Tension adjusting device for multi-wire cutting equipment

Abstract

The utility model discloses a tension adjusting device for multi-wire cutting equipment, which comprises a mounting plate, a tension adjusting device and a tension adjusting device, the driving mechanism is arranged on the mounting plate and is in transmission connection with the sliding plate; the tension sensor is arranged on one side of the sliding plate; and the wire wheel is connected with the tension sensor. The utility model provides a tension adjusting device for multi-wire cutting equipment, which can quickly adjust the position of a wire wheel and adjust the tension of a cutting wire.

Description

Technical Field

[0001] The utility model relates to the field of servo motors, and more specifically, to a servo motor for multi-wire cutting equipment. Background Art

[0002] Multi-wire cutting is a new cutting method that uses high-speed reciprocating motion of a cutting wire made of metal to bring abrasives into the semiconductor processing area for grinding, and simultaneously cuts hard and brittle materials such as semiconductors into hundreds of thin slices. When the multi-wire cutting equipment is working, it is necessary to ensure that the tension of the cutting wire wound on the cutting drum remains constant in order to ensure the stable quality of the cutting surface. Current multi-wire cutting equipment usually controls the tension through the torque change of the servo motor of the multi-wire cutting equipment. However, torque regulation has problems such as inconvenience in controlling the size of the tension and inaccurate control. Utility Model Content

[0003] The utility model aims to provide a tension adjustment device for multi-wire cutting equipment, which can quickly adjust the position of the wire wheel and adjust the tension of the cutting wire.

[0004] The utility model solves the above technical problems with the following technical solutions: A tension adjustment device for multi-wire cutting equipment, comprising:

[0005] A mounting plate, the upper edge of which is horizontally slidably connected with a slide plate;

[0006] A driving mechanism, which is arranged on the mounting plate and is drivingly connected to the slide plate;

[0007] A tension sensor is arranged on one side of the slide plate;

[0008] A wire wheel is connected with the tension sensor.

[0009] Furthermore, in the tension adjustment device for multi-wire cutting equipment, a through groove is horizontally provided on the mounting plate, and sliding grooves are respectively provided at the upper and lower ends of the slide plate, the slide plate passes through the through groove, and the upper and lower ends of the through groove are respectively slidably set in the two sliding grooves.

[0010] Furthermore, in the tension adjustment device for a multi-wire cutting device, the driving mechanism comprises:

[0011] A servo motor is arranged on the mounting plate;

[0012] A ball screw is horizontally arranged along the sliding direction of the slide plate, one end of the ball screw is drivingly connected to the servo motor, and the other end of the ball screw is rotationally connected to the slide plate through a bearing seat;

[0013] A connecting piece is arranged on the other side of the slide plate, and a nut of the ball screw passes through the connecting piece and is connected with the connecting piece.

[0014] Furthermore, the tension adjustment device for a multi-wire cutting device further includes:

[0015] A wire guide mechanism is arranged on the same side as the wire wheel and connected to the mounting plate.

[0016] Furthermore, in the tension adjustment device for multi-wire cutting equipment, the wire mechanism includes two groups of wire assemblies spaced apart vertically, and the wire assembly includes two wire wheels spaced apart horizontally, which are rotatably connected to the mounting plate respectively.

[0017] The utility model is suitable for multi-wire cutting equipment, which detects the tension of the cutting wire in real time through a tension sensor and drives the wire wheel to move through a driving mechanism to quickly adjust the tension of the cutting wire.

[0018] Other advantages, objectives and features of the present invention will be embodied in part through the following description, and in part will be understood by those skilled in the art through research and practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a structural schematic diagram of the tension adjustment device described in the utility model;

[0020] Figure 2 It is a structural schematic diagram of the tension adjustment device described in the utility model;

[0021] Figure 3 The utility model is a structural schematic diagram of the skateboard described in the utility model. DETAILED DESCRIPTION

[0022] The present invention will be further described in detail below in conjunction with the accompanying drawings so that those skilled in the art can implement the invention with reference to the description.

[0023] It should be noted that, in the description of the present invention, the terms "lateral", "longitudinal", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description. They do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0024] Figure 1-Figure 3A tension adjustment device for a multi-wire cutting device provided in an embodiment of the utility model comprises:

[0025] A mounting plate 1, with a slide plate 2 horizontally slidably connected to its upper edge;

[0026] A driving mechanism, which is arranged on the mounting plate 1 and is drivingly connected to the slide plate 2;

[0027] A tension sensor 3, which is arranged on one side of the slide plate 2;

[0028] The wire wheel 4 is connected to the tension sensor 3 .

