Manipulator calibration jig for front open type wafer transfer box

Abstract

The utility model discloses a manipulator calibration jig for a front open type wafer transfer box. The manipulator calibration jig comprises a main body frame; the positioning mechanism is arranged at the bottom of the main body frame and is used for positioning the main body frame at a preset position of an external workstation; and the supporting mechanism is arranged at the top of the main body frame and is used for supporting the wafer. According to the utility model, the trouble that the wafer taking and placing positions of the mechanical arms cannot be well observed in the installation and debugging process of the existing semiconductor equipment is solved, the double mechanical arms can be synchronously debugged, the installation efficiency is greatly improved, and the risk of damaging the wafer and the equipment is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor equipment installation and debugging, in particular to a robot calibration fixture for a front-opening wafer transfer box. Background Art

[0002] like Figure 1 As shown, in the processing equipment for 12-inch wafer production, the robot arm 8 is often required to take the wafer 6 out of the front-opening wafer transfer box 7, and then the robot arm 8 sends the wafer 6 to the process station. In the same equipment, there are usually 4 workstations 5 for placing the front-opening wafer transfer boxes 7. The heights of different workstations 5 may be different, so the starting position of the robot arm 8 for taking and placing the wafer 6 at each workstation 5 needs to be set during the installation and debugging stage.

[0003] The existing method for setting the starting height of the robot arm 8 for picking up and placing the wafer 6 at each workstation 5 is as follows:

[0004] 1. Workstation 5 opens the cover of the front-opening wafer transfer box 7;

[0005] 2. The installation and debugging personnel use the robot teaching device to move the robot arm 8 to the position of the workstation 5 to prepare for the material picking action; (such as Figure 2 shown);

[0006] 3. The front-opening wafer transfer box 7 is composed of a small amount of transparent plastic, and the installation and debugging personnel can observe the situation inside the box through the transparent plastic;

[0007] 4. Slowly move the robot arm 8 forward to the front-opening wafer transfer box 7. The installation and debugging personnel look through the transparent plastic to determine whether the position of the robot arm 8 meets the requirements;

[0008] 5. After determining the position of the robot arm 8, the installation and debugging personnel can record the starting height of the robot arm 8 for picking up and placing the wafer 6 at the current workstation 5.

[0009] Disadvantages of the above method:

[0010] 1. The front-opening wafer transfer box 7 is a closed structure, and the observation space provided by a small amount of transparent plastic is limited;

[0011] 2. When the installation and debugging personnel observe the position of the robotic arm 8 to pick up and place the wafer 6 through the transparent plastic, they often cannot quickly determine the pick-up and placement position of the robotic arm 8, which prolongs the installation and debugging time and reduces the work efficiency;

[0012] 3. There are errors in visual observation, which may cause the wafer 6 to be scrapped or damage the equipment in serious cases;

[0013] 4. When two robotic arms 8 are required to grasp at the same time, the installation and debugging personnel can only adjust the two arms separately according to the above steps, and cannot do it at the same time, which reduces work efficiency. Summary of the invention

[0014] According to an embodiment of the utility model, a robot calibration fixture for a front-opening wafer pod is provided, comprising:

[0015] Main frame;

[0016] A positioning mechanism, which is arranged at the bottom of the main frame and is used to position the main frame at a preset position of an external workstation;

[0017] The supporting mechanism is arranged on the top of the main frame and is used to support the wafer.

[0018] Furthermore, the positioning mechanism includes: three positioning members, and the three positioning members are arranged at the bottom of the main frame.

[0019] Furthermore, the supporting mechanism includes: three single-layer brackets, which are arranged on the top of the main frame and are used to support the wafer.

[0020] Furthermore, the parts of the three single-layer brackets that receive the wafers are chamfered.

[0021] Furthermore, the supporting mechanism includes: three double-layer brackets, which are arranged on the top of the main frame and are used to support the wafer.

