Cutting fluid nozzle structure and cutting device

Abstract

The utility model discloses a cutting fluid nozzle structure and a cutting device, and the cutting fluid nozzle structure comprises a nozzle device which is provided with a cutting fluid nozzle used for spraying cutting fluid to a wafer cutting part and a cutting tool of the cutting device; the nozzle device is mounted on the adjusting device, and the adjusting device is used for adjusting the position of the nozzle device; and the liquid supply device is communicated with the nozzle device so as to convey cutting liquid to the nozzle device. According to the cutting fluid nozzle structure provided by the utility model, the fluid supply device supplies the cutting fluid to the nozzle device and sprays the cutting fluid to the cutting tool and the wafer cutting part, and in the cutting process, when the position of the cutting fluid nozzle deviates or inclines, or wafers with different heights are cut, the cutting fluid nozzle can be used for cutting the wafers with different heights. The cutting fluid spraying position of the cutting fluid nozzle is adjusted through the adjusting device, it is guaranteed that the cutting fluid has good cooling, lubricating and cutting powder timely cleaning performance, and the washing effect of the cutting fluid is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of automation equipment, in particular to a cutting fluid nozzle structure and a cutting device. Background Art

[0002] In the manufacturing process of semiconductor devices, a predetermined separation line is drawn on the surface of the wafer, and then the wafer is cut along the predetermined separation line by a cutting device to separate the semiconductor chips. During the wafer cutting process, the nozzle of the cutting device sprays cutting fluid onto the cutting tool and the cutting part of the wafer, thereby cooling and lubricating the cutting tool and the processing part, and timely cleaning the cutting powder.

[0003] However, during the wafer cutting process, the vibration of the cutting device may cause the nozzle to shift or tilt, or when cutting wafers of different heights, the nozzle positions may not match, both of which will lead to poor flushing effect of the cutting fluid.

[0004] Therefore, how to improve the flushing effect of cutting fluid is a technical problem that technicians in this field currently need to solve. Utility Model Content

[0005] In view of this, the purpose of the utility model is to provide a cutting fluid nozzle structure to improve the flushing effect of the cutting fluid;

[0006] Another object of the utility model is to provide a cutting device having the cutting fluid nozzle structure.

[0007] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0008] A cutting fluid nozzle structure, comprising:

[0009] A nozzle device is provided with a cutting fluid nozzle for spraying cutting fluid toward a wafer cutting portion and a cutting tool of the cutting device;

[0010] an adjusting device, the nozzle device is mounted on the adjusting device, and the adjusting device is used to adjust the position of the nozzle device;

[0011] A liquid supply device is connected to the nozzle device to deliver cutting fluid to the nozzle device.

[0012] Optionally, in the above-mentioned cutting fluid nozzle structure, the adjustment device includes an adjustment portion and a support portion;

[0013] The support part is fixed on the cutting device, and the support part is provided with an adjustment part installation groove;

[0014] The adjustment part includes a first mounting block and a second mounting block, the first mounting block is slidably mounted in the adjustment part mounting groove, and the second mounting block is exposed outside the adjustment part mounting groove, and the nozzle device and the liquid supply device are connected through the second mounting block.

[0015] Optionally, in the above-mentioned cutting fluid nozzle structure, the adjustment device further comprises an adjustment rod penetrating the first mounting block and mounted in the mounting groove of the adjustment portion;

[0016] The first end of the adjustment rod is rotatably connected to the first end of the adjustment portion mounting slot, and the second end of the adjustment rod is rotatably connected to the second end of the adjustment portion mounting slot;

[0017] The adjusting rod and the first mounting block are connected to each other via threads.

[0018] Optionally, in the above-mentioned cutting fluid nozzle structure, the first end of the adjustment rod passes through the first end of the adjustment part mounting groove to form a rotating end for rotating the adjustment rod, and the adjustment rod is provided with a blocking block that fits with the inner wall of the first end of the adjustment part mounting groove.

[0019] Optionally, in the above-mentioned cutting fluid nozzle structure, at least one end of the adjustment portion mounting groove passes through the support portion, and the passing side of the adjustment portion mounting groove is blocked by a limit plate, and the limit plate is detachably connected to the support portion.

