Molybdenum boat with interception function

Abstract

The utility model belongs to the technical field of chemical process film deposition equipment, and particularly relates to a molybdenum boat with an interception function, which comprises an equipment main body, circulation ports and support legs, the circulation ports are arranged at the bottoms of the outer end faces of the front and rear ends of the equipment main body, and the support legs are arranged on the outer end faces of four corners of the bottom of the equipment main body. By arranging the intercepting frame, the intercepting row pieces and the intercepting teeth, chemical materials are placed in the material containing groove, then the intercepting frame is connected with the equipment body through the clamping blocks, the equipment serves as a carrier for material sintering according to a conventional method, and the equipment is placed in high-temperature heating equipment to be heated. Chemical materials are evaporated at high temperature, part of substances vertically and upwards escape through floating, and when the escaping materials make contact with the intercepting teeth on the inner sides of the intercepting row pieces, the escaping substances are blocked by the inner ends of the blocked intercepting teeth and finally clamped into included angles in the intercepting teeth, so that the intercepting row pieces are blocked. And the equipment can have an interception effect during chemical material processing.

Description

Technical Field

[0001] The utility model relates to the technical field of chemical process thin film deposition equipment, in particular to a molybdenum boat with an interception function. Background Art

[0002] Molybdenum boat, also known as evaporation molybdenum boat or coating molybdenum boat, is a tool used in thin film deposition technology in material science and chemical processes, usually made of molybdenum sheets or molybdenum-based alloys by welding or high-temperature stamping.

[0003] The main function of the molybdenum boat is to serve as an important sintering carrier for the preparation of molybdenum powder and other metal powders. During the evaporation process, the molybdenum boat is heated to a high temperature, causing the material inside to evaporate, and then the evaporated material is deposited on the substrate. Molybdenum boats are widely used as material containers in high-temperature furnaces such as vacuum furnaces and glass melting furnaces. In addition, molybdenum boats also have excellent dimensional stability, corrosion resistance and creep resistance, as well as long service life and the advantages of not easy deformation.

[0004] When ordinary molybdenum boats are used as sintering carriers, the materials placed inside will directly escape upward after high-temperature evaporation. If the molybdenum boat is fully sealed, it will affect the internal heat conduction and the introduction of air. Some molybdenum boats now use barrier plug-ins for interception. Since the plug-ins used for interception effect are in contact with the escaping materials, they need to be cleaned for a long time before being used again. For this reason, we propose a molybdenum boat with interception function.

[0005] The prior art has the following problems:

[0006] 1. The current molybdenum boat with interception function often uses a large area of ​​covering for interception. This interception method will affect the internal heat conduction and air contact area of ​​the molybdenum boat;

[0007] 2. For the current molybdenum boat with interception function, the interception mechanism is in contact with the escaping material and the interception mechanism is integrated, so it takes a long time to clean before it can be used again. Utility Model Content

[0008] In view of the deficiencies in the prior art, the utility model provides a molybdenum boat with an interception function, which solves the problems that the current interception method is not good enough and requires a long time to be cleaned before reuse.

[0009] To achieve the above purpose, the utility model provides the following technical solutions: a molybdenum boat with an interception function, comprising a device body, a flow port, and a support foot, wherein the flow port is opened at the bottom of the outer end surfaces at the front and rear ends of the device body, and the support foot is arranged at the outer end surfaces at the four corners of the bottom of the device body;

[0010] An interception frame is also provided inside the upper end of the device body;

[0011] The interception frame also includes interception plates, interception teeth, and clamping blocks. The interception plates are fixedly connected to the inner ends of the interception frame by welding, and the interception teeth are fixedly connected to the inner wall end faces of the interception plates by welding. Two groups of clamping blocks are provided, and are formed together with the main body of the interception frame by integrated die-casting.

[0012] As a preferred technical solution of the present utility model, the device body also includes a card slot and a material placement slot. The card slot is provided in two groups and is respectively opened on the inner walls at both ends of the device body and distributed in symmetrical positions. The material placement slot is opened in the middle of the device body.

[0013] As a preferred technical solution of the utility model, the intercepting plates and the intercepting teeth are equidistantly distributed between every two groups, and the intercepting teeth are symmetrically distributed at both ends of the inner wall of the intercepting plates.

[0014] As a preferred technical solution of the utility model, the card slot and the card block have the same size and corresponding positions, and are movably connected through a sliding connection.

[0015] As a preferred technical solution of the utility model, the intercepting teeth are all distributed with their tips facing obliquely downward, and the angles between the roots of the intercepting teeth and the intercepting slices are all fixed at 45 degrees.

[0016] Compared with the prior art, the utility model provides a molybdenum boat with an interception function, which has the following beneficial effects:

[0017] 1. The molybdenum boat with interception function is provided with an interception frame, an interception row, and an interception tooth. The chemical material is placed in a material placement slot, and then the interception frame is connected to the equipment body through a card block. The equipment is then used as a carrier for material sintering according to a conventional method. The equipment is placed in a high-temperature heating device for heating. After the chemical material evaporates at high temperature, part of the material floats vertically upward. When the escaping material contacts the interception tooth on the inner side of the interception row, the escaping material is blocked by the sealed inner end of the interception tooth and finally stuck in the angle inside the interception tooth. Through the above arrangement, the equipment can have an interception effect when processing chemical materials.