[0029] In this embodiment, the mounting plate 1 is fixed on the multi-wire cutting device, and the cutting wire of the multi-wire cutting device is passed around the wire wheel 4. The wire wheel 4 is connected to the measuring end of the tension sensor 3. When the multi-wire cutting device is working, the cutting wire rotates around the wire wheel 4. At this time, the wire wheel 4 is subjected to the force of the cutting wire, and the tension sensor 3 can detect the tension of the cutting wire at this time. The tension sensor 3 and the driving mechanism are respectively electrically connected to the control system of the multi-wire cutting device. The tension sensor 3 sends the real-time tension data measured by the tension sensor 3 to the control system of the multi-wire cutting device. The minimum value and maximum value of the cutting wire tension are pre-set in the control system of the multi-wire cutting device. Within the range of the minimum value and the maximum value, the tension of the cutting wire is normal. When the real-time tension measured by the tension sensor 3 is less than the minimum value, it means that the cutting wire is a little loose at this time. At this time, the controller controls the driving mechanism to drive the slide plate 2 to slide on the mounting plate 1, and changes the horizontal position of the wire wheel 4 as a square, and straightens the cutting wire until the real-time tension measured by the tension sensor 3 is greater than the minimum value and less than the maximum value. When the real-time tension measured by the tension sensor 3 is greater than the maximum value, it means that the cutting line is too tight. At this time, the controller controls the driving mechanism to drive the slide plate 2 to slide in the opposite direction on the mounting plate 1, changes the horizontal position of the wire wheel 4, and loosens the cutting line until the real-time tension measured by the tension sensor 3 is greater than the minimum value and less than the maximum value.

[0030] Preferably, as another embodiment of the utility model, a through groove 5 is horizontally provided on the mounting plate 1, and sliding grooves 6 are respectively provided at the upper and lower ends of the slide plate 2, the slide plate 2 passes through the through groove 5, and the upper and lower ends of the through groove 5 are respectively slidably set in the two sliding grooves 6.

[0031] In this embodiment, the through groove 5 is provided so that the slide plate 2 can slide stably on the mounting plate 1 .

[0032] Preferably, as another embodiment of the utility model, the driving mechanism includes:

[0033] A servo motor 7, which is arranged on the mounting plate 1;

[0034] A ball screw 8 is horizontally arranged along the sliding direction of the slide plate 2, one end of the ball screw 8 is transmission-connected to the servo motor 7, and the other end of the ball screw 8 is rotationally connected to the slide plate 2 through a bearing seat;

[0035] A connecting member 9 is arranged on the other side of the slide plate 2 , and a nut of the ball screw 8 passes through the connecting member 9 and is connected thereto.

[0036] In this embodiment, the servo motor drives the ball screw 8 to rotate, and at this time, the nut of the ball screw 8 performs linear motion, driving the connecting member 9 and the slide plate 2 to move.

[0037] Preferably, as another embodiment of the utility model, it also includes:

[0038] The wire guide mechanism is arranged on the same side as the wire wheel 4 and connected to the mounting plate 1 .

[0039] In this embodiment, by setting a wire mechanism, the moving trajectory of the cutting line entering and exiting the wire wheel 4 is limited to a certain extent. Specifically, the wire mechanism includes two groups of wire assemblies arranged at intervals in the upper and lower parts. The wire assembly includes two wire wheels 10 arranged at intervals in the horizontal direction, which are respectively rotatably connected to the mounting plate 1, and the cutting line passes around the two wire wheels 10 of the same wire assembly in turn.

[0040] Although the implementation scheme of the utility model has been disclosed as above, it is not limited to the applications listed in the specification and implementation scheme. It can be fully applied to various fields suitable for the utility model. For those familiar with the art, additional modifications can be easily implemented. Therefore, without departing from the general concept defined by the claims and the scope of equivalents, the utility model is not limited to the specific details and the embodiments shown and described herein.

Claims

1. A tension adjustment device for a multi-wire cutting device, characterized in that: include: A mounting plate (1) having a slide plate (2) horizontally slidably connected to its upper edge; A driving mechanism, which is arranged on the mounting plate (1) and is drivingly connected to the slide plate (2); A tension sensor (3) arranged on one side of the slide plate (2); A wire wheel (4) is connected to the tension sensor (3).

2. A tension adjustment device for a multi-wire cutting device as claimed in claim 1, characterized in that: A through slot (5) is horizontally provided on the mounting plate (1), and slide slots (6) are respectively provided at the upper and lower ends of the slide plate (2). The slide plate (2) passes through the through slot (5), and the upper and lower ends of the through slot (5) are respectively slidably arranged in the two slide slots (6).

3. A tension adjustment device for a multi-wire cutting device as claimed in claim 2, characterized in that: The driving mechanism comprises: A servo motor (7) arranged on the mounting plate (1); a ball screw (8) arranged horizontally along the sliding direction of the slide plate (2), one end of the ball screw (8) being transmission-connected to the servo motor (7), and the other end of the ball screw (8) being rotationally connected to the slide plate (2) via a bearing seat; A connecting member (9) is arranged on the other side of the slide plate (2), and a nut of the ball screw (8) passes through the connecting member (9) and is connected thereto.

4. A tension adjustment device for a multi-wire cutting device as claimed in claim 1, characterized in that: Also includes: A wire guide mechanism is arranged on the same side as the wire wheel (4) and is connected to the mounting plate (1).

5. A tension adjustment device for multi-wire cutting equipment as claimed in claim 4, characterized in that: The wire guide mechanism comprises two groups of wire guide assemblies spaced apart from each other in the upper and lower parts, and the wire guide assemblies comprise two wire guide wheels (10) spaced apart from each other horizontally and respectively connected in rotation with the mounting plate (1).

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