Tail-piece-free detection device of piece inserting machine

By designing the tailless detection device of the chip plug machine, using the tailless detection device and proximity sensor, combined with PLC technology, the automatic loading and detection of the chip plug machine is realized, and the chip plug machine cannot automatically judge the completion of the silicon wafer processing. Problem, improving production efficiency.

CN222483285UActive Publication Date: 2025-02-14TIANJIN HUANBO SCI & TECH CO LTD
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Patent Information

Application Number
CN202420074335.7
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-01-11
Publication Date
2025-02-14
Estimated Expiration
2034-01-11

AI Technical Summary

Technical Problem

When the chip inserter is processing the silicon wafer, it is impossible to automatically determine that the silicon wafer is processed, and it needs to be manually confirmed. The liquid in the feeding tank is turbid, making it difficult to confirm the silicon wafer, which affects production efficiency.

Method used

A tailless chip detection device for the chip inserter is designed, including a feeding groove, magazine, magazine back plate and fixing shaft. The tail chip detection device and proximity sensor are used, combined with PLC technology to realize automatic detection and loading. , avoid manual confirmation.

Benefits of technology

Automatic feeding and testing of the insertion machine is realized, production efficiency is improved, key processes for the cyclic operation of the insertion machine are opened up, and manual intervention is reduced.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model provides a tail-piece-free detection device of a piece inserting machine. The tail-piece-free detection device comprises a feeding groove, a cartridge clip, a cartridge clip back plate and a jig shaft. The feeding groove is formed in one side of the sheet inserting machine, the cartridge clip is arranged at the bottom of the feeding groove in a sliding mode, the cartridge clip back plate is installed on the cartridge clip, and the jig shaft can push the cartridge clip to move front and back along the feeding groove. The jig shaft is arranged on one side of the feeding groove. A detection plate is arranged on the cartridge clip back plate, and a tail piece detection device is arranged at the bottom of the piece inserting machine. According to the no-tail-piece detection device of the piece inserting machine, manual confirmation is not needed, and the production efficiency is improved.
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Description

Technical Field

[0001] The utility model belongs to the technical field, and in particular relates to a tail-free piece detection device of a piece inserting machine. Background Art

[0002] During the production of silicon wafers, a wafer inserter is required. After the wafer inserter is completed, it cannot automatically determine that the processing of the silicon wafer is completed. Manual confirmation is required, and automatic loading cannot be achieved. When the wafer inserter is processing silicon wafers, it is used to determine that the processing of the silicon wafer is completed. However, the liquid in the loading tank of the wafer inserter is turbid, not transparent, and it is not easy to confirm the silicon wafer, which affects production efficiency. Utility Model Content

[0003] In view of this, the utility model aims to solve the problem that a wafer inserting machine determines that processing of a silicon wafer is completed and requires manual confirmation.

[0004] In order to achieve the above object, the technical solution of the utility model is implemented as follows:

[0005] A tailless piece detection device for a chip inserting machine comprises a feeding trough, a clip, a clip back plate, and a fixture shaft; the feeding trough is arranged on one side of the chip inserting machine, and the clip is slidably arranged at the bottom of the feeding trough.

[0006] The magazine back plate is installed on the magazine, and the fixture shaft can push the magazine to move forward and backward along the feeding trough; the fixture shaft is arranged on one side of the feeding trough;

[0007] A detection plate is arranged on the back plate of the magazine, and a tail piece detection device is arranged at the bottom of the inserting machine.

[0008] The tail piece detection device is arranged on the water absorption plate of the inserting machine, the position of the water absorption plate corresponds to the position of the clip, and the position of the tail piece detection device corresponds to the detection plate.

[0009] Furthermore, the magazine includes a feeding side plate, a feeding bottom plate, a connecting side plate, and a feeding connecting plate. The two feeding side plates are arranged on both sides of the feeding bottom plate. The connecting side plate is fixedly arranged on the side of the feeding bottom plate away from the feeding machine. The magazine back plate is slidably arranged on the feeding bottom plate. The feeding connecting plate is arranged at one end away from the connecting side plate, and the feeding connecting plate is arranged between the two feeding side plates. The feeding side plate is provided with a clamping hole. The size of the magazine back plate corresponds to the size of the magazine, and magazines of different specifications correspond to magazine back plates of different specifications.

[0010] Furthermore, a loading chute is provided at the bottom of the loading base plate, and a loading slide rail corresponding to the chute is provided in the loading chute.

[0011] Furthermore, the magazine back plate is rotatably mounted on the magazine, and anti-falling brackets are provided on both sides of the magazine back plate, and the anti-falling brackets are slidably mounted on both sides of the magazine.

