Carrier plate conveying device for vacuum coating equipment

Abstract

The utility model relates to the technical field of silicon wafer conveying devices, in particular to a carrier plate conveying device for vacuum coating equipment, which comprises a conveying frame, a rotating shaft is rotatably arranged on the conveying frame, and one end, positioned in the conveying frame, of the rotating shaft is connected with a supporting wheel for supporting a carrier plate. The supporting wheels are provided with rolling assemblies used for reducing friction force between the C-shaped supporting parts of the carrier plate and the supporting wheels. According to the conveying device, the friction force generated between the C-shaped supporting parts and the supporting wheels can be reduced, and the conveying effect on the carrier plate is guaranteed.

Description

Technical Field

[0001] The present application relates to the technical field of silicon wafer conveying devices, and in particular to a carrier conveying device for vacuum coating equipment. Background Art

[0002] In the production process of crystalline silicon solar cells, a film layer needs to be generated on the surface of the silicon wafer, which has the functions of passivating the surface of the silicon wafer and reducing light reflection. In the current production process, the silicon wafers are usually arranged and placed on a carrier, and then the carrier with the silicon wafers is transported to the magnetron sputtering cathode module, and then the carrier is transported to the coating position by the conveying device in the magnetron sputtering cathode module, and a film layer is generated on the surface of the silicon wafer by magnetron sputtering coating.

[0003] The existing conveying device usually includes a conveying frame, a supporting wheel and a driving structure. The supporting wheel is rotatably mounted on the conveying frame. The driving structure is arranged on the conveying frame and is used to drive the supporting wheel to rotate. The carrier includes a bearing portion and two C-shaped supporting portions. The two C-shaped supporting portions are fixedly connected to opposite sides of the bearing portion. During the use of the conveying device, the supporting wheel is inserted into the C-shaped supporting portion and supports the C-shaped supporting plate. The driving structure drives the supporting wheel to rotate, so that the C-shaped supporting portion moves under the drive of the supporting wheel, thereby realizing the conveyance of the carrier and the silicon wafer.

[0004] However, during the conveying process, since the direction of the carrier plate will shift during movement, the position of the C-shaped support portion may shift, making it easy for the C-shaped support portion to collide with the side wall of the support wheel, thereby easily causing a large friction force between the C-shaped support portion and the support wheel, and thus easily affecting the conveying effect of the carrier plate. Utility Model Content

[0005] In order to reduce the friction force generated between the C-shaped support portion and the support wheel and ensure the conveying effect of the carrier, the present application provides a carrier conveying device for vacuum coating equipment.

[0006] The present application provides a plate carrier conveying device for vacuum coating equipment, which adopts the following technical solution:

[0007] A carrier conveying device for vacuum coating equipment includes a conveying frame, a rotating shaft is rotatably arranged on the conveying frame, one end of the rotating shaft located inside the conveying frame is connected to a support wheel for supporting the carrier, and the support wheel is provided with a rolling component for reducing the friction between the C-shaped support portion of the carrier and the support wheel.

[0008] By adopting the above technical solution, when the C-shaped support portion of the carrier is close to the side wall of the support wheel, the rolling assembly helps to roll against the C-shaped support portion, thereby helping to reduce the friction between the C-shaped support portion of the carrier and the support wheel, and further helping to ensure the conveying effect of the carrier.

[0009] In a specific possible implementation scheme, the rolling assembly includes a ball and a limit plate, a mounting groove is opened on the side wall of the support wheel facing the carrier plate, the ball is rollingly arranged in the mounting groove, the limit plate is fixedly arranged on the side wall of the support wheel facing the carrier plate, and the support wheel is provided with a clearance hole for making way for the ball, the aperture of the clearance hole is smaller than the diameter of the ball, and the ball protrudes from the side wall surface of the support wheel facing the carrier plate.

[0010] By adopting the above technical solution, when the C-shaped support portion of the carrier plate is close to the side wall of the support wheel, the ball bearings are used to contact the C-shaped support portion, thereby preventing the C-shaped support portion from contacting the side wall of the support wheel, so that the C-shaped support portion can drive the ball bearings to roll while moving, thereby helping to reduce the friction resistance encountered by the C-shaped support portion during movement, thereby improving the smoothness of the carrier plate movement and ensuring the conveying effect of the carrier plate.

