Lifting type precise annealing furnace

Abstract

The utility model belongs to the technical field of annealing furnaces, in particular relates to a lifting type precise annealing furnace, and aims to solve the problems of higher heat treatment temperature and higher working risk of the annealing furnace due to the fact that feeding control is often carried out by workers when the annealing furnace is used for feeding in the prior art, the lifting type precise annealing furnace comprises an annealing furnace; the control box is fixedly connected to the left side of the annealing furnace; the supporting frame is slidably connected to the right side of the control box, and the left side of the supporting frame extends into the control box; the automatic feeding device has the beneficial effects that materials are placed on the supporting frame, at the moment, the motor is controlled to work, the supporting plate can be automatically controlled to extend into the annealing furnace by clicking, stable and automatic feeding is facilitated, a worker does not need to get close to control, and the automatic feeding device is convenient to operate and high in practicability. Safety is guaranteed, and work is convenient.

Description

Technical Field

[0001] The utility model relates to the technical field of annealing furnaces, in particular to a lifting type precision annealing furnace. Background Art

[0002] In the prior art, an annealing furnace is a process used in the manufacture of semiconductor devices, which includes heating multiple semiconductor wafers to affect their electrical properties. Heat treatment is designed for different effects. The wafer can be heated to activate dopants, convert a thin film into a thin film or convert a thin film into a wafer substrate interface, make a densely deposited thin film, change the state of a growing thin film, repair implanted damage, move dopants or transfer dopants from one thin film to another or from a thin film into a wafer substrate. In the prior art, when loading the annealing furnace, the staff often approach to control the loading. At this time, the heat treatment temperature of the annealing furnace is high, and the work is more dangerous.

[0003] Therefore, the present application proposes a lifting type precision annealing furnace to solve the above problems. Utility Model Content

[0004] The utility model aims to solve the problem in the prior art that when loading the annealing furnace, the loading is often controlled by a worker approaching, the heat treatment temperature of the annealing furnace is high, and the work is dangerous, and a lifting precision annealing furnace is proposed.

[0005] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0006] Lifting precision annealing furnace, including annealing furnace;

[0007] A control box, the control box is fixedly connected to the left side of the annealing furnace;

[0008] A support frame, wherein the support frame is slidably connected to the right side of the control box, and the left side of the support frame extends into the control box;

[0009] A motor, wherein the motor is fixedly connected to the right inner wall of the control box, and an output shaft of the motor is fixedly connected to a gear;

[0010] A hollow plate, wherein the hollow plate is fixedly connected to the rear inner wall of the control box;

[0011] The control mechanism comprises a rack, a telescopic tube, a driving column, an auxiliary belt, a control plate, an auxiliary plate, a guide plate and a pull plate, the rack is slidably connected to the right inner wall of the control box, and the rack is meshed with the gear, the telescopic tube is fixedly connected to the bottom inner wall of the control box, and the top of the telescopic tube is fixedly connected to the bottom of the rack, the left side of the inner tube of the telescopic tube extends to the outside of the outer tube of the telescopic tube, the driving column is rotatably connected to the left side of the outer tube of the telescopic tube, the auxiliary belt is fixedly connected to the top of the inner tube of the telescopic tube, the control plate is slidably connected to the left inner wall of the control box, and the top of the control plate is fixedly connected to one end of the auxiliary belt, the auxiliary belt contacts the driving column, the auxiliary plate is slidably connected in the hollow plate, the guide plate is slidably connected to the top of the hollow plate, the pull plate is rotatably connected to the front side of the guide plate, and the top of the pull plate is rotatably connected to the front side of the support frame.

[0012] As a preferred solution of the utility model, the top of the hollow plate is rotatably connected to two movable columns, and the outer sleeves of the movable columns are provided with a same transmission belt, and the outer wall of the transmission belt is fixedly connected to the rear side of the auxiliary plate and the front side of the guide plate.

[0013] As a preferred solution of the utility model, a guide belt is fixedly connected to the top of the control board, and one end of the guide belt is fixedly connected to the right side of the auxiliary board.

[0014] As a preferred solution of the utility model, an auxiliary groove is provided on the right side of the control box, and the support frame is slidably connected to the inner wall of the auxiliary groove.

[0015] As a preferred solution of the utility model, a control spring is fixedly connected to the bottom of the control board, and one end of the control spring is fixedly connected to the bottom inner wall of the control box.

[0016] As a preferred solution of the utility model, the rear inner wall of the control box is rotatably connected to two guide columns, and the guide columns are in contact with the guide belts.

