Evaporation coating equipment

Abstract

The utility model discloses evaporation coating equipment, which comprises an evaporation tank, an evaporation electrode, a coating layer and a coating layer, wherein the evaporation tank is internally provided with an evaporation electrode; the protective wall plate is arranged on the side of the evaporation tank, a first cooling channel is formed in the protective wall plate, and a cooling medium circulates in the first cooling channel so as to cool the protective wall plate; one end of the connecting pipe fitting is connected with the transformer, the other end of the connecting pipe fitting penetrates through the protective wall plate to be connected with the evaporation electrode, a second cooling channel used for circulating a cooling medium is arranged in at least part of pipe section of the connecting pipe fitting, and the cooling medium in the second cooling channel is used for cooling the connecting pipe fitting. The problem that the quality of a coated product is low due to the fact that the temperature of a wall plate and a copper bar in evaporation coating equipment in the prior art is too high and the sealing performance of a coating cavity and the electric power of an evaporation electrode are affected is solved.

Description

Technical Field

[0001] The present application relates to the technical field of composite current collector processing, and in particular to an evaporation coating device. Background Art

[0002] With the continuous development of new energy technologies, composite current collectors are becoming popular due to their excellent safety and high energy density. In the manufacturing process of positive and negative composite current collectors, evaporation coating technology is favored due to its high evaporation efficiency and fast production speed.

[0003] However, the existing evaporation winding coating equipment often encounters the following problems during production:

[0004] (1) The stainless steel integrated wall panel on the electrode introduction side (non-motorized side) has high resistivity and generates large heat due to the eddy current effect. The temperature is too high, which accelerates the aging of the wall panel sealing ring. Even after a long coating process, the wall panel temperature is too high and melts, resulting in insufficient sealing performance of the coating chamber, which seriously affects the quality of the coating product.

[0005] (2) When the original electrode copper busbar is plated, the temperature of the bolt connection point rises, which is prone to loosening or deformation, resulting in the deterioration of the copper busbar contact state and increased resistance at the contact point. When a large current of hundreds of amperes passes through the copper busbar, a large amount of heat will be generated at the bolt, instantly melting the bolt, causing the copper busbar to open circuit. The evaporation electrode has no power input, the evaporation temperature gradually decreases, and the evaporation stops. A large amount of residual material remains in the crucible, causing a large number of crucibles to be scrapped after cooling. In addition, due to the lack of evaporation electrode, the single-sided film layer of the coated product is thin and the square resistance is large, so it needs to be reworked or the product is directly scrapped. Utility Model Content

[0006] The main purpose of the present application is to provide an evaporation coating device to solve the problem that the wall panels and copper busbars in the evaporation coating device in the prior art have excessively high temperatures, which affect the sealing of the coating chamber and the power of the evaporation electrode, resulting in low quality of the coated products.

[0007] The present application provides an evaporation coating device, comprising: an evaporation tank, in which an evaporation electrode is arranged; a protective wall plate, which is arranged on the side of the evaporation tank, and in which a first cooling channel is arranged, and the first cooling channel is used for circulating a cooling medium to cool the protective wall plate; a connecting pipe, one end of the connecting pipe is connected to the transformer, and the other end of the connecting pipe passes through the protective wall plate and is connected to the evaporation electrode, and a second cooling channel for circulating a cooling medium is arranged in at least a part of the pipe section of the connecting pipe, and the cooling medium in the second cooling channel is used to cool the connecting pipe.

[0008] The protective wall panel includes: a supporting frame; a protective body, which is arranged on the supporting frame and connected to the supporting frame, and a first cooling channel is arranged in the protective body; a liquid outlet channel and a liquid inlet channel are arranged on the protective body, and both ends of the first cooling channel are respectively connected to the liquid outlet channel and the liquid inlet channel.

[0009] Furthermore, the evaporation coating equipment also includes: an evaporation trough bottom plate and an evaporation trough side plate, the evaporation trough side plate is arranged on the evaporation trough bottom plate and along the circumferential direction of the evaporation trough bottom plate to enclose an evaporation trough between the evaporation trough bottom plate and the evaporation trough side plate; wherein a third cooling channel is arranged in the evaporation trough bottom plate, and a fourth cooling channel is arranged in the evaporation trough side plate, and the third cooling channel and the fourth cooling channel are connected.