[0020] Optionally, in the above-mentioned cutting fluid nozzle structure, the adjustment device further includes a locking portion, and the locking portion is used to lock the adjustment portion and the supporting portion.

[0021] Optionally, in the above-mentioned cutting fluid nozzle structure, the locking part includes a locking screw, the supporting part is provided with a waist-shaped hole connected to the mounting groove of the adjusting part, and the waist-shaped hole extends along the moving direction of the adjusting part, the first end of the locking screw passes through the waist-shaped hole and is threadedly connected to the adjusting part, and the second end of the locking screw is pressed against the supporting part.

[0022] Optionally, in the above-mentioned cutting fluid nozzle structure, the nozzle device includes a liquid supply pipe, a first end of the liquid supply pipe is provided with a plurality of cutting fluid nozzles arranged at intervals along the tangent direction of the cutting tool cutting the wafer, a second end of the liquid supply pipe is connected to the adjustment device, and the liquid supply pipe is arranged on both sides of the cutting tool.

[0023] Optionally, in the above-mentioned cutting fluid nozzle structure, a protective device is also provided, wherein the protective device is used to block the cutting fluid and cutting powder splashed during the cutting process, and the protective device is installed on the adjusting device.

[0024] When the cutting fluid nozzle structure provided by the utility model is used, the cutting fluid is supplied to the cutting fluid nozzle in the nozzle device by the liquid supply device, and the cutting fluid is sprayed onto the cutting tool and the wafer cutting part. During the cutting process, when the position of the cutting fluid nozzle is offset or tilted, or when wafers of different heights are cut, the nozzle device is timely adjusted by the adjustment device, and then the position of the cutting fluid nozzle spraying onto the cutting tool and the wafer cutting part is adjusted, so that during the entire cutting process, the cutting fluid is guaranteed to have good cooling, lubrication and cutting powder cleaning performance on the cutting tool and the wafer cutting part, thereby improving the flushing effect of the cutting fluid.

[0025] A cutting device comprises a cutting fluid nozzle structure, wherein the cutting fluid nozzle structure is the cutting fluid nozzle structure as described in any one of the above items.

[0026] The cutting device provided by the utility model has all the technical effects of the above-mentioned cutting fluid nozzle structure, and will not be described in detail herein. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0028] Figure 1 It is a structural schematic diagram of a cutting fluid nozzle structure disclosed in an embodiment of the utility model;

[0029] Figure 2 It is a structural schematic diagram of the support part disclosed in the embodiment of the utility model;

[0030] Figure 3 It is a structural schematic diagram of the adjustment part disclosed in the embodiment of the utility model;

[0031] Figure 4 It is a schematic diagram of the structure of the limiting plate disclosed in the embodiment of the utility model.

[0032] Wherein, 100 is a nozzle device, 110 is a cutting fluid nozzle, and 120 is a fluid supply pipe;

[0033] 200 is an adjustment device, 210 is an adjustment part, 211 is a first mounting block, 212 is a second mounting block, 213 is a delivery liquid channel, 214 is an adjustment rod mounting hole, 215 is a locking screw mounting hole, 216 is a protective device fixing hole, 220 is a support part, 221 is an adjustment part mounting groove, 230 is a limit plate, 223 is a waist-shaped hole, 231 is a blocking block mounting groove, 232 is a mounting hole, and 240 is an adjustment rod;

[0034] 300 is a liquid supply device;

[0035] 400 is a protective device. DETAILED DESCRIPTION

[0036] The core of the utility model is to provide a cutting fluid nozzle structure to improve the flushing effect of the cutting fluid;

[0037] Another core of the utility model is to provide a cutting device with the cutting fluid nozzle structure.

[0038] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0039] like Figure 1 As shown, the embodiment of the utility model discloses a cutting fluid nozzle structure, including a nozzle device 100, an adjustment device 200 and a liquid supply device 300. Among them, the nozzle device 100 is provided with a cutting fluid nozzle 110 for spraying cutting fluid to the cutting tool and the wafer cutting part, so as to achieve the treatment of the cutting tool and the wafer cutting part, and the treatment at least includes cooling, lubricating and flushing cutting powder. The liquid supply device 300 is connected with the nozzle device 100, so that the liquid supply device 300 can transport cutting fluid to the nozzle device 100. The nozzle device 100 and the liquid supply device 300 are both connected to the adjustment device 200, so that during the cutting process, the position of the nozzle device 100 can be adjusted in time through the adjustment device 200 to ensure that the cutting fluid sprayed by the cutting fluid nozzle 110 has a good flushing effect on the cutting tool and the wafer cutting part.

