Graphite boat page and graphite boat

Abstract

The utility model provides a graphite boat page and a graphite boat. The graphite boat page comprises a boat page base body, the boat page base body is provided with a bearing face, a vent hole penetrating through the bearing face of the boat page base body is formed in the boat page base body, the hole wall of the vent hole is provided with an air guiding structure and an air blocking structure, the air guiding structure and the air blocking structure are both connected to the bearing face, and the air guiding structure is in a concave face shape or an inclined face shape inclined relative to the bearing face. In the direction away from the bearing surface, the air guide structure gradually shrinks towards the inner side of the vent hole, and the air blocking structure is in a convex surface shape or a plane shape perpendicular to the bearing surface. According to the graphite boat page, graphite boat marks on the surface of a workpiece can be effectively reduced, and the performance of the workpiece is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of coating, in particular to a graphite boat sheet and a graphite boat. Background Art

[0002] A graphite boat is a carrier consisting of multiple graphite boat pages and other accessories connected in series. Current crystalline silicon solar cells are made based on silicon wafers that undergo multiple coating processes. Silicon wafers are usually placed on graphite boat pages for coating.

[0003] The graphite boat is usually provided with an opening to expose the silicon wafer it carries. In the conventional technology, a large chamfered surface is provided at the opening of the graphite boat. The purpose of the transition surface design is to allow airflow to pass between the graphite boat and the silicon wafer, so as to create an airflow gap between the graphite boat and the silicon wafer, thereby avoiding linear graphite boat marks on the surface of the silicon wafer due to contact with the graphite boat. However, in actual use, some graphite boat marks that are difficult to remove still exist on the surface of the silicon wafer. Utility Model Content

[0004] Based on this, in order to further reduce the graphite boat mark on the surface of the workpiece to be placed and improve the performance of the workpiece to be placed, it is necessary to provide a graphite boat sheet and a graphite boat including the graphite boat sheet.

[0005] The present disclosure provides a graphite boat sheet, which includes a boat sheet substrate, the boat sheet substrate having a bearing surface, the boat sheet substrate being provided with an air vent which penetrates the bearing surface of the boat sheet substrate, the hole wall of the air vent having an air guiding structure and an air blocking structure, the air guiding structure and the air blocking structure being both connected to the bearing surface, the air guiding structure being in a concave shape or in a slope shape inclined relative to the bearing surface, and the air guiding structure gradually shrinks toward the inner side of the air vent along a direction away from the bearing surface, and the air blocking structure being in a convex shape or in a plane shape perpendicular to the bearing surface.

[0006] In some embodiments of the present disclosure, the hole wall of the vent hole includes a top wall, a bottom wall and two side walls, the top wall and the bottom wall are arranged opposite to each other, the two side walls are located between the top wall and the bottom wall, the air guiding structure is arranged on the bottom wall and the two side walls, and the air blocking structure is arranged on the top wall.

[0007] In some embodiments of the present disclosure, the graphite boat page also includes a plurality of limit members arranged on the boat page base, and the limit members are used to limit the position of the workpiece to be placed. The limit members are arranged on the side of the bottom wall away from the top wall, and the limit members are also arranged on the outer sides of the two side walls.

[0008] In some embodiments of the present disclosure, the gas-guiding structure has a gas-guiding head end connected to the bearing surface and a gas-guiding tail end away from the bearing surface, and the gas-blocking structure has a gas-blocking head end connected to the bearing surface and a gas-blocking tail end away from the bearing surface;

[0009] The inclination angle of the plane defined by the gas guide head end and the gas guide tail end relative to the bearing surface is 3° to 15°; and / or,

[0010] The inclination angle of the plane defined by the air-blocking head end and the air-blocking tail end relative to the bearing surface is 45° to 90°.

[0011] In some embodiments of the present disclosure, a distance between the air guide head end and the air guide tail end in the axial direction of the vent hole is smaller than a distance between the two in the radial direction of the vent hole.

[0012] In some embodiments of the present disclosure, the distance between the gas guide head and the gas guide tail in the axial direction of the ventilation hole is 0.1mm~0.6mm, and the distance between the gas guide head and the gas guide tail in the radial direction of the ventilation hole is 2.5mm~4mm.