[0010] Furthermore, a first through channel and a second through channel are provided on the protective wall panel, a liquid inlet pipe fitting is provided in the first through channel, and a liquid outlet pipe fitting is provided in the second through channel; both ends of the third cooling channel are respectively connected to the liquid inlet pipe fitting and the liquid outlet pipe fitting; or both ends of the fourth cooling channel are respectively connected to the liquid inlet pipe fitting and the liquid outlet pipe fitting.

[0011] Furthermore, a first sealing groove is provided on the side of the protective wall plate away from the evaporation tank, the first sealing groove is provided around the port of the first through channel, a first sealing ring is provided in the first sealing groove, and at least part of the tube body of the liquid inlet pipe fitting is fitted with the first sealing ring; and / or a second sealing groove is provided on the side of the protective wall plate away from the evaporation tank, the second sealing groove is provided around the port of the second through channel, a second sealing ring is provided in the second sealing groove, and at least part of the tube body of the liquid outlet pipe fitting is fitted with the second sealing ring.

[0012] Furthermore, the evaporation coating equipment also includes: a clamping copper plate for clamping the evaporation electrode, and the connecting pipe is electrically connected to the clamping copper plate; wherein a fifth cooling channel is arranged in the clamping copper plate, and the second cooling channel is connected to the fifth cooling channel.

[0013] Furthermore, the evaporation coating equipment also includes: a connecting clamping plate, in which a clamping space is provided, and the end of the connecting pipe fitting away from the transformer is inserted into the clamping space and fits with the connecting clamping plate; a connecting copper busbar, in which both ends of the connecting copper busbar are electrically connected to the connecting clamping plate and the clamping copper plate respectively.

[0014] Furthermore, the fifth cooling channel includes a first cooling section and a second cooling section, and the clamping copper plate includes: an upper clamping plate and a lower clamping plate arranged opposite to each other, and at least a portion of the evaporation electrode is arranged between the upper clamping plate and the lower clamping plate; wherein the first cooling section is arranged in the upper clamping plate, and the second cooling section is arranged in the lower clamping plate, so as to cool the upper clamping plate and the lower clamping plate respectively.

[0015] Furthermore, there are two connecting pipes, and the evaporation coating equipment also includes: a first connecting hose, one end of which is connected to the second cooling channel in a connecting pipe, and the other end is connected to the first port of the first cooling section; a second connecting hose, one end of which is connected to the second cooling channel in another connecting pipe, and the other end is connected to the third port of the second cooling section; a series hose, both ends of which are respectively connected to the second port of the first cooling section and the fourth port of the second cooling section.

[0016] Furthermore, the evaporation electrode includes a positive electrode of the evaporation electrode body and a negative electrode of the evaporation electrode body; the clamping copper plate includes a positive electrode clamping copper plate and a negative electrode clamping copper plate, the positive electrode clamping copper plate clamps the positive electrode of the evaporation electrode body, and the negative electrode clamping copper plate clamps the negative electrode of the evaporation electrode body; a fifth cooling channel is respectively arranged in the positive electrode clamping copper plate and the negative electrode clamping copper plate; the connecting pipe includes a positive electrode connecting pipe and a negative electrode connecting pipe, the two ends of the positive electrode connecting pipe are respectively connected to the transformer and the positive electrode clamping copper plate, and the two ends of the negative electrode connecting pipe are respectively connected to the transformer and the negative electrode clamping copper plate; a positive electrode passing channel and a negative electrode passing channel are arranged on the protective wall plate, the positive electrode connecting pipe is inserted into the positive electrode passing channel, and the negative electrode connecting pipe is inserted into the negative electrode passing channel.

[0017] Compared with the prior art, the technical solution of this application has at least the following technical effects:

[0018] According to the evaporation coating equipment provided by the utility model, in order to avoid the problem of excessively high temperature of the protective wallboard forming the coating chamber, a first cooling channel is arranged in the protective wallboard, and the protective wallboard is cooled by the cooling medium in the first cooling channel, thereby avoiding the protective wallboard being damaged due to high temperature, thereby causing the problem of insufficient sealing of the coating chamber; at the same time, in order to avoid the situation in the evaporation electrode loop where the electrical connection point formed by the connecting pipe is disconnected due to high temperature, a second cooling channel is arranged in the connecting pipe, and the connecting pipe is cooled by the cooling medium in the second cooling channel, thereby cooling the components in contact with the connecting pipe, avoiding the situation at the connection point of the connecting pipe due to high temperature, ensuring the stability of the evaporation electrode heating circuit, and improving the coating quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The drawings described herein are used to provide a further understanding of the present application and constitute a part of the present application. The illustrative embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation on the present application. In the drawings:

