Low-power-consumption supporting electrode
By designing a low -power support electrode including graphite electrode, copper electrode, connecting parts and cover, the problem of calorie loss and uneven temperature in the copper electrode in the single crystal furnace, and achieve the effect of effectively reducing power consumption.
Patent Information
- Application Number
- CN202421224192.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-31
- Publication Date
- 2025-01-28
- Estimated Expiration
- 2034-05-31
AI Technical Summary
The prior art is difficult to effectively reduce the heat loss of copper electrodes in single crystal furnaces, and the copper electrode temperature is uneven, making it impossible to effectively reduce power consumption.
A low -power support electrode is designed, including graphite electrode, copper electrode main body, connecting parts, and cover. By setting up a groove on one end of the graphite electrode, the copper electrode main body is installed in the groove through the connector, and there is a provision of the connector, and there are also set up with a connection parts, and there is a set of parts. The convex and protective cover is to reduce the loss of heat, and at the same time, set the cooling structure at one end of the copper electrode to stay away from the graphite electrode to achieve uniform temperature.
By reducing the heat dissipation area of copper electrodes and uniform temperature, it effectively reduces the heat loss and achieves the purpose of reducing power consumption.
Smart Images
Figure CN222411989U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of single crystal silicon manufacturing, in particular to a low power consumption supporting electrode. Background Art
[0002] At present, the power consumption of single crystal furnace is reduced mainly by optimizing the heat field heat transfer components and introducing new low thermal conductivity materials to block or reduce heat loss, so as to achieve the purpose of reducing power consumption. Among them, the heat loss from the furnace bottom is the largest. In addition to the thermal insulation performance of the single crystal furnace thermal field components, the heat loss of the electrode accounts for a large proportion. It is of great significance to reduce the power consumption of the single crystal furnace by reasonably setting the copper electrode structure and cooling device.
[0003] The existing technology usually uses a hollow structure inside the graphite electrode to reduce the contact area between the copper electrode and the graphite electrode, and fills it with heat insulation materials to prevent the heat from the graphite electrode from being transferred to the copper electrode to reduce the temperature of the copper electrode. A cooling water tank is passed through the lower part of the copper electrode to reduce the heat loss of the electrode. However, this method of reducing the heat transfer from the graphite electrode to the copper electrode by changing the graphite electrode structure and reducing the contact with the copper electrode by adding a hollow structure and heat insulation materials is difficult to achieve; and it is impossible to make the temperature of the copper electrode uniform, and it cannot achieve the effect of reducing power consumption.
[0004] Therefore, it is urgent to propose a low-power supporting electrode to solve the above problems. Utility Model Content
[0005] The utility model aims to provide a low-power consumption supporting electrode, which can reduce the heat dissipation area of the copper electrode, make the temperature of the copper electrode uniform, and effectively reduce heat loss.
[0006] In order to solve the above technical problems, the utility model provides a low-power consumption supporting electrode, including a graphite electrode, a copper electrode body, a connecting piece and a sheath;
[0007] One end of the graphite electrode is provided with a groove; the copper electrode body is installed in the groove through a connecting piece;
[0008] A boss is provided between the copper electrode body and the connecting member; the raised portion of the boss is located in the groove;
[0009] The sheath is disposed around the boss and the copper electrode body, and one end of the sheath is connected to one end of the graphite electrode;
[0010] A cooling structure is provided at one end of the copper electrode body away from the graphite electrode, for making the temperature of the copper electrode body uniform.
[0011] Furthermore, the cooling structure includes a plurality of water outlet channels, a cavity and a water inlet channel; the plurality of water outlet channels are evenly distributed inside the copper electrode body, the cavity is located in the middle of the copper electrode body and is located between the plurality of water outlet channels; the water inlet channel is connected to the water outlet channel and is surrounded by the cavity for connecting to a cooling water pipe.
[0012] Furthermore, the cavity is an annular cavity.
[0013] Furthermore, the boss includes a base and a raised portion; the end surface of the raised portion away from the groove is connected to the base; and the base is connected to the copper electrode body.
[0014] Furthermore, the diameter of the copper electrode body is smaller than the diameter of the base.
[0015] Furthermore, the height of the boss ranges from 8 to 42 mm.