[0011] In a specific possible implementation manner, an oil groove for storing lubricating oil is provided on the support wheel, and the oil groove is located inside the mounting groove and arranged on the groove wall of the mounting groove.

[0012] By adopting the above technical solution, the lubricating oil placed inside the oil tank helps to reduce the friction force encountered by the ball during the rolling process in the mounting groove, thereby helping to further reduce the friction resistance encountered by the C-shaped support part during the movement, further improving the smoothness of the movement of the carrier plate, and further ensuring the conveying effect of the carrier plate.

[0013] In a specific possible implementation scheme, the rolling assembly includes a rolling wheel, a central shaft and a rolling column, a cylindrical groove is opened on the side wall of the support wheel facing the carrier plate, the rolling column is rotatably arranged in the cylindrical groove, and a limiting assembly is arranged on the conveying frame, and the limiting assembly is used to keep the relative position between the rolling column and the conveying frame unchanged;

[0014] A placement groove is provided on the side wall of the rolling column facing the carrier plate, the central axis is arranged in the placement groove, the rolling wheel is rotatably sleeved on the central axis, and the distance between the circumferential outer wall of the rolling wheel and the axis of the central axis is greater than the distance between the side wall of the rolling column facing the carrier plate and the axis of the central axis.

[0015] By adopting the above technical solution, when the C-shaped support portion of the carrier plate is close to the side wall of the support wheel, the rolling wheel is used to contact the C-shaped support portion, thereby preventing the C-shaped support portion from contacting the side wall of the support wheel, so that the C-shaped support portion can drive the rolling wheel to rotate while moving, thereby helping to reduce the friction resistance of the C-shaped support portion during movement, improving the smoothness of the carrier plate movement, and ensuring the conveying effect of the carrier plate. The use of the limit assembly helps to keep the relative position between the rolling column and the conveying frame unchanged, thereby helping to ensure that the rolling wheel and the C-shaped support portion always maintain linear contact, ensuring the use effect of the rolling wheel.

[0016] In a specific possible implementation scheme, the limiting assembly includes a connecting rod and a plug connector, one end of the connecting rod is connected to the conveying frame, the other end of the connecting rod is located on the side of the rolling column facing the carrier plate, and the distance between the connecting rod and the side wall of the rolling column facing the carrier plate is smaller than the distance between the circumferential outer wall of the rolling wheel and the side wall of the rolling column facing the carrier plate, the plug connector is arranged at one end of the connecting rod close to the rolling column, the rolling column is provided with a plug hole, and the plug connector is plugged into the plug hole.

[0017] By adopting the above technical solution, the connection between the plug connector and the plug hole helps to keep the relative position between the rolling column and the conveying frame unchanged, thereby helping to ensure that the rolling wheel and the C-shaped support portion always maintain linear contact, thereby ensuring the use effect of the rolling wheel.

[0018] In a specific possible implementation manner, the central axis is arranged in a cylindrical shape, and the side edge of the central axis is engaged with the groove wall of the placement groove.

[0019] By adopting the above technical solution and utilizing the shape of the central axis, it is helpful to limit the position of the central axis.

[0020] In a specific feasible implementation scheme, a first threaded hole is opened on the central axis, a second threaded hole is opened on the groove wall of the placement groove, and the first threaded hole is aligned with the second threaded hole, an adjusting screw is inserted into the first threaded hole, the end of the adjusting screw is threadedly connected to the second threaded hole, and a locking nut is provided on the adjusting screw, and the locking nut is used to lock the central axis.

[0021] By adopting the above technical solution, the position of the central axis can be adjusted by using an adjusting screw, thereby adjusting the position of the rolling wheel, which helps to limit the minimum distance between the C-shaped support part and the support wheel; the locking nut helps to tighten the central axis, thereby helping to improve the stability of the central axis after the position is adjusted.

[0022] In a specific possible implementation manner, a marking scale is provided on the groove wall of the placement groove, and the marking scale is arranged along the moving direction of the central axis in the placement groove.

[0023] By adopting the above technical solution, when adjusting the position of the central axis, observation of the marking scale helps to improve the accuracy of the adjustment position of the central axis.

