Semiconductor loading detection support and semiconductor loading rapid detection device

Abstract

The utility model discloses a semiconductor chip mounting detection support and a semiconductor chip mounting rapid detection device, and belongs to the technical field of semiconductor packaging detection equipment. In order to solve the problems that wafers are mistakenly touched and the qualified rate of the wafers is affected during adjustment of tray jigs in existing products, the following technical scheme is provided: the semiconductor loading detection bracket comprises a tray jig for bearing the wafers and a detection bracket for placing the tray jig, the detection support is composed of an L-shaped plate, a transverse strip, an extension plate and an adjusting piece, a containing cavity is formed in the side edge shell wall of the L-shaped plate, the extension plate is connected into the containing cavity in a sliding mode, the adjusting piece comprises a U-shaped plate, and the U-shaped plate is rotationally connected with a two-way lead screw. According to the utility model, the adjustable detection support is arranged, so that the angle of the tray jig can be conveniently adjusted according to actual requirements when the wafer on the tray jig is observed, and the action of re-placing the tray jig is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor packaging detection equipment, in particular to a semiconductor chip mounting detection bracket and a semiconductor chip mounting rapid detection device. Background Art

[0002] Semiconductor packaging refers to the process of processing tested wafers into independent chips according to product models and functional requirements. In the semiconductor packaging process, after the wafer is glued to the frame with glue, before the glue is baked and cured, the wafer needs to be inspected for appearance to detect glue overflow and climbing on the side of the wafer. In order to facilitate inspection under a microscope, the frame needs to be tilted.

[0003] There is a Chinese patent with authorization announcement number CN218918824U, which discloses a semiconductor wafer detection bracket and a semiconductor wafer rapid detection device, wherein a semiconductor wafer rapid detection device includes a semiconductor wafer detection bracket and a connecting support frame, the semiconductor wafer detection bracket is installed on the connecting support frame, the connecting support frame is movably installed in a through hole set on the detection platform, the bottom of the connecting support frame is slidably installed on the guide rail, and is driven to move by a driving mechanism, and the guide rail is set at the bottom of the detection platform. The utility model solves the problem that the current inspection process for the wafer is mainly manual operation, and it is easy to touch the wafer during the process of taking and observing, resulting in the wafer position displacement, which affects the quality of semiconductor products.

[0004] Although the technical solution in the above patent document provides a multi-groove detection bracket to carry the tray fixture that needs to be placed at different angles, and uses a driving mechanism to realize automatic displacement adjustment of the detection bracket to ensure observation of wafers in different areas on the tray fixture and reduce the risk of manual contact with the wafer during wafer inspection, it has the following problems in actual operation:

[0005] 1. When placing the wafer tray fixture on the inspection bracket, it may not be possible to successfully place it at the required angle at one time. If a novice is operating, it is even more likely that there will be misalignment during placement, and adjustments need to be made during the observation process, and then the tray fixture needs to be lifted and re-placed. In the process of such adjustment and placement, the wafer will inevitably shake, which will easily lead to a decrease in the qualified rate.

[0006] 2. During the displacement of the detection bracket realized by the driving mechanism in the detection device, when there is doubt about the observation of the wafer, it is necessary to operate the control button to adjust its movement state. If the operation is not proficient enough, omissions are likely to occur.

[0007] Therefore, those skilled in the art provide a semiconductor wafer inspection bracket and a semiconductor wafer rapid inspection device to solve the problems raised in the above background technology. Utility Model Content

[0008] In order to overcome the above-mentioned defects of the prior art, the embodiments of the utility model provide a semiconductor wafer inspection bracket and a semiconductor wafer rapid inspection device. By setting an adjustable inspection bracket, the angle of the tray fixture can be conveniently adjusted according to actual needs when observing the wafer on the tray fixture, thereby avoiding the need to re-place the tray fixture. The displacement structure formed by the combination of a guide rod, a spring and a winding mechanism is used to manually adjust the displacement of the inspection bracket. When there is any doubt about the observation of the wafer, the winding mechanism can be stopped to achieve real-time pause, thereby avoiding omissions caused by unfamiliar operation, thereby solving the problems raised in the above-mentioned background technology.

[0009] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0010] The technical solution of the first aspect: a semiconductor wafer loading and detection bracket, including a tray fixture for carrying wafers, and a detection bracket for placing the tray fixture, the detection bracket is composed of an L-shaped plate, a horizontal bar, an extension plate and an adjusting member, wherein a accommodating cavity is opened on the side shell wall of the L-shaped plate, the extension plate is slidably connected to the accommodating cavity, and the adjusting member includes a U-shaped plate, and a bidirectional screw rod is rotatably connected to the U-shaped plate, and the bidirectional screw rod and the extension plate are connected by a support rod.

