Optical machine calibration device

Abstract

The utility model provides an optical machine calibration device. The optical machine calibration device comprises a laser; the diaphragm is arranged on the light emitting side of the laser, and the clear aperture of the diaphragm is adjustably arranged; the polarization splitting prism is arranged on one side, far away from the laser, of the diaphragm; the reflector is arranged on one side, far away from the laser, of the polarization splitting prism; and the detection camera and the to-be-detected optical machine are respectively arranged at two sides of the polarization splitting prism, and a connecting line between the to-be-detected optical machine and the detection camera is perpendicular to a connecting line between the laser and the reflector and intersects with the connecting line at the polarization splitting prism. According to the utility model, the problems of low efficiency and high difficulty in optical machine calibration in the prior art are solved.

Description

Technical Field

[0001] The utility model relates to the technical field of optical machine detection equipment, in particular to an optical machine calibration device. Background Art

[0002] As key modules such as high-computing chips and optical modules become increasingly highly integrated, wearable devices have become possible. AR glasses, with their advantages of integrating computing, projection and other functions, have become a typical representative of wearable devices. They can be applied to education, medical treatment, industry, entertainment and other fields, bringing great convenience to people's study, life and work.

[0003] Compared with MicroLED, DLP, and LBS optical machines, LCOS optical machines are more common in AR glasses, with advantages such as high light utilization and high resolution. LCOS optical machines can be divided into lighting modules and imaging modules according to their functions. The lighting module evenly illuminates the surface of the LCOS chip, and the imaging module projects the image on the surface of the LCOS chip. The LCOS chip is a key component that connects the lighting module and the imaging module. Its positional changes such as position offset and tilt have a great influence on the projection effect. Therefore, during the assembly process of the LCOS optical machine, active alignment is required to adjust the LCOS chip to the optimal position relative to other structures in the optical machine to achieve the best projection effect.

[0004] Before the LCOS chip is actively aligned, it is necessary to align each component on the device one by one, then align the optical machine lens, and finally align the LCOS chip relative to the lens to the optimal position. The entire alignment process is relatively complicated, and some devices even need to move key components. The back-and-forth movement may cause the key components to be misaligned and may require recalibration, resulting in a low efficiency and difficulty in the calibration process.

[0005] In other words, the optical-mechanical calibration in the prior art has the problems of low efficiency and great difficulty. Utility Model Content

[0006] The main purpose of the utility model is to provide an optical machine calibration device to solve the problems of low efficiency and great difficulty in optical machine calibration in the prior art.

[0007] In order to achieve the above-mentioned purpose, the utility model provides an optical machine calibration device, comprising: a laser; an aperture, the aperture is arranged on the light-emitting side of the laser, and the aperture of the aperture can be adjusted; a polarization beam splitter prism, the polarization beam splitter prism is arranged on the side of the aperture away from the laser; a reflector, the reflector is arranged on the side of the polarization beam splitter prism away from the laser; a detection camera, the detection camera and the optical machine to be measured are respectively arranged on both sides of the polarization beam splitter prism, and the connection line between the optical machine to be measured and the detection camera is perpendicular to the connection line between the laser and the reflector and intersects at the polarization beam splitter prism.

[0008] Furthermore, the optical machine calibration device also includes a field lens, which is arranged between the optical machine to be measured and the polarization beam splitter prism.

[0009] Furthermore, the optical machine calibration device also includes a rotatable first dimming plate, a second dimming plate and a third dimming plate, each of which has a hollow area and a light blocking area. The first dimming plate is located between the polarization splitter prism and the detection camera, the second dimming plate is located between the polarization splitter prism and the reflector, and the third dimming plate is located between the optical machine to be measured and the polarization splitter prism.

[0010] Furthermore, the hollow area and the light blocking area of ​​the first dimming film are arranged around the circumference of the first dimming film, and the hollow area and the light blocking area are both fan-shaped; and / or the area of ​​the hollow area of ​​the first dimming film is smaller than the area of ​​the light blocking area of ​​the first dimming film.

[0011] Furthermore, the second dimming plate also has a 1 / 4 wave plate area, and the hollow area, the 1 / 4 wave plate area and the light blocking area are arranged around the circumference of the second dimming plate.

[0012] Furthermore, the third dimming plate also has a 1 / 2 wave plate area, and the 1 / 2 wave plate area, the light blocking area and the hollow area are arranged around the circumference of the third dimming plate.

