utility model is a highly sealed single crystal furnace with an extended furnace chamber, comprising a single crystal furnace assembly 1, a heating field assembly 2 is installed at the bottom of the single crystal furnace assembly 1, and the heating field assembly 2 includes a shock-absorbing reinforcement assembly 202.

[0027] By installing a shock-absorbing reinforcement component 202 at the bottom of the device, when the device is used, the bottom setting can provide a certain shock-absorbing and anti-vibration effect, avoiding the occurrence of certain instability and damage to internal parts of the device caused by vibration or the device.

[0028] The single crystal furnace assembly 1 includes a sealed furnace body 101, a sub-chamber upper flange 102 is installed on the top of the sealed furnace body 101, and a guide channel plug 103 is installed on the upper side thereof, and an observation nozzle 104 is installed at the bottom of the guide channel plug 103. The guide channel plug 103 can avoid internal blockage, and during operation, the internal situation can be observed through the observation nozzle 104.

[0029] The shock-absorbing and reinforcing component 202 is installed at the bottom of the middle component 201 , and a fixing end 203 is installed at the top of the middle component 201 .

[0030] The intermediate component 201 includes a protective sleeve 2011, a heat insulation layer 2012 is installed inside the protective sleeve 2011, a graphite thermal field layer 2013 is installed inside the heat insulation layer 2012, and a central component 2014 is installed inside the graphite thermal field layer 2013. By setting the graphite thermal field layer 2013, the oxidation rate can be reduced when the device is used, thereby extending the service life to a certain extent.

[0031] The shock-absorbing reinforcement component 202 includes a shock-absorbing cavity 2021, inside of which a resilient spring 2022 is installed, and around which a shock-absorbing filler 2023 is installed. The shock-absorbing filler 2023 can provide a certain shock-absorbing and shock-reducing effect when the device is used, thereby avoiding loosening of internal parts.

[0032] The central component 2014 includes a connecting pipe 20141, which has reinforced ends 20142 installed on both sides, and a heat expansion layer 20143 installed at the bottom thereof, the heat expansion layer 20143, a heating layer 20144 installed inside the heat expansion layer 20143, and a supporting base 20145 installed at the bottom of the heating layer 20144.

[0033] When using this device, first, by installing a shock-absorbing reinforcement component 202 at the bottom of the device, when using the device, the shock-absorbing filler 2023 can provide a certain shock-absorbing and shock-absorbing effect when using the device, thereby avoiding loosening of internal parts, avoiding certain instability of the device due to vibration or the device, and damage to internal parts. Then, during the processing, the internal situation can be observed by observing the pipe mouth 104, and the guide channel plug 103 can be used to avoid internal blockage. The graphite thermal field layer 2013 can be used to reduce the oxidation rate when using the device, thereby extending the service life to a certain extent.

[0034] The preferred embodiments of the utility model disclosed above are only used to help explain the utility model. The preferred embodiments do not describe all the details in detail, nor do they limit the utility model to the specific implementation methods described. Obviously, many modifications and changes can be made according to the content of this specification. This specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the utility model, so that technicians in the relevant technical field can well understand and use the utility model. The utility model is limited only by the claims and their full scope and equivalents.

Claims

1. A highly sealed single crystal furnace with an extended furnace chamber, comprising a single crystal furnace assembly (1), characterized in that: A heating field assembly (2) is installed at the bottom of the single crystal furnace assembly (1), and the heating field assembly (2) comprises a shock-absorbing reinforcement assembly (202).

2. The highly sealed single crystal furnace with an extended furnace chamber according to claim 1, characterized in that: The single crystal furnace assembly (1) comprises a sealed furnace body (101), a sub-chamber upper flange (102) is installed on the top of the sealed furnace body (101), a flow guide plug (103) is installed on the upper side of the sealed furnace body (101), and an observation nozzle (104) is installed on the bottom of the flow guide plug (103).

3. The highly sealed single crystal furnace with an extended furnace chamber according to claim 1, characterized in that: The shock-absorbing and reinforcing component (202) is installed at the bottom of the middle component (201), and a fixed end (203) is installed at the top of the middle component (201).

4. The highly sealed single crystal furnace with an extended furnace chamber according to claim 3, characterized in that: The intermediate component (201) comprises a protective sleeve (2011), a heat insulation layer (2012) is installed inside the protective sleeve (2011), a graphite thermal field layer (2013) is installed inside the heat insulation layer (2012), and a central component (2014) is installed inside the graphite thermal field layer (2013).

5. The highly sealed single crystal furnace with an extended furnace chamber according to claim 3, characterized in that: The shock-absorbing reinforcement component (202) comprises a shock-absorbing cavity (2021), a resilient spring (2022) is installed inside the shock-absorbing cavity (2021), and a shock-absorbing filler (2023) is installed around the resilient spring (2022).

6. The highly sealed single crystal furnace with an extended furnace chamber according to claim 4, characterized in that: The central component (2014) comprises a connecting pipe (20141), the connecting pipe (20141) is provided with reinforcement ends (20142) on both sides thereof, and a heat expansion layer (20143) is provided at the bottom thereof, a heating layer (20144) is provided inside the heat expansion layer (20143), and a supporting base (20145) is provided at the bottom of the heating layer (20144).

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