[0016] Furthermore, the sheath includes a first ring-shaped member and a second ring-shaped member; the outer wall of the first ring-shaped member is connected to the inner wall of the second ring-shaped member; the inner wall of the first ring-shaped member is connected to the copper electrode body; one end of the second ring-shaped member is connected to the graphite electrode; and the base is located between the graphite electrode and the first ring-shaped member.
[0017] Furthermore, the height dimension of the first annular member is smaller than the height dimension of the second annular member.
[0018] Furthermore, the material of the sheath includes at least one of ceramic material, vacuum insulation panel, cellulose insulation material, foam glass and glass fiber.
[0019] Furthermore, the outer wall of the connecting piece is provided with a first thread, and the inner wall of the groove is provided with a second thread matching with the first thread.
[0020] Through the above technical solution, the utility model has the following beneficial effects:
[0021] Through the arrangement of graphite electrode, copper electrode body, connector and sheath; and one end of the graphite electrode is provided with a groove; the copper electrode body is installed in the groove through the connector; a boss is provided between the copper electrode body and the connector; the raised part of the boss is located in the groove; the sheath is arranged around the boss and the copper electrode body, and one end of the sheath is connected to one end of the graphite electrode; the end of the copper electrode body away from the graphite electrode is provided with a cooling structure for making the temperature of the copper electrode body uniform. Among them, the copper electrode body, the connector and the boss can be integrally formed to form a copper electrode. Since the heat loss of the copper electrode at the bottom of the single crystal furnace is large, the contact surface between the copper electrode and the graphite electrode is reduced by adding a simple structure of the boss. Adding a sheath around the copper electrode can reduce the heat loss of the copper electrode. At the same time, by setting the cooling structure, that is, shortening the water path and adjusting the water path, the uniformity of the heat can be taken away, and the uniformity of the temperature of the copper electrode can be achieved at the same time, avoiding the damage of the copper electrode due to heat concentration and reducing the heat loss, thereby achieving the effect of reducing power consumption. Therefore, the device can reduce the heat dissipation area of the copper electrode, make the temperature of the copper electrode uniform, and effectively reduce heat loss. BRIEF DESCRIPTION OF THE DRAWINGS
[0022] Figure 1 A cross-sectional view of a low power consumption supporting electrode in one embodiment of the utility model;
[0023] Figure 2 This is a schematic diagram of the structure of a copper electrode in one embodiment of the utility model;
[0024] Figure 3 It is a structural schematic diagram of the cooling structure in the low power consumption supporting electrode in one embodiment of the utility model.
[0025] In the figure, 1, graphite electrode; 2, copper electrode body; 3, connecting piece; 4, boss; 41, base; 42, raised part; 5, sheath; 51, first annular piece; 52, second annular piece; 61, water outlet channel; 62, cavity; 63, water inlet channel. DETAILED DESCRIPTION
[0026] A low power consumption supporting electrode of the present invention will be described below in conjunction with a schematic diagram, wherein a preferred embodiment of the present invention is shown, and it should be understood that those skilled in the art can modify the present invention described herein, while still achieving the advantageous effects of the present invention. Therefore, the following description should be understood as being widely known to those skilled in the art, and not as a limitation to the present invention.
[0027] The serial numbers assigned to the components herein, such as "first", "second", etc., are only used to distinguish the objects described and do not have any order or technical meaning. The "connection" and "coupling" mentioned in this application, unless otherwise specified, include direct and indirect connections (couplings). In the description of the present utility model, it should be understood that the orientation or position relationship indicated by the terms "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", etc. are based on the orientation or position relationship shown in the accompanying drawings, which is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to the present utility model.
[0028] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.
[0029] The present invention is described in more detail in the following paragraphs by way of example with reference to the accompanying drawings. The advantages and features of the present invention will become more apparent from the following description and claims. It should be noted that the accompanying drawings are in very simplified form and in non-precise proportions, and are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the present invention.
[0030] like Figure 1-2 As shown, the embodiment of the utility model proposes a simple, practical, low-power supporting electrode, including a graphite electrode 1, a copper electrode body 2, a connecting piece 3 and a sheath 5.
[0031] Specifically, a groove is provided at one end of the graphite electrode 1; the copper electrode body 2 is installed in the groove through a connecting piece 3; a boss 4 is provided between the copper electrode body 2 and the connecting piece 3; a raised portion 42 of the boss 4 is located in the groove; the sheath 5 is arranged around the boss 4 and the copper electrode body 2, and one end of the sheath 5 is connected to one end of the graphite electrode 1; a cooling structure is provided at one end of the copper electrode body 2 away from the graphite electrode 1, which is used to make the temperature of the copper electrode body 2 uniform.
