Carrier plate, coating device and coating system

Abstract

The utility model provides a carrier plate, a coating device and a coating system, relates to the technical field of coating, and aims to solve the technical problem that when a crystalline silicon substrate is coated, a solution is easy to diffuse to the side surface and the back surface to cause pollution. The carrier plate is provided with at least one first adsorption hole and a first gas blowing structure arranged around the at least one first adsorption hole, and the first adsorption hole is used for fixing a coating object through an adsorption effect; the first gas blowing structure is provided with at least one opening, and at least part of each opening is opposite to the surface, facing the carrier plate, of the coating object; the first gas blowing structure is used for enabling gas flow to flow in the preset direction, and the preset direction is the direction from the middle area of the coating object to the peripheral side edge. The carrier plate disclosed by the utility model is used for bearing a coating object, so that a solution on the top surface of the coating object does not diffuse to the side surface and the bottom surface of the coating object to cause pollution.

Description

Technical Field

[0001] The utility model relates to the technical field of coating, in particular to a carrier plate, a coating device and a coating system. Background Art

[0002] The statements in this section merely provide background technology related to the present invention and do not necessarily constitute prior art.

[0003] In the photovoltaic field, the theoretical efficiency limit of crystalline silicon photovoltaic cells is 29%. In order to break through the photoelectric conversion efficiency limit of crystalline silicon photovoltaic cells, photovoltaic cells need to be connected in series from top to bottom according to the size of the band gap width to form a multi-junction stacked cell.

[0004] In the process of manufacturing crystalline silicon laminated photovoltaic cells, the solution needs to be evenly applied to the crystalline silicon substrate, and then the solution needs to be quickly crystallized on the substrate. When coating the crystalline silicon substrate, the solution will diffuse to the side and back of the crystalline silicon substrate, thereby contaminating the side and back of the crystalline silicon substrate and affecting subsequent processes. Utility Model Content

[0005] The utility model aims to provide a carrier plate, a coating device and a coating system to solve the technical problem that when a crystalline silicon substrate is coated, the solution easily diffuses to the side and back and causes contamination.

[0006] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0007] In a first aspect, the utility model provides a carrier plate for carrying a coating object, wherein the carrier plate has at least one first adsorption hole and a first gas blowing structure arranged around the at least one first adsorption hole.

[0008] The first adsorption hole is used to fix the coating object by adsorption;

[0009] The first gas blowing structure has at least one opening, and at least a portion of each of the openings is opposite to the surface of the coating object facing the carrier plate;

[0010] The first gas blowing structure is used to direct the gas flow along a preset direction, where the preset direction is a direction from a middle area to a peripheral edge of the coating object.

[0011] According to at least one embodiment of the present utility model, the flow channel of the first gas blowing structure extends in the thickness direction of the carrier plate; or,

[0012] In a direction from a surface of the carrier plate facing away from the coating object to a surface facing the coating object, a flow channel of the first gas blowing structure extends obliquely toward a peripheral side of the coating object.

[0013] According to at least one embodiment of the present invention, the flow channel of the first gas blowing structure and the surface of the carrier plate facing the coating object are arranged at a preset angle, and the angle value range of the preset angle is 15° to 75°.

[0014] According to at least one embodiment of the present invention, the first gas blowing structure comprises an annular structure formed by strip-shaped holes; or,

[0015] The first gas blowing structure includes a plurality of blowing holes, the plurality of blowing holes are distributed along the circumference of the coating object, and each of the blowing holes is close to an edge of the coating object.

[0016] According to at least one embodiment of the present invention, the opening width of the strip-shaped holes ranges from 0.5 mm to 2 mm, and the opening width direction of the strip-shaped holes is the distribution direction from the first adsorption hole to the first gas blowing structure; or,

[0017] The opening size of the blowing hole ranges from 0.5 mm to 2 mm.

[0018] According to at least one embodiment of the present utility model, there are multiple first adsorption holes, and the multiple first adsorption holes are evenly distributed on the carrier plate.

[0019] In a second aspect, the utility model provides a coating device, comprising a coating table for carrying a carrier plate, wherein the carrier plate is the carrier plate described in the first aspect, and the coating table has at least one second adsorption hole matching the at least one first adsorption hole, and a second gas blowing structure matching the first gas blowing structure.

