Electrode silicon ring machining supporting tool

Abstract

The utility model discloses an electrode silicon ring machining supporting tool which comprises a supporting disc, a plurality of inserts are inlaid on the supporting disc, and a base plate located above the inserts is further arranged on the supporting disc. The insert comprises a sleeve arranged in the supporting disc, and the inner wall of the sleeve is provided with threads. According to the utility model, the problem of certain deformation in the heating process of the existing tool is solved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor tooling, in particular to an electrode silicon ring processing support tooling. Background Art

[0002] Fixtures are indispensable tools in modern manufacturing. They play the role of fixing, positioning and supporting workpieces during processing. The design and manufacture of fixtures directly affect the quality and production efficiency of products. With the development and progress of the domestic semiconductor manufacturing industry, the requirements for semiconductor processing fixtures are also increasing. More precise, flexible, efficient and stable fixtures are needed to adapt to the ever-changing production needs.

[0003] However, most domestic semiconductor parts manufacturers are still using metal tooling in production and processing. Metal tooling can easily collide with semiconductor parts, causing the workpiece to be scrapped. Moreover, metal products will deform to a certain extent during the heating process. Excessive deformation will cause the semiconductor parts to deform at the same time during the processing, resulting in a large number of defective products.

[0004] At the same time, most of the materials used in the existing electrode silicon ring tooling are made of aluminum plates. The tooling and the product are bonded together by yellow wax, which requires heating the tooling to melt the yellow wax. When the aluminum tooling is heated, the tooling will deform greatly, which will cause the tooling and the product to be bonded with yellow wax. When the temperature returns to normal, the thermal expansion and contraction deformation will cause the product to deform. In the subsequent processing, the product quality is unqualified. In some cases, the product is directly shattered under the action of thermal expansion and contraction, resulting in the scrapping of the workpiece. Utility Model Content

[0005] In order to solve the problem that the existing tooling has certain deformation during the heating process, which leads to product deformation or even scrapping, the purpose of the utility model is to provide an electrode silicon ring processing support tooling.

[0006] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: an electrode silicon ring processing support tooling, comprising a support plate, a plurality of inserts are inlaid on the support plate, and a pad located above the inserts is also provided on the support plate;

[0007] The insert comprises a sleeve arranged in a supporting plate, and the inner wall of the sleeve is provided with threads.

[0008] Preferably, the support plate is made of quartz.

[0009] Preferably, a through hole is formed on the support plate, a key slot is formed at a bottom port of the support plate located at the bottom of the through hole, and a countersunk groove is formed at a port of the support plate located at the top of the through hole.

[0010] Preferably, the outer wall of the sleeve is slidably connected to the inner wall of the through hole; one end of the sleeve located inside the keyway is fixedly connected to a fixing block, and the outer wall of the fixing block is slidably connected to the inner wall of the keyway.

[0011] Preferably, the outer wall of the sleeve at one end of the sink is threadedly sleeved with a limit plate, and the outer wall of the limit plate is provided with two symmetrically arranged planes.

[0012] Preferably, the pad is provided with a via hole.

[0013] Preferably, the pad is a Saigang plate.

[0014] Compared with the prior art, the utility model achieves the following beneficial effects:

[0015] 1. The tooling is made of quartz material, which has high hardness, is not easy to deform, has good anti-fouling performance, is easy to clean, and is environmentally friendly and healthy.

[0016] 2. The tooling is provided with inserts, which are connected to other components through the inserts, thereby improving the service life of the tooling and avoiding a large number of bump problems.

[0017] 3. When the tooling cooperates with the processing machine, it contacts with other parts through the pad, which is a surface contact, the force is evenly distributed, and the torque that can be withstood is greatly improved, which improves the connection strength between the tooling and the machine tool and ensures that the tooling will not move during processing.

[0018] 4. The utility model reduces the potential safety hazards caused by workpiece deformation, breakage, dewaxing and other tooling during processing, greatly improves the yield rate and reduces processing costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The present invention is further described in detail below with reference to the accompanying drawings and specific implementations:

[0020] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0021] Figure 2 It is a structural schematic diagram of the top surface of the support plate of the utility model;

[0022] Figure 3 This is a schematic diagram of the structure of the bottom of the support plate of the utility model;

[0023] Figure 4 It is a structural schematic diagram of the insert of the utility model.

[0024] In the figure: 1, support plate; 2, insert; 3, pad; 101, through hole; 102, keyway; 103, countersunk groove; 201, sleeve; 202, fixing block; 203, limit plate; 301, through hole. DETAILED DESCRIPTION

[0025] The following is a description of the implementation of the present invention by means of specific embodiments. People familiar with the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification.

[0026] See also Figures 1 to 4 It should be noted that the structures, proportions, sizes, etc. illustrated in the drawings in this specification are only used to match the contents disclosed in the specification for people familiar with this technology to understand and read, and are not used to limit the limiting conditions for the implementation of the utility model, so they have no substantial technical significance. Any modification of the structure, change in the proportion relationship, or adjustment of the size should still fall within the scope of the technical content disclosed by the utility model without affecting the effects and purposes that can be achieved by the utility model. At the same time, the terms such as "upper", "lower", "left", "right", "middle" and "one" quoted in this specification are only for the convenience of description, and are not used to limit the scope of the implementation of the utility model. The change or adjustment of their relative relationship should also be regarded as the scope of the implementation of the utility model without substantially changing the technical content.