[0032] The copper electrode body 2, the connecting piece 3 and the boss 4 can be integrally formed to form a copper electrode.
[0033] In a specific embodiment, in combination Figure 1 and Figure 3 As shown, the cooling structure includes a plurality of water outlet channels 61, a cavity 62 and a water inlet channel 63. Specifically, the plurality of water outlet channels 61 are evenly distributed inside the copper electrode body 2, the cavity 62 is located in the middle of the copper electrode body 2 and between the plurality of water outlet channels 61; the water inlet channel 63 is connected to the water outlet channel 61 and is surrounded by the cavity 62 for connecting to the cooling water pipe. Through the specific setting of the cooling structure, the problem of local heating of the copper electrode can be avoided, so that the temperature of the copper electrode can be kept uniform.
[0034] In a specific example, there are four water outlet channels 61. Through the four evenly distributed water outlet channels 61, cooling water can circulate inside to take away heat, while ensuring uniform temperature and reducing heat concentration, thereby reducing damage to the electrode due to excessively high internal temperature.
[0035] In one embodiment, the cavity 62 is an annular cavity. The cavity 62 exists between the water inlet channel 63 and the water outlet channel 61, which can reduce lateral heat flow, reduce heat loss and thus reduce power consumption.
[0036] In a specific example, the boss 4 includes a base 41 and a raised portion 42. Specifically, the end surface of the raised portion 42 away from the groove is connected to the base 41; the base 41 is connected to the copper electrode body 2. By setting the boss 4, the contact surface between the copper electrode and the graphite electrode 1 can be reduced, thereby reducing the heating area of the copper electrode.
[0037] The diameter of the copper electrode body 2 is smaller than the diameter of the base 41 , which is beneficial to reducing the contact surface.
[0038] Preferably, the height of the boss 4 ranges from 8 to 42 mm. For example, the height can be 10 mm, 20 mm, 30 mm and 40 mm, and the seeding powers corresponding to the different heights are 65 kw, 66.4 kw, 67.9 kw and 68.5 kw, respectively. By setting bosses 4 of different heights, different seeding powers can be achieved, thereby reducing defects and waste in the manufacturing process and improving production efficiency.
[0039] In a specific example, the sheath 5 includes a first annular member 51 and a second annular member 52. Specifically, the outer wall of the first annular member 51 is connected to the inner wall of the second annular member 52; the inner wall of the first annular member 51 is connected to the copper electrode body 2; one end of the second annular member 52 is connected to the graphite electrode 1; and the base 41 is located between the graphite electrode 1 and the first annular member 51.
[0040] By setting the sheath 5, heat loss can be reduced. For example, in a specific example, when the sheath 5 is provided, the seeding power is 68.5 kW, while when the sheath 5 is not provided, the seeding power is 67.4 kW. It can be seen that the presence of the sheath 5 can affect the seeding power, increase the seeding power, and enable more energy to be used in the crystal growth process rather than as heat loss. This can improve the overall energy utilization, reduce power consumption, and is practical.
[0041] The height dimension of the first annular member 51 is smaller than the height dimension of the second annular member 52. By setting the first annular member 51 and the second annular member 52 at different heights, heat can be better isolated and unnecessary heat transfer can be prevented, thereby reducing energy loss. This structure is more suitable for the assembly between the copper electrode and the graphite electrode 1 in this embodiment.
[0042] Preferably, the material of the jacket 5 includes at least one of ceramic material, vacuum insulation board, cellulose insulation material, foam glass and glass fiber, so as to prevent the furnace bottom or heat field from contacting and igniting the copper electrode and block the heat loss.
[0043] Those skilled in the art will appreciate that, while achieving the same effect, the material of the sheath 5 may also be other heat-insulating materials other than those in this embodiment.
[0044] In this embodiment, the outer wall of the connector 3 is provided with a first thread, and the inner wall of the groove is provided with a second thread that matches the first thread. Through the matching of the threads, the connector 3 can be more firmly fixed in the groove to prevent loosening due to vibration or external force. The threaded connection can also achieve precise alignment, which helps to improve the accuracy and quality of the overall assembly.