[0024] In a specific possible implementation manner, an annular groove is provided on the circumferential outer wall of the support wheel, and a rubber support ring is provided in the annular groove.

[0025] By adopting the above technical solution, the use of a rubber support ring helps to increase the rolling friction between the support wheel and the C-shaped support portion, thereby preventing slippage between the support wheel and the C-shaped support portion, thereby helping to ensure the conveying effect of the carrier.

[0026] In summary, the present application includes at least one of the following beneficial technical effects:

[0027] 1. The present application provides a rolling assembly, which helps to roll against the C-shaped support portion, thereby helping to reduce the friction resistance encountered by the C-shaped support portion of the carrier during movement, thereby helping to ensure the conveying effect of the carrier.

[0028] 2. In the present application, the lubricating oil in the oil groove helps to reduce the friction force encountered by the ball in the rolling process in the installation groove, thereby helping to further reduce the friction resistance encountered by the C-shaped support part during the movement, further improving the smoothness of the movement of the carrier plate, and further ensuring the conveying effect of the carrier plate.

[0029] 3. The present application provides a rubber support ring which helps to increase the rolling friction between the support wheel and the C-shaped support portion, thereby preventing slippage between the support wheel and the C-shaped support portion, thereby helping to ensure the conveying effect of the carrier plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 It is a schematic diagram of the overall structure of Example 1 of the present application.

[0031] Figure 2 It is a partial structural diagram of Example 1 of the present application.

[0032] Figure 3 It is a partial structural diagram reflecting the specific structure of the rolling component in Example 1.

[0033] Figure 4 It is a partial structural cross-sectional view of Example 2.

[0034] Figure 5 yes Figure 4 Enlarged view of point A in the middle.

[0035] Figure 6 It is a cross-sectional view showing the specific internal structure of the support wheel in Example 2.

[0036] Figure 7 It is a partial structural diagram reflecting the specific structure of the rolling component in Example 2.

[0037] Explanation of the reference numerals in the accompanying drawings: 1. conveying frame; 2. rotating shaft; 3. supporting wheel; 4. rolling assembly; 41. ball bearing; 42. limiting plate; 43. rolling wheel; 44. central axis; 45. rolling column; 5. mounting groove; 6. clearance hole; 7. oil groove; 8. placement groove; 9. first threaded hole; 10. second threaded hole; 11. adjusting screw; 12. locking nut; 13. marking scale; 14. annular groove; 15. rubber support ring; 16. carrier plate; 161. bearing part; 162. C-shaped supporting part; 17. cylindrical groove; 18. limiting assembly; 181. connecting rod; 182. plug connector; 19. plug hole. DETAILED DESCRIPTION

[0038] The present application is further described in detail below in conjunction with the accompanying drawings.

[0039] Embodiment 1:

[0040] The present application embodiment discloses a carrier conveying device for vacuum coating equipment, referring to Figure 1 and Figure 2 , including a conveying frame 1, on which multiple rotating shafts 2 are rotatably installed on the opposite side walls in the width direction of the conveying frame 1, one end of the multiple rotating shafts 2 located outside the conveying frame 1 is connected to a driving structure (not shown in the figure), and one end of each rotating shaft 2 located inside the conveying frame 1 is fixedly connected to a supporting wheel 3, and a rolling component 4 is provided on the supporting wheel 3.

[0041] Reference Figure 2 and Figure 3 The rolling assembly 4 includes a ball 41 and a limit plate 42. A mounting groove 5 is provided on the side wall of the support wheel 3 facing the carrier plate 16, and the mounting groove 5 is hemispherical. An oil groove 7 is provided on the side wall of the support wheel 3, and the oil groove 7 is filled with lubricating oil. The oil groove 7 is located inside the mounting groove 5 and arranged on the groove wall of the mounting groove 5. The ball 41 is rollingly installed in the mounting groove 5, and the limit plate 42 is fixedly installed on the side wall of the support wheel 3 facing the carrier plate 16 by bolts, and a clearance hole 6 is provided on the support wheel 3, and the ball 41 partially passes through the clearance hole 6. The aperture of the clearance hole 6 is smaller than the diameter of the ball 41, and the ball 41 protrudes from the side wall surface of the support wheel 3 facing the carrier plate 16.