[0013] In some embodiments of the present disclosure, the distance between the air blocking head and the air blocking tail in the axial direction of the vent hole is 0.1 mm to 0.6 mm, and the distance between the air blocking head and the air blocking tail in the radial direction of the vent hole is 0.1 mm to 0.6 mm.

[0014] In some embodiments of the present disclosure, the air guide structure is concave, and a cross section at the air guide head end is perpendicular to the bearing surface.

[0015] In some embodiments of the present disclosure, the gas-blocking structure is convex, and a cut surface at the gas-blocking head end is parallel to the bearing surface.

[0016] Furthermore, the present disclosure also provides a graphite boat, which includes the graphite boat page as described in any of the above embodiments, wherein there are multiple graphite boat pages, and the multiple graphite boat pages are arranged in parallel and at intervals.

[0017] In the graphite boat sheet disclosed in the present invention, an air-guiding structure and an air-blocking structure are provided on the hole wall of the air vent, wherein the air-guiding structure and the air-blocking structure are both connected to the bearing surface of the boat sheet substrate. The air-guiding structure may be concave or inclined relative to the bearing surface, and the air-guiding structure gradually shrinks toward the inner side of the air vent in the direction away from the bearing surface. The air-guiding structure has a drainage effect, and the air flow passing through the surface of the air-guiding structure is easier to pass through, and a gap for air flow to pass through is formed between the workpiece on the air-guiding structure and the bearing surface, thereby reducing the graphite boat mark caused by the friction between the workpiece and the graphite boat sheet. The air-blocking structure is convex or in a plane perpendicular to the bearing surface, and the air-blocking structure does not have a drainage effect or hinders the flow of gas, making it easier for gas to flow from the surface of the air-guiding structure, and then the workpiece on the air-blocking structure and the bearing surface are less likely to form a gap for air flow to pass through, thereby reducing the graphite boat mark caused by the collision between the workpiece and the graphite boat sheet. Therefore, compared with the structure in which large chamfered surfaces are arranged around the vent hole in the conventional technology, the graphite boat sheet in the present disclosure can more effectively reduce the graphite boat mark on the surface of the workpiece and improve the performance of the workpiece. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of a top view structure of a graphite boat leaf;

[0019] Figure 2 for Figure 1 Schematic diagram of the cross-sectional structure of the graphite boat along AA';

[0020] Figure 3 for Figure 2 Schematic diagram of the enlarged structure of region B;

[0021] Figure 4 for Figure 2 Schematic diagram of the enlarged structure of the C region.

[0022] The reference numerals and their meanings are as follows:

[0023] 100, boat leaf base; 101, bearing surface; 110, vent; 111, air guide structure; 1111, air guide head end; 1112, air guide tail end; 112, air blocking structure; 1121, air blocking head end; 1122, air blocking tail end; 1101, top wall; 1102, bottom wall; 1103, side wall; 200, limiter. DETAILED DESCRIPTION

[0024] In order to facilitate the understanding of the present invention, the present invention will be described more comprehensively in combination with the embodiments and the effect diagrams. The embodiments provide preferred embodiments of the present invention. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the understanding of the disclosure of the present invention more thorough and comprehensive.

[0025] It should be noted that when an element is referred to as being "fixed" to another element, it may be directly fixed to another original part or there may also be a central element. When an element is considered to be "connected" to another element, it may be directly connected to the other element or there may be a central element at the same time. In addition, in the description of the present utility model, unless otherwise clearly specified and limited, the terms "installed", "connected" and "connected" should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integrated connection; it may be a mechanical connection or an electrical connection; it may be a direct connection, or an indirect connection through an intermediate medium, or it may be internal communication between two elements. It should be understood that it is possible for those skilled in the art to understand the specific meanings of the above terms according to the specific circumstances without causing ambiguity.

[0026] Unless otherwise specified, in the description of the present invention, terms indicating orientation or positional relationship, such as "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", and "outside", are based on the orientation or positional relationship shown in the drawings of the utility model. They are only for the convenience and simplification of the description of the content of the utility model and to help readers understand the description in conjunction with the drawings. They do not limit or imply a specific orientation that the device or element referred to must have, and therefore should not be understood as a limitation on the present invention.