[0020] Figure 1 It is a front view of the evaporation coating equipment disclosed in this application;

[0021] Figure 2 A top view of the evaporation coating device disclosed in this application;

[0022] Figure 3 A side view of a protective wall plate of the evaporation coating equipment disclosed in the present application;

[0023] Figure 4 It is a front view of a connecting clamp in the evaporation coating equipment disclosed in the present application;

[0024] Figure 5 A top view of a connecting clamp in the evaporation coating device disclosed in the present application;

[0025] Figure 6 It is a structural schematic diagram of an upper clamping plate for clamping a copper plate in the evaporation coating device disclosed in the present application;

[0026] Figure 7 It is a structural schematic diagram of an upper clamping plate for clamping a copper plate in the evaporation coating device disclosed in the present application;

[0027] Figure 8 It is a structural schematic diagram of a lower clamping plate for clamping a copper plate in the evaporation coating device disclosed in the present application;

[0028] Fig. 9 It is a schematic structural diagram of a lower clamping plate for clamping a copper plate in the evaporation coating equipment disclosed in this application.

[0029] The above drawings include the following reference numerals:

[0030] 100, transformer; 1, evaporation tank; 10, evaporation electrode; 2, protective wallboard; 20, first cooling channel; 3, connecting pipe fittings; 30, second cooling channel; 21, support frame; 22, protective body; 220, liquid outlet channel; 221, liquid inlet channel; 12, evaporation tank bottom plate; 13, evaporation tank side plate; 120, third cooling channel; 130, fourth cooling channel; 23, first through channel; 24, second through channel; 14, liquid inlet pipe fittings; 15, liquid outlet pipe fittings; 25, first sealing groove; 26, second sealing groove; 4, clamping copper plate; 40, fifth cooling channel; 5, connecting clamping plate; 50, clamping space; 6, connecting copper busbar; 401, First cooling section; 402, second cooling section; 41, upper clamping plate; 42, lower clamping plate; 71, first connecting hose; 4010, first port; 72, second connecting hose; 4020, third port; 73, series hose; 4011, second port; 4021, fourth port; 43, positive electrode clamping copper plate; 44, negative electrode clamping copper plate; 101, positive electrode of evaporation electrode body; 102, negative electrode of evaporation electrode body; 31, positive electrode connecting tube; 32, negative electrode connecting tube; 27, positive electrode passing through channel; 28, negative electrode passing through channel; 8, insulating sleeve; 61, positive electrode connecting copper busbar; 62, negative electrode connecting copper busbar; 51, positive electrode connecting clamping plate; 52, negative electrode connecting clamping plate. DETAILED DESCRIPTION

[0031] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application can be combined with each other. The present application will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0032] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, it indicates the presence of features, steps, operations, devices, components and / or combinations thereof.

[0033] Unless otherwise specifically stated, the relative arrangement, numerical expressions and numerical values ​​of the parts and steps set forth in these embodiments do not limit the scope of the present application. At the same time, it should be understood that, for ease of description, the sizes of the various parts shown in the accompanying drawings are not drawn according to the actual proportional relationship. The technology, methods and equipment known to those of ordinary skill in the relevant art may not be discussed in detail, but in appropriate cases, the technology, methods and equipment should be considered as a part of the authorization specification. In all examples shown and discussed here, any specific value should be interpreted as being merely exemplary, rather than as a limitation. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters represent similar items in the following drawings, so that once a certain item is defined in an accompanying drawing, it does not need to be further discussed in subsequent drawings.

[0034] As mentioned in the background technology, in the existing evaporation coating equipment, the wall panels are made of stainless steel one-piece wall panels. During the coating process, due to the high resistivity of steel, the temperature is easily too high, which leads to accelerated aging of the wall panel sealing ring, affecting the sealing of the coating chamber. At the same time, the motor copper busbar generates heat during the long-term electrical connection process, which causes the temperature of the connection point bolts to rise, which is prone to loosening or deformation, resulting in the copper busbar opening, and seriously causing the product to be directly scrapped. Problems; Therefore, in response to the above technical problems, in the evaporation coating equipment provided by the present application, a first cooling channel 20 is set in the protective wall panel 2, and a cooling medium is introduced into the first cooling channel 20, thereby achieving For the purpose of cooling the protective wall panel 2, a second cooling channel 30 is provided in the connecting pipe 3 between the transformer and the evaporation electrode 10, and the cooling medium is introduced into the second cooling channel 30 to cool the connecting pipe 3. In this way, no matter whether the connecting pipe 3 is in contact with the copper busbar or the connecting terminal, it can play a cooling role, thereby suppressing the situation where the copper busbar is open circuited; therefore, the evaporation coating equipment provided by the present application can realize autonomous cooling of the protective wall panel 2 and the connecting pipe 3, thereby avoiding the problem that the temperature of the protective wall panel 2 and the connecting pipe 3 is too high and affects the sealing of the coating chamber, thereby improving the quality of the coating product.

