Chip disassembly and inspection device

Abstract

The utility model discloses a chip disassembly and inspection device, which belongs to the technical field of chip detection and comprises a bottom plate, a base and a side plate are arranged on the upper end face of the bottom plate, a containing groove is formed in the upper end face of the base, a rectangular block is arranged in the containing groove, and a containing space is formed by the right side face of the rectangular block and the side face of the containing groove and used for containing a chip. A first threaded rod is in threaded connection with the interior of the side plate, and when the left end of the first threaded rod abuts against the base, a part of the left end face of the first threaded rod makes contact with the chip. When the appearance detection device is used and the appearance detection is carried out on the Timm glue of the chip, the chip is placed in the accommodating space formed by the base and the right side surface of the rectangular block, then the chip is tightly propped through the first threaded rod, then a tool is used, the Lid is upwarped, and then a pair of diagonal pliers is used for rolling up the Lid until more than or equal to 2 / 3 of the chip is leaked; therefore, the glue line condition on the back surface of the Lid can be observed, the time for waiting for wafer grinding in a laboratory is shortened, and the efficiency of detecting the appearance of the chip Timm glue is improved.

Description

Technical Field

[0001] The utility model relates to a detection device, in particular to a chip disassembly and inspection device. Background Art

[0002] The process of manufacturing chips includes using photolithography technology to form circuit patterns on silicon wafers, and then forming electronic components through processes such as deposition, etching, and diffusion, and finally packaging them into a complete chip. Chips are used to perform specific electronic functions, such as microprocessor chips for the central processing unit of a computer, memory chips for storing data, and sensor chips for sensing the environment.

[0003] In the chip manufacturing process, the LA process mainly attaches the lid and the substrate together. The specific method is to first apply glue to the back of the lid at the Tim glue painting station, and then the placement machine attaches the substrate to the lid, cools and solidifies, or solidifies through exposure light, and finally puts them into the oven for baking. The baking time is generally 6-8 hours. After baking, they are taken out and transferred to the next station. After baking, quality inspectors usually perform appearance inspections on the chips, one of which is the coverage area inspection of the Tim glue. The current practice is to take a set number of chips to the laboratory for grinding, grind off the chip substrate, and observe the coverage area of ​​the glue line on the back of the lid to see if there is any glue breakage or glue overflow. Grinding the chips in the laboratory requires a certain amount of waiting, which reduces the efficiency of the inspection. If serious problems are found during the inspection, it is more troublesome to recover the products. Utility Model Content

[0004] The utility model aims to provide a chip disassembly and inspection device, which can reduce the waiting time for laboratory grinding when performing glue line detection on the chip, and improve the detection efficiency of the chip.

[0005] The utility model adopts the following technical scheme: it includes a bottom plate, the upper end surface of the bottom plate is provided with a base and a right side plate, the upper end surface of the base is provided with a receiving groove, a rectangular block is provided in the receiving groove, the right side surface of the rectangular block and the receiving groove together form a receiving space for placing the chip, the internal thread of the right side plate is connected with a first threaded rod, when the left end of the first threaded rod conflicts with the base, a part of the left end surface of the first threaded rod contacts the chip.

[0006] Furthermore, the accommodating groove is a V-shaped groove, and the two side surfaces of the V-shaped groove form an angle of degrees with the upper end surface of the bottom plate.

[0007] Furthermore, the rectangular block is slidably arranged in the V-shaped groove of the base, and a left side plate is also arranged on the upper end surface of the base plate; a second threaded rod is threadedly connected to the left side plate, and the right end of the second threaded rod is rotatably connected to the rectangular block.

[0008] Furthermore, a bracket is provided on the upper end surface of the base, a third threaded rod is provided inside the bracket along the up and down direction, the third threaded rod is threadedly connected to the bracket, and a blade is rotatably connected to the bottom end of the third threaded rod.

[0009] Furthermore, a guide plate is arranged between the third threaded rod and the blade, the guide plate is rotatably connected to the bottom end of the third threaded rod, the lower end surface of the guide plate is fixedly arranged on the blade, and the front and rear side surfaces of the guide plate are in sliding contact with the outer surface of the bracket.