[0027] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those generally understood by technicians in the technical field of the present invention. The terms used herein in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more related listed items. "Multiple" herein includes a combination of two or more than two items.

[0028] The present disclosure provides a graphite boat sheet, which includes a boat sheet substrate, the boat sheet substrate having a bearing surface, the boat sheet substrate is provided with an air vent which penetrates the bearing surface of the boat sheet substrate, the hole wall of the air vent has an air guiding structure and an air blocking structure, both the air guiding structure and the air blocking structure are connected to the air vent, the air guiding structure is concave or is in an inclined shape relative to the bearing surface, and along the direction away from the bearing surface, the air guiding structure gradually shrinks toward the inside of the air vent, and the air blocking structure is convex or in a plane perpendicular to the bearing surface.

[0029] After research, the present invention finds that in the actual use of the graphite boat, multiple vacuuming and air intake operations are involved in the coating process. Although the design of the large chamfered surface at the opening of the graphite boat page can create an airflow gap between the graphite boat and the workpiece to be placed to avoid contact during the air intake process, the workpiece will have a hard collision with some edges and corners of the chamfered surface during the process of placing the workpiece and the vacuum treatment stage, which results in some difficult-to-solve graphite boat marks on the surface of the workpiece to be placed.

[0030] In the graphite boat sheet disclosed in the present invention, an air-guiding structure and an air-blocking structure are provided on the hole wall of the air vent, wherein the air-guiding structure and the air-blocking structure are both connected to the bearing surface of the boat sheet substrate. The air-guiding structure may be concave or inclined relative to the bearing surface, and the air-guiding structure gradually shrinks toward the inner side of the air vent in the direction away from the bearing surface. The air-guiding structure has a drainage effect, and the air flow passing through the surface of the air-guiding structure is easier to pass through, and a gap for air flow to pass through is formed between the workpiece on the air-guiding structure and the bearing surface, thereby reducing the graphite boat mark caused by the friction between the workpiece and the graphite boat sheet. The air-blocking structure is convex or in a plane perpendicular to the bearing surface, and the air-blocking structure does not have a drainage effect or hinders the flow of gas, making it easier for gas to flow from the surface of the air-guiding structure, and then the workpiece on the air-blocking structure and the bearing surface are less likely to form a gap for air flow to pass through, thereby reducing the graphite boat mark caused by the collision between the workpiece and the graphite boat sheet. Therefore, compared with the structure in which large chamfered surfaces are arranged around the vent hole in the conventional technology, the graphite boat sheet in the present disclosure can more effectively reduce the graphite boat mark on the surface of the workpiece and improve the performance of the workpiece.

[0031] Figure 1 This is a top view of the structure of a graphite boat. Figure 1As shown, the graphite boat sheet of the present disclosure includes a boat sheet substrate 100, and the boat sheet substrate 100 has a bearing surface 101, and the boat sheet substrate 100 may be provided with a vent hole 110 that penetrates the bearing surface 101 of the boat sheet substrate 100. Further, the vent hole 110 may also penetrate the surface opposite to the bearing surface 101 in the boat sheet substrate 100. In this embodiment, there may be a plurality of vent holes 110, and the plurality of vent holes 110 may be arranged in parallel and at intervals on the boat sheet substrate 100. By arranging a plurality of vent holes 110 on the boat sheet substrate 100, one boat sheet substrate 100 can be used to carry a plurality of workpieces to be placed. It can be understood that the workpiece to be placed can be arranged on the bearing surface 101 of the boat sheet substrate 100 and cover the vent hole 110.

[0032] In some examples of this embodiment, the workpiece to be placed may be a silicon wafer. In other embodiments, the workpiece to be placed may also be other workpieces to be coated.

[0033] Figure 2 for Figure 1 Schematic diagram of the cross-sectional structure of the graphite boat along AA'. Figure 1 and Figure 2 As shown, the hole wall of the vent hole 110 has an air guiding structure 111 and an air blocking structure 112, wherein the air guiding structure 111 and the air blocking structure 112 are both connected to the surface of the boat leaf substrate 100. The air guiding structure 111 is concave or inclined relative to the carrying surface 101, and gradually shrinks toward the inner side of the vent hole 110 in the direction away from the carrying surface 101, and the air blocking structure 112 is convex or in a plane perpendicular to the carrying surface 101.