[0035] See also Figures 1 to 7 As shown, the present application provides an evaporation coating device, including: an evaporation tank 1, in which an evaporation electrode 10 is arranged; a protective wall plate 2, which is arranged on the side of the evaporation tank 1, and a first cooling channel 20 is arranged in the protective wall plate 2, and the first cooling channel 20 is used to circulate a cooling medium, and the cooling medium in the second cooling channel 30 is used to cool the protective wall plate 2; a connecting pipe 3, one end of the connecting pipe 3 is connected to the transformer 100, and the other end of the connecting pipe 3 passes through the protective wall plate 2 and is connected to the evaporation electrode 10, and at least a part of the pipe section of the connecting pipe 3 is provided with a second cooling channel 30 for circulating a cooling medium to cool the connecting pipe 3.

[0036] According to the evaporation coating equipment provided by the present application, it includes an evaporation tank 1, a protective wall plate 2 and a connecting pipe 3. A first cooling channel 20 is arranged in the protective wall plate 2, and a cooling medium is passed into the first cooling channel 20 to cool the protective wall plate 2, wherein the first cooling channel 20 is arranged in a spiral shape along the circumferential direction of the protective wall plate 2 to uniformly cool the protective wall plate 2, and a second cooling channel 30 is arranged in the connecting pipe 3. The two ends of the connecting pipe 3 are respectively connected to the transformer 100 and the evaporation electrode 10 by bolts. The connecting pipe 3 is cooled by the second cooling channel 30, so that the bolts at the ends of the connecting pipe 3 can also be cooled, thereby avoiding the problem of deformation and loosening of the bolts due to excessive temperature at the bolt connection point, improving the sealing of the coating chamber, and at the same time improving the quality of the coated product.

[0037] Specifically, the protective wall panel 2 includes: a supporting frame 21; a protective body 22, which is arranged on the supporting frame 21 and connected to the supporting frame 21, and a first cooling channel 20 is arranged in the protective body 22; a liquid outlet channel 220 and a liquid inlet channel 221 are arranged on the protective body 22, and the two ends of the first cooling channel 20 are respectively connected to the liquid outlet channel 220 and the liquid inlet channel 221. By setting the liquid inlet channel 221 and the liquid outlet channel 220, the cooling medium is circulated in the protective body 22, so as to continuously cool the protective body 22. Among them, the supporting frame 21 is a stainless steel frame, and the protective body 22 is an aluminum alloy plate body, and the stainless steel frame and the aluminum alloy plate body are connected by bolts. Preferably, the liquid inlet channel 221 and the liquid outlet channel 220 are arranged on the side of the protective body 22.

[0038] Furthermore, the evaporation coating equipment further includes: an evaporation tank bottom plate 12 and an evaporation tank side plate 13, wherein the evaporation tank side plate 13 is arranged on the evaporation tank bottom plate 12 and arranged along the circumferential direction of the evaporation tank bottom plate 12, so as to enclose the evaporation tank 1 between the evaporation tank bottom plate 12 and the evaporation tank side plate 13; wherein a third cooling channel 120 is arranged in the evaporation tank bottom plate 12, and a fourth cooling channel 130 is arranged in the evaporation tank side plate 13, and the third cooling channel 120 and the fourth cooling channel 130 are connected. Such an arrangement allows the cooling medium to circulate between the third cooling channel 120 and the fourth cooling channel 130, thereby absorbing heat from the evaporation tank 1, further reducing the heat absorption of the protective wall plate 2, controlling the wall temperature rise caused by the invalid heat inside the coating chamber, and combining with the first cooling channel 20 in the protective wall plate 2, solving the problem of poor cavity sealing due to the heating of the protective wall plate 2.

