Silicon wafer loading clamp

By designing a silicon wafer loading fixture that includes brackets, support rollers, clamp rollers, and transmission mechanisms, the limitation of the self -weight of the crystal dragging and silicon wafers can be used to solve the problem that the silicon wafer loading fixture in the existing technology cannot be effective. The effect of reducing silicon wafers and avoiding loading stackers.

CN222421949UActive Publication Date: 2025-01-28WUI GELIN SITONG AUTOMATION EQUIP CO LTD
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Patent Information

Application Number
CN202420204256.3
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-01-26
Publication Date
2025-01-28
Estimated Expiration
2034-01-26

AI Technical Summary

Technical Problem

Existing silicon wafer loading fixtures cannot be effectively limited, resulting in easy damage when loading and transporting silicon wafers.

Method used

A silicon wafer loading fixture that includes brackets, support rollers, clamp rollers, and transmission mechanisms is designed to achieve limits through the self -weight of crystal dragging and silicon wafers. It is not damaged during the transfer.

Benefits of technology

Through this design, the silicon bar loading fixture can effectively reduce the damage of the silicon wafer, avoid stuttering during loading, and ensure the safety and integrity of the silicon wafer during the loading and transfer.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a silicon wafer loading clamp which is based on a crystal support and comprises a support, two supporting rollers, two clamping rollers and four transmission mechanisms. The support comprises fixing plates located on the front side and the rear side, connecting rods are arranged on the left side and the right side of the front side portion of each fixing plate, the two supporting rollers are located at the lower ends between the two fixing plates respectively, and the two clamping rollers are located at the upper ends between the two fixing plates respectively. The crystal support is located at the tops of the two supporting rollers. The two clamping rollers are located on the left side and the right side of the crystal support respectively. The four transmission mechanisms are located on the left side and the right side of the front side portion and the rear side portion of the support respectively. The utility model has the advantages that the limitation is realized through the self-weight of the crystal support and the silicon wafer, the damage of the silicon wafer is reduced, and the blockage is avoided when the crystal support and the silicon wafer are loaded.
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Description

Technical Field

[0001] The utility model relates to the field of tooling fixtures, in particular to a silicon wafer loading fixture. Background Art

[0002] During the process of clamping and transporting silicon wafers, a crystal drag is needed to ensure that the relative positions of the silicon wafers are fixed and there is no collision or damage to each other. The crystal drag is placed in a silicon wafer loading fixture, and the crystal drag is limited and fixed by the silicon wafer loading fixture.

[0003] However, the silicon wafer loading fixture currently used only places the wafer carrier in the silicon wafer loading fixture, but cannot effectively limit the silicon wafer loading fixture, thereby causing damage to the silicon wafer when the silicon wafer loading fixture transports the silicon wafer. Utility Model Content

[0004] The utility model aims to provide a silicon wafer loading fixture, which has the advantages of achieving position limiting through the self-weight of a crystal drag and a silicon wafer, reducing the damage of the silicon wafer, and avoiding jamming when loading the crystal drag and the silicon wafer.

[0005] The above technical objectives of the utility model are achieved through the following technical solutions:

[0006] A silicon wafer loading fixture, based on a wafer drag, comprises a bracket, two support rollers, two clamping rollers, and four transmission mechanisms;

[0007] The bracket includes fixed plates located at the front and rear sides, and each of the front side portions of the fixed plates is provided with connecting rods on the left and right sides, and each of the connecting rods is fixedly connected to the fixed plates at the front and rear sides, and the two supporting rollers are respectively located at the lower ends between the two fixed plates, and the two clamping rollers are respectively located at the upper ends between the two fixed plates;

[0008] The crystal drag is located on top of the two support rollers, and the two clamping rollers are respectively located on the left and right sides of the crystal drag;

[0009] The four transmission mechanisms are respectively located on the left and right sides of the front and rear sides of the bracket, the front and rear sides of the clamping roller and the support roller located on the left side are respectively fixedly connected to the transmission mechanisms located on the left side of the front side and the left side of the rear side, and the front and rear sides of the clamping roller and the support roller located on the right side are respectively fixedly connected to the transmission mechanisms located on the right side of the front side and the right side of the rear side.