[0027] The utility model provides a technical solution: an electrode silicon ring processing support tool, comprising a support plate 1, a plurality of inserts 2 are inlaid on the support plate 1, and a pad 3 located above the inserts 2 is also arranged on the support plate 1.

[0028] The top surface of the support plate 1 and the bottom port of the electrode silicon ring are bonded by yellow wax. The support plate 1 needs to be heated to melt the yellow wax, and then solidified to bond with the electrode silicon ring.

[0029] The insert 2 includes a sleeve 201 disposed in the support plate 1, and the inner wall of the sleeve 201 is provided with threads, which are used to cooperate with bolts to install the tooling;

[0030] The threads also allow for a handle to be mounted, by which the tool can be lifted.

[0031] The support plate 1 is made of quartz to avoid thermal expansion and contraction.

[0032] The support plate 1 is provided with a through hole 101 , a key slot 102 is provided at a bottom port of the support plate 1 located at the bottom of the through hole 101 , and a sink 103 is provided at a port of the support plate 1 located at the top of the through hole 101 .

[0033] The outer wall of the sleeve 201 is slidably connected to the inner wall of the through hole 101 ; one end of the sleeve 201 located inside the keyway 102 is fixedly connected to a fixing block 202 , and the outer wall of the fixing block 202 is slidably connected to the inner wall of the keyway 102 .

[0034] The outer wall of the sleeve 201 at one end of the sink 103 is threadedly sleeved with a limit plate 203 , and the outer wall of the limit plate 203 is provided with two symmetrically arranged planes.

[0035] The pad 3 is provided with a via hole 301 .

[0036] The backing plate 3 is a Saigang steel plate.

[0037] After the tooling is made of quartz material, the tooling performance is stable when heated from room temperature to the wax melting temperature, and the deformation can meet the processing requirements. Quartz material has high hardness, small deformation, good anti-fouling performance, easy cleaning, environmental protection and health. Compared with the heating deformation of aluminum tooling base, it is more suitable for tooling materials.

[0038] Since the quartz material has high hardness, direct contact can easily cause cracking, and the resulting cracks affect the service life of the tooling. Therefore, in order to avoid direct contact between the quartz tooling and the handle and mounting bolts, we set up insert 2, which improves the service life of the tooling and avoids a large number of bump problems.

[0039] When the tooling is matched with the processing machine, most of the industry directly uses bolts and rubber pads to match the machine tool. When the tightening torque is too large, it will also cause cracks in the quartz tooling, thereby causing the tooling to be scrapped and increasing costs. Therefore, we set up a pad 3, and the contact mode is changed from the previous point contact to the improved surface contact. The advantage of the improvement is that the tooling is evenly stressed, and the torque it can withstand is greatly improved compared to metal connectors, which improves the connection strength between the tooling and the machine tool, ensuring that the tooling will not move during processing.

[0040] The tooling scheme of the utility model breaks the uncertainty factors brought by the existing tooling scheme when processing workpieces, reduces the safety hazards caused by tooling such as workpiece deformation, easy breakage, and dewaxing during the processing process, greatly improves the yield rate, and reduces processing costs.

[0041] The above embodiments are merely illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. Anyone familiar with the technology may modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by a person of ordinary skill in the art without departing from the spirit and technical concept disclosed in the present invention shall still be covered by the claims of the present invention.

Claims

1. An electrode silicon ring processing support tool, comprising a support plate (1), characterized in that: The support plate (1) is inlaid with a plurality of inlays (2), and the support plate (1) is also provided with a pad (3) located above the inlays (2); The insert (2) comprises a sleeve (201) arranged in the support plate (1), and the inner wall of the sleeve (201) is provided with threads.

2. The electrode silicon ring processing support tooling according to claim 1, characterized in that: The support plate (1) is made of quartz.

3. The electrode silicon ring processing support tooling according to claim 1, characterized in that: The support plate (1) is provided with a through hole (101), a key groove (102) is provided at a bottom port of the support plate (1) located at the bottom of the through hole (101), and a sink groove (103) is provided at a port of the support plate (1) located at the top of the through hole (101).

4. The electrode silicon ring processing support tooling according to claim 2, characterized in that: The outer wall of the sleeve (201) is slidably connected to the inner wall of the through hole (101); one end of the sleeve (201) located inside the keyway (102) is fixedly connected to a fixing block (202), and the outer wall of the fixing block (202) is slidably connected to the inner wall of the keyway (102).

5. The electrode silicon ring processing support tooling according to claim 3, characterized in that: The outer wall of the sleeve (201) at one end of the sink (103) is threadedly sleeved with a limit plate (203), and the outer wall of the limit plate (203) is provided with two symmetrically arranged planes.

6. The electrode silicon ring processing support tooling according to claim 1, characterized in that: The pad (3) is provided with a via hole (301).

7. The electrode silicon ring processing support tooling according to claim 1, characterized in that: The pad (3) is a Saigang steel plate.

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