[0012] Furthermore, mounting blocks are provided on both sides of the magazine back plate, and first mounting threads are provided at the ends of the mounting blocks, and the mounting blocks are installed with the anti-falling bracket through the mounting threads; the magazine back plate is rotatably installed on the anti-falling bracket, and an upper chamfer is provided on the upper part of the magazine back plate, and a downward chamfer is provided on the lower part of the magazine back plate.

[0013] Furthermore, the magazine back plate is provided with a plurality of evenly distributed through holes, and the through holes are arranged around the detection plate.

[0014] Furthermore, the detection plate is mounted on the magazine back plate by bolts, the detection plate is a stainless steel detection plate, the tail piece detection device is a proximity sensor, and the proximity sensor is an acid-proof, alkali-proof and waterproof proximity sensor. The proximity sensor adopts the existing technology.

[0015] The device uses a rotatable clip back plate, which can fit the silicon wafer more closely, thereby preventing the silicon wafer from slipping. The clip back plate is provided with evenly distributed through holes, which can allow the liquid in the feeding trough to pass through the clip back plate, thereby preventing the silicon wafer from sticking to the clip back plate and scratching the silicon wafer, thereby improving the quality of produced silicon wafers.

[0016] Furthermore, the anti-reversal bracket includes an L-shaped slide and an inverted T-shaped mounting frame. The bottom of the inverted T-shaped mounting frame is fixedly set at the horizontal end of the L-shaped slide. The L-shaped slide is slidably set on the feeding side plate. The inverted T-shaped mounting frame is provided with a second mounting thread corresponding to the first mounting thread.

[0017] Further, the fixture shaft includes a U-shaped push plate, an L-shaped push shaft, a push guide rail, a push cylinder, and a push box, wherein the push box is arranged on one side of the loading trough, the fixed end of the push cylinder is arranged on one side of the push box, the push guide rail is arranged on one side of the push cylinder, the output end of the push cylinder is connected to the horizontal end of the L-shaped push shaft, and the horizontal end of the L-shaped push shaft is slidably arranged on the push guide rail;

[0018] The vertical end of the L-shaped pushing shaft is connected with a U-shaped pushing plate, the bottom of the U-shaped pushing plate is connected with the L-shaped pushing shaft, and the U-shaped pushing plate is clamped with the connecting side plate.

[0019] Furthermore, the tail piece detection device is electrically connected to the controller, and the controller is electrically connected to the push cylinder. When the transmission cylinder is reset, the controller controls the manipulator to lift the magazine without silicon wafers and put it to one side, and move the magazine full of silicon wafers to the loading slide rail. The controller adopts the existing PLC technology.

[0020] Compared with the prior art, the tail-free piece detection device of the piece inserting machine described in the utility model has the following beneficial effects:

[0021] 1. When all the silicon wafers on the magazine are loaded by the inserter, the tail wafer detection device on the inserter can detect the detection plate, and the controller controls the push cylinder, which drives the U-shaped push plate, and then drives the loading bottom plate back to the initial position. When the transmission cylinder is reset, the controller controls the manipulator to lift the magazine without silicon wafers and put it to one side, and move the magazine full of silicon wafers to the loading slide rail. No manual confirmation is required, which improves production efficiency. This device opens up the key process of the inserter's cyclic operation.

[0022] 2. The mounting block of the magazine back plate of the device cooperates with the anti-falling bracket to prevent the magazine back plate from being reversed or falling into the feeding chute, and prevents the magazine back plate from tipping over by itself, and can only move with the feeding side plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] The accompanying drawings constituting a part of the present invention are used to provide a further understanding of the present invention. The illustrative embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation on the present invention. In the accompanying drawings:

[0024] Figure 1 It is an overall schematic diagram of a tail-free piece detection device of a piece inserting machine according to an embodiment of the utility model;

[0025] Figure 2 It is a schematic diagram of a clip back plate of a tail-free detection device of a chip inserting machine according to an embodiment of the utility model;

[0026] Figure 3 It is a schematic diagram of an anti-reversal bracket of a tail-free piece detection device of a piece inserting machine described in an embodiment of the utility model.

[0027] Description of reference numerals:

[0028] 1. Feeding trough; 2. Magazine; 3. Magazine back plate; 4. Tail piece detection device; 5. Detection plate; 6. Feeding side plate; 7. Feeding bottom plate; 8. Connecting side plate; 9. Feeding connecting plate; 10. Feeding slide rail; 11. Mounting block; 12. Upper chamfer; 13. Lower chamfer; 14. Through hole; 15. Anti-reverse bracket; 16. L-shaped slide; 17. Inverted T-shaped mounting bracket; 18. Second mounting thread; 19. U-shaped push plate; 20. L-shaped push shaft; 21. Push guide rail; 22. Push cylinder; 23. Push box; 24. Insertion machine. DETAILED DESCRIPTION

[0029] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other.

[0030] The present invention will be described in detail below with reference to the accompanying drawings and in combination with embodiments.