[0022] Furthermore, the parts of the three double-layer brackets that receive the wafers are chamfered.

[0023] Furthermore, the supporting mechanism is made of self-lubricating material.

[0024] Furthermore, a plurality of hollow parts are provided on the main frame.

[0025] According to an embodiment of the utility model, a robot calibration fixture for a front-opening wafer transfer box solves the problem that the position of the robot arm for picking up and placing wafers cannot be well observed during the installation and debugging of existing semiconductor equipment. It can also perform synchronous debugging of dual robot arms, greatly improving installation efficiency and reducing the risk of damaging wafers and equipment.

[0026] It is to be understood that both the foregoing general description and the following detailed description are exemplary, and are intended to provide further explanation of the technology as claimed. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 It is a schematic diagram of the three-dimensional structure when a front-opening wafer transfer box is placed on an existing workstation.

[0028] Figure 2 Schematic diagram of the action of the existing robotic arm moving to the workstation to prepare for picking up materials.

[0029] Figure 3 It is a schematic diagram of the front structural view of a robot calibration fixture for a front-opening wafer transfer box according to an embodiment of the utility model.

[0030] Figure 4 It is a schematic diagram of the top view of the structure of a robot calibration fixture for a front-opening wafer transfer box according to an embodiment of the utility model.

[0031] Figure 5 It is a schematic diagram of the top view of the structure of the robot calibration fixture for the front-opening wafer transfer box when placing a wafer according to an embodiment of the utility model.

[0032] Figure 6 It is a schematic structural diagram of a single-layer bracket of a robot calibration fixture for a front-opening wafer transfer box according to an embodiment of the utility model.

[0033] Figure 7 It is a schematic structural diagram of a double-layer bracket of a robot calibration fixture for a front-opening wafer transfer box according to an embodiment of the utility model.

[0034] Figure 8 It is a bottom view structural schematic diagram of a robot calibration fixture for a front-opening wafer transfer box according to an embodiment of the utility model.

[0035] Fig. 9 It is a schematic diagram of the three-dimensional structure of the robot calibration fixture for the front-opening wafer transfer box according to the embodiment of the utility model when working. DETAILED DESCRIPTION

[0036] The preferred embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings to further illustrate the present invention.

[0037] First, combine Figures 3~9 A robot calibration fixture for a front-opening wafer transfer box according to an embodiment of the utility model is described, which is used to calibrate the working position of a robot arm 8 and has a wide range of application scenarios.

[0038] like Figures 3~9 As shown, a robot calibration fixture for a front-opening wafer transfer box according to an embodiment of the utility model comprises a main frame 1, a positioning mechanism and a supporting mechanism.

[0039] Specifically, Figure 3 , 8As shown, the positioning mechanism is arranged at the bottom of the main frame 1, and is used to position the main frame 1 at a preset position of the external workstation 5. The positioning mechanism comprises: three positioning members 21, and the three positioning members 21 are arranged at the bottom of the main frame 1. The positioning mechanism is consistent with the bottom mechanism of the 12-inch front-opening wafer transfer box 7, simulating the positioning relationship of the front-opening wafer transfer box 7 at the workstation 5.

[0040] Specifically, Figures 3 to 6 As shown, the support mechanism is arranged at the top of the main frame 1, and is used to support the wafer 6 used in the debugging of the robot arm 8. The support mechanism includes: three single-layer brackets 31, and the three single-layer brackets 31 are arranged at the top of the main frame 1 to support the wafer 6. When the wafer 6 with a diameter of 300 mm is placed on the support mechanism, the wafer 6 is completely fixed by the three single-layer brackets 31 on the upper layer of the fixture. At this time, the relative position relationship between the wafer 6 and the workstation 5 is consistent with the position relationship of the wafer 6 when it is in the first layer in the front-opening wafer transfer box 7. In order to meet the requirements of simultaneous positioning of the two robot arms 8, the support mechanism can also be replaced with three double-layer brackets 32, and the three double-layer brackets 32 are arranged at the top of the main frame 1 to support the wafer 6.

