HVPE waste gallium recovery device

Abstract

The utility model discloses an HVPE waste gallium recovery device which comprises an HVPE cavity (1). The top of the first-stage cooling device is communicated with a tail gas exhaust port of the HVPE cavity through a connecting pipe (5), the first-stage cooling device comprises a plurality of layers of platforms which are distributed in a staggered mode in the vertical direction, triangular baffles (203) are arranged on the platforms, and an outlet is formed in the position, located below the bottommost layer of platform, of the first-stage cooling device; one end of the secondary cooling device is communicated with the outlet, and a cooling jacket is arranged outside the secondary cooling device; the filter device (4) is communicated with the other end of the secondary cooling device, and a filter element (401) is arranged in the filter device. The device has the advantages that gallium is separated through the first-stage cooling device, ammonium chloride is deposited through the second-stage cooling device, small particles are filtered through the filtering device, and finally discharged waste gas is pure and cannot block a pipeline.

Description

Technical Field

[0001] The utility model relates to the technical field of gallium nitride production, in particular to an HVPE waste gallium recovery device. Background Art

[0002] Hydride vapor phase epitaxy equipment is a compound growth process equipment, which is mainly used to epitaxially grow a thick film or crystal such as GaN on the substrate surface through hydride gases such as H2 and HCl in a high temperature environment, and also react to generate reactants such as ammonium chloride (NH4Cl, melting point: 340℃, boiling point: 520℃), gallium chloride (GaCl3, melting point: 77.9℃, boiling point: 201.3℃) and incompletely reacted metal gallium (melting point: 29.76℃, boiling point: 2403℃). Due to the current exhaust emission method, ammonium chloride, gallium chloride and liquid gallium are mixed and discharged into the cold trap of the cooling device for deposition, which is easy to cause blockage of the cooling device and the exhaust emission pipeline, and is not conducive to the recovery of gallium.

[0003] China Utility Model Patent Publication No. CN211310868U discloses a device for filtering the waste gas of a gallium nitride production furnace into saturated ammonia water, including a filter, a compressor, an ammonia separator and an ammonia water storage tank. The left side of the filter is connected to an exhaust gas inlet pipe, and a filter layer is arranged inside the filter. The metal particles in the exhaust gas are filtered out and recovered in the filter of this design, and the compressor is pressurized and transported to the ammonia separator. The ammonia becomes liquid ammonia after pressurization and cooling, and then the sprayer dilutes the liquid ammonia to make the liquid ammonia into ammonia water, which is transported to the ammonia water storage tank through an ammonia water pump for storage. The device only performs one filtration and cannot ensure that ammonium chloride, gallium chloride and liquid gallium are completely separated. Utility Model Content

[0004] The technical problem to be solved by the utility model is that the existing gallium nitride waste gas contains a variety of impurities, which makes it difficult to completely separate them through one filtration, and for this purpose, a HVPE waste gallium recovery device is provided.

[0005] The technical solution of the utility model is: an HVPE waste gallium recovery device, comprising: an HVPE cavity; a primary cooling device, the top of the primary cooling device is connected to the tail gas discharge port of the HVPE cavity through a connecting pipe, the primary cooling device includes a plurality of platforms staggered in a vertical direction, a triangular baffle is arranged on the platform, and the primary cooling device is located below the bottom platform and has an outlet; a secondary cooling device, one end of the secondary cooling device is connected to the outlet, and a cooling jacket is arranged outside the secondary cooling device; a filtering device, the filtering device is connected to the other end of the secondary cooling device, and a filter element is built in the filtering device.

[0006] The vertex angle of the triangular baffle in the above solution is 90°-120°.

[0007] The side wall of the secondary cooling device in the above scheme is fixed with a plurality of staggeredly distributed stoppers.

[0008] The stopper in the above solution is made of stainless steel.

[0009] In the above scheme, the inlet of the cooling jacket is opened at the lower part of one side, and the outlet of the cooling jacket is opened at the upper part of the other side.

[0010] The filter device in the above scheme has a built-in filter element fixing device, and a filter element extending downward is fixed to the filter element fixing device. The inlet of the filter device is opened on the side wall of the filter element fixing device located below the filter element fixing device, and the outlet of the filter device is opened on the side wall of the filter element fixing device located above the filter element fixing device.