[0020] In a third aspect, the utility model provides a coating system, comprising a coating device, a first vacuum device, a second vacuum device and a third vacuum device arranged in sequence, wherein the coating device is the coating device described in the second aspect;

[0021] The chamber of the first vacuum device and the chamber of the second vacuum device, and the chamber of the third vacuum device and the chamber of the second vacuum device are isolated from each other by switchable gate valves;

[0022] The first vacuum device comprises a first heating unit and a first vacuum breaking unit, wherein the first heating unit is used for preheating the coating object in a vacuum environment, and the first vacuum breaking unit is used for releasing the vacuum environment in the chamber of the first vacuum device;

[0023] The second vacuum device comprises a second heating unit, and the second vacuum device is used to crystallize the coating object from the first vacuum device in a vacuum environment;

[0024] The third vacuum device includes a second vacuum breaking part, and the second vacuum breaking part is used to release the vacuum environment in the chamber of the third vacuum device.

[0025] According to at least one embodiment of the present utility model, the third vacuum device further includes a cooling device, and the cooling device is used to cool the coating object from the second vacuum device.

[0026] According to at least one embodiment of the present invention, the coating system further comprises a conveying device, and the conveying device is used to sequentially convey the carrier to the first vacuum device, the second vacuum device and the third vacuum device.

[0027] Among the one or more technical solutions provided in the exemplary embodiments of the present utility model, at least one of the following beneficial effects can be achieved.

[0028] The carrier plate of the exemplary embodiment of the utility model is used for supporting the coating object, and has at least one first adsorption hole on the carrier plate, which fixes the coating object on the carrier plate through vacuum adsorption to prevent the carrier plate from shifting and causing uneven coating when the coating tool is coating. A first gas blowing structure is arranged around the at least one first adsorption hole, which has at least one opening, and each opening is at least partially or completely opposite to the bottom surface of the coating object. When the airflow blows toward the bottom surface of the coating object, an air curtain is formed that flows from the bottom surface of the coating object from the inside to the periphery. Under the blowing of the air curtain, the solution on the top surface of the coating object can be prevented from diffusing to the side and bottom surfaces of the coating object to cause pollution. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] The accompanying drawings illustrate exemplary embodiments of the present invention and are used to explain the principles of the present invention together with the description thereof, wherein these drawings are included to provide a further understanding of the present invention, and the accompanying drawings are included in and constitute a part of this specification;

[0030] Figure 1 It is a schematic diagram of the axonometric structure of a coating device according to an embodiment of the utility model;

[0031] Figure 2 It is a schematic diagram of the top view of the coating device according to the embodiment of the utility model;

[0032] Figure 3 yes Figure 2 A schematic diagram of the enlarged structure of part A;

[0033] Figure 4 It is a schematic diagram of the axonometric structure of a coating system according to an embodiment of the utility model;

[0034] Figure 5It is a schematic diagram of the top structure of the coating system according to the embodiment of the utility model.

[0035] Figure numerals: 10, carrier plate; 11, first adsorption hole; 12, first gas blowing structure; 20, coating station; 30, coating robot arm; 40, belt lifting mechanism; 51, first vacuum device; 511, first heating part; 512, first vacuum breaking part; 513, first vacuum pump; 52, second vacuum device; 53, third vacuum device; 532, second vacuum breaking part; 533, second vacuum pump; 60, conveying device; 70, gate valve. DETAILED DESCRIPTION

[0036] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0037] Vacuum crystallization is a physical process that separates the solute and solvent in a solution by crystallization under reduced pressure. Its operating principle is to evenly coat a saturated solution on a substrate and send it into a vacuum chamber. The chamber is maintained in a vacuum state, heated and insulated from the outside. The solution on the substrate must flash evaporate and then adiabatically cool to an equilibrium temperature corresponding to the pressure in the chamber. That is, the supersaturated crystallization of the solution is the result of the simultaneous action of adiabatic evaporation of the solvent and vaporization cooling of the solution.

[0038] During the process of applying the solution to the substrate, the solution will diffuse to the sides and back of the substrate, thereby contaminating the sides and back of the substrate and affecting subsequent processes, for example, requiring the addition of a subsequent process for removing contaminants.