[0034] The concave shape of the air-guiding structure 111 means that the hole wall of the air-guiding structure 111 is sunken toward the boat leaf substrate 100. When the air-guiding structure 111 is concave or inclined, when the gas flows through the surface of the air-guiding structure 111, it will gradually converge and flow toward the workpiece located on the vent 110, so as to form an air flow gap between the workpiece and the air-guiding structure 111. The convex shape of the air-blocking structure 112 means that the hole wall of the air-blocking structure 112 protrudes toward the vent 110. When the air-blocking structure 112 is convex or vertically planar, it can reduce the impact of the gas on the workpiece located on the vent 110, so that it is not easy to form an air flow gap between the workpiece and the air-blocking structure 112.

[0035] Reference Figure 1~Figure 2As shown, in some examples of this embodiment, the hole wall of the vent hole 110 includes a top wall 1101, a bottom wall 1102 and two side walls 1103, the two side walls 1103 are located between the top wall 1101 and the bottom wall 1102, the air blocking structure 112 is arranged on the top wall 1101, and the air guiding structure 111 is arranged on the bottom wall 1102 and the two side walls 1103. Among them, the top wall 1101 and the bottom wall 1102 only represent the relative position relationship between the two, and do not necessarily represent their actual placement orientation. In actual use, the workpiece can be placed on the bearing surface 101 along the direction of the top wall 1101 toward the bottom wall 1102. Since the top wall 1101 is designed as the air blocking structure 112, it can reduce the friction between the workpiece and the top wall 1101 during the insertion and removal process, and reduce the abrasion of the workpiece during the insertion and removal process.

[0036] Reference Figure 1~Figure 2 As shown, in some examples of this embodiment, the graphite boat also includes a plurality of limiters 200 arranged on the boat substrate 100, and the limiters 200 are used to limit the position of the workpiece to be placed. The limiter 200 is arranged on the side of the bottom wall 1102 away from the top wall 1101, and the limiters 200 are also arranged on the outer sides of the two side walls 1103. The outer sides of the two side walls 1103 refer to the side of the first side wall 1103 away from the second side wall 1103 and the side of the second side wall 1103 away from the first side wall 1103. It can be understood that when the workpiece to be placed is placed in the graphite boat, the limiter 200 can support the workpiece and limit the range of movement of the workpiece, so that the workpiece is placed close to the graphite boat. Among them, the limiter 200 located on the side of the bottom wall 1102 away from the top wall 1101 can support the bottom of the workpiece to be placed, and the limiter 200 located on the outer sides of the two side walls 1103 can limit the deviation of the workpiece to be placed toward both sides.

[0037] Furthermore, in some examples of this embodiment, a limiting hole with an opening located on the bearing surface 101 is provided on the boat sheet base 100, and the limiting member 200 is inserted into the limiting hole and has a protrusion protruding from the bearing surface 101, and the radial dimension of the protrusion gradually increases along the direction away from the limiting hole. The workpiece is supported by the protrusion with gradually increasing radial dimension, which can play a good limiting role while allowing a small gap between the workpiece and the graphite boat sheet to be generated under the impact of airflow.

[0038] Figure 2 The air guide structure 111 is located in the B region. For ease of explanation, refer to Figure 3 As shown, Figure 3 for Figure 2Schematic diagram of the enlarged structure of the B area in FIG. In this embodiment, the gas guide structure 111 has a gas guide head end 1111 connected to the bearing surface 101 and a gas guide tail end 1112 away from the bearing surface 101. In some examples of this embodiment, along the direction from the gas guide head end 1111 to the gas guide tail end 1112, the gas guide structure 111 gradually shrinks toward the inner side of the vent 110, so that the plane defined by the gas guide head end 1111 and the gas guide tail end 1112 is inclined relative to the bearing surface 101, and can provide a smoother flow path for the gas.