[0041] Further, if Figures 6 and 7 As shown, the parts of the three single-layer brackets 31 that support the wafer 6 are chamfered or the parts of the three double-layer brackets 32 that support the wafer 6 are chamfered, and the supporting mechanism is made of self-lubricating material to ensure that the wafer 6 will not be damaged.

[0042] Furthermore, a plurality of hollow parts 4 are provided on the main frame 1, which can reduce the weight while ensuring the rigidity and strength of the main body, so as to facilitate the handling by the installation and commissioning personnel.

[0043] Usage process:

[0044] 1. The calibration jig is placed at a preset position of the workstation 5, and the workstation 5 simulates the opening action of the front-opening wafer pod 7, so that the calibration jig is in the same position as the front-opening wafer pod 7 when the robot takes and places the wafer;

[0045] 2. Move the robot arm 8 to a preset position of the workstation 5 so that the robot arm 8 can take and place the wafer 6;

[0046] 3. Slowly lift the robotic arm 8 so that the wafer 6 can be taken out by the robotic arm 8;

[0047] 4. Slowly lower the robotic arm 8 so that the wafer 6 can accurately fall onto the support mechanism of the fixture;

[0048] 5. At the same time, the pick-up and placement positions of the robot arm 8 are recorded on the robot pendant. The calibration of the robot arm 8 at the preset position of the workstation 5 is completed. Fig. 9 shown)

[0049] Above, refer to Figures 3~9 A robot calibration fixture for a front-opening wafer transfer box according to an embodiment of the utility model is described, which solves the problem that the position of the robot arm 8 for picking up and placing wafers cannot be well observed during the installation and debugging of existing semiconductor equipment. The dual robot arms 8 can also be debugged synchronously, which greatly improves the installation efficiency and reduces the risk of damaging the wafers and equipment.

[0050] It should be noted that, in this specification, the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also includes other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprises..." do not exclude the existence of other identical elements in the process, method, article or device including the elements.

[0051] Although the content of the utility model has been described in detail through the above preferred embodiments, it should be appreciated that the above description should not be considered as a limitation of the utility model. After reading the above content, various modifications and substitutions of the utility model will be obvious to those skilled in the art. Therefore, the protection scope of the utility model should be limited by the attached claims.

Claims

1. A robot calibration fixture for a front-opening wafer pod, characterized in that: Include: Main frame; A positioning mechanism, the positioning mechanism is arranged at the bottom of the main frame, and is used to position the main frame at a preset position of an external workstation; A supporting mechanism is arranged on the top of the main frame and is used to support the wafer.

2. The robot calibration fixture for a front-opening wafer pod as claimed in claim 1, characterized in that: The positioning mechanism comprises: three positioning members, and the three positioning members are arranged at the bottom of the main frame.

3. The robot calibration fixture for a front-opening wafer pod as claimed in claim 1, characterized in that: The supporting mechanism comprises: three single-layer brackets, and the three single-layer brackets are arranged on the top of the main frame and are used for supporting the wafer.

4. The robot calibration fixture for a front-opening wafer pod as claimed in claim 3, characterized in that: The parts of the three single-layer brackets that receive the wafers are chamfered.

5. The robot calibration fixture for front-opening wafer pod as claimed in claim 1, characterized in that: The supporting mechanism comprises: three double-layer brackets, and the three double-layer brackets are arranged on the top of the main frame and are used for supporting wafers.

6. The robot calibration fixture for a front-opening wafer pod as claimed in claim 5, characterized in that: The parts of the three double-layer brackets that receive the wafers are chamfered.

7. The robot calibration fixture for a front-opening wafer pod according to any one of claims 1 to 6, characterized in that: The supporting mechanism is made of self-lubricating material.

8. The robot calibration fixture for front-opening wafer pods as claimed in claim 1, characterized in that: The main frame is provided with a plurality of hollow parts.

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