[0010] The preferred solutions are as follows:

[0011] Preferably: each of the transmission mechanisms comprises a first rotating arm, a second rotating arm, and a tension spring, a first vertical waist-shaped through hole is formed at the lower end of each of the first rotating arms, a bearing is placed in each of the first waist-shaped through holes, each of the bearings is rotatably connected to the upper end of the corresponding second rotating arm, one end of each of the tension springs is fixedly connected to the corresponding bearing, and the other end of each of the tension springs is fixedly connected to the upper end of the corresponding fixing plate;

[0012] A second transverse waist-shaped through hole is provided on the left and right sides of the upper ends of the front sides of the two fixing plates, and a third waist-shaped through hole is provided on the left and right sides of the lower ends of the front sides of the two fixing plates, which is mirror-symmetrical along the central axis of the fixing plates in the vertical direction;

[0013] The upper end of each of the first rotating arms is rotatably connected to the upper side of the corresponding second waist-shaped through hole, the front side of each of the clamping rollers passes through the corresponding second waist-shaped through hole, and the front side of each of the clamping rollers is rotatably connected to the corresponding first rotating arm;

[0014] Each of the second rotating arms is located between its corresponding first rotating arm and the fixed plate;

[0015] The first waist-shaped perforation of each of the first rotating arms corresponds to the position of the third waist-shaped perforation of its corresponding fixed plate, the front side of each of the supporting rollers passes through its corresponding third waist-shaped perforation, and the front side of each of the supporting rollers is rotatably connected to its corresponding second rotating arm.

[0016] Preferably, the two transmission mechanisms on the left and the two transmission mechanisms on the right are mirror-symmetrical along the central axis in the vertical direction of the fixing plate.

[0017] To summarize, the utility model is provided with two supporting rollers, two clamping rollers and four transmission mechanisms. When the crystal drag is placed on the two supporting rollers, the two supporting rollers are pressed downward. When the two supports move downward, the two clamping rollers are respectively driven by the four transmission mechanisms to clamp the crystal drag, thereby completing the effect of clamping and limiting the crystal drag. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 is a schematic diagram of the overall structure of the embodiment;

[0019] Figure 2 It is a bottom side view of the overall structural modeling schematic diagram of the embodiment.

[0020] In the figure, 1, bracket; 2, support roller; 3, clamping roller; 4, transmission mechanism; 5, crystal drag; 111, fixed plate; 112, connecting rod; 411, first rotating arm; 412, second rotating arm; 413, tension spring; 414, first waist-shaped perforation; 415, bearing; 416, second waist-shaped perforation; 417, third waist-shaped perforation. DETAILED DESCRIPTION

[0021] The utility model is further described in detail below in conjunction with the accompanying drawings.

[0022] The same components are denoted by the same reference numerals. It should be noted that the words "front", "rear", "left", "right", "upper" and "lower" used in the following description refer to directions in the drawings.

[0023] like Figure 1 , Figure 2 As shown, a silicon wafer loading fixture is based on a wafer drag 5 and includes a support 1, two support rollers 2, two clamping rollers 3, and four transmission mechanisms 4;

[0024] The bracket 1 includes fixing plates 111 located at the front and rear sides, and connecting rods 112 are provided on the left and right sides of the front side of each fixing plate 111. Each connecting rod 112 is fixedly connected to the fixing plates 111 at the front and rear sides. The fixing plates 111 at the front and rear sides are connected by the connecting rods 112, thereby achieving fixation of the bracket 1 and forming a placement space inside the bracket 1.

[0025] The two support rollers 2 are respectively located at the lower end between the two fixed plates 111, the two clamping rollers 3 are respectively located at the upper end between the two fixed plates 111, the crystal drag 5 is located on the top of the two support rollers 2, and the two clamping rollers 3 are respectively located on the left and right sides of the crystal drag 5. The two support rollers 2 are used to support the crystal drag 5, and the two clamping rollers 3 are used to limit the left and right sides of the crystal drag 5.