[0039] like Figure 3 As shown, the protective wall plate 2 is provided with a first through channel 23 and a second through channel 24, a liquid inlet pipe 14 is provided in the first through channel 23, and a liquid outlet pipe 15 is provided in the second through channel 24; both ends of the third cooling channel 120 are respectively connected with the liquid inlet pipe 14 and the liquid outlet pipe 15; or both ends of the fourth cooling channel 130 are respectively connected with the liquid inlet pipe 14 and the liquid outlet pipe 15. In this arrangement, the liquid inlet pipe 14 and the liquid outlet pipe 15 are used to realize a cooling circulation loop between the third cooling channel 120 and the fourth cooling channel 130 to cool the evaporation tank 1.

[0040] Furthermore, a first sealing groove 25 is also provided on the side of the protective wall plate 2 away from the evaporation tank 1. The first sealing groove 25 is arranged around the port of the first through channel 23. A first sealing ring is arranged in the first sealing groove 25. At least part of the body of the liquid inlet pipe 14 is in contact with the first sealing ring; and / or a second sealing groove 26 is also provided on the side of the protective wall plate 2 away from the evaporation tank 1. The second sealing groove 26 is arranged around the port of the second through channel 24. A second sealing ring is arranged in the second sealing groove 26. At least part of the body of the liquid outlet pipe 15 is in contact with the second sealing ring. In this way, the sealing of the connection between the pipe and the channel is ensured, and the protective wall plate 2 is kept at a low temperature through the first cooling channel 20 in the protective wall plate 2, thereby ensuring the good use of the first sealing ring and the second sealing ring, and ensuring the sealing reliability with the coating chamber.

[0041] In the embodiment provided by the utility model, the evaporation coating device further includes: a clamping copper plate 4, which is used to clamp the evaporation electrode 10, and the connecting pipe 3 is electrically connected to the clamping copper plate 4; wherein a fifth cooling channel 40 is arranged in the clamping copper plate 4, and the second cooling channel 30 is connected to the fifth cooling channel 40. wherein the connecting pipe 3 is a copper tube, the second cooling channel 30 is arranged in the copper tube, the cooling medium in the second cooling channel 30 is passed into the fifth cooling channel 40, and the clamping copper plate 4 is cooled at the same time.

[0042] Furthermore, the evaporation coating device further includes: a connecting clamp plate 5, in which a clamping space 50 is provided, and one end of the connecting pipe 3 away from the transformer 100 is inserted into the clamping space 50 and fits with the connecting clamp plate 5; a connecting copper bar 6, and both ends of the connecting copper bar 6 are respectively electrically connected to the connecting clamp plate 5 and the clamping copper plate 4. Preferably, the connecting clamp plate 5 is a copper plate, and the connecting pipe 3 is inserted into the clamping space 50 and fits with the connecting clamp plate 5, and the second cooling channel 30 can be used to cool the connecting clamp plate 5.

[0043] Specifically, the fifth cooling channel 40 includes a first cooling section 401 and a second cooling section 402, and the clamping copper plate 4 includes: an upper clamping plate 41 and a lower clamping plate 42 that are arranged opposite to each other, and at least part of the evaporation electrode 10 is arranged between the upper clamping plate 41 and the lower clamping plate 42; wherein, the first cooling section 401 is arranged in the upper clamping plate 41, and the second cooling section 402 is arranged in the lower clamping plate 42, so as to cool the upper clamping plate 41 and the lower clamping plate 42 respectively. In a specific implementation, the upper clamping plate 41 and the lower clamping plate 42 are connected by bolts, and by cooling the upper clamping plate 41 and the lower clamping plate 42 respectively, the bolts can be cooled at the same time, so as to avoid deformation or even melting of the bolts caused by excessive temperature of the upper clamping plate 41 or the lower clamping plate 42, resulting in reduced power input to the evaporation electrode and affecting the coating quality.

[0044] In the specific implementation process, there are two connecting pipes 3, and the evaporation coating equipment also includes: a first connecting hose 71, one end of the first connecting hose 71 is connected to the second cooling channel 30 in one connecting pipe 3, and the other end is connected to the first port 4010 of the first cooling section 401; a second connecting hose 72, one end of the second connecting hose 72 is connected to the second cooling channel 30 in another connecting pipe 3, and the other end is connected to the third port 4020 of the second cooling section 402; a series hose 73, both ends of the series hose 73 are respectively connected to the second port 4011 of the first cooling section 401 and the fourth port 4021 of the second cooling section 402. There are two clamping spaces 50, which are arranged one by one corresponding to the two connecting pipes 3. Through the two connecting pipes 3 and the series hose 73, a cooling circulation loop is formed between the two second cooling channels 30, the first cooling section 401 and the second cooling section 402, and the two connecting pipes 3, the clamping copper plate 4 and the connecting clamp plate 5 are cooled respectively to avoid deformation of the bolts at each connection due to high temperature, or even melting to cause the copper busbar to open, so that the evaporation electrode 10 always maintains power input.