[0040] like Figure 2 and Figure 3As shown, the adjustment device 200 includes an adjustment portion 210 and a support portion 220. The support portion 220 is fixedly mounted on the cutting device, and an adjustment portion mounting groove 221 is provided on the support portion 220. The adjustment portion 210 includes a first mounting block 211 and a second mounting block 212, wherein the adjustment portion 210 is mounted in the adjustment portion mounting groove 221 of the support portion 220 through the first mounting block 211, and when the first mounting block 211 is installed in the adjustment portion mounting groove 221, the second mounting block 212 is exposed to the outside of the adjustment portion mounting groove 221, and a delivery liquid channel 213 for delivering cutting fluid is also provided on the second mounting block 212, and the nozzle device 100 and the liquid supply device 300 are respectively connected to the two ends of the delivery liquid channel 213, so that the nozzle device 100 and the liquid supply device 300 are connected through the second mounting block 212. At the same time, the first mounting block 211 can move along the extension direction of the adjustment portion mounting groove 221, so that the adjustment portion 210 can move relative to the support portion 220, thereby enabling the adjustment device 200 to adjust the position of the nozzle device 100 relative to the cutting device.

[0041] In a specific embodiment, the adjustment device 200 further includes an adjustment rod 240, which is installed in the adjustment portion installation groove 221 of the support portion 220, and penetrates the first installation block 211 of the adjustment portion 210 through the adjustment rod installation hole 214 provided in the adjustment portion 210, and the adjustment portion installation groove 221 of the support portion 220 is provided with installation holes at both ends, and the first end and the second end of the adjustment rod 240 are respectively installed in the installation holes, and the first end and the second end of the adjustment rod 240 are clearance-matched with the installation holes, so that the adjustment rod 240 can be rotated in the adjustment portion installation groove 221. The surface of the adjustment rod 240 and the inner wall of the adjustment rod installation hole 214 are provided with external threads and internal threads that match each other, so that the adjustment rod 240 and the first installation block 211 are connected to each other through threads, so that when the adjustment rod 240 is rotated, the first installation block 211 can move along the extension direction of the adjustment rod 240, and then the adjustment portion 210 can be pushed to move in the extension direction of the adjustment portion installation groove 221 through the adjustment rod 240.

[0042] In order to facilitate the rotation of the adjustment rod 240, the first end of the adjustment rod 240 passes through the first end of the adjustment portion mounting groove 221, so that the first end of the adjustment rod 240 can be outside the adjustment portion mounting groove 221, forming a rotating end for rotating the adjustment rod 240, which is convenient for the staff to rotate the adjustment rod 240 through the rotating end. In order to prevent the adjustment rod 240 from falling out of the adjustment portion mounting groove 221, a blocking block is provided on the adjustment rod 240. The blocking block is located inside the adjustment portion mounting groove 221 and fits with the inner wall of the first end of the adjustment portion mounting groove 221 to prevent the adjustment rod 240 from detaching from the adjustment portion mounting groove 221 from the second end to the first end. In a specific embodiment, the rotating end of the adjustment rod 240 is located below the cutting device and is located at the same end as the nozzle device 100.

[0043] like Figure 2 and Figure 4 As shown, at least one end of the adjustment portion installation groove 221 penetrates the support portion 220, and a limit plate 230 is installed on the penetration side of the adjustment portion installation groove 221 to block the penetration opening, and the limit plate 230 and the support portion 220 are detachably connected. Therefore, when the adjustment portion 210 and the adjustment rod 240 are installed in the adjustment portion installation groove 221, the limit plate 230 is removed from the support portion 220 and enters the penetration groove through the penetration opening of the support portion 220, which facilitates the assembly of the adjustment portion 210 and the adjustment rod 240 with the adjustment portion installation groove 221. In a specific embodiment, the detachable connection between the limit plate 230 and the support portion 220 is achieved by the cooperation of the installation hole 232 of the limit plate 230 and the bolt. In addition, the limiting plate 230 also defines a blocking block mounting groove 231 for mounting the blocking block on the first end of the adjusting rod 240, so that the blocking block can be embedded in the blocking block mounting groove 231, which not only improves the limiting effect of the limiting plate 230 on the adjusting rod 240, but also avoids the interference of the blocking block with the up and down movement of the first mounting block 211 of the adjusting part 210.