[0011] As a further solution of the utility model, the horizontal bar is fixedly connected to the top left side of the L-shaped plate, the U-shaped plate is fixedly connected to the side outer wall of the L-shaped plate, and the U-shaped plate is located below the accommodating cavity.

[0012] As a further solution of the utility model, the support rods include two, each of which is connected to a support seat at both ends through a pin shaft, the upper support seat is fixedly connected to the side wall of the extension plate, the lower support seat is threadedly connected to the bidirectional screw rod, and the lower support seat is slidably connected to the L-shaped plate.

[0013] The technical solution of the second aspect: a semiconductor wafer rapid detection device, comprising the semiconductor wafer detection bracket according to the claim, and further comprising a U-shaped seat, on which a detection platform and a displacement structure are installed, wherein an I-shaped slide plate is slidably connected to the detection platform, and the semiconductor wafer detection bracket is arranged on the top of the I-shaped slide plate;

[0014] The displacement structure is composed of a guide rod, a moving block and a winding mechanism, wherein there are two guide rods, which are symmetrically arranged inside the U-shaped seat in a front-to-back manner. The moving block is slidably connected to the symmetrical guide rods, and each of the guide rods is provided with a spring for reset adjustment. The moving block is connected to the I-shaped slide plate by bolts.

[0015] As a further solution of the utility model, the winding mechanism is composed of a carrier, a rope winding wheel and a one-way component, wherein the carrier is installed on the side outer wall of the U-shaped seat by bolts, and the rope winding wheel is connected to the carrier through a rotating shaft.

[0016] As a further solution of the utility model, the one-way component includes a ratchet wheel arranged on the rotating shaft, and a pawl and a protruding rod located on the outer wall of the carrier are provided below the ratchet wheel, wherein the pawl and the protruding rod are connected by a tension spring.

[0017] As a further solution of the utility model, the pawl is rotatably connected to the back outer wall of the carrier through a movable pin, and the pawl and the ratchet are engaged and limited. A traction rope is wound around the rope winding wheel, and one end of the traction rope passes through the side wall of the U-shaped seat and is bound to the moving block.

[0018] Compared with the prior art, the beneficial effects of the utility model are:

[0019] 1. By setting an adjustable detection bracket, the angle of the tray fixture can be conveniently adjusted according to actual needs when observing the wafer on the tray fixture, avoiding the need to re-place the tray fixture.

[0020] 2. By setting a displacement structure formed by a combination of a guide rod, a spring and a winding mechanism, the displacement adjustment of the detection bracket is realized by manual adjustment. When there is doubt about the wafer observation, the winding mechanism can be stopped to achieve real-time pause, avoiding omissions caused by unfamiliar operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 A schematic diagram of the three-dimensional structure of a semiconductor wafer detection bracket and a semiconductor wafer rapid detection device Figure 1 ;

[0022] Figure 2 A schematic diagram of the three-dimensional structure of a semiconductor wafer detection bracket and a semiconductor wafer rapid detection device Figure 2 ;

[0023] Figure 3 for Figure 2 Schematic diagram of the structure viewed from above.

[0024] In the figure: 1. U-shaped seat; 2. detection platform; 3. guide rod; 4. moving block; 5. I-shaped slide plate; 6. detection bracket; 61. L-shaped plate; 62. horizontal bar; 63. extension plate; 64. adjustment member; 641. U-shaped plate; 642. two-way screw rod; 643. support rod; 7. pallet fixture; 8. winding mechanism; 81. carrier; 82. rope pulley; 83. ratchet; 84. pawl; 85. convex rod. DETAILED DESCRIPTION

[0025] See also Figures 1-2 In an embodiment of the utility model, a semiconductor wafer testing bracket includes a tray fixture 7 for carrying a wafer and a testing bracket 6 for placing the tray fixture 7. The wafer on the tray fixture 7 is bonded to a frame, and then placed on the tray fixture 7 by the frame.

[0026] The detection bracket 6 is composed of an L-shaped plate 61, a horizontal bar 62, an extension plate 63 and an adjustment member 64. A receiving cavity is provided on the side wall of the L-shaped plate 61. The extension plate 63 is slidably connected in the receiving cavity. The sliding connection of the extension plate 63 in the receiving cavity ensures the stability of the extension plate 63 when it is raised and lowered.