[0013] Furthermore, the optical machine calibration device also includes a plurality of adjustable bases, and the polarization beam splitter prism, the reflector, the detection camera and the optical machine to be measured are arranged on different adjustable bases.

[0014] Furthermore, the diaphragm is circular or polygonal, and the adjustment range of the aperture of the diaphragm is greater than 0.2 mm and less than 5 mm.

[0015] Furthermore, the diameter of the laser beam is less than 5 mm.

[0016] Furthermore, the field of view angle FOV of the detection lens of the detection camera satisfies: 20° <FOV<80°。

[0017] By applying the technical solution of the utility model, the optical machine calibration device includes a laser, an aperture, a polarization beam splitter prism, a reflector and a detection camera, wherein the aperture is arranged on the light-emitting side of the laser, and the aperture of the aperture can be adjusted; the polarization beam splitter prism is arranged on the side of the aperture away from the laser; the reflector is arranged on the side of the polarization beam splitter prism away from the laser; the detection camera and the optical machine to be measured are respectively arranged on both sides of the polarization beam splitter prism, and the connection line between the optical machine to be measured and the detection camera is perpendicular to the connection line between the laser and the reflector and intersects at the polarization beam splitter prism.

[0018] The laser of the present application is used to output lasers for testing. The size of the aperture of the diaphragm can be adjusted to obtain laser beams of different sizes. Then, by setting a polarization beam splitter prism, the polarization beam splitter prism can transmit and reflect light of different polarization states, thereby projecting the light to the reflector. Then, the reflector inputs the light into the optical machine to be measured through the polarization beam splitter prism. The light emitted by the optical machine to be measured enters the detection camera. The optical machine to be measured is calibrated or the installation position of the chip in the optical machine to be measured is determined according to the image obtained in the detection camera. The optical machine calibration device of the present application can realize the calibration of the optical machine to be measured and the determination of the installation of the lens and LCOS chip therein. There is no need to move key components during calibration and alignment, thus avoiding the reduction in efficiency caused by moving key components. At the same time, the optical machine is calibrated by the optical machine calibration device of the present application, which is simple to operate and has low difficulty, which is conducive to ensuring the reliability of the optical machine calibration device and further ensuring the reliability and accuracy of the optical machine calibration. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The drawings constituting part of the present application are used to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation on the present invention. In the drawings:

[0020] Figure 1 A schematic diagram showing the structure of an optical-mechanical calibration device according to an optional embodiment of the utility model is shown;

[0021] Figure 2 Shows Figure 1 A schematic diagram of the structure of the optical machine to be measured and its adjustable base;

[0022] Figure 3 Shows Figure 2 A schematic diagram of another angle of the light machine to be measured and its adjustable base;

[0023] Figure 4 Shows Figure 1 A schematic diagram of the calibration of the polarization beam splitter prism, the reflector and the detection camera of the optical-mechanical calibration device;

[0024] Figure 5 Shows Figure 1 A schematic diagram of calibration of the field lens of the optical-mechanical calibration device;

[0025] Figure 6 Shows the use of Figure 1 Schematic diagram of the optical machine calibration device calibrating the optical machine to be measured;

[0026] Figure 7 Shows the use of Figure 1 A schematic diagram of the calibration device for calibrating LCOS chips;

[0027] Figure 8 Shows the use of Figure 1 Another schematic diagram of the calibration device for calibrating LCOS chips.

[0028] The above drawings include the following reference numerals:

[0029] 10. Laser; 20. Aperture; 30. Polarization beam splitter; 40. Reflector; 50. Detection camera; 60. Field lens; 71. First dimming plate; 72. Second dimming plate; 73. Third dimming plate; 74. Hollow area; 75. Light blocking area; 76. 1 / 4 wave plate area; 77. 1 / 2 wave plate area; 80. Adjustable base; 81. X-axis direction adjustment knob; 82. Y-axis direction adjustment knob; 83. Z-axis direction adjustment knob; 84. θy adjustment knob; 85. θz adjustment knob; 90. Light machine to be measured; 91. LCOS chip. DETAILED DESCRIPTION

[0030] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application can be combined with each other. The present utility model will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0031] It should be noted that, unless otherwise specified, all technical and scientific terms used in this application have the same meanings as commonly understood by ordinary technicians in the technical field to which this application belongs.