[0017] Beneficial effects:

[0018] 1. Place the material on the support frame, and then control the motor to work. The output shaft of the motor can control the rack to descend through the gear. At this time, the rack can push the inner tube of the telescopic tube to descend. At this time, the movement of the inner tube of the telescopic tube can synchronously pull the auxiliary belt to move;

[0019] 2. When the auxiliary belt moves, the auxiliary belt can pull the control plate to rise. At this time, the movement of the control plate can synchronously pull the guide belt to move. As the guide belt moves, the guide belt is guided by the guide column to pull the auxiliary plate to move to the left. When the auxiliary plate moves, the auxiliary plate can control the transmission belt to rotate. At this time, the rotation of the transmission belt can synchronously control the guide plate to move to the left;

[0020] 3. When the guide plate moves, the guide plate can pull the pull plate to move, thereby pulling the support frame down and extending into the annealing furnace. There is no need for staff to control the feeding, ensuring safety and facilitating work.

[0021] In the utility model: by placing the material on the support frame, the motor is controlled to work at this time, and a click can automatically control the support plate to extend into the annealing furnace, which is convenient for stable automatic loading, does not require staff to get close to the control, ensures safety, and facilitates work. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a structural sectional view of the utility model;

[0023] Figure 2 It is a structural side view of the telescopic tube of the utility model;

[0024] Figure 3 A three-dimensional diagram of the structure of the support frame of the utility model;

[0025] Figure 4 It is an enlarged structural diagram of structure A of the present utility model.

[0026] In the figure: 1. annealing furnace; 2. control box; 3. motor; 4. gear; 5. rack; 6. telescopic tube; 7. driving column; 8. auxiliary belt; 9. control plate; 10. control spring; 11. guide column; 12. guide belt; 13. hollow plate; 14. auxiliary plate; 15. movable column; 16. transmission belt; 17. guide plate; 18. pull plate; 19. support frame. DETAILED DESCRIPTION

[0027] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0028] Example

[0029] Reference Figure 1-Figure 4 , a lifting type precision annealing furnace, comprising an annealing furnace 1;

[0030] A control box 2, which is fixedly connected to the left side of the annealing furnace 1;

[0031] A support frame 19, the support frame 19 is slidably connected to the right side of the control box 2, and the left side of the support frame 19 extends into the control box 2;

[0032] The motor 3 is fixedly connected to the right inner wall of the control box 2, and the output shaft of the motor 3 is fixedly connected to the gear 4;

[0033] A hollow plate 13, the hollow plate 13 is fixedly connected to the rear inner wall of the control box 2;

[0034] The control mechanism includes a rack 5, a telescopic tube 6, a driving column 7, an auxiliary belt 8, a control panel 9, an auxiliary plate 14, a guide plate 17 and a pull plate 18. The rack 5 is slidably connected to the right inner wall of the control box 2, and the rack 5 is meshed with the gear 4. The telescopic tube 6 is fixedly connected to the bottom inner wall of the control box 2, and the top of the telescopic tube 6 is fixedly connected to the bottom of the rack 5. The left side of the inner tube of the telescopic tube 6 extends to the outside of the outer tube of the telescopic tube 6. The driving column 7 is rotatably connected to the left side of the outer tube of the telescopic tube 6. The auxiliary belt 8 is fixedly connected to the top of the inner tube of the telescopic tube 6. The control panel 9 is slidably connected to the left inner wall of the control box 2, and the top of the control panel 9 is fixedly connected to one end of the auxiliary belt 8. The auxiliary belt 8 contacts the driving column 7. The auxiliary plate 14 is slidably connected in the hollow plate 13. The guide plate 17 is slidably connected to the top of the hollow plate 13. The pull plate 18 is rotatably connected to the front side of the guide plate 17, and the top of the pull plate 18 is rotatably connected to the front side of the support frame 19.

[0035] By means of the above structure: by setting the support frame 19, the support frame 19 plays the role of driving the material to move up and down, which is convenient for automatic loading. By setting the motor 3, the motor 3 plays the role of assisting the rack 5 to move longitudinally.

[0036] As a preferred solution of the utility model, the top of the hollow plate 13 is rotatably connected to two movable columns 15, and the outer sleeve of the movable column 15 is provided with the same transmission belt 16. The outer wall of the transmission belt 16 is fixedly connected to the rear side of the auxiliary plate 14 and the front side of the guide plate 17. When the auxiliary plate 14 moves, the auxiliary plate 14 can control the transmission belt 16 to rotate, thereby synchronously controlling the guide plate 17 to move to the left.

[0037] As a preferred solution of the utility model, a guide belt 12 is fixedly connected to the top of the control panel 9, and one end of the guide belt 12 is fixedly connected to the right side of the auxiliary panel 14. When the control panel 9 moves, the control panel 9 pulls the guide belt 12 to move, thereby facilitating the movement of the auxiliary panel 14.

[0038] As a preferred solution of the utility model, an auxiliary groove is provided on the right side of the control box 2, and the support frame 19 is slidably connected to the inner wall of the auxiliary groove. By providing the auxiliary groove, the auxiliary groove limits the longitudinal movement of the support frame 19.