[0039] In response to the above problems, the carrier provided by the exemplary embodiment of the utility model uses a first adsorption hole to fix the coating object, and uses a first gas blowing structure to generate an airflow from the inside to the surrounding side of the back side of the coating object. This airflow can prevent the top surface of the coating object from diffusing to the side and back sides, thereby avoiding contamination, thereby saving the subsequent removal process steps.

[0040] It should be noted that the coating objects of the present invention include but are not limited to crystalline silicon, and may also be other objects that require coating solutions, such as electronic circuit boards and wafers.

[0041] Figure 1 Schematic diagram of the axonometric structure of the coating device according to the embodiment of the utility model. Figure 1As shown, the carrier provided by the exemplary embodiment of the utility model is used for carrying the coating object. In actual use, the coating object is placed at the corresponding position of the carrier 10. For example, there can be multiple carrying positions on the carrier 10 so that multiple coating objects can be coated at the same time. The carrier 10 is conveyed to the belt of the belt lifting mechanism 40 by the conveyor belt. The belt lifting mechanism 40 drives the belt to descend. After the carrier 10 is docked with the coating station 20, the holographic adaptive height detector detects the position height of the coating object to be coated on the carrier 10. After the position information is transmitted to the host computer, the coating head on the coating robot 30 sequentially coats the solution on each coating object.

[0042] Figure 2 It is a schematic diagram of the top view of the coating device according to the embodiment of the utility model; Figure 3 yes Figure 2 A schematic diagram of the enlarged structure of part A. Figure 2 and Figure 3 As shown, the carrier plate 10 provided by the exemplary embodiment of the utility model has at least one first adsorption hole 11 and a first gas blowing structure 12 arranged around the at least one first adsorption hole 11, the first adsorption hole 11 is used to fix the coating object by adsorption; the first gas blowing structure 12 has at least one opening, and at least a part of each opening is opposite to the surface of the coating object facing the carrier plate 10; the first gas blowing structure 12 is used to direct the gas flow along a preset direction, and the preset direction is the direction from the middle area of ​​the coating object to the peripheral edge.

[0043] In actual use, after the carrier 10 is docked with the coating station 20, the first adsorption hole 11 fixes the coating object on the carrier 10 by vacuum adsorption to prevent the coating object from being displaced during the coating solution process, resulting in uneven coating. For example, the bottom of a coating object is adsorbed and fixed by multiple first adsorption holes 11. A circle of first gas blowing structures 12 surrounds the multiple first adsorption holes 11 of the same coating object, wherein the openings of the first gas blowing structure 12 face the bottom surface of the coating object, for example, part of each opening is opposite to the surface of the coating object facing the carrier 10, that is, part of each opening is opposite to the surface of the coating object facing the carrier 10, and the other part is exposed to the outside of the coating object. Optionally, all of each opening is opposite to the surface of the coating object facing the carrier 10. At this time, by blowing the airflow toward the coating object, the airflow can also flow from the inner side to the peripheral edge of the back of the coating object. Based on this, when the top surface of the coating object is coated with the solution, under the action of the airflow blown by the first gas blowing structure 12, the solution is difficult to diffuse to the side and back of the coating object, avoiding contamination, thereby eliminating the pollutant removal process step.

[0044] When a portion of each opening is opposite to the surface of the coating object facing the carrier 10, the flow channel extension direction of the first gas blowing structure 12 is the thickness direction of the carrier 10, that is, the flow channel extension direction of the first gas blowing structure 12 is perpendicular to the surface of the coating object facing the carrier 10, so that the flow direction of the airflow can be formed from the inner side of the back side of the carrier 10 to the peripheral edge of the carrier 10.

[0045] When the entire portion of each opening is opposite to the surface of the coating object facing the carrier 10, the flow channel of the first gas blowing structure 12 extends obliquely toward the peripheral side of the coating object in the direction from the surface of the carrier 10 away from the coating object to the surface facing the coating object. At this time, the flow channel direction of the first gas blowing structure 12 can also form an airflow flowing from the inner side of the back side of the carrier 10 to the peripheral side edge of the carrier 10, thereby preventing the solution from diffusing to the side and back sides of the coating object.