[0032] In the present invention, unless otherwise specified, the directional words used, such as "up, down, top, bottom", usually refer to the directions shown in the drawings, or to the components themselves in the vertical, perpendicular or gravity directions; similarly, for ease of understanding and description, "inside and outside" refer to the inside and outside relative to the outline of each component itself, but the above-mentioned directional words are not used to limit the present invention.

[0033] In order to solve the problems of low efficiency and great difficulty in optical-mechanical calibration in the prior art, the utility model provides an optical-mechanical calibration device.

[0034] like Figures 1 to 8 As shown, the optical machine calibration device includes a laser 10, an aperture 20, a polarization beam splitter prism 30, a reflector 40 and a detection camera 50. The aperture 20 is arranged on the light-emitting side of the laser 10, and the aperture of the aperture 20 can be adjusted; the polarization beam splitter prism 30 is arranged on the side of the aperture 20 away from the laser 10; the reflector 40 is arranged on the side of the polarization beam splitter prism 30 away from the laser 10; the detection camera 50 and the optical machine 90 to be measured are respectively arranged on both sides of the polarization beam splitter prism 30, and the connecting line between the optical machine 90 to be measured and the detection camera 50 is perpendicular to the connecting line between the laser 10 and the reflector 40 and intersects at the polarization beam splitter prism 30.

[0035] The laser 10 of this application is used to output laser for testing. By adjusting the size of the light passing aperture of the diaphragm 20, laser beams of different sizes can be obtained. Then, by setting the polarization beam splitter prism 30, the polarization beam splitter prism 30 can transmit and reflect light of different polarization states, so as to project the light onto the mirror 40. Then, the mirror 40 inputs the light into the optical engine 90 to be measured through the polarization beam splitter prism 30. The light emitted by the optical engine 90 to be measured enters the detection camera 50. According to the image obtained in the detection camera 50, the optical engine 90 to be measured is calibrated or the installation position of the chip in the optical engine 90 to be measured is determined. The optical engine calibration device of this application can realize the calibration of the optical engine 90 to be measured and the determination of the installation of the lens and the LCOS chip 91 therein. When calibrating and aligning, there is no need to move key components, avoiding the reduction in efficiency caused by moving key components. At the same time, by calibrating the optical engine with the optical engine calibration device of this application, the operation is simple and the difficulty is low, which is beneficial to ensuring the reliability of the optical engine calibration device and further ensuring the reliability and accuracy of the optical engine calibration.

[0036] It should be noted that the above-mentioned laser 10 preferably adopts a solid or gas laser 10 with adjustable power. The wavelength of the laser 10 is in the visible light range of 380nm < λ < 700nm. The output power of the laser 10 satisfies: 0.2mW < W < 10mW. The diameter of the beam of the laser 10 is less than 5mm. In a specific embodiment of this application, the laser 10 adopts a He-Ne laser.

[0037] It also should be noted that the above-mentioned detection camera 50 is composed of a detection lens and a CCD, and can image the incident light on the CCD and display it on the screen of the computer. The field of view angle FOV of the detection lens of the detection camera 50 satisfies: 20° < FOV < 80°. The number of pixels per unit angle PPD after the detection lens is matched with the CCD > 30.

[0038] Specifically, the above-mentioned mirror 40 is a plane mirror 40, which can perform specular reflection on the incident beam. The above-mentioned polarization beam splitter prism 30 is cube-shaped, with a side length greater than 3mm and less than 20mm. The polarization beam splitter prism 30 is composed of two triangular prisms and a polarization film. The polarization film is attached between the two triangular prisms, and the projection line of the attachment surface on the XY plane forms an angle of 45° with the X axis. The polarization beam splitter prism 30 is used to reflect S light and transmit P light.

[0039] As Figure 1 shown, the optical engine calibration device further includes a field lens 60. The field lens 60 is arranged between the optical engine 90 to be measured and the polarization beam splitter prism 30. The field lens 60 is used to shape and control the beam passing through it. The field lens 60 is matched with the optical engine 90 to be measured and the detection camera 50, and transfers the light emitted by the optical engine 90 to be measured into the detection camera 50, so that the image projected by the optical engine 90 to be measured completely enters the detection camera 50 to avoid image loss.