[0031] An automatic feeding device for a chip inserter 24, comprising a feeding trough 1, a clip 2, a clip back plate 3, and a fixture shaft; the feeding trough 1 is arranged on one side of the chip inserter 24, the clip 2 is slidably arranged at the bottom of the feeding trough 1, the clip back plate 3 is mounted on the clip 2, and the fixture shaft can push the clip 2 to move forward and backward along the feeding trough 1; the fixture shaft is arranged on one side of the feeding trough 1; a detection plate 5 is arranged on the clip back plate 3, and a tail piece detection device 4 is arranged at the bottom of the chip inserter 24. The tail piece detection device 4 is arranged on a water absorption plate of the chip inserter 24, the position of the water absorption plate corresponds to the position of the clip 2, and the position of the tail piece detection device 4 corresponds to the detection plate 5.

[0032] The magazine 2 includes a feeding side plate 6, a feeding bottom plate 7, a connecting side plate 8, and a feeding connecting plate 9. The two feeding side plates 6 are arranged on both sides of the feeding bottom plate 7. The connecting side plate 8 is fixedly arranged on the side of the feeding bottom plate 7 away from the feeding machine. The magazine back plate 3 is slidably arranged on the feeding bottom plate 7. The feeding connecting plate 9 is arranged at one end away from the connecting side plate 8, and the feeding connecting plate 9 is arranged between the two feeding side plates 6. The feeding side plate 6 is provided with a clamping hole, and the bottom of the feeding bottom plate 7 is provided with a feeding chute. The feeding chute 1 is provided with a feeding slide rail 10 corresponding to the chute. The magazine back plate 3 is rotatably mounted on the magazine 2. Anti-fall brackets 15 are arranged on both sides of the magazine back plate 3. The anti-fall brackets 15 are slidably mounted on both sides of the magazine 2. Mounting blocks 11 are provided on both sides of the clip back plate 3, and the ends of the mounting blocks 11 are provided with first mounting threads, and the mounting blocks 11 are installed with the anti-falling bracket 15 through the mounting threads; the clip back plate 3 is rotatably installed on the anti-falling bracket 15, and the upper part of the clip back plate 3 is provided with an upper chamfer 12, and the lower part of the clip back plate 3 is provided with a lower oblique chamfer 13. The size of the clip back plate corresponds to the size of the clip, and clips of different specifications correspond to clip back plates of different specifications. A number of evenly distributed through holes 14 are provided on the clip back plate 3, and the through holes 14 are arranged around the detection plate 5. The detection plate 5 is installed on the clip back plate 3 by bolts, and the detection plate 5 is a stainless steel detection plate 5, and the tail piece detection device 4 is a proximity sensor, and the proximity sensor is an acid-resistant, alkali-resistant and waterproof proximity sensor. The proximity sensor adopts the existing technology, and the model of the proximity sensor is CP30-N35PAU2.

[0033] The anti-reversal bracket 15 includes an L-shaped slide 16 and an inverted T-shaped mounting frame 17. The bottom of the inverted T-shaped mounting frame 17 is fixedly set at the horizontal end of the L-shaped slide 16, and the L-shaped slide 16 is slidably set on the feeding side plate 6. The inverted T-shaped mounting frame 17 is provided with a second mounting thread 18 corresponding to the first mounting thread. The fixture shaft includes a U-shaped push plate 19, an L-shaped driving shaft 20, a driving guide rail 21, a driving cylinder 22, and a driving box 23. The driving box 23 is set on one side of the feeding trough 1, the fixed end of the driving cylinder 22 is set on one side of the driving box 23, the driving guide rail 21 is set on one side of the driving cylinder 22, and the output end of the driving cylinder 22 is connected to the horizontal end of the L-shaped driving shaft 20, and the horizontal end of the L-shaped driving shaft 20 is slidably set on the driving guide rail 21; the vertical end of the L-shaped driving shaft 20 is connected with the U-shaped push plate 19, the bottom of the U-shaped push plate 19 is connected to the L-shaped driving shaft 20, and the U-shaped push plate 19 is clamped with the connecting side plate 8. A mechanical gripper is provided above the feeding trough 1. The mechanical gripper adopts the existing technology. The mechanical gripper can move the clip 2 through the clamping hole, and place the clip 2 filled with silicon wafers on the feeding slide rail 10 through the mechanical gripper. The tail piece detection device 4 is electrically connected to the controller, and the controller is electrically connected to the push cylinder 22. When the transmission cylinder is reset, the controller controls the mechanical gripper to lift the clip 2 without silicon wafers and put it to one side, and move the clip 2 filled with silicon wafers to the feeding slide rail 10. The controller adopts the existing PLC technology.