[0039] Figure 2 The gas barrier structure 112 is located in the C region. For ease of explanation, refer to Figure 4 As shown, Figure 4 for Figure 2 In this embodiment, the gas blocking structure 112 has a gas blocking head end 1121 connected to the bearing surface 101 and a gas blocking tail end 1122 away from the bearing surface 101. The gas blocking structure 112 has a gas blocking head end 1121 connected to the bearing surface 101 and a gas blocking tail end 1122 away from the bearing surface 101.

[0040] Reference Figure 3 As shown, in this embodiment, the gas guide head end 1111 and the gas guide tail end 1112 can define a plane, and the plane defined by the gas guide head end 1111 and the gas guide tail end 1112 refers to a plane passing through the two. The plane defined by the gas guide head end 1111 and the gas guide tail end 1112 is inclined relative to the bearing surface 101, and the inclination angle between the plane and the bearing surface 101 refers to the acute angle formed by the two. Figure 4 As shown, the air barrier head end 1121 and the air barrier tail end 1122 can determine a plane, and the plane determined by the air barrier head end 1121 and the air barrier tail end 1122 refers to a plane passing through the two. The plane determined by the air barrier head end 1121 and the air barrier tail end 1122 can be inclined or perpendicular to the bearing surface 101, and the inclination angle between the plane and the bearing surface 101 refers to the acute angle or right angle formed by the two.

[0041] In this embodiment, the vent hole 110 has an axial direction and a radial direction. The axial direction of the vent hole 110 may be the same as the thickness direction of the boat-leaf base 100 , the radial direction may be perpendicular to the axial direction, and the radial direction may be parallel to the surface of the boat-leaf base 100 .

[0042] Reference Figure 3As shown, the distance between the gas guide head end 1111 and the gas guide tail end 1112 in the axial direction of the vent 110 is h1, and the distance between the gas guide head end 1111 and the gas guide tail end 1112 in the radial direction of the vent 110 is l1. In some examples of this embodiment, the distance h1 between the gas guide head end 1111 and the gas guide tail end 1112 in the axial direction of the vent 110 is smaller than the distance l1 between the two in the radial direction of the vent 110. This can make it easier for the gas to flow out along the gas guide structure 111.

[0043] Reference Figure 4 As shown, the distance between the blocking head end 1121 and the blocking tail end 1122 in the axial direction of the vent 110 is h2, and the distance between the blocking head end 1121 and the blocking tail end 1122 in the radial direction of the vent 110 is l2. In some examples of this embodiment, the distance h2 between the blocking head end 1121 and the blocking tail end 1122 in the axial direction of the vent 110 is greater than or equal to the distance l2 between the two in the radial direction of the vent 110. This can make it more difficult for the gas to flow out along the blocking structure 112.

[0044] In some examples of this embodiment, the distance h1 between the gas guide head end 1111 and the gas guide tail end 1112 in the axial direction of the vent hole 110 is 0.1 mm to 0.6 mm. For example, the distance h1 between the gas guide head end 1111 and the gas guide tail end 1112 in the axial direction of the vent hole 110 is 0.1 mm, 0.2 mm, 0.3 mm, 0.4 mm, 0.5 mm, 0.6 mm, or the distance h1 may also be within the range between any two of the above distances.

[0045] In some examples of this embodiment, the distance l1 between the gas guide head end 1111 and the gas guide tail end 1112 in the radial direction of the vent 110 is 2.5 mm to 4 mm. For example, the distance l1 between the gas guide head end 1111 and the gas guide tail end 1112 in the radial direction of the vent 110 is 2.5 mm, 2.7 mm, 3 mm, 3.2 mm, 3.5 mm, 4 mm, or the distance l1 may also be within the range between any two of the above distances.

[0046] In some examples of this embodiment, the distance h2 between the blocking head end 1121 and the blocking tail end 1122 in the axial direction of the vent 110 is 0.1 mm to 0.6 mm. For example, the distance h2 between the blocking head end 1121 and the blocking tail end 1122 in the axial direction of the vent 110 is 0.1 mm, 0.2 mm, 0.3 mm, 0.4 mm, 0.5 mm, 0.6 mm, or the distance h2 may also be within the range between any two of the above distances.