[0042] Reference Figure 1 and Figure 2During the conveying process of the carrier 16, the driving structure drives the multiple rotating shafts 2 and the supporting wheels 3 to rotate synchronously. At the same time, the multiple supporting wheels 3 support the C-shaped supporting parts 162 on both sides of the carrier 16, so that the multiple supporting wheels 3 drive the carrier 16 to move while rotating.

[0043] Reference Figure 2 and Figure 3 During the movement of the carrier 16, the carrier 16 will shift its position while moving, so that the C-shaped support portion 162 gradually approaches the support wheel 3. When the C-shaped support portion 162 contacts the ball 41, the ball 41 will prevent the C-shaped support portion 162 from continuing to approach the support wheel 3. At the same time, the ball 41 can roll while the C-shaped support portion 162 moves, thereby helping to reduce the friction resistance of the C-shaped support portion 162 during the movement, improving the smoothness of the movement of the carrier 16 and ensuring the conveying effect of the carrier 16.

[0044] Reference Figure 2 and Figure 3 During the rolling process of the ball 41, the lubricating oil inside the oil groove 7 helps to reduce the friction force encountered by the ball 41 during the rolling process in the mounting groove 5, thereby helping to further reduce the friction resistance encountered by the C-shaped support portion 162 during the movement, further improving the smoothness of the movement of the carrier plate 16, and further ensuring the conveying effect of the carrier plate 16.

[0045] Reference Figure 2 and Figure 3 A plurality of annular grooves 14 arranged at intervals are formed on the circumferential outer wall of the support wheel 3, and a rubber support ring 15 is fixedly installed in each annular groove 14. When the carrier 16 is moving, the rubber support ring 15 helps to increase the rolling friction between the support wheel 3 and the C-shaped support portion 162, thereby preventing the support wheel 3 and the C-shaped support portion 162 from slipping, thereby helping to ensure the conveying effect of the carrier 16.

[0046] The implementation principle of the embodiment of the present application is: during the conveying process of the carrier 16, the driving structure drives the multiple rotating shafts 2 and the supporting wheels 3 to rotate synchronously, and at the same time, the multiple supporting wheels 3 support the C-shaped supporting parts 162 on both sides of the carrier 16, so that the multiple supporting wheels 3 drive the carrier 16 to move while rotating.

[0047] During the movement of the carrier 16, the position of the carrier 16 will shift while moving, so that the C-shaped support portion 162 gradually approaches the support wheel 3. When the C-shaped support portion 162 contacts the ball 41, the ball 41 will prevent the C-shaped support portion 162 from continuing to approach the support wheel 3. At the same time, the ball 41 can roll while the C-shaped support portion 162 moves, thereby helping to reduce the friction resistance of the C-shaped support portion 162 during the movement, improving the smoothness of the movement of the carrier 16 and ensuring the conveying effect of the carrier 16.

[0048] During the rolling process of the ball 41, the lubricating oil inside the oil groove 7 helps to reduce the friction force encountered by the ball 41 during the rolling process in the mounting groove 5, thereby helping to further reduce the friction resistance encountered by the C-shaped support portion 162 during the movement, further improving the smoothness of the movement of the carrier plate 16, and further ensuring the conveying effect of the carrier plate 16.

[0049] Embodiment 2:

[0050] Reference Figure 4 and Figure 5 The difference between the embodiment of the present application and embodiment 1 is that the rolling assembly 4 includes a rolling wheel 43, a central axis 44 and a rolling column 45, a cylindrical groove 17 is opened on the side wall of the support wheel 3 facing the carrier plate 16, and the rolling column 45 is rotatably installed in the cylindrical groove 17, and the rolling column 45 is flush with the surface of the support wheel 3.

[0051] Reference Figure 5 and Figure 6 A limit assembly 18 is provided on the conveying frame 1, and the limit assembly 18 includes a connecting rod 181 and a plug connector 182. One end of the connecting rod 181 is fixedly connected to the conveying frame 1, and the other end of the connecting rod 181 is located on the side of the rolling column 45 facing the carrier plate 16, and the distance between the connecting rod 181 and the side wall of the rolling column 45 facing the carrier plate 16 is smaller than the distance between the circumferential outer wall of the rolling wheel 43 and the side wall of the rolling column 45 facing the carrier plate 16 (not shown in the figure), and the plug connector 182 is fixedly connected to one end of the connecting rod close to the rolling column 45, and the rolling column 45 is provided with a plug hole 19, and the plug connector 182 is plugged into the plug hole 19.