[0010] Furthermore, the bracket includes two vertical plates fixed to the upper end surface of the base, and a top plate arranged between the two vertical plates. The third threaded rod passes through the top plate and is threadedly connected to the top plate. The front and rear side surfaces of the guide plate are in sliding contact with the outer surfaces of the corresponding vertical plates, and the top plate is slidably arranged between the two vertical plates.

[0011] Furthermore, a through slot is provided in the left-right direction at the position where the vertical plate contacts the top plate, and a locking screw passes through the through slot and is threadedly connected to the top plate.

[0012] Furthermore, the left end of the first threaded rod is rotatably connected to a clamping block, and the first threaded rod is in contact with the chip through the clamping block.

[0013] Furthermore, two adjacent sides of the rectangular block in contact with the V-shaped groove are provided with slide rails, and positions on both sides of the V-shaped groove corresponding to the slide rails are provided with slide grooves adapted to the slide rails. The rectangular block is connected to the base for left and right sliding in the V-shaped groove through the slide rails and the slide grooves.

[0014] Furthermore, a group of parallel limiting strips are provided on the adjacent side surfaces of the two vertical plates along the left-right direction, and the front end and the rear end of the top plate are located between the corresponding group of limiting strips.

[0015] When the utility model is used, when the appearance inspection of the Tim glue of the chip is carried out, the chip is placed in the accommodating space formed by the base and the right side of the rectangular block, and then the chip is pressed tightly by the first threaded rod. Then, a tool, such as a utility knife, is used to insert it from the junction of the Lid and the substrate of the chip, and the Lid is tilted up, and then the diagonal pliers are used to roll up the Lid until ≥2 / 3 of the chip leaks out, or the Lid is completely separated from the substrate, and then the glue line on the back of the Lid can be observed. The operation is convenient, the waiting time for laboratory grinding is reduced, and the efficiency of the appearance inspection of the chip Tim glue is improved.

[0016] Furthermore, the utility model is also provided with a blade and a third threaded rod, and the blade can be driven to move downward by rotating the third threaded rod so that the cutting edge of the blade contacts the junction of the chip's Lid and the substrate, and the third threaded rod is continued to be rotated so that the blade enters the junction of the chip's Lid and the substrate, causing the Lid to tilt up until ≥2 / 3 of the chip leaks out or the Lid and the substrate are completely separated, thereby making it convenient to observe the glue line on the back of the Lid. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the overall three-dimensional structure of the utility model;

[0018] Figure 2 This is a schematic diagram of the front view structure of the utility model;

[0019] Figure 3 This is a schematic diagram of the three-dimensional structure of the second threaded rod of the utility model;

[0020] Figure 4 This is a schematic diagram of the three-dimensional structure of the rectangular block and the base of the utility model;

[0021] Figure 5 This is a schematic diagram of the three-dimensional structure of the base of the utility model (rectangular blocks are omitted);

[0022] Figure 6 This is a schematic diagram of the three-dimensional structure of the bracket of the utility model;

[0023] Figure 7 This is a schematic diagram of the three-dimensional structure of the chip of the utility model.

[0024] In the figure, 1, bottom plate; 2, base; 3, right side plate; 4, accommodating groove; 5, rectangular block; 6, accommodating space; 7, chip; 8, first threaded rod; 9, Lid; 10, base plate; 11, tightening block; 12, second threaded rod; 13, slide groove; 14, bracket; 15, third threaded rod; 16, blade; 17, guide plate; 18, vertical plate; 19, top plate; 20, limit strip; 21, through groove; 22, locking screw; 23, left side plate. DETAILED DESCRIPTION

[0025] The present invention is described in detail below with reference to the accompanying drawings and embodiments:

[0026] The chip disassembly and inspection device described in the utility model includes a bottom plate 1, the upper end surface of the bottom plate 1 is provided with a base 2 and a right side plate 3, the upper end surface of the base 2 is provided with a receiving groove 4, a rectangular block 5 is provided in the receiving groove 4, the right side surface of the rectangular block 5 and the side surface of the receiving groove 4 form a receiving space 6 for placing a chip 7, the rectangular block 5 and the base 2 can be formed as one piece, the internal thread of the right side plate 3 is connected with a first threaded rod 8, when the left end surface of the first threaded rod 8 conflicts with the base 2, a part of the left end surface of the first threaded rod 8 contacts with the chip 7.