[0044] Furthermore, after the relative position adjustment of the adjustment part 210 to the support part 220 is completed, during the cutting process, in order to prevent the vibration of the cutting device from causing the adjustment part 210 to move on the support part 220, the adjustment device 200 is also provided with a locking part, which locks the adjustment part 210 and the support part 220, thereby limiting the movement of the adjustment part 210 relative to the support part 220.

[0045] In a specific embodiment, the locking part includes a locking screw, and a waist-shaped hole 223 communicating with the adjusting part mounting groove 221 is provided on the supporting part 220, so that the first end of the locking screw extends into the adjusting part mounting groove 221 through the waist-shaped hole 223, and is installed in the locking screw mounting hole 215 provided on the first mounting block 211, so as to realize the connection between the locking screw and the adjusting part 210. In addition, the waist-shaped hole 223 extends along the moving direction of the adjusting part 210, and the first end of the locking screw is provided with an external thread, and the locking screw mounting hole 215 is provided with an internal thread matching the external thread of the first end of the locking screw, so as to realize the mutual connection in a threaded manner. Therefore, after the relative position adjustment of the adjustment part 210 and the support part 220 is completed, the locking screw is rotated so that the second end of the locking screw abuts against the support part 220, so that the adjustment part 210 and the support part 220 are pressed and locked against each other through the locking screw, thereby achieving the locking of the adjustment part 210 and the support part 220.

[0046] like Figure 1 As shown, the nozzle device 100 further includes a liquid supply pipe 120, and the cutting fluid nozzle 110 is installed at the first end of the liquid supply pipe 120, and a plurality of cutting fluid nozzles 110 are provided, and each cutting fluid nozzle 110 is evenly arranged along the tangent direction of the cutting tool cutting the wafer, and the second end of the liquid supply pipe 120 is connected to the adjustment device 200 and communicated with the liquid supply device 300. At the same time, the liquid supply pipe 120 is arranged on both sides of the cutting tool, thereby further enhancing the ability of the cutting fluid nozzle structure provided in this embodiment to spray cutting fluid, and improving the ability to cool, lubricate and clean cutting powder in time for the cutting tool and the wafer cutting part.

[0047] Of course, during the cutting process, in order to prevent the splashing cutting fluid and cutting powder from affecting the workers, the cutting fluid nozzle structure provided in this embodiment is also provided with a protective device 400 for blocking the splashing cutting fluid and cutting powder. The protective device 400 is installed on the adjustment device 200 by means of bolts and the protective device fixing hole 216 opened in the adjustment part 210, so that the protective device 400 can move with the position adjustment of the nozzle device 100, thereby having a good blocking effect on the splashing cutting fluid and cutting powder, and improving the safety of the workers during work.

[0048] The utility model also discloses a cutting device, including a cutting fluid nozzle structure. Since the cutting device has the cutting fluid nozzle structure, it has all the technical effects of the cutting device, which will not be described in detail herein.

[0049] It should be noted that the various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0050] As shown in this application and claims, unless the context clearly indicates an exception, the words "a", "an", "a kind" and / or "the" do not refer to the singular, but also include the plural. Generally speaking, the terms "include" and "comprise" only indicate the inclusion of clearly identified steps and elements, and these steps and elements do not constitute an exclusive list. The method or device may also include other steps or elements. The elements defined by the sentence "includes a..." do not exclude the existence of other identical elements in the process, method, commodity or device that includes the elements.

[0051] In the description of the embodiments of the present application, unless otherwise specified, " / " means or, for example, A / B can mean A or B; "and / or" in this article is only a description of the association relationship of associated objects, indicating that there can be three relationships, for example, A and / or B can mean: A exists alone, A and B exist at the same time, and B exists alone. In addition, in the description of the embodiments of the present application, "multiple" means two or more than two.