[0047] In some examples of this embodiment, the distance l2 between the blocking head end 1121 and the blocking tail end 1122 in the radial direction of the vent 110 is 0.1 mm to 0.6 mm. For example, the distance l2 between the blocking head end 1121 and the blocking tail end 1122 in the radial direction of the vent 110 is 0.1 mm, 0.2 mm, 0.3 mm, 0.4 mm, 0.5 mm, 0.6 mm, or the distance l2 may also be within the range between any two of the above distances.

[0048] The inclination angle of the plane defined by the gas guide head end 1111 and the gas guide tail end 1112 relative to the bearing surface 101 is θ1. In some examples of this embodiment, the inclination angle θ1 may be 3° to 15°. For example, the inclination angle θ1 of the plane defined by the gas guide head end 1111 and the gas guide tail end 1112 relative to the bearing surface 101 may be 3°, 4°, 5°, 6°, 7°, 8°, 10°, 12°, 14°, 15°, or the inclination angle θ1 may also be within the range between any two of the above inclination angles.

[0049] The inclination angle of the plane defined by the air blocking head end 1121 and the air blocking tail end 1122 relative to the bearing surface 101 is θ2. In some examples of this embodiment, the inclination angle θ2 may be 45° to 90°. For example, the inclination angle θ2 of the plane defined by the air blocking head end 1121 and the air blocking tail end 1122 relative to the bearing surface 101 may be 45°, 50°, 55°, 60°, 65°, 70°, 75°, 80°, 85°, 90°, or the inclination angle θ2 may also be within the range between any two of the above inclination angles. It is understood that when the inclination angle θ2 is 90°, the air blocking structure 112 is perpendicular to the bearing surface 101.

[0050] Reference Figure 3 As shown, in some examples of this embodiment, the gas guide structure 111 is concave, and the cut surface at the gas guide head end 1111 is perpendicular to the bearing surface 101. By setting the cut surface at the gas guide head end 1111 to be perpendicular to the bearing surface 101, the airflow flowing to the gas guide head end 1111 can impact in a direction perpendicular to the bearing surface 101, so that it is easier to push the workpiece covered on the gas guide head end 1111 and generate a gap between the workpiece and the gas guide head end 1111.

[0051] Reference Figure 4 As shown, in some examples of this embodiment, the gas blocking structure 112 is convex, and the cut surface at the gas blocking head end 1121 is parallel to the bearing surface 101. By setting the cut surface at the gas blocking head end 1121 to be parallel to the bearing surface 101, the impact of the airflow on the workpiece on the gas blocking head end 1121 can be reduced, thereby reducing or eliminating the gap between the workpiece and the gas blocking head end 1121.

[0052] Reference Figure 4As shown, in some examples of this embodiment, the gas blocking structure 112 may be in the shape of a convex curved surface.

[0053] In the graphite boat sheet of the present disclosure, an air guide structure 111 and an air blocking structure 112 are provided on the hole wall of the vent hole 110, wherein the air guide structure 111 and the air blocking structure 112 are both connected to the bearing surface 101 of the boat sheet substrate 100. The air guide structure 111 may be in a concave shape or in an inclined shape inclined relative to the bearing surface 101, and the air guide structure 111 gradually shrinks toward the inner side of the vent hole 110 in the direction away from the bearing surface 101. The air guide structure 111 has a drainage effect, and the air flow passing through the surface of the air guide structure 111 is easier to pass, and a gap for air flow to pass is formed between the workpiece on the air guide structure 111 and the bearing surface 101, thereby reducing the graphite boat mark caused by the friction between the workpiece and the graphite boat sheet. The gas blocking structure 112 is convex or in a plane perpendicular to the bearing surface 101. The gas blocking structure 112 does not have a drainage function or blocks the flow of gas, making it easier for gas to flow from the surface of the gas guiding structure 111. Then, it is less likely to form a gap for gas flow between the workpiece on the gas blocking structure 112 and the bearing surface 101, thereby reducing the graphite boat mark caused by the collision between the workpiece and the graphite boat sheet. Therefore, compared with the structure in which large chamfered curved surfaces are arranged around the vent hole 110 in the conventional technology, the graphite boat sheet in the present disclosure can more effectively reduce the graphite boat mark on the surface of the workpiece and improve the performance of the workpiece.

[0054] Furthermore, the present disclosure also provides a graphite boat, which includes a plurality of graphite boat pages, and the plurality of graphite boat pages are sequentially arranged in parallel and at intervals.