[0040] Specifically, the optical machine calibration device further includes a first dimming sheet 71, a second dimming sheet 72, and a third dimming sheet 73 that can be rotatably arranged. The first dimming sheet 71, the second dimming sheet 72, and the third dimming sheet 73 all have a hollow area 74 and a light blocking area 75. The first dimming sheet 71 is located between the polarization beam splitter prism 30 and the detection camera 50, the second dimming sheet 72 is located between the polarization beam splitter prism 30 and the reflector 40, and the third dimming sheet 73 is located between the optical machine to be measured 90 and the polarization beam splitter prism 30. By setting the first dimming sheet 71, the second dimming sheet 72, and the third dimming sheet 73 to be rotatable, the rotational positions of the first dimming sheet 71, the second dimming sheet 72, and the third dimming sheet 73 can be adjusted so that the light beam corresponds to the hollow area 74 or the light blocking area 75, thereby achieving different alignment effects.

[0041] like Figure 1 As shown, the first dimming sheet 71 is circular, and the hollow area 74 and the light blocking area 75 of the first dimming sheet 71 are arranged sequentially around the circumference of the first dimming sheet 71, and the hollow area 74 and the light blocking area 75 are both fan-shaped, and the area of ​​the hollow area 74 of the first dimming sheet 71 is smaller than the area of ​​the light blocking area 75 of the first dimming sheet 71. As can be seen from the figure, the light blocking area 75 of the first dimming sheet 71 occupies at least 3 / 4 of the first dimming sheet 71, and the hollow area 74 of the first dimming sheet 71 occupies at least 1 / 4 of the first dimming sheet 71. It is equivalent to that the first dimming sheet 71 only has the hollow area 74 and the light blocking area 75. When the first dimming sheet 71 is rotated so that the hollow area 74 corresponds to the light beam, the first dimming sheet 71 is in a light-transmitting state; when the first dimming sheet 71 is rotated so that the light blocking area 75 receives the light beam, the first dimming sheet 71 is in a light-blocking state.

[0042] like Figure 1 As shown, the second dimming plate 72 is circular, and the second dimming plate 72 also has a 1 / 4 wave plate area 76, and the hollow area 74, the 1 / 4 wave plate area 76 and the light blocking area 75 are arranged around the circumference of the second dimming plate 72. Specifically, the circular second dimming plate 72 is divided into four fan-shaped areas, and the four fan-shaped areas are respectively two light blocking areas 75, a hollow area 74 and a 1 / 4 wave plate area 76, the 1 / 4 wave plate area 76 is arranged opposite to the hollow area 74, and the two light blocking areas 75 are arranged opposite to each other. When the second dimming plate 72 is rotated so that the hollow area 74 corresponds to the light beam, the second dimming plate 72 is in a light-transmitting state; when the second dimming plate 72 is rotated so that the light blocking area 75 receives the light beam, the second dimming plate 72 is in a light blocking state; when the second dimming plate 72 is rotated so that the 1 / 4 wave plate area 76 receives the light beam, the second dimming plate 72 is in a 1 / 4 wave plate action state.

[0043] like Figure 1As shown, the third dimming plate 73 is circular, and the third dimming plate 73 also has a 1 / 2 wave plate area 77, and the 1 / 2 wave plate area 77, the light blocking area 75 and the hollow area 74 are arranged around the circumference of the third dimming plate 73. Specifically, the circular third dimming plate 73 is divided into four fan-shaped areas, and the four fan-shaped areas are respectively two light blocking areas 75, a hollow area 74 and a 1 / 2 wave plate area 77, the 1 / 2 wave plate area 77 is arranged opposite to the hollow area 74, and the two light blocking areas 75 are arranged opposite to each other. When the third dimming plate 73 is rotated so that the hollow area 74 corresponds to the light beam, the third dimming plate 73 is in a light-transmitting state; when the third dimming plate 73 is rotated so that the light blocking area 75 receives the light beam, the third dimming plate 73 is in a light-blocking state; when the third dimming plate 73 is rotated so that the 1 / 2 wave plate area 77 receives the light beam, the third dimming plate 73 is in a 1 / 2 wave plate action state.

[0044] Specifically, the optical machine calibration device also includes a plurality of adjustable bases 80, and the polarization beam splitter prism 30, the reflector 40, the detection camera 50, the field lens 60, and the optical machine to be measured 90 are arranged on different adjustable bases 80. The adjustable base 80 can realize the adjustment of the structure on it on the X-axis, the Y-axis and the Z-axis, and can also realize the adjustment of the pitch angle of the structure on it. Among them, the adjustable base 80 supporting the polarization beam splitter prism 30 and the reflector 40 can realize three-axis adjustment, and the three axes include height Z, pitch angle θy and tilt angle θz. The adjustable base 80 supporting the optical machine to be measured 90, the detection camera 50 and the field lens 60 is adjustable in at least five axes, and the five axes include X-axis direction, Y-axis direction, Z-axis direction, pitch angle θy and tilt angle θz. The angle of rotation around the X-axis is θx, the angle of rotation around the Y-axis is θy, and the angle of rotation around the Z-axis is θz.