[0045] Specifically, the evaporation electrode 10 includes a positive electrode 101 of the evaporation electrode body and a negative electrode 102 of the evaporation electrode body; the clamping copper plate 4 includes a positive electrode clamping copper plate 43 and a negative electrode clamping copper plate 44, the positive electrode clamping copper plate 43 clamps the positive electrode 101 of the evaporation electrode body, and the negative electrode clamping copper plate 44 clamps the negative electrode 102 of the evaporation electrode body; the fifth cooling channel 40 is respectively arranged in the positive electrode clamping copper plate 43 and the negative electrode clamping copper plate 44; the connecting pipe 3 includes a positive electrode connecting pipe 31 and a negative electrode connecting pipe 32, the two ends of the positive electrode connecting pipe 31 are respectively connected to the transformer 100 and the positive electrode clamping copper plate 43, and the two ends of the negative electrode connecting pipe 32 are respectively connected to the transformer 100 and the negative electrode clamping copper plate 44; the protective wall plate 2 is provided with a positive electrode passing channel 27 and a negative electrode passing channel 28, the positive electrode connecting pipe 31 is penetrated in the positive electrode passing channel 27, and the negative electrode connecting pipe 32 is penetrated in the negative electrode passing channel 28. Among them, an insulating sleeve 8 is arranged between the positive electrode connecting tube 31 and the positive electrode passing channel 27 to maintain insulation between the positive electrode connecting tube 31 and the protective wall plate 2, and an insulating sleeve 8 is also arranged between the negative electrode connecting tube 32 and the negative electrode passing channel 28 to maintain insulation between the negative electrode connecting tube 32 and the negative electrode passing channel 28.

[0046] In actual application, the two ends of the positive electrode connecting tube 31 are respectively connected to the positive electrode of the transformer and the positive electrode connecting clamp 51, and the two ends of the positive electrode connecting copper bar 61 are respectively connected to the positive electrode connecting clamp 51 and the positive electrode clamping copper plate 43 by bolts to form a positive electrode passage, which is connected to the negative electrode 102 of the evaporation electrode body through the evaporation electrode body in the evaporation tank 1, and then electrically connected in sequence through the negative electrode clamping copper plate 44, the negative electrode connecting copper bar 62, the negative electrode connecting clamp 52 and the negative electrode connecting tube 32, and finally connected to the negative electrode of the transformer by the negative electrode connecting tube 32, forming an evaporation heating electric circuit from the positive electrode to the negative electrode of the transformer.

[0047] Specifically, there are two positive electrode connecting tubes 31, which are respectively inserted into two clamping spaces 50 in the positive electrode connecting clamp plate 51. The two positive electrode connecting tubes 31 are respectively connected to the first cooling section 401 and the second cooling section 402 in the positive electrode clamping copper plate 43 through the first connecting hose 71 and the second connecting hose 72. The second cooling channels 30 in the two positive electrode connecting tubes 31 are respectively the liquid inlet cooling channel and the liquid outlet cooling channel, so as to realize a cooling circulation loop at the positive electrode, cool down the positive electrode connecting tube 31, the positive electrode connecting clamp plate 51 and the positive electrode clamping copper plate 43, and by cooling down the positive electrode connecting clamp plate 51 and the positive electrode connecting tube 31 respectively, the two ends of the positive electrode connecting copper bar 61 can maintain a relatively low temperature, thereby ensuring that the bolts play a good role.