[0027] When in use, the base plate 1 can be first fixed on the desktop by bolts, the chip 7 to be disassembled and inspected can be placed in the accommodating space 6, and then the first threaded rod 8 can be rotated so that the left end of the first threaded rod 8 is pressed against the chip 7 to fix the chip 7. Then, a tool, such as a utility knife, can be used to align the joint of Lid9 and the substrate 10, and pressure can be applied to lift Lid9 from the substrate 10. Then, diagonal pliers can be used to roll up Lid9 until ≥2 / 3 of the chip 7 leaks out or Lid9 and the substrate 10 are completely separated. Then, the coverage area of ​​the Tim glue can be observed to see if it meets the requirements. Then, according to the observed Tim glue line, the parameters of the LA station can be adjusted until the Tim glue line meets the requirements.

[0028] In order to make a diagonal line of the chip 7 perpendicular to the bottom plate 1 when fixing the chip 7, so as to more conveniently peel off the Lid 9 of the chip 7 from the substrate 10, in this embodiment, the accommodating groove 4 is a V-shaped groove, and the two side surfaces of the V-shaped groove form an angle of 45 degrees with the upper end surface of the bottom plate 1; when in use, the chip 7 is placed in the accommodating space 6 formed by the rectangular block 5 and the V-shaped groove. Due to the limitation of the V-shaped groove, the posture of the chip 7 in the accommodating space 6 is that a diagonal line is perpendicular to the bottom plate 1, so that the Lid 9 can be more conveniently peeled off from the substrate 10 using tools, and then the chip 7 is fixed in the accommodating space 6 by the first threaded rod 8.

[0029] In order to enable the first threaded rod 8 to better tighten and fix the chip 7, in this embodiment, the left end of the first threaded rod 8 is rotatably connected to a tightening block 11, and the first threaded rod 8 is in contact with the chip 7 through the tightening block 11; when the chip 7 needs to be fixed, the first threaded rod 8 is rotated so that the tightening block 11 is in contact with the chip 7, thereby achieving the purpose of fixing the chip 7.

[0030] In order to make the accommodating space 6 adapt to chips 7 of various specifications and thicknesses, in the present embodiment, the rectangular block 5 is slidably arranged in the V-shaped groove of the base 2, and a left side plate 23 is also provided on the upper end surface of the bottom plate 1. The left side plate 23 is internally threadedly connected with a second threaded rod 12, and the right end of the second threaded rod 12 is rotatably connected to the rectangular block 5; by rotating the second threaded rod 12, the rectangular block 5 slides left and right in the V-shaped groove of the base 2, and then the length of the accommodating space 6 in the left and right direction is adjusted to adapt to the fixation of chips 7 of various specifications and thicknesses.

[0031] In order to increase the stability of the rectangular block 5 sliding left and right in the V-shaped groove, in this embodiment, two adjacent sides of the rectangular block 5 in contact with the V-shaped groove are provided with slide rails, and positions on both sides of the V-shaped groove corresponding to the slide rails are provided with slide grooves 13 adapted to the slide rails. The rectangular block 5 is connected to the base 2 for left and right sliding in the V-shaped groove through the slide rails and the slide grooves 13; when the rectangular block 5 moves left and right, it slides in the slide grooves 13 through the slide rails, thereby increasing the stability of the movement of the rectangular block 5.

[0032] In order to realize more convenient disassembly and inspection of the chip 7, in the present embodiment, a bracket 14 is provided on the upper end surface of the base 2, and a third threaded rod 15 is provided inside the bracket 14 in the up and down directions. The third threaded rod 15 is threadedly connected to the bracket 14, and a blade 16 is rotatably connected to the bottom end of the third threaded rod 15; after the chip 7 is fixed in the accommodating space 6, the third threaded rod 15 is rotated so that the third threaded rod 15 drives the blade 16 to move downward, and when the blade 16 conflicts with the joint between the Lid9 of the chip 7 and the substrate 10, the third threaded rod 15 is continued to be rotated so that the third threaded rod 15 applies pressure to the chip 7 through the blade 16, so that the Lid9 is peeled off from the substrate 10, so as to facilitate the observation of the Tim glue on the substrate 10 and the Lid9.