[0026] The four transmission mechanisms 4 are respectively located on the left and right sides of the front and rear sides of the bracket 1. The front and rear sides of the clamping roller 3 and the supporting roller 2 on the left are fixedly connected to the transmission mechanisms 4 on the left front side and the left rear side respectively. The front and rear sides of the clamping roller 3 and the supporting roller 2 on the right are fixedly connected to the transmission mechanisms 4 on the right front side and the right rear side respectively. The two transmission mechanisms 4 on the left and the two transmission mechanisms 4 on the right are placed in a mirror-symmetrical manner along the central axis of the fixed plate 111 in the vertical direction. The two transmission mechanisms 4 on the front and the two transmission mechanisms 4 on the rear are placed in a mirror-symmetrical manner along the central axis of the connecting rod 112 in the vertical direction. When the crystal drag 5 is placed on the two supporting rollers 2, the two supporting rollers 2 are pressed downward, and the two support rollers 2 drive the two clamping rollers 3 to clamp the crystal drag 5 through the four transmission mechanisms 4 respectively.

[0027] Each transmission mechanism 4 includes a first rotating arm 411, a second rotating arm 412, and a tension spring 413. A first waist-shaped through hole 414 in a vertical shape is provided at the lower end of each first rotating arm 411. A bearing 415 is placed in each first waist-shaped through hole 414. Each bearing 415 is rotatably connected to the upper end of the corresponding second rotating arm 412. One end of each tension spring 413 is fixedly connected to the corresponding bearing 415. The other end of each tension spring 413 is fixedly connected to the upper end of the corresponding fixing plate 111. The two fixed plates 111 are fixedly connected, with a second horizontal waist-shaped through-hole 416 on the left and right sides of the upper ends of the front sides, and a third waist-shaped through-hole 417 on the left and right sides of the lower ends of the front sides of the two fixed plates 111 is mirror-symmetrically arranged along the central axis of the vertical direction of the fixed plates 111; the bearing 415 moves in the first waist-shaped through-hole 414, and when the upper end of the first rotating arm 411 can only rotate but cannot generate displacement, it is convenient to drive the clamping roller 3 to move left and right through the third waist-shaped through-hole 417.

[0028] The upper end of each first rotating arm 411 is rotatably connected to the upper side of the corresponding second waist-shaped through hole 416, the front side of each clamping roller 3 passes through the corresponding second waist-shaped through hole 416, and the front side of each clamping roller 3 is rotatably connected to the corresponding first rotating arm 411;

[0029] Each second rotating arm 412 is located between its corresponding first rotating arm 411 and the fixing plate 111;

[0030] The first waist-shaped perforation 414 of each first rotating arm 411 corresponds to the position of the third waist-shaped perforation 417 of the corresponding fixed plate 111, and the front side of each supporting roller 2 passes through its corresponding third waist-shaped perforation 417. The front side of each supporting roller 2 is rotatably connected to the corresponding second rotating arm 412, wherein the setting of the arc-shaped third waist-shaped perforation 417 can make the supporting roller 2 drive the lower end of the first rotating arm 411 to rotate along the upper end while descending. At the same time, in order to facilitate the work of the two clamping rollers 3, the diameter of the connection between each clamping roller 3 and the first rotating arm 411 is one-third of the height of the second waist-shaped perforation 416, so as to avoid its position being affected when it moves in the second waist-shaped perforation 416.

[0031] Among them, in order to facilitate the rotation of the first rotating arm 411 and the second rotating arm 412 and increase the strength, the first rotating arm 411 and the second rotating arm 412 of the transmission mechanism 4 located on the left front side are both "L"-shaped, and the "L"-shaped opening of the first rotating arm 411 faces right, and the angle formed by the "L"-shaped opening of the first rotating arm 411 is 160°, the "L"-shaped opening of the second rotating arm 412 faces left, and the angle formed by the "L"-shaped opening of the second rotating arm 412 is 136°, and the angle of the arc corresponding to the third waist-shaped perforation 417 is 68°, thereby limiting the displacement distance of the support roller 2.

[0032] Specific implementation process:

[0033] Step 1: Place the crystal drag 5 on top of the two support rollers 2. The crystal drag 5 will drop due to its own weight.