[0011] The utility model has the beneficial effects that the first-stage cooling device separates gallium, the second-stage cooling device deposits ammonium chloride, the filtering device filters small particles, and the exhaust gas finally discharged is relatively pure and will not block the pipeline. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 It is a schematic diagram of the utility model;

[0013] Figure 2 yes Figure 1 Schematic diagram of the middle level cooling device;

[0014] Figure 3 yes Figure 2 A top view of

[0015] Figure 4 yes Figure 1 Schematic diagram of the middle triangle baffle;

[0016] Figure 5 yes Figure 1 Schematic diagram of the secondary cooling device;

[0017] Figure 6 yes Figure 1 Schematic diagram of the filter device;

[0018] In the figure, 1. HVPE cavity, 2. primary cooling device, 201. upper end of primary cooling device, 202. lower end of primary cooling device, 203. triangular baffle, 3. secondary cooling device, 301. block, 302. inlet, 303. outlet, 4. filtering device, 401. filter element, 402. filter element fixing device, 403. air outlet, 5. connecting pipe. DETAILED DESCRIPTION

[0019] The technical scheme in the embodiment of the utility model is clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiment is only a part of the embodiment of the utility model, not all of the embodiments. Based on the embodiment of the utility model, all other embodiments of ordinary technicians in this field without creative work are within the protection scope of the utility model.

[0020] like Figure 1-6 As shown, the utility model includes: an HVPE cavity 1; a primary cooling device 2, the top of the primary cooling device is connected to the exhaust gas discharge port of the HVPE cavity through a connecting pipe 5, the connecting pipe is wrapped with a heating layer to ensure that the pipe temperature is 350°C-400°C, the primary cooling device includes a plurality of platforms staggered in a vertical direction, a triangular baffle is arranged on the platform, and the primary cooling device is located below the bottom platform and has an outlet; a secondary cooling device 3, one end of the secondary cooling device is connected to the outlet, and a cooling jacket is arranged outside the secondary cooling device; a filtering device 4, the filtering device is connected to the other end of the secondary cooling device, and a filter element 401 is built into the filtering device.

[0021] As a preferred example of the utility model, the vertex angle of the triangular baffle is 90°-120°, so that the gallium can be fully attached and form gallium droplets to drip to the lower end.

[0022] The temperature of the primary cooling device is set at 350-400°C to ensure that gallium is in liquid state and other byproducts are in gaseous state, so that high-purity gallium can drip to the lower end of the cooling device and other byproducts enter the next device. The upper end 201 of the primary cooling device is formed by multiple layers of staggered platforms in the vertical direction, and the lower end 202 of the primary cooling device is formed at the bottom, which is used to store high-purity liquid gallium.

[0023] The secondary cooling device does not heat, and a large amount of ammonium chloride and a small amount of gallium chloride powder are deposited. The secondary cooling device cools the tail gas by-products, so that the by-products are solidified and deposited, which is convenient for cleaning, and at the same time, the small amount of gallium contained in the by-products is recovered. The stainless steel block is used to slow down the flow rate of the gaseous by-products so that they can be fully cooled and deposited. The cooling jacket reduces the temperature of the device, so that a large amount of tail gas is deposited.

[0024] The filter device is used for exhaust gas treatment. Small particles that have not been deposited are filtered in the filter element to prevent them from entering the pipeline and causing pipeline blockage. The filter device is built with a filter element fixing device 402, and a sealing ring is used to seal the filter element. A filter element extending downward is fixed to the filter element fixing device. The inlet of the filter device is opened on the side wall of the filter element fixing device located below the filter element fixing device, and the air outlet 403 of the filter device is opened on the side wall of the filter element fixing device located above the filter element fixing device.

Claims

1. HVPE waste gallium recovery device, characterized by: include: An HVPE chamber (1); a primary cooling device (2), the top of which is connected to the exhaust outlet of the HVPE chamber via a connecting pipe (5), the primary cooling device comprising a plurality of platforms staggered in a vertical direction, a triangular baffle (203) being arranged on the platform, the primary cooling device being located below the bottom platform and having an outlet; a secondary cooling device (3), one end of which is connected to the outlet, the secondary cooling device being provided with a cooling jacket outside; and a filtering device (4), the filtering device being connected to the other end of the secondary cooling device, the filtering device having a filter element (401) built therein.

2. The HVPE waste gallium recovery device according to claim 1, characterized in that: The vertex angle of the triangular baffle is 90°-120°.

3. The HVPE waste gallium recovery device according to claim 1, characterized in that: A plurality of staggeredly distributed stoppers (301) are fixedly connected to the side wall of the secondary cooling device.

4. The HVPE waste gallium recovery device as claimed in claim 3 is characterized by: The stopper is made of stainless steel.

5. The HVPE waste gallium recovery device as claimed in claim 1, characterized in that: The inlet (302) of the cooling jacket is opened at the lower part of one side, and the outlet (303) of the cooling jacket is opened at the upper part of the other side.

6. The HVPE waste gallium recovery device as claimed in claim 1, characterized in that: The filter device has a built-in filter element fixing device (402), a filter element extending downwardly is fixedly connected to the filter element fixing device, the inlet of the filter device is opened on the side wall of the filter element fixing device located below the filter element fixing device, and the air outlet (403) of the filter device is opened on the side wall of the filter element fixing device located above the filter element fixing device.

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