[0033] In order to achieve the purpose of not following the rotation of the third threaded rod 15 when the blade 16 moves up and down, in this embodiment, a guide plate 17 is arranged between the third threaded rod 15 and the blade 16, and the guide plate 17 is rotatably connected to the bottom end of the third threaded rod 15, and the lower end surface of the guide plate 17 is fixedly arranged with the blade 16, and the front and rear side surfaces of the guide plate 17 are in sliding contact with the outer surface of the bracket 14; when the third threaded rod 15 is rotated, the third threaded rod 15 moves downward relative to the bracket 14 and drives the guide plate 17 to move downward, and the front and rear side surfaces of the guide plate 17 cooperate with the outer surface of the bracket 14 to limit the rotation of the guide plate 17, and the downward movement of the guide plate 17 drives the blade 16 to move downward, so that the chip 7 can be disassembled and inspected conveniently.

[0034] During specific use, due to the different specifications and models of the chip 7, sometimes the cutting edge of the blade 16 cannot be aligned with the joint between the Lid9 of the chip 7 and the substrate 10. In order to solve this problem, in this embodiment, the bracket 14 includes two vertical plates 18 fixed to the upper end surface of the base 2, and a top plate 19 arranged between the two vertical plates 18. The third threaded rod 15 passes through the top plate 19 and is threadedly connected to the top plate 19. The front and rear side surfaces of the guide plate 17 are in sliding contact with the outer surfaces of the corresponding vertical plates 18, and the top plate 19 is slidably arranged between the two vertical plates 18. During use, when the cutting edge of the blade 16 is misaligned with the joint between the Lid9 of the chip 7 and the substrate 10, the top plate 19 is moved so that the top plate 19 drives the third threaded rod 15 and the blade 16 to move left and right, so that the cutting edge of the blade 16 is aligned with the joint between the Lid9 of the chip 7 and the substrate 10.

[0035] In order to increase the stability of the top plate 19 sliding left and right between the two vertical plates 18, in this embodiment, a group of parallel limit strips 20 are provided along the left and right directions on the adjacent side surfaces of the two vertical plates 18, and the front end and the rear end of the top plate 19 are both located between the corresponding group of limit strips 20; when the top plate 19 moves left and right, the front end and the rear end of the top plate 19 slide in the corresponding group of limit strips 20.

[0036] In order to achieve the purpose of fixing the top plate 19 in any position when it slides left and right, in the present embodiment, a through slot 21 is opened in the left-right direction at the position where the vertical plate 18 and the top plate 19 contact each other, and a locking screw 22 passes through the through slot 21 and is threadedly connected to the top plate 19; the relative position of the top plate 19 and the vertical plate 18 can be fixed by the locking screw 22, and when the top plate 19 needs to slide left and right to adjust its position, the locking screw 22 is first screwed so that the nut of the locking screw 22 is away from the vertical plate 18, and then the position of the top plate 19 is moved; when the position of the top plate 19 and the vertical plate 18 needs to be fixed, the locking screw 22 is screwed so that the nut is pressed against the vertical plate 18 to fix the relative position of the top plate 19 and the vertical plate 18.

[0037] The working principle of the utility model is as follows: when the chip 7 needs to be disassembled and inspected to check the glue line, the chip 7 is placed in the accommodating space 6. If the length of the accommodating space 6 in the left-right direction is greater than the chip 7, the position of the rectangular block 5 needs to be adjusted. By rotating the second threaded rod 12, the second threaded rod 12 drives the rectangular block 5 to move to the right, so that the length of the accommodating space 6 in the left-right direction becomes smaller, until it is just consistent with the thickness of the chip 7, or slightly smaller than the thickness of the chip 7. Then, the first threaded rod 8 is rotated so that the first threaded rod 8 is pressed against the chip 7 through the pressing block 11, and then the third threaded rod 15 is rotated to drive the guide plate 17 and the blade 16 to move downward, so that The blade 16 is in contact with the joint of Lid9 of chip 7 and substrate 10. If the blade 16 is misaligned with the joint of Lid9 of chip 7 and substrate 10, the left and right position of the blade 16 can be adjusted by moving the top plate 19 so that the cutting edge of the blade 16 is aligned with the joint of Lid9 of chip 7 and substrate 10, and then the third threaded rod 15 is continued to be rotated so that the third threaded rod 15 applies pressure to the joint of Lid9 of chip 7 and substrate 10 through the blade 16, so that Lid9 of chip 7 is peeled off from substrate 10, and the Tim glue on Lid9 of chip 7 and substrate 10 can be observed and detected.