[0052] The terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features.

[0053] This article uses specific examples to illustrate the principles and implementation methods of the utility model. The above examples are only used to help understand the core idea of ​​the utility model. It should be pointed out that for ordinary technicians in this technical field, without departing from the principle of the utility model, the utility model can also be improved and modified, and these improvements and modifications also fall within the scope of protection of the claims of the utility model.

Claims

1. A cutting fluid nozzle structure, characterized in that: include: A nozzle device (100) is provided with a cutting fluid nozzle (110) for spraying cutting fluid onto a wafer cutting portion and a cutting tool of the cutting device; an adjusting device (200), the nozzle device (100) being mounted on the adjusting device (200), and the adjusting device (200) being used to adjust the position of the nozzle device (100); A liquid supply device (300), the liquid supply device (300) being in communication with the nozzle device (100) so as to deliver cutting fluid to the nozzle device (100).

2. The cutting fluid nozzle structure according to claim 1, characterized in that: The adjustment device (200) comprises an adjustment portion (210) and a support portion (220); The support part (220) is fixed on the cutting device, and the support part (220) is provided with an adjustment part installation groove (221); The adjustment portion (210) comprises a first mounting block (211) and a second mounting block (212); the first mounting block (211) is slidably mounted in the adjustment portion mounting groove (221), and the second mounting block (212) is exposed outside the adjustment portion mounting groove (221); the nozzle device (100) and the liquid supply device (300) are connected via the second mounting block (212).

3. The cutting fluid nozzle structure according to claim 2, characterized in that: The adjustment device (200) further comprises an adjustment rod (240) penetrating the first installation block (211) and installed in the adjustment portion installation groove (221); The first end of the adjustment rod (240) is rotatably connected to the first end of the adjustment portion mounting groove (221), and the second end of the adjustment rod (240) is rotatably connected to the second end of the adjustment portion mounting groove (221); The adjustment rod (240) and the first mounting block (211) are connected to each other via threads.

4. The cutting fluid nozzle structure according to claim 3, characterized in that: The first end of the adjustment rod (240) passes through the first end of the adjustment portion installation groove (221) to form a rotating end for rotating the adjustment rod (240), and the adjustment rod (240) is provided with a blocking block that fits with the inner wall of the first end of the adjustment portion installation groove (221).

5. The cutting fluid nozzle structure according to claim 2, characterized in that: At least one end of the adjustment portion installation groove (221) passes through the support portion (220), and the passing side of the adjustment portion installation groove (221) is blocked by a limiting plate (230), and the limiting plate (230) and the support portion (220) are detachably connected.

6. The cutting fluid nozzle structure according to claim 2, characterized in that: The adjustment device (200) further comprises a locking portion, wherein the locking portion is used to lock the adjustment portion (210) and the support portion (220).

7. The cutting fluid nozzle structure according to claim 6, characterized in that: The locking portion comprises a locking screw, the supporting portion (220) is provided with a waist-shaped hole (223) connected to the adjusting portion mounting groove (221), and the waist-shaped hole (223) extends along the moving direction of the adjusting portion (210), the first end of the locking screw passes through the waist-shaped hole (223) and is threadedly connected to the adjusting portion (210), and the second end of the locking screw is pressed onto the supporting portion (220).

8. The cutting fluid nozzle structure according to claim 1, characterized in that: The nozzle device (100) comprises a liquid supply pipe (120), a first end of which is provided with a plurality of cutting fluid nozzles (110) arranged at intervals along a tangent direction of the cutting tool cutting the wafer, a second end of the liquid supply pipe (120) is connected to the adjustment device (200), and the liquid supply pipe (120) is arranged on both sides of the cutting tool.

9. The cutting fluid nozzle structure according to claim 1, characterized in that: A protective device (400) is also provided, the protective device (400) being used to block the cutting fluid and cutting powder splashed during the cutting process, and the protective device (400) is installed on the adjusting device (200).

10. A cutting device, characterized in that: It comprises a cutting fluid nozzle structure, and the cutting fluid nozzle structure is the cutting fluid nozzle structure as described in any one of claims 1-9.

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