[0018] 2. The molybdenum boat with intercepting function is provided with card slots at the inner ends of both sides of the equipment main body, and card blocks of the same size are provided at both ends of the intercepting frame, so that the intercepting frame can be quickly connected to or removed from the equipment main body. Through the above arrangement, the intercepting frame in the equipment can be quickly disassembled and used. After a group of intercepting frames are used, if the surface is dirty and cannot be used continuously, they can be directly replaced, and the new intercepting frame can be installed and used. Since the connection structure is very simple, the replacement process is very convenient, so that the equipment can be quickly reused. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0020] Figure 2 This is a schematic diagram of the detailed structure of the interception and discharging device of the utility model;

[0021] Figure 3 This is a schematic diagram of the split structure of the utility model;

[0022] Figure 4 It is a schematic diagram of the plane structure of the intercepting tooth of the utility model.

[0023] In the figure: 1. Equipment body; 101. Card slot; 102. Material placement slot; 2. Flow port; 3. Support foot; 4. Intercepting frame; 401. Intercepting row; 402. Intercepting teeth; 403. Card block. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0025] See also Figure 1-4 In this embodiment: a molybdenum boat with an interception function includes an equipment body 1, a flow port 2, and a support leg 3. The flow port 2 is opened at the bottom of the outer end surfaces at both ends of the equipment body 1. The flow port 2 is used to quickly pour out the chemical materials placed inside. The support leg 3 is set at the outer end surfaces at the four corners of the bottom of the equipment body 1. The support leg 3 is used to support the equipment body 1;

[0026] An interception frame 4 is also provided inside the upper end of the device body 1, and the interception frame 4 can partially intercept the escaping gas;

[0027] The interception frame 4 also includes an interception plate 401, an interception tooth 402, and a clamping block 403. The interception plate 401 is fixedly connected to the inner end of the interception frame 4 by welding, and the interception tooth 402 is fixedly connected to the inner wall end face of the interception plate 401 by welding. Two groups of clamping blocks 403 are provided, and are made together with the main part of the interception frame 4 by integrated die-casting. By providing an integrated die-casting main body of the interception frame 4, the overall integrity of the structure can be high.

[0028] In this embodiment, the device body 1 also includes a card slot 101 and a material placement slot 102. The card slot 101 is provided with two groups, and is respectively provided at the inner walls of the two ends of the device body 1 and is symmetrically distributed. The material placement slot 102 is provided in the middle of the device body 1. By setting the card slots 101 distributed in symmetrical positions, the card block 403 can quickly establish a connection; the interception row pieces 401 and the interception teeth 402 are equidistantly distributed between each two groups, and the interception teeth 402 are symmetrically distributed at the two ends of the inner wall of the interception row piece 401. By setting the interception row pieces 401 distributed in equidistant positions, the card block 403 can quickly establish a connection. 01 can make the structure maintain uniform interception; the card slot 101 and the card block 403 have the same size and corresponding position, and there is a movable connection relationship through the sliding connection. By setting the card slot 101 and the card block 403 with the same size and corresponding position, the card slot 101 and the card block 403 can quickly establish a stable connection relationship with each other; the interception teeth 402 are all distributed with the tip facing obliquely downward, and the angle between the root of the interception tooth 402 and the interception row plate 401 is fixed at 45 degrees. By setting the interception teeth 402 with the tip facing downward, the escaping gas can be better intercepted and collected.

[0029] The working principle and use process of the utility model are as follows: the operator establishes a connection between the interception frame 4 and the equipment body 1 through the clamping block 403, and then uses the equipment as a carrier for material sintering according to the conventional method, and puts the equipment into the high-temperature heating equipment for heating. After the chemical material evaporates at high temperature, part of the substance escapes vertically upward by floating. When the escaping material contacts the interception tooth 402 on the inner side of the interception row sheet 401, the escaping material is blocked by the inner end of the sealed interception tooth 402, and finally is stuck in the angle inside the interception tooth 402; after a group of interception frames 4 are used, if the surface is dirty and cannot be used continuously, it can be directly replaced, and the new interception frame 4 can be installed and used. Since the connection structure is very simple, the replacement process is very convenient.

[0030] Finally, it should be noted that the above description is only a preferred embodiment of the utility model and is not intended to limit the utility model. Although the utility model is described in detail with reference to the above embodiments, those skilled in the art can still modify the technical solutions recorded in the above embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A molybdenum boat with an interception function, comprising a device body (1), a flow port (2), and a support foot (3), wherein the flow port (2) is provided at the bottom of the outer end surfaces at the front and rear ends of the device body (1), and the support foot (3) is provided at the outer end surfaces at the four corners of the bottom of the device body (1); Features: An interception frame (4) is also provided inside the upper end of the device body (1); The interception frame (4) further comprises an interception row of plates (401), an interception tooth (402), and a clamping block (403); the interception row of plates (401) are fixedly connected to the inner end of the interception frame (4) by welding; the interception tooth (402) is fixedly connected to the inner wall end surface of the interception row of plates (401) by welding; and the clamping block (403) is provided in two groups and is manufactured together with the main body of the interception frame (4) by integrated die-casting.

2. The molybdenum boat with interception function according to claim 1, characterized in that: The device body (1) further comprises a card slot (101) and a material placement slot (102); the card slot (101) is provided with two groups and is respectively provided on the inner walls at both ends of the device body (1) and is distributed in symmetrical positions; the material placement slot (102) is provided in the middle of the device body (1).

3. The molybdenum boat with interception function according to claim 1, characterized in that: The intercepting plates (401) and the intercepting teeth (402) are equidistantly distributed between each two groups, and the intercepting teeth (402) are symmetrically distributed at two ends of the inner wall of the intercepting plates (401).

4. The molybdenum boat with interception function according to claim 2, characterized in that: The card slot (101) and the card block (403) have the same size and corresponding positions, and are in a movable connection relationship through a sliding connection.

5. The molybdenum boat with interception function according to claim 1, characterized in that: The intercepting teeth (402) are all distributed with their tips pointing obliquely downward, and the angle between the roots of the intercepting teeth (402) and the intercepting row of slices (401) is fixed at 45 degrees.

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