[0034] Step 2: Since the crystal drag 5 is located on the top of the two support rollers 2, the two support rollers 2 slide downward along the arc of the third waist-shaped perforations 417 under the limitation of the four arc-shaped third waist-shaped perforations 417;

[0035] Step 3: The upper end of each second rotating arm 412 rotates along with the displacement of the corresponding supporting roller 2;

[0036] Step 4: The tension spring 413 corresponding to the bearing 415 to which each second rotating arm 412 is rotatably connected is stretched to generate elasticity;

[0037] Step 5: Each bearing 415 rotates in the first waist-shaped through hole 414 of the corresponding first rotating arm 411 and generates displacement, driving the lower end of the first rotating arm 411 to rotate toward the crystal drag 5;

[0038] Step 6: As the four first rotating arms 411 rotate, the corresponding clamping rollers 3 are driven to rotate at the crystal drag 5, and the two clamping rollers 3 clamp the crystal drag 5;

[0039] Step 7: After the crystal drag 5 is taken out, due to the loss of the weight of the crystal drag 5, the four tension springs 413 rebound respectively, and then drive the two support rollers 2 to return to the origin respectively.

[0040] This specific embodiment is merely an explanation of the present invention and is not a limitation of the present invention. After reading this specification, those skilled in the art may make non-creative modifications to the present embodiment as needed, but such modifications are protected by patent law as long as they are within the scope of the claims of the present invention.

Claims

1. A silicon wafer loading fixture based on wafer drag, characterized in that: It comprises a bracket (1), two supporting rollers (2), two clamping rollers (3), and four transmission mechanisms (4); The bracket (1) comprises fixed plates (111) located at the front and rear sides, each of the fixed plates (111) is provided with connecting rods (112) on the left and right sides of the front side, each of the connecting rods (112) is fixedly connected to the fixed plates (111) at the front and rear sides, the two supporting rollers (2) are respectively located at the lower ends between the two fixed plates (111), and the two clamping rollers (3) are respectively located at the upper ends between the two fixed plates (111); The crystal drag (5) is located on top of the two support rollers (2), and the two clamping rollers (3) are respectively located on the left and right sides of the crystal drag (5); The four transmission mechanisms (4) are respectively located on the left and right sides of the front side and rear side of the bracket (1); the front and rear sides of the clamping roller (3) and the support roller (2) located on the left side are respectively fixedly connected to the transmission mechanisms (4) located on the left side of the front side and the left side of the rear side; the front and rear sides of the clamping roller (3) and the support roller (2) located on the right side are respectively fixedly connected to the transmission mechanisms (4) located on the right side of the front side and the right side of the rear side.

2. A silicon wafer loading fixture according to claim 1, characterized in that: Each of the transmission mechanisms (4) comprises a first rotating arm (411), a second rotating arm (412), and a tension spring (413); a first waist-shaped through hole (414) in a vertical shape is provided at the lower end of each of the first rotating arms (411); a bearing (415) is placed in each of the first waist-shaped through holes (414); each of the bearings (415) is rotatably connected to the upper end of its corresponding second rotating arm (412); one end of each of the tension springs (413) is fixedly connected to its corresponding bearing (415); and the other end of each of the tension springs (413) is fixedly connected to the upper end of its corresponding fixing plate (111); A second transverse waist-shaped through hole (416) is provided on the left and right sides of the upper ends of the front sides of the two fixing plates (111), and a third waist-shaped through hole (417) is provided on the left and right sides of the lower ends of the front sides of the two fixing plates (111) in the shape of an arc and mirror-symmetrical along the central axis of the fixing plates (111) in the vertical direction; The upper end of each first rotating arm (411) is rotatably connected to the upper side of its corresponding second waist-shaped through hole (416), the front side of each clamping roller (3) passes through its corresponding second waist-shaped through hole (416), and the front side of each clamping roller (3) is rotatably connected to its corresponding first rotating arm (411); Each of the second rotating arms (412) is located between its corresponding first rotating arm (411) and the fixed plate (111); The first waist-shaped through hole (414) of each first rotating arm (411) corresponds to the position of the third waist-shaped through hole (417) of the corresponding fixed plate (111), the front side of each supporting roller (2) passes through the corresponding third waist-shaped through hole (417), and the front side of each supporting roller (2) is rotatably connected to the corresponding second rotating arm (412).

3. A silicon wafer loading fixture according to claim 2, characterized in that: The two transmission mechanisms (4) on the left side are mirror-symmetrical with the two transmission mechanisms (4) on the right side along the central axis of the fixed plate (111) in the vertical direction.