[0052] Reference Figure 5 and Figure 6 When the support wheel 3 rotates, since the plug connector 182 is plugged into the plug hole 19 and the connecting rod is fixedly connected to the conveying frame 1, it helps to keep the relative position between the rolling column 45 and the conveying frame 1 unchanged, so that the position of the rolling wheel 43 will not change with the rotation of the support wheel 3, thereby improving the stability of the position of the rolling wheel 43.

[0053] Reference Figure 6, a placement groove 8 is provided on the side wall of the rolling column 45, and the placement groove 8 is arranged in a cross shape. In this embodiment, the central shaft 44 is arranged in a cylindrical body, and the central shaft 44 can be adjusted to be installed in the placement groove 8, and the opposite two sides of the central shaft 44 are engaged with the groove wall of the placement groove 8. The rolling wheel 43 is rotatably sleeved on the circumferential periphery of the central shaft 44, and the distance between the circumferential outer wall of the rolling wheel 43 and the axis of the central shaft 44 is greater than the distance between the side wall of the rolling column 45 facing the carrier plate 16 and the axis of the central shaft 44.

[0054] Reference Figure 6 During the movement of the carrier 16, the carrier 16 will shift its position while moving, so that the C-shaped support portion 162 gradually approaches the support wheel 3. When the C-shaped support portion 162 contacts the rolling wheel 43, the rolling wheel 43 will prevent the C-shaped support portion 162 from continuing to approach the support wheel 3. At the same time, the rolling wheel 43 can rotate while the C-shaped support portion 162 moves, thereby helping to reduce the friction resistance of the C-shaped support portion 162 during the movement, improving the smoothness of the movement of the carrier 16 and ensuring the conveying effect of the carrier 16.

[0055] Reference Figure 6 and Figure 7 , both ends of the central shaft 44 in the length direction are penetrated with a first threaded hole 9, the groove wall of the placement groove 8 is provided with a second threaded hole 10 aligned with the first threaded hole 9, an adjusting screw 11 is inserted into the first threaded hole 9, the adjusting screw 11 is threadedly connected to the first threaded hole 9, the end of the adjusting screw 11 is threadedly connected to the second threaded hole 10, and a tightening nut 12 is threadedly connected to the adjusting screw 11. By rotating the adjusting screw 11, the central shaft 44 can be driven to move in the placement groove 8, which helps to adjust the position of the rolling wheel 43, and further helps to limit the minimum distance between the C-shaped support portion 162 and the support wheel 3. The tightening nut 12 helps to tighten the central shaft 44, thereby helping to improve the stability of the central shaft 44 after the position is adjusted.

[0056] Reference Figure 6 The groove wall of the placement groove 8 is provided with a marking scale 13, and the marking scale 13 is arranged along the moving direction of the central axis 44 in the placement groove 8. When adjusting the position of the central axis 44, observing the marking scale 13 helps to determine the position of the central axis 44, thereby helping to improve the accuracy of adjusting the position of the central axis 44.

[0057] The implementation principle of the embodiment of the present application is: when the support wheel 3 rotates, since the plug connector 182 is plugged into the plug hole 19 and the connecting rod is fixedly connected to the conveying frame 1, it helps to keep the relative position between the rolling column 45 and the conveying frame 1 unchanged, so that the position of the rolling wheel 43 will not change with the rotation of the support wheel 3, thereby improving the stability of the position of the rolling wheel 43.

[0058] During the movement of the carrier 16, the carrier 16 will shift its position while moving, so that the C-shaped support portion 162 gradually approaches the support wheel 3. When the C-shaped support portion 162 contacts the rolling wheel 43, the rolling wheel 43 will prevent the C-shaped support portion 162 from continuing to approach the support wheel 3, and the rolling wheel 43 can rotate while the C-shaped support portion 162 moves, thereby helping to reduce the friction resistance of the C-shaped support portion 162 during the movement, improving the smoothness of the movement of the carrier 16, and ensuring the conveying effect of the carrier 16.