[0048] Furthermore, there are two negative electrode connecting tubes 32, which are respectively inserted into two clamping spaces 50 in the negative electrode connecting clamp plate 52. The two negative electrode connecting tubes 32 are respectively connected to the first cooling section 401 and the second cooling section 402 in the negative electrode clamping copper plate 44 through the first connecting hose 71 and the second connecting hose 72. The second cooling channels 30 in the two negative electrode connecting tubes 32 are respectively the liquid inlet cooling channel and the liquid outlet cooling channel, so as to realize the cooling circulation loop at the negative electrode, cool down the negative electrode connecting tube 32, the negative electrode connecting clamp plate 52 and the negative electrode clamping copper plate 44, and the two ends of the negative electrode connecting copper bar 62 are respectively connected to the negative electrode connecting clamp plate 52 and the negative electrode clamping copper plate 44 by bolts. By cooling down the negative electrode connecting clamp plate 52 and the negative electrode clamping copper plate 44 respectively, the two ends of the negative electrode connecting copper bar 62 can maintain a relatively low temperature, thereby ensuring that the bolts play a good role, effectively controlling the temperature rise of the electrode connection point, and preventing the connection point bolts from melting to form an open circuit.

[0049] From the above description, it can be seen that the above embodiments of the present application achieve the following technical effects:

[0050] According to the evaporation coating equipment provided by the utility model, a first cooling channel 20 is arranged in the protective wall plate 2, and the protective wall plate 2 is cooled by the first cooling channel 20, thereby avoiding the problem of the sealing of the coating chamber caused by the over-high temperature of the protective wall plate 2. At the same time, a second cooling channel 30 is arranged in the connecting pipe 3, and the connecting pipe 3 is cooled by the second cooling channel 30, so that the components connected to the connecting pipe 3 can achieve the effect of cooling and cooling, thereby avoiding the disconnection at the connection point of the connecting pipe 3, and ensuring the coating quality.

[0051] For ease of description, spatially relative terms such as "above", "above", "on the upper surface of", "above", etc. may be used here to describe the spatial positional relationship between a device or feature and other devices or features as shown in the figure. It should be understood that spatially relative terms are intended to include different orientations of the device in use or operation in addition to the orientation described in the figure. For example, if the device in the accompanying drawings is inverted, the device described as "above other devices or structures" or "above other devices or structures" will be positioned as "below other devices or structures" or "below other devices or structures". Thus, the exemplary term "above" can include both "above" and "below". The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatially relative descriptions used here are interpreted accordingly.

[0052] In addition, it should be noted that the use of terms such as "first" and "second" to limit components is only for the convenience of distinguishing the corresponding components. Unless otherwise stated, the above terms have no special meaning and therefore cannot be understood as limiting the scope of protection of this application.

[0053] The above are only preferred embodiments of the present application and are not intended to limit the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. An evaporation coating device, characterized in that: include: An evaporation tank (1), wherein an evaporation electrode (10) is arranged in the evaporation tank (1); A protective wall plate (2) is arranged on the side of the evaporation tank (1), and a first cooling channel (20) is arranged in the protective wall plate (2), and a cooling medium is circulated in the first cooling channel (20) to cool the protective wall plate (2); A connecting pipe (3), one end of the connecting pipe (3) is connected to the transformer (100), and the other end of the connecting pipe (3) passes through the protective wall plate (2) and is connected to the evaporation electrode (10), and a second cooling channel (30) for circulating a cooling medium is provided in at least a part of the pipe section of the connecting pipe (3), and the cooling medium in the second cooling channel (30) is used to cool the connecting pipe (3).

2. The evaporation coating equipment according to claim 1, characterized in that: The protective wall panel (2) comprises: Support frame (21); A protective body (22) is arranged on the supporting frame (21) and connected to the supporting frame (21), and the first cooling channel (20) is arranged in the protective body (22); The protective body (22) is provided with a liquid outlet channel (220) and a liquid inlet channel (221), and two ends of the first cooling channel (20) are respectively connected to the liquid outlet channel (220) and the liquid inlet channel (221).

3. The evaporation coating equipment according to claim 1, characterized in that: The evaporation coating equipment also includes: An evaporation tank bottom plate (12) and an evaporation tank side plate (13), wherein the evaporation tank side plate (13) is arranged on the evaporation tank bottom plate (12) and along the circumferential direction of the evaporation tank bottom plate (12) so as to enclose the evaporation tank (1) between the evaporation tank bottom plate (12) and the evaporation tank side plate (13); The evaporation tank bottom plate (12) is provided with a third cooling channel (120), the evaporation tank side plate (13) is provided with a fourth cooling channel (130), and the third cooling channel (120) and the fourth cooling channel (130) are connected.

4. The evaporation coating equipment according to claim 3, characterized in that: The protective wall plate (2) is provided with a first through channel (23) and a second through channel (24); a liquid inlet pipe (14) is provided in the first through channel (23), and a liquid outlet pipe (15) is provided in the second through channel (24); Two ends of the third cooling channel (120) are respectively connected to the liquid inlet pipe member (14) and the liquid outlet pipe member (15); or Both ends of the fourth cooling channel (130) are respectively connected to the liquid inlet pipe member (14) and the liquid outlet pipe member (15).