[0045] like Figure 2 and Figure 3 , which is a schematic diagram of the optical machine to be measured 90 and the adjustable base 80 supporting the optical machine 90. The adjustable base 80 has an X-axis direction adjustment knob 81, a Y-axis direction adjustment knob 82, a Z-axis direction adjustment knob 83, a θy adjustment knob 84, and a θz adjustment knob 85.

[0046] In another optional embodiment of the present application, the above-mentioned components may not be supported by the adjustable base 80, and the above-mentioned components may be fixed on a customized platform, and the customized platform can also realize the adjustability of the above-mentioned components in three-axis or five-axis dimensions.

[0047] Specifically, the aperture 20 is circular or polygonal, and the adjustment range of the aperture of the aperture 20 is greater than 0.2 mm and less than 5 mm. In the present application, the aperture of the aperture 20 is adjusted in a continuous adjustment or gradient adjustment manner.

[0048] The following is combined with Figures 4 to 8To describe the coordination of the components in the optical machine calibration device and the detection process of the optical machine 90 to be tested. Figures 4 to 8 Here, P represents P polarized light, and S represents S polarized light.

[0049] Coarsely adjust the polarization beam splitter prism 30: rotate the first dimming plate 71, the second dimming plate 72 and the third dimming plate 73 so that the three dimming plates are in a light blocking state, turn on the laser 10, rotate the aperture 20 to the maximum light aperture, and adjust the adjustable base 80 of the polarization beam splitter prism 30 so that the light spot reflected by the polarization beam splitter prism 30 to the aperture 20 coincides with the light aperture of the aperture 20;

[0050] Fine adjustment of the polarization beam splitter prism 30: rotate the aperture 20 to a smaller light aperture, adjust the adjustable base 80 of the polarization beam splitter prism 30, so that the light spot reflected by the polarization beam splitter prism 30 to the aperture 20 coincides with the light aperture of the aperture 20. At this time, the first dimming sheet 71 and the second dimming sheet 72 are both in the light blocking state, such as Figure 4 The light path diagram corresponding to a in the figure.

[0051] Then, the second dimming plate 72 is rotated to the light-transmitting state, and the adjustable base 80 of the reflector 40 is adjusted so that the light spot reflected by the reflector 40 coincides with the light hole of the diaphragm 20. Figure 4 Light path diagram corresponding to b in the figure.

[0052] Then rotate the second dimming plate 72 to the light blocking state, rotate the first dimming plate 71 to the light transmitting state, and adjust the adjustable base 80 of the detection camera 50 so that the light spot reflected back from the surface of the detection camera 50 coincides with the light hole of the aperture 20, as shown in FIG. Figure 4 The light path diagram corresponding to c in the figure.

[0053] like Figure 5 As shown, the first dimming plate 71 is then rotated to the light blocking state, and the second dimming plate 72 is rotated to the 1 / 4 wave plate action state to allow the 1 / 4 wave plate area 76 to pass light, and the adjustable base 80 of the field lens 60 is adjusted so that the light spot reflected back from the surface of the field lens 60 coincides with the light hole of the aperture 20.

[0054] like Figure 6 As shown, the optical machine to be measured 90 is placed on its adjustable base 80 , and the adjustable base 80 is adjusted so that the light spot reflected back from the surfaces of the optical machine to be measured 90 , the polarization beam splitter prism 30 and the reflector 40 coincides with the light aperture of the aperture 20 .

[0055] like Figure 7 As shown, an LCOS chip 91 is placed on the optical machine 90 to be measured, and the pitch θx and θy of the LCOS chip 91 are adjusted so that the light spot reflected back by the LCOS chip 91 coincides with the light hole of the aperture 20.

[0056] like Figure 8As shown, turn off the laser 10, rotate the second dimming plate 72 to the 1 / 2 wave plate action state to allow the 1 / 2 wave plate area 77 to pass light, rotate the first dimming plate 71 to the light passing state, turn on the power of the LCOS chip 91 to light up the LCOS chip 91, and the light machine 90 to be tested projects an image. At this time, the detection camera 50 can receive the picture projected by the light machine 90 to be tested.