[0059] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A carrier conveying device for vacuum coating equipment, comprising a conveying frame (1), characterized in that: A rotating shaft (2) is rotatably arranged on the conveying frame (1); one end of the rotating shaft (2) located inside the conveying frame (1) is connected to a support wheel (3) for supporting a carrier plate (16); and a rolling assembly (4) is arranged on the support wheel (3) for reducing friction between a C-shaped support portion (162) of the carrier plate (16) and the support wheel (3).

2. The substrate conveying device for vacuum coating equipment according to claim 1, characterized in that: The rolling assembly (4) comprises a ball (41) and a limiting plate (42); a mounting groove (5) is provided on the side wall of the support wheel (3) facing the carrier plate (16); the ball (41) is rollingly arranged in the mounting groove (5); the limiting plate (42) is fixedly arranged on the side wall of the support wheel (3) facing the carrier plate (16); and a clearance through hole (6) for making way for the ball (41) is provided on the support wheel (3); the aperture of the clearance through hole (6) is smaller than the diameter of the ball (41); and the ball (41) protrudes from the surface of the side wall of the support wheel (3) facing the carrier plate (16).

3. The substrate conveying device for vacuum coating equipment according to claim 2, characterized in that: The support wheel (3) is provided with an oil groove (7) for storing lubricating oil. The oil groove (7) is located inside the mounting groove (5) and arranged on the groove wall of the mounting groove (5).

4. The substrate conveying device for vacuum coating equipment according to claim 1, characterized in that: The rolling assembly (4) comprises a rolling wheel (43), a central shaft (44) and a rolling column (45); a cylindrical groove (17) is provided on the side wall of the supporting wheel (3) facing the carrier plate (16); the rolling column (45) is rotatably arranged in the cylindrical groove (17); a limiting assembly (18) is arranged on the conveying frame (1); the limiting assembly (18) is used to keep the relative position between the rolling column (45) and the conveying frame (1) unchanged; A placement groove (8) is provided on the side wall of the rolling column (45) facing the carrier plate (16), the central axis (44) is arranged in the placement groove (8), the rolling wheel (43) is rotatably sleeved on the central axis (44), and the distance between the circumferential outer wall of the rolling wheel (43) and the axis of the central axis (44) is greater than the distance between the side wall of the rolling column (45) facing the carrier plate (16) and the axis of the central axis (44).

5. The substrate conveying device for vacuum coating equipment according to claim 4, characterized in that: The limit assembly (18) comprises a connecting rod (181) and a plug connector (182), one end of the connecting rod (181) is connected to the conveying frame (1), the other end of the connecting rod (181) is located on the side of the rolling column (45) facing the carrier plate (16), and the distance between the connecting rod (181) and the side wall of the rolling column (45) facing the carrier plate (16) is smaller than the distance between the circumferential outer wall of the rolling wheel (43) and the side wall of the rolling column (45) facing the carrier plate (16), the plug connector (182) is arranged at one end of the connecting rod close to the rolling column (45), the rolling column (45) is provided with a plug hole (19), and the plug connector (182) is plugged into the plug hole (19).

6. The substrate conveying device for vacuum coating equipment according to claim 4, characterized in that: The central axis (44) is arranged in a cylindrical shape, and the side edge of the central axis (44) is engaged with the groove wall of the placement groove (8).

7. The substrate conveying device for vacuum coating equipment according to claim 6, characterized in that: A first threaded hole (9) is provided on the central shaft (44), a second threaded hole (10) is provided on the groove wall of the placement groove (8), and the first threaded hole (9) is aligned with the second threaded hole (10), an adjusting screw (11) is inserted into the first threaded hole (9), the end of the adjusting screw (11) is threadedly connected to the second threaded hole (10), and a tightening nut (12) is provided on the adjusting screw (11), and the tightening nut (12) is used to tighten the central shaft (44).

8. The substrate conveying device for vacuum coating equipment according to claim 7, characterized in that: A marking scale (13) is provided on the groove wall of the placement groove (8), and the marking scale (13) is arranged along the moving direction of the central axis (44) in the placement groove (8).

9. The substrate conveying device for vacuum coating equipment according to claim 1, characterized in that: An annular groove (14) is provided on the circumferential outer wall of the support wheel (3), and a rubber support ring (15) is provided in the annular groove (14).

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