5. The evaporation coating equipment according to claim 4, characterized in that: A first sealing groove (25) is further provided on the side of the protective wall plate (2) away from the evaporation tank (1), the first sealing groove (25) being arranged around the port of the first through channel (23), a first sealing ring being arranged in the first sealing groove (25), and at least a part of the tube body of the liquid inlet pipe member (14) being in contact with the first sealing ring; and / or A second sealing groove (26) is also provided on the side of the protective wall plate (2) away from the evaporation tank (1); the second sealing groove (26) is arranged around the port of the second through channel (24); a second sealing ring is arranged in the second sealing groove (26); and at least part of the pipe body of the liquid outlet pipe member (15) is in contact with the second sealing ring.

6. The evaporation coating equipment according to claim 1, characterized in that: The evaporation coating equipment also includes: A clamping copper plate (4) for clamping the evaporation electrode (10), the connecting pipe (3) being electrically connected to the clamping copper plate (4); Wherein, a fifth cooling channel (40) is provided in the clamping copper plate (4), and the second cooling channel (30) is connected to the fifth cooling channel (40).

7. The evaporation coating equipment according to claim 6, characterized in that: The evaporation coating equipment also includes: A connecting clamp (5), wherein a clamping space (50) is provided in the connecting clamp (5), and an end of the connecting pipe (3) away from the transformer (100) is inserted into the clamping space (50) and is in contact with the connecting clamp (5); A connecting copper bar (6), wherein two ends of the connecting copper bar (6) are electrically connected to the connecting clamping plate (5) and the clamping copper plate (4) respectively.

8. The evaporation coating equipment according to claim 6, characterized in that: The fifth cooling channel (40) comprises a first cooling section (401) and a second cooling section (402), and the clamping copper plate (4) comprises: An upper clamping plate (41) and a lower clamping plate (42) are arranged opposite to each other, and at least a portion of the evaporation electrode (10) is arranged between the upper clamping plate (41) and the lower clamping plate (42); Wherein, the first cooling section (401) is arranged in the upper clamping plate (41), and the second cooling section (402) is arranged in the lower clamping plate (42), so as to cool the upper clamping plate (41) and the lower clamping plate (42) respectively.

9. The evaporation coating equipment according to claim 8, characterized in that: There are two connecting pipes (3), and the evaporation coating equipment further comprises: A first connecting hose (71), one end of the first connecting hose (71) being connected to a second cooling channel (30) in one of the connecting pipes (3), and the other end of the first connecting hose (71) being connected to a first port (4010) of the first cooling section (401); A second connecting hose (72), one end of the second connecting hose (72) being connected to a second cooling channel (30) in another connecting pipe (3), and the other end of the second connecting hose (72) being connected to a third port (4020) of the second cooling section (402); A series hose (73), wherein two ends of the series hose (73) are respectively connected to the second port (4011) of the first cooling section (401) and the fourth port (4021) of the second cooling section (402).

10. The evaporation coating equipment according to claim 6, characterized in that: The evaporation electrode (10) comprises an evaporation electrode body positive electrode (101) and an evaporation electrode body negative electrode (102); The clamping copper plate (4) comprises a positive electrode clamping copper plate (43) and a negative electrode clamping copper plate (44); the positive electrode clamping copper plate (43) clamps the positive electrode (101) of the evaporation electrode body, and the negative electrode clamping copper plate (44) clamps the negative electrode (102) of the evaporation electrode body; the fifth cooling channel (40) is respectively arranged in the positive electrode clamping copper plate (43) and the negative electrode clamping copper plate (44); The connecting pipe member (3) comprises a positive electrode connecting pipe (31) and a negative electrode connecting pipe (32); two ends of the positive electrode connecting pipe (31) are respectively connected to the transformer (100) and the positive electrode clamping copper plate (43); and two ends of the negative electrode connecting pipe (32) are respectively connected to the transformer (100) and the negative electrode clamping copper plate (44); The protective wall plate (2) is provided with a positive electrode passing channel (27) and a negative electrode passing channel (28); the positive electrode connecting tube (31) is inserted into the positive electrode passing channel (27); and the negative electrode connecting tube (32) is inserted into the negative electrode passing channel (28).

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