[0057] Then adjust the position of the LCOS chip 91 on the Z axis so that the image received by the detection camera 50 is the clearest; adjust the θz of the LCOS chip 91 so that the image received by the detection camera 50 is not tilted; adjust the position of the LCOS chip 91 on the XY plane so that the image received by the detection camera 50 is at the center of the CCD. After completing the above steps, the LCOS chip 91 and the optical machine to be tested 90 can be fixed to achieve accurate assembly of the optical machine to be tested 90 and the LCOS chip 91.

[0058] Obviously, the embodiments described above are only some embodiments of the utility model, not all embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the utility model.

[0059] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, it indicates the presence of features, steps, operations, devices, components and / or combinations thereof.

[0060] It should be noted that the terms "first", "second", etc. in the specification and claims of the present application and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the numbers used in this way can be interchanged where appropriate, so that the embodiments of the present application described herein can be implemented in an order other than those illustrated or described herein.

[0061] The above description is only the preferred embodiment of the utility model, and is not intended to limit the utility model. For those skilled in the art, the utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. An optical machine calibration device, characterized in that: include: Laser (10); An aperture (20), the aperture (20) being arranged on the light-emitting side of the laser (10), and the aperture of the aperture (20) being adjustable; a polarization beam splitter prism (30), the polarization beam splitter prism (30) being arranged on a side of the aperture (20) away from the laser (10); a reflector (40), the reflector (40) being arranged on a side of the polarization beam splitting prism (30) away from the laser (10); A detection camera (50), wherein the detection camera (50) and the light machine to be measured (90) are respectively arranged on both sides of the polarization beam splitter prism (30), and a line between the light machine to be measured (90) and the detection camera (50) is perpendicular to a line between the laser (10) and the reflector (40) and intersects at the polarization beam splitter prism (30).

2. The optical-mechanical calibration device according to claim 1, characterized in that: The optical machine calibration device also includes a field lens (60), and the field lens (60) is arranged between the optical machine to be measured (90) and the polarization beam splitter prism (30).

3. The optical-mechanical calibration device according to claim 1, characterized in that: The optical machine calibration device also includes a rotatable first dimming plate (71), a second dimming plate (72) and a third dimming plate (73); the first dimming plate (71), the second dimming plate (72) and the third dimming plate (73) all have a hollow area (74) and a light blocking area (75); the first dimming plate (71) is located between the polarization beam splitter prism (30) and the detection camera (50); the second dimming plate (72) is located between the polarization beam splitter prism (30) and the reflector (40); and the third dimming plate (73) is located between the optical machine to be measured (90) and the polarization beam splitter prism (30).

4. The optical-mechanical calibration device according to claim 3, characterized in that: The hollow area (74) and the light-blocking area (75) of the first dimming film (71) are arranged around the circumference of the first dimming film (71), and the hollow area (74) and the light-blocking area (75) are both fan-shaped; and / or the area of ​​the hollow area (74) of the first dimming film (71) is smaller than the area of ​​the light-blocking area (75) of the first dimming film (71).

5. The optical-mechanical calibration device according to claim 3, characterized in that: The second dimming plate (72) further has a 1 / 4 wave plate area (76), and the hollow area (74), the 1 / 4 wave plate area (76) and the light blocking area (75) are arranged around the circumference of the second dimming plate (72).

6. The optical-mechanical calibration device according to claim 3, characterized in that: The third dimming plate (73) further comprises a 1 / 2 wave plate area (77), and the 1 / 2 wave plate area (77), the light blocking area (75) and the hollow area (74) are arranged around the circumference of the third dimming plate (73).

7. The optical-mechanical calibration device according to claim 1, characterized in that: The optical machine calibration device also includes a plurality of adjustable bases (80), and the polarization beam splitter prism (30), the reflector (40), the detection camera (50) and the optical machine to be measured (90) are arranged on different adjustable bases (80).

8. The optical-mechanical calibration device according to any one of claims 1 to 7, characterized in that: The aperture (20) is circular or polygonal, and the adjustment range of the aperture of the aperture (20) is greater than 0.2 mm and less than 5 mm.

9. The optical-mechanical calibration device according to any one of claims 1 to 7, characterized in that: The diameter of the beam of the laser (10) is less than 5 mm.

10. The optical-mechanical calibration device according to any one of claims 1 to 7, characterized in that: The field of view angle FOV of the detection lens of the detection camera (50) satisfies: 20° <FOV<80°。

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