[0046] In some embodiments, when a portion of each opening is opposite to the surface of the coating object facing the carrier 10, the flow direction of the first gas blowing structure 12 can also be inclined to extend toward the peripheral side of the coating object, thereby realizing an airflow flowing from the inner side of the back side of the carrier 10 to the peripheral edge of the carrier 10.

[0047] Exemplarily, when the flow channel direction of the first gas blowing structure 12 extends obliquely toward the peripheral side of the coating object, the flow channel of the first gas blowing structure 12 and the surface of the carrier plate 10 facing the coating object are arranged at a preset angle, and the angle value range of the preset angle is 15° to 75°. Optionally, the angle value range of the preset angle is 30° to 60°, and further optionally, the angle value of the preset angle is 45°.

[0048] In some embodiments, the first gas blowing structure 12 may include a ring-shaped structure formed by strip-shaped holes, such as Figure 3 As shown, the first gas blowing structure 12 is formed by four strip holes, that is, four slits. The annular structure is determined according to the contour shape of the coating object. For example, when the outer contour of the coating object is circular, the annular structure is a circular annular structure.

[0049] In other embodiments, the first gas blowing structure 12 may include a plurality of blowing holes, the plurality of blowing holes are distributed along the circumference of the coating object, and each blowing hole is close to the edge of the coating object. The plurality of blowing holes are densely arranged and distributed in an annular structure, for example, they may be distributed to form an annular structure with a rectangular outline. When the outer contour of the coating object is circular, the arrangement and distribution form of the plurality of blowing holes is a circular distribution.

[0050] For example, the opening width of the strip-shaped hole ranges from 0.5 mm to 2 mm, and the opening width direction of the strip-shaped hole is the distribution direction from the first adsorption hole 11 to the first gas blowing structure 12, that is, the direction from the inside to the outside of the surface of the coating object. For example, the opening width of the strip-shaped hole is 1 mm.

[0051] Exemplarily, when the first gas blowing structure 12 is formed by a plurality of closely spaced blowing holes, the opening size of the blowing holes ranges from 0.5 mm to 2 mm. Exemplarily, when the blowing holes are circular, the diameter of the blowing holes is 1 mm. When a portion of the blowing holes is opposite to the back of the coating object and the other portion is exposed to the peripheral side of the coating object, half of the blowing holes is opposite to the back of the coating object and the other half is exposed to the peripheral side edge range of the coating object. It should be noted that the shape of the blowing holes can be triangular or other irregular shapes in addition to the circular shape.

[0052] Exemplarily, the shape of the first adsorption hole 11 can be circular, triangular, or other irregular shapes. When the shape of the first adsorption hole 11 is circular, its diameter can be 2 mm. When each coated object corresponds to multiple first adsorption holes 11, the multiple first adsorption holes 11 are evenly distributed on the carrier 10, that is, the coated object can be evenly adsorbed to prevent the displacement of the coated object caused by uneven adsorption force. For example, the first adsorption holes 11 are set at the center position of the back of the coated object and at the four corners to adsorb and fix the coated object.

[0053] like Figure 2 As shown, an exemplary embodiment of the utility model also provides a coating device, including a coating table 20 for supporting a carrier plate 10, the carrier plate 10 is a carrier plate 10 of any of the above-mentioned embodiments, the coating table 20 has at least one second adsorption hole matching with at least one first adsorption hole 11, and a second gas blowing structure matching with the first gas blowing structure 12.

[0054] The second adsorption holes on the coating station 20 can be arranged one by one with the first adsorption holes 11 on the carrier 10, and the second gas blowing structure on the coating station 20 is also arranged corresponding to the first gas blowing structure 12 on the carrier 10. After the belt lifting mechanism 40 descends and docks the carrier 10 with the coating station 20, the vacuum generating device and the compressed gas generating device connected to the coating station 20 will provide vacuum adsorption force for the first adsorption holes 11 of the carrier 10 to fix it, and provide compressed gas with a certain pressure to the first gas blowing structure 12 to form a blowing airflow. At this time, the coating robot 30 can sequentially apply the solution to the coating object through the coating head.