[0027] The adjusting member 64 includes a U-shaped plate 641, and a bidirectional screw rod 642 is rotatably connected to the U-shaped plate 641. The bidirectional screw rod 642 is connected to the extension plate 63 through a support rod 643. Both ends of the bidirectional screw rod 642 pass through the corresponding side walls of the U-shaped plate 641, and a handle for adjustment is installed.

[0028] The horizontal bar 62 is fixedly connected to the top left side of the L-shaped plate 61. The U-shaped plate 641 is fixedly connected to the side outer wall of the L-shaped plate 61, and the U-shaped plate 641 is located below the accommodating cavity.

[0029] There are two support rods 643, and both ends of each support rod 643 are connected to a support seat through a pin shaft. The upper support seat is fixedly connected to the side wall of the extension plate 63. The lower support seat is threadedly connected to the bidirectional screw rod 642, and the lower support seat is slidably connected to the L-shaped plate 61. A guide groove is provided on the top of the L-shaped plate 61, and the lower support seat is slidably connected to the guide groove, thereby ensuring that the lower support seat performs linear displacement with the rotation of the bidirectional screw rod 642.

[0030] The working principle of the utility model is: when the product is placed for testing of semiconductor wafers, the tray fixture 7 loaded with the wafers is placed on the testing bracket 6. Among them, the bottom of the tray fixture 7 is against the horizontal bar 62 in the testing bracket 6, and the back thereof lies on the top of the extension plate 63. Then, according to the required observation angle, the bidirectional screw rod 642 in the adjustment member 64 is rotated and adjusted. During the movement of the bidirectional screw rod 642, the movable seat threadedly connected thereto rotates with the U-shaped plate 641 while being slidably connected thereto, and performs linear displacement adjustment. When the movable seat connected to the bidirectional screw rod 642 moves, the support rod 643 is moved, thereby supporting the extension plate 63 to complete the lifting and lowering adjustment thereof.

[0031] When the extension plate 63 is raised and lowered, the tray fixture 7 lying thereon is adjusted to have its tilt angle adjusted to achieve a composite observation angle of the wafer thereon.

[0032] See also Figures 2-3 In an embodiment of the utility model, a semiconductor wafer rapid detection device includes a semiconductor wafer detection bracket and a U-shaped seat 1, on which a detection platform 2 and a displacement structure are installed. An I-shaped slide plate 5 is slidably connected to the detection platform 2. A detection bracket 6 in the semiconductor wafer detection bracket is fixedly connected to the top of the I-shaped slide plate 5 by bolts. A through groove is synchronously opened on the detection platform 2, and the I-shaped slide plate 5 is slidably connected to the through groove.

[0033] The displacement structure is composed of a guide rod 3, a moving block 4 and a winding mechanism 8. There are two guide rods 3, which are symmetrically arranged inside the U-shaped seat 1. The moving block 4 is slidably connected to the symmetrical guide rods 3. Each guide rod 3 is sleeved with a spring for reset adjustment. The moving block 4 is connected to the I-shaped slide plate 5 by bolts. One end of the spring is arranged on the side wall of the moving block 4, and the other end of the spring is fixedly connected to the side inner wall of the U-shaped seat 1.

[0034] The winding mechanism 8 is composed of a carrier 81, a rope winding wheel 82 and a one-way assembly. The carrier 81 is installed on the side outer wall of the U-shaped seat 1 by bolts. The rope winding wheel 82 is connected to the carrier 81 by a rotating shaft.

[0035] The one-way assembly includes a ratchet 83 disposed on the rotating shaft. A ratchet 84 and a protruding rod 85 are disposed below the ratchet 83 and are located on the outer wall of the carrier 81. The ratchet 84 and the protruding rod 85 are connected by a tension spring. The protruding rod 85 is fixedly connected to the carrier 81. A through hole is provided on the carrier 81, and the rotating shaft is rotatably connected to the through hole through a bearing. The rope wheel 82 and the ratchet 83 are respectively assembled at both ends of the rotating shaft.

[0036] The ratchet 84 is rotatably connected to the outer wall of the back side of the carrier 81 through a movable pin, and the ratchet 84 is engaged and limited with the ratchet wheel 83. A traction rope is wound around the rope wheel 82, and one end of the traction rope passes through the side wall of the U-shaped seat 1 and is bound to the moving block 4.