[0034] When all the silicon wafers on the clip 2 are loaded by the inserting machine 24, the tail wafer detection device 4 on the inserting machine 24 can detect the detection plate 5, and the controller controls the pushing cylinder 22, and the pushing cylinder 22 drives the U-shaped pushing plate 19, and then drives the loading bottom plate 7 back to the initial position. When the transmission cylinder is reset, the controller controls the manipulator to lift the clip 2 without silicon wafers and put it to one side, and move the clip 2 full of silicon wafers to the loading slide rail 10, without manual confirmation, thereby improving production efficiency.

Claims

1. A device for detecting a tailless piece of a piece inserting machine, characterized in that: It comprises a feeding trough (1), a clip (2), a clip back plate (3), and a fixture shaft; the feeding trough (1) is arranged on one side of the inserting machine (24), and the clip (2) is slidably arranged at the bottom of the feeding trough (1). The magazine back plate (3) is mounted on the magazine (2), and the jig shaft can push the magazine (2) to move forward and backward along the loading trough (1); the jig shaft is arranged on one side of the loading trough (1); A detection plate (5) is provided on the magazine back plate (3), and a tail piece detection device (4) is provided at the bottom of the piece inserting machine (24).

2. The device for detecting the missing tail of a sheet inserting machine according to claim 1, characterized in that: The magazine (2) comprises a loading side plate (6), a loading bottom plate (7), a connecting side plate (8), and a loading connecting plate (9), wherein the two loading side plates (6) are arranged on both sides of the loading bottom plate (7), the connecting side plate (8) is fixedly arranged on the side of the loading bottom plate (7) away from the loading machine, the magazine back plate (3) is slidably arranged on the loading bottom plate (7), the loading connecting plate (9) is arranged at one end away from the connecting side plate (8), and the loading connecting plate (9) is arranged between the two loading side plates (6), and the loading side plate (6) is provided with a snap-in hole.

3. The device for detecting the missing tail of a sheet inserting machine according to claim 2, characterized in that: A loading chute is provided at the bottom of the loading base plate (7), and a loading slide rail (10) corresponding to the chute is provided in the loading chute (1).

4. The device for detecting the missing tail of a sheet inserting machine according to claim 3, characterized in that: The magazine back plate (3) is rotatably mounted on the magazine (2), and anti-falling brackets (15) are provided on both sides of the magazine back plate (3), and the anti-falling brackets (15) are slidably mounted on both sides of the magazine (2).

5. The device for detecting the missing tail of a sheet inserting machine according to claim 4, characterized in that: Mounting blocks (11) are provided on both sides of the magazine back plate (3), and first mounting threads are provided at the ends of the mounting blocks (11). The mounting blocks (11) are mounted on the anti-falling bracket (15) via the mounting threads; the magazine back plate (3) is rotatably mounted on the anti-falling bracket (15), an upper chamfer (12) is provided on the upper part of the magazine back plate (3), and a lower oblique chamfer (13) is provided on the lower part of the magazine back plate (3).

6. The device for detecting the missing tail of a sheet inserting machine according to claim 5, characterized in that: The magazine back plate (3) is provided with a plurality of evenly distributed through holes (14), and the through holes (14) are arranged around the detection plate (5).

7. The device for detecting a chip-free chip of a chip inserting machine according to claim 1, characterized in that: The detection plate (5) is mounted on the magazine back plate (3) by means of bolts; the detection plate (5) is a stainless steel detection plate (5); and the tail piece detection device (4) is a proximity sensor.

8. The device for detecting the missing tail of a sheet inserting machine according to claim 4, characterized in that: The anti-falling bracket (15) comprises an L-shaped slide (16) and an inverted T-shaped mounting frame (17), wherein the bottom of the inverted T-shaped mounting frame (17) is fixedly arranged on the horizontal end of the L-shaped slide (16), the L-shaped slide (16) is slidably arranged on the feeding side plate (6), and the inverted T-shaped mounting frame (17) is provided with a second mounting thread (18) corresponding to the first mounting thread.

9. The device for detecting the missing tail of a sheet inserting machine according to claim 1, characterized in that: The fixture shaft comprises a U-shaped push plate (19), an L-shaped push shaft (20), a push guide rail (21), a push cylinder (22), and a push box (23); the push box (23) is arranged on one side of the loading trough (1); the fixed end of the push cylinder (22) is arranged on one side of the push box (23); the push guide rail (21) is arranged on one side of the push cylinder (22); the output end of the push cylinder (22) is connected to the horizontal end of the L-shaped push shaft (20); and the horizontal end of the L-shaped push shaft (20) is slidably arranged on the push guide rail (21); The vertical end of the L-shaped pushing shaft (20) is connected to a U-shaped pushing plate (19), the bottom of the U-shaped pushing plate (19) is connected to the L-shaped pushing shaft (20), and the U-shaped pushing plate (19) is clamped with the connecting side plate (8).