[0055] The technical features of the above embodiments may be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0056] The above embodiments only express several implementation methods of the utility model, and the descriptions are relatively specific and detailed, but they cannot be understood as limiting the scope of the utility model patent. It should be pointed out that for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the utility model, which all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model patent shall be based on the attached claims.

Claims

1. A graphite boat, characterized in that: The invention comprises a boat-leaf substrate (100), wherein the boat-leaf substrate (100) has a bearing surface (101), and an air vent (110) is arranged on the boat-leaf substrate (100) and passes through the bearing surface (101) of the boat-leaf substrate (100); the hole wall of the air vent (110) has an air guide structure (111) and an air blocking structure (112); the air guide structure (111) and the air blocking structure (112) are both connected to the bearing surface (101); the air guide structure (111) is concave or inclined relative to the bearing surface (101); along the direction away from the bearing surface (101), the air guide structure (111) gradually shrinks toward the inner side of the air vent (110); the air blocking structure (112) is convex or flat relative to the bearing surface (101).

2. The graphite boat page according to claim 1, characterized in that: The hole wall of the vent hole (110) comprises a top wall (1101), a bottom wall (1102) and two side walls (1103); the top wall (1101) and the bottom wall (1102) are arranged opposite to each other; the two side walls (1103) are located between the top wall (1101) and the bottom wall (1102); the air guiding structure (111) is arranged on the bottom wall (1102) and the two side walls (1103); and the air blocking structure (112) is arranged on the top wall (1101).

3. The graphite boat page according to claim 2, characterized in that: The graphite boat sheet also includes a plurality of limit members (200) arranged on the boat sheet base (100), and the limit members (200) are used to limit the position of the workpiece to be placed. The limit members (200) are arranged on the side of the bottom wall (1102) away from the top wall (1101), and the limit members (200) are also arranged on the outer sides of the two side walls (1103).

4. The graphite boat sheet according to any one of claims 1 to 3, characterized in that: The gas-guiding structure (111) comprises a gas-guiding head end (1111) connected to the bearing surface (101) and a gas-guiding tail end (1112) away from the bearing surface (101); the gas-blocking structure (112) comprises a gas-blocking head end (1121) connected to the bearing surface (101) and a gas-blocking tail end (1122) away from the bearing surface (101); The inclination angle of the plane defined by the gas guide head end (1111) and the gas guide tail end (1112) relative to the bearing surface (101) is 3° to 15°; and / or, The inclination angle of the plane defined by the air-blocking head end (1121) and the air-blocking tail end (1122) relative to the bearing surface (101) is 45° to 90°.

5. The graphite boat page according to claim 4, characterized in that: The distance between the air guide head end (1111) and the air guide tail end (1112) in the axial direction of the vent hole (110) is smaller than the distance between the two in the radial direction of the vent hole (110).

6. The graphite boat page according to claim 5, characterized in that: The distance between the gas guide head end (1111) and the gas guide tail end (1112) in the axial direction of the vent hole (110) is 0.1 mm to 0.6 mm, and the distance between the gas guide head end (1111) and the gas guide tail end (1112) in the radial direction of the vent hole (110) is 2.5 mm to 4 mm.

7. The graphite boat page according to claim 4, characterized in that: The distance between the air blocking head end (1121) and the air blocking tail end (1122) in the axial direction of the vent hole (110) is 0.1 mm to 0.6 mm, and the distance between the air blocking head end (1121) and the air blocking tail end (1122) in the radial direction of the vent hole (110) is 0.1 mm to 0.6 mm.

8. The graphite boat sheet according to any one of claims 5 to 7, characterized in that: The air guide structure (111) is concave, and a section at the air guide head end (1111) is perpendicular to the bearing surface (101).

9. The graphite boat sheet according to any one of claims 5 to 7, characterized in that: The gas blocking structure (112) is convex, and the section at the gas blocking head end (1121) is parallel to the bearing surface (101).

10. A graphite boat, characterized in that: It comprises the graphite boat page as claimed in any one of claims 1 to 9, wherein there are a plurality of graphite boat pages, and the plurality of graphite boat pages are arranged in parallel and at intervals.

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