[0055] Figure 4 It is a schematic diagram of the axonometric structure of a coating system according to an embodiment of the utility model; Figure 5It is a schematic diagram of a top view structure of a coating system according to an embodiment of the utility model. The exemplary embodiment of the utility model also provides a coating system, comprising a coating device, a first vacuum device 51, a second vacuum device 52 and a third vacuum device 53 arranged in sequence, wherein the coating device is the above-mentioned coating device; the chamber of the first vacuum device 51 and the chamber of the second vacuum device 52, and the chamber of the third vacuum device 53 and the chamber of the second vacuum device 52 are isolated from each other by a switchable gate valve 70; the first vacuum device 51 comprises a first heating part 511 and a first vacuum breaking part 512, the first heating part 511 is used for preheating the coating object in a vacuum environment, and the first vacuum breaking part 512 is used for releasing the vacuum environment in the chamber of the first vacuum device 51; the second vacuum device 52 comprises a second heating part, and the second vacuum device 52 is used for crystallizing the coating object from the first vacuum device 51 in a vacuum environment; the third vacuum device 53 comprises a second vacuum breaking part 532, and the second vacuum breaking part 532 is used for releasing the vacuum environment in the chamber of the third vacuum device 53.

[0056] In practical applications, the vacuum environment in the chamber of the first vacuum device 51 is formed by vacuuming the first vacuum pump 513, the vacuum environment in the chamber of the second vacuum device 52 is also formed by vacuuming the first vacuum pump 513, and the vacuum environment in the chamber of the third vacuum device 53 is formed by vacuuming the second vacuum pump 533. Along the conveying direction of the carrier 10, the coating device, the first vacuum device 51, the second vacuum device 52 and the third vacuum device 53 are arranged in sequence. After the coating object on the carrier 10 is coated with a solution in the coating device, it is conveyed to the chamber of the first vacuum device 51, the first vacuum pump 513 is vacuumed, and the first heating unit 511 is turned on for preheating. Exemplarily, the first heating unit 511 can be arranged on the cover plate of the first vacuum device 51, such as an infrared heating lamp; when the vacuum pressure of the chamber of the first vacuum device 51 and the chamber of the second vacuum device 52 are equal, the gate valve 70 between the two is opened, and the carrier 10 is conveyed to the second vacuum device 52, and the second heating unit in the second vacuum device 52 is heated to perform crystal formation. Exemplarily, the second heating part in the second vacuum device 52 is also an infrared heating lamp tube arranged on the cover plate, that is, the structures of the first vacuum device 51 and the second vacuum device 52 are substantially the same.

[0057] After the crystal making process of the second vacuum device 52 is completed, when the vacuum pressure in the third vacuum device 53 is equal to the vacuum pressure in the chamber of the second vacuum device 52, the gate valve 70 between the third vacuum device 53 and the second vacuum device 52 is opened, and the carrier 10 carrying the coating object is transferred to the third vacuum device 53. When the gate valve 70 is closed, the second vacuum breaking part 532 of the third vacuum device 53 is inflated and the chamber of the third vacuum device 53 is restored to the atmospheric state, and the carrier 10 can be transferred to the unloading position. The chamber of the third vacuum device 53 is evacuated by the second vacuum pump 533 to the same vacuum pressure as the chamber of the second vacuum device 52, waiting for the process flow of the next carrier 10.

[0058] It can be seen that by respectively arranging the first vacuum device 51 and the third vacuum device 53 on both sides of the second vacuum device 52, in the entire crystal making process, the second vacuum device 52 mainly used for crystal making does not need to break vacuum, so the vacuum stabilization time can be shortened, thereby improving production efficiency and product yield. Furthermore, since the coating device can enter the first vacuum device 51 for pre-crystal making after coating on the coating station 20, there is no need to wait for the vacuum breaking and stabilization time of the second vacuum device 52, so the time that the solution of the coating object is exposed to the air can be reduced.

[0059] In some embodiments, the third vacuum device 53 further includes a cooling device, which is used to cool the coated object from the second vacuum device 52. The cooling device can accelerate the cooling time of the coated object, thereby improving production efficiency.

[0060] In actual use, in order to allow the carrier 10 to automatically flow between the various vacuum devices and the coating devices without manual intervention, the coating system further includes a conveying device 60, which is used to sequentially convey the carrier 10 to the first vacuum device 51, the second vacuum device 52, and the third vacuum device 53. Exemplarily, the conveying device 60 can be a conveyor belt.