[0037] The working principle of the utility model is as follows: when the tray fixture 7 is placed on the detection bracket 6, the appearance of the wafer on the tray fixture 7 is observed through a microscope. During the observation, the rope wheel 82 of the winding mechanism 8 in the displacement structure is rotated. The rotation of the rope wheel 82 realizes the winding of the traction rope, and the winding of the traction rope realizes the dragging of the moving block 4. The moving block 4 is adjusted on the guide rod 3, and the spring is stretched synchronously. The I-shaped slide plate 5 drives the detection bracket 6 to move, and then drives the tray fixture 7 placed thereon to adjust the displacement. When the tray fixture 7 is adjusted, the appearance of the wafer in different areas on it is observed. During the rotation of the rope wheel 82, the ratchet 83 in the one-way component rotates synchronously. The movement of the ratchet 83 is unidirectional under the action of the ratchet 83 and the tension spring, thereby avoiding that when the rope wheel 82 is loosened when the wafer is observed to be suspicious, the moving block 4 is in the original position and will not be reset under the action of the spring.

[0038] When observing the wafer on the tray fixture 7, the other wafers are observed. The tray fixture 7 that has been observed is first removed. Then the pawl 84 is moved to cancel the limit between it and the ratchet 83. Then, under the action of the spring, the moving block 4 drives the structure on it to return to the initial state, which is convenient for the subsequent placement and adjustment of the tray fixture 7.

[0039] What is described above is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the technical scope disclosed by the present invention according to the technical scheme and the utility model concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A semiconductor wafer mounting and testing support, comprising a tray fixture (7) for carrying a wafer, and a testing support (6) for placing the tray fixture (7), characterized in that: The detection bracket (6) is composed of an L-shaped plate (61), a horizontal bar (62), an extension plate (63) and an adjustment member (64), wherein a housing cavity is provided on a side shell wall of the L-shaped plate (61), the extension plate (63) is slidably connected in the housing cavity, and the adjustment member (64) comprises a U-shaped plate (641), a bidirectional screw rod (642) is rotatably connected to the U-shaped plate (641), and the bidirectional screw rod (642) and the extension plate (63) are connected via a support rod (643).

2. A semiconductor wafer detection bracket according to claim 1, characterized in that: The horizontal bar (62) is fixedly connected to the left side of the top of the L-shaped plate (61), the U-shaped plate (641) is fixedly connected to the side outer wall of the L-shaped plate (61), and the U-shaped plate (641) is located below the accommodating cavity.

3. A semiconductor wafer detection bracket according to claim 1, characterized in that: The support rods (643) include two, and both ends of each support rod (643) are connected to a support seat via a pin shaft. The upper support seat is fixedly connected to the side wall of the extension plate (63), and the lower support seat is threadedly connected to the bidirectional screw rod (642), and the lower support seat is slidably connected to the L-shaped plate (61).

4. A semiconductor wafer rapid detection device, characterized in that: The semiconductor wafer detection bracket comprises the semiconductor wafer detection bracket according to claim 1, and further comprises a U-shaped seat (1), on which a detection platform (2) and a displacement structure are mounted, wherein an I-shaped slide plate (5) is slidably connected to the detection platform (2), and the semiconductor wafer detection bracket is arranged on the top of the I-shaped slide plate (5); The displacement structure is composed of a guide rod (3), a moving block (4) and a winding mechanism (8), wherein the guide rods (3) include two, which are symmetrically arranged inside the U-shaped seat (1) in a front-to-back manner, and the moving blocks (4) are slidably connected to the symmetrical guide rods (3), and each of the guide rods (3) is sleeved with a spring for reset adjustment, and the moving blocks (4) are connected to the I-shaped slide plate (5) by bolts.

5. A semiconductor wafer rapid detection device according to claim 4, characterized in that: The winding mechanism (8) is composed of a carrier (81), a rope winding wheel (82) and a one-way component, wherein the carrier (81) is mounted on the side outer wall of the U-shaped seat (1) by bolts, and the rope winding wheel (82) is connected to the carrier (81) by a rotating shaft.

6. A semiconductor wafer rapid detection device according to claim 5, characterized in that: The one-way assembly comprises a ratchet (83) arranged on a rotating shaft, and a ratchet pawl (84) and a protruding rod (85) located on the outer wall of the carrier (81) are arranged below the ratchet (83), wherein the ratchet pawl (84) and the protruding rod (85) are connected via a tension spring.

7. A semiconductor wafer rapid detection device according to claim 6, characterized in that: The ratchet pawl (84) is rotatably connected to the back outer wall of the carrier (81) via a movable pin, and the ratchet pawl (84) is engaged with the ratchet wheel (83) to limit the position. A traction rope is wound around the rope winding wheel (82), and one end of the traction rope passes through the side wall of the U-shaped seat (1) and is bound to the moving block (4).

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