[0039] As a preferred solution of the utility model, a control spring 10 is fixedly connected to the bottom of the control board 9, and one end of the control spring 10 is fixedly connected to the bottom inner wall of the control box 2. By setting the control spring 10, the control spring 10 has the effect of pulling the control board 9 down.

[0040] As a preferred solution of the utility model, the rear inner wall of the control box 2 is rotatably connected to two guide columns 11, and the guide columns 11 are in contact with the guide belt 12. By setting the guide columns 11, the guide columns 11 are in contact with the guide belt 12, which facilitates the guide auxiliary plate 14 to move to the right.

[0041] It should be noted that the specific type of motor 3 to be used is selected by the relevant technical personnel familiar with the field, and the above motor 3 belongs to the existing technology and will not be elaborated in this solution.

[0042] The working principle of the utility model: in actual work, by placing the material on the support frame 19, the motor 3 is controlled to work at this time, and the output shaft of the motor 3 can control the rack 5 to descend through the gear 4. At this time, the rack 5 can push the inner tube of the telescopic tube 6 to descend. At this time, the movement of the inner tube of the telescopic tube 6 can synchronously pull the auxiliary belt 8 to move. When the auxiliary belt 8 moves, the auxiliary belt 8 can pull the control plate 9 to rise. At this time, the movement of the control plate 9 can synchronously pull the guide belt 12 to move. With the movement of the guide belt 12, the guide belt 12 is guided by the guide column 11 to pull the auxiliary plate 14 to move to the left. When the auxiliary plate 14 moves, the auxiliary plate 14 can control the transmission belt 16 to rotate. At this time, the rotation of the transmission belt 16 can synchronously control the guide plate 17 to move to the left. When the guide plate 17 moves, the guide plate 17 can pull the pull plate 18 to move, thereby pulling the support frame 19 to extend downward into the annealing furnace 1, and there is no need for staff to control the feeding, thereby ensuring safety and facilitating work.

[0043] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the technical scope disclosed by the present invention according to the technical scheme and the utility model concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. Lifting precision annealing furnace, characterized in that: include Annealing furnace (1); A control box (2), the control box (2) being fixedly connected to the left side of the annealing furnace (1); A support frame (19), wherein the support frame (19) is slidably connected to the right side of the control box (2), and the left side of the support frame (19) extends into the control box (2); A motor (3), wherein the motor (3) is fixedly connected to the right inner wall of the control box (2), and the output shaft of the motor (3) is fixedly connected to a gear (4); A hollow plate (13), wherein the hollow plate (13) is fixedly connected to the rear inner wall of the control box (2); The control mechanism comprises a rack (5), a telescopic tube (6), a driving column (7), an auxiliary belt (8), a control plate (9), an auxiliary plate (14), a guide plate (17) and a pull plate (18); the rack (5) is slidably connected to the right inner wall of the control box (2), and the rack (5) is meshed with the gear (4); the telescopic tube (6) is fixedly connected to the bottom inner wall of the control box (2), and the top of the telescopic tube (6) is fixedly connected to the bottom of the rack (5); the left side of the inner tube of the telescopic tube (6) extends to the outside of the outer tube of the telescopic tube (6); the driving column (7) is rotatably connected to the telescopic tube (6) The auxiliary belt (8) is fixedly connected to the top of the inner tube of the telescopic tube (6), the control panel (9) is slidably connected to the left inner wall of the control box (2), and the top of the control panel (9) is fixedly connected to one end of the auxiliary belt (8), the auxiliary belt (8) is in contact with the driving column (7), the auxiliary plate (14) is slidably connected in the hollow plate (13), the guide plate (17) is slidably connected to the top of the hollow plate (13), the pull plate (18) is rotatably connected to the front side of the guide plate (17), and the top of the pull plate (18) is rotatably connected to the front side of the support frame (19).

2. The lifting precision annealing furnace according to claim 1, characterized in that: The top of the hollow plate (13) is rotatably connected to two movable columns (15), and the outer sheath of the movable columns (15) is provided with a same transmission belt (16), and the outer wall of the transmission belt (16) is fixedly connected to the rear side of the auxiliary plate (14) and the front side of the guide plate (17).

3. The lifting precision annealing furnace according to claim 1, characterized in that: A guide belt (12) is fixedly connected to the top of the control panel (9), and one end of the guide belt (12) is fixedly connected to the right side of the auxiliary panel (14).

4. The lifting precision annealing furnace according to claim 1, characterized in that: An auxiliary groove is provided on the right side of the control box (2), and the support frame (19) is slidably connected to the inner wall of the auxiliary groove.

5. The lifting precision annealing furnace according to claim 1, characterized in that: A control spring (10) is fixedly connected to the bottom of the control panel (9), and one end of the control spring (10) is fixedly connected to the bottom inner wall of the control box (2).

6. The lifting precision annealing furnace according to claim 3, characterized in that: The rear inner wall of the control box (2) is rotatably connected to two guide columns (11), and the guide columns (11) are in contact with the guide belt (12).

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