Claims

1. A chip disassembly and inspection device, characterized in that: The invention comprises a bottom plate (1), wherein the upper end surface of the bottom plate (1) is provided with a base (2) and a right side plate (3), the upper end surface of the base (2) is provided with a receiving groove (4), a rectangular block (5) is provided in the receiving groove (4), the right side surface of the rectangular block (5) and the receiving groove (4) together form a receiving space (6) for placing a chip (7), the inner thread of the right side plate (3) is connected with a first threaded rod (8), when the left end of the first threaded rod (8) contacts the base (2), a part of the left end surface of the first threaded rod (8) contacts the chip (7); the upper end surface of the base (2) is provided with a bracket (14), a third threaded rod (15) is provided in the bracket (14) along the up and down direction, the third threaded rod (15) is threadedly connected with the bracket (14), and the bottom end of the third threaded rod (15) is rotatably connected with a blade (16).

2. The chip disassembly and inspection device according to claim 1, characterized in that: The accommodating groove (4) is a V-shaped groove, and the two side surfaces of the V-shaped groove and the upper end surface of the bottom plate (1) both form an angle of 45 degrees.

3. The chip disassembly and inspection device according to claim 2, characterized in that: The rectangular block (5) is slidably arranged in the V-shaped groove of the base (2) to the left and right, and a left side plate (23) is also arranged on the upper end surface of the bottom plate (1); the left side plate (23) is internally threadedly connected to a second threaded rod (12), and the right end of the second threaded rod (12) is rotatably connected to the rectangular block (5).

4. The chip disassembly and inspection device according to claim 3, characterized in that: A guide plate (17) is arranged between the third threaded rod (15) and the blade (16), the guide plate (17) is rotatably connected to the bottom end of the third threaded rod (15), the lower end surface of the guide plate (17) is fixedly arranged on the blade (16), and the front and rear side surfaces of the guide plate (17) are in sliding contact with the outer surface of the bracket (14).

5. The chip disassembly and inspection device according to claim 4, characterized in that: The bracket (14) comprises two vertical plates (18) fixedly arranged on the upper end surface of the base (2), and a top plate (19) arranged between the two vertical plates (18); the third threaded rod (15) passes through the top plate (19) and is threadedly connected to the top plate (19); the front and rear side surfaces of the guide plate (17) are in sliding contact with the outer surface of the corresponding vertical plate (18); and the top plate (19) is slidably arranged between the two vertical plates (18).

6. The chip disassembly and inspection device according to claim 5, characterized in that: A through slot (21) is provided in the left-right direction at the position where the vertical plate (18) contacts the top plate (19), and a locking screw (22) passes through the through slot (21) and is threadedly connected to the top plate (19).

7. The chip disassembly and inspection device according to claim 1, characterized in that: The left end of the first threaded rod (8) is rotatably connected to a pressing block (11), and the first threaded rod (8) contacts the chip (7) via the pressing block (11).

8. The chip disassembly and inspection device according to claim 2, characterized in that: The two adjacent sides of the rectangular block (5) in contact with the V-shaped groove are both provided with slide rails, and the positions of the two sides of the V-shaped groove corresponding to the slide rails are both provided with slide grooves (13) adapted to the slide rails. The rectangular block (5) is connected to the base (2) by sliding left and right in the V-shaped groove via the slide rails and the slide grooves (13).

9. The chip disassembly and inspection device according to claim 5, characterized in that: A group of parallel limiting strips (20) are arranged on the adjacent side surfaces of the two vertical plates (18) along the left-right direction, and the front end and the rear end of the top plate (19) are located between the corresponding group of limiting strips (20).

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