[0045] In this embodiment, the copper electrode body 2 is cylindrical. Those skilled in the art will appreciate that the copper electrode body 2 may also be in other shapes while achieving the same effect.
[0046] In this embodiment, the copper electrode body 2 is installed in the graphite electrode 1 through the connector 3, and the temperature of the copper electrode body 2 is kept uniform by starting the cooling structure, which can effectively reduce heat loss.
[0047] In summary, the low-power support electrode proposed in the present invention has the following advantages:
[0048] Through the arrangement of graphite electrode, copper electrode body, connector and sheath; and one end of the graphite electrode is provided with a groove; the copper electrode body is installed in the groove through the connector; a boss is provided between the copper electrode body and the connector; the raised part of the boss is located in the groove; the sheath is arranged around the boss and the copper electrode body, and one end of the sheath is connected to one end of the graphite electrode; the end of the copper electrode body away from the graphite electrode is provided with a cooling structure for making the temperature of the copper electrode body uniform. Among them, the copper electrode body, the connector and the boss can be integrally formed to form a copper electrode. Since the heat loss of the copper electrode at the bottom of the single crystal furnace is large, the contact surface between the copper electrode and the graphite electrode is reduced by adding a simple structure of the boss. Adding a sheath around the copper electrode can reduce the heat loss of the copper electrode. At the same time, by setting the cooling structure, that is, shortening the water path and adjusting the water path, the uniformity of the heat can be taken away, and the uniformity of the temperature of the copper electrode can be achieved at the same time, avoiding the damage of the copper electrode due to heat concentration and reducing the heat loss, thereby achieving the effect of reducing power consumption. Therefore, the device can reduce the heat dissipation area of the copper electrode, make the temperature of the copper electrode uniform, and effectively reduce heat loss.
[0049] Obviously, those skilled in the art can make various changes and modifications to the present invention without departing from the spirit and scope of the present invention. Thus, if these modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include these modifications and variations.
Claims
1. A low power consumption supporting electrode, characterized in that: It includes a graphite electrode, a copper electrode body, a connector and a sheath; One end of the graphite electrode is provided with a groove; the copper electrode body is installed in the groove through a connecting piece; A boss is provided between the copper electrode body and the connecting member; the raised portion of the boss is located in the groove; The sheath is disposed around the boss and the copper electrode body, and one end of the sheath is connected to one end of the graphite electrode; A cooling structure is provided at one end of the copper electrode body away from the graphite electrode, for making the temperature of the copper electrode body uniform.
2. The low power consumption supporting electrode according to claim 1, characterized in that: The cooling structure includes multiple water outlet channels, a cavity and a water inlet channel; the multiple water outlet channels are evenly distributed inside the copper electrode body, the cavity is located in the middle of the copper electrode body and is located between the multiple water outlet channels; the water inlet channel is connected to the water outlet channel and is surrounded by the cavity for connecting to the cooling water pipe.
3. The low power consumption supporting electrode according to claim 2, characterized in that: The cavity is an annular cavity.
4. The low power consumption supporting electrode according to claim 1, characterized in that: The boss comprises a base and a raised portion; the end surface of the raised portion away from the groove is connected to the base; and the base is connected to the copper electrode body.
5. The low power consumption supporting electrode according to claim 4, characterized in that: The diameter of the copper electrode body is smaller than the diameter of the base.
6. The low power consumption supporting electrode according to claim 4, characterized in that: The height of the boss ranges from 8 to 42 mm.
7. The low power consumption supporting electrode according to claim 4, characterized in that: The sheath includes a first annular member and a second annular member; the outer wall of the first annular member is connected to the inner wall of the second annular member; the inner wall of the first annular member is connected to the copper electrode body; one end of the second annular member is connected to the graphite electrode; and the base is located between the graphite electrode and the first annular member.
8. The low power consumption supporting electrode according to claim 7, characterized in that: The height dimension of the first annular member is smaller than the height dimension of the second annular member.
9. The low power consumption supporting electrode according to claim 1, characterized in that: The material of the sheath includes at least one of ceramic material, vacuum insulation panel, cellulose insulation material, foam glass and glass fiber.
10. The low power consumption supporting electrode according to claim 1, characterized in that: The outer wall of the connecting piece is provided with a first thread, and the inner wall of the groove is provided with a second thread matching with the first thread.