[0061] It should be noted that when the carrier 10 is transferred from the coating device to the first vacuum device 51, the chamber of the first vacuum device 51 needs to be inflated through the first vacuum breaking part 512, and then after returning to the atmospheric state, the carrier 10 is transferred to the chamber of the first vacuum device 51, and then vacuumed and preheated. Exemplarily, the chambers of the first vacuum device 51, the second vacuum device 52 and the third vacuum device 53 are also provided with vacuum degree detectors to determine whether the vacuum pressures of the three chambers meet the process requirements.

[0062] Those skilled in the art should understand that the above embodiments are only for the purpose of clearly illustrating the present invention, and are not intended to limit the scope of the present invention. For those skilled in the art, other changes or modifications may be made based on the above disclosure, and these changes or modifications are still within the scope of the present invention.

Claims

1. A carrier board, characterized in that: The carrier plate is used for carrying a coating object, the carrier plate has at least one first adsorption hole and a first gas blowing structure arranged around the at least one first adsorption hole. The first adsorption hole is used to fix the coating object by adsorption; The first gas blowing structure has at least one opening, and at least a portion of each of the openings is opposite to the surface of the coating object facing the carrier plate; The first gas blowing structure is used to direct the gas flow along a preset direction, where the preset direction is a direction from a middle area to a peripheral edge of the coating object.

2. The carrier board according to claim 1, characterized in that: The flow channel of the first gas blowing structure extends in the thickness direction of the carrier plate; or, In a direction from a surface of the carrier plate facing away from the coating object to a surface facing the coating object, a flow channel of the first gas blowing structure extends obliquely toward a peripheral side of the coating object.

3. The carrier board according to claim 2, characterized in that: The flow channel of the first gas blowing structure is arranged at a preset angle with the surface of the carrier plate facing the coating object, and the preset angle has a value range of 15° to 75°.

4. The carrier board according to claim 1, characterized in that: The first gas blowing structure comprises a ring-shaped structure formed by strip-shaped holes; or, The first gas blowing structure includes a plurality of blowing holes, the plurality of blowing holes are distributed along the circumference of the coating object, and each of the blowing holes is close to an edge of the coating object.

5. The carrier board according to claim 4, characterized in that: The opening width of the strip-shaped holes ranges from 0.5 mm to 2 mm, and the opening width direction of the strip-shaped holes is the distribution direction from the first adsorption holes to the first gas blowing structure; or, The opening size of the blowing hole ranges from 0.5 mm to 2 mm.

6. The carrier board according to any one of claims 1 to 5, characterized in that: There are multiple first adsorption holes, and the multiple first adsorption holes are evenly distributed on the carrier plate.

7. A coating device, characterized in that: A coating station for carrying a carrier plate is included, wherein the carrier plate is the carrier plate according to any one of claims 1 to 6, and the coating station has at least one second adsorption hole matching the at least one first adsorption hole, and a second gas blowing structure matching the first gas blowing structure.

8. A coating system, characterized in that: It comprises a coating device, a first vacuum device, a second vacuum device and a third vacuum device which are arranged in sequence, wherein the coating device is the coating device according to claim 7; The chamber of the first vacuum device and the chamber of the second vacuum device, and the chamber of the third vacuum device and the chamber of the second vacuum device are isolated from each other by switchable gate valves; The first vacuum device comprises a first heating unit and a first vacuum breaking unit, wherein the first heating unit is used for preheating the coating object in a vacuum environment, and the first vacuum breaking unit is used for releasing the vacuum environment in the chamber of the first vacuum device; The second vacuum device comprises a second heating unit, and the second vacuum device is used to crystallize the coating object from the first vacuum device in a vacuum environment; The third vacuum device includes a second vacuum breaking part, and the second vacuum breaking part is used to release the vacuum environment in the chamber of the third vacuum device.

9. The coating system according to claim 8, characterized in that: The third vacuum device further includes a cooling device for cooling the coating object from the second vacuum device.

10. The coating system according to claim 9, characterized in that: The coating system further includes a conveying device, which is used to sequentially convey the carrier to the first vacuum device, the second vacuum device, and the third vacuum device.

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