Tail gas recovery device and tail gas recovery system

Abstract

The utility model relates to the technical field of tail gas recovery, and discloses a tail gas recovery device and a tail gas recovery system. The heat exchange pipes are spirally wound in the cylinder body at intervals in the radial direction of the cylinder body, each heat exchange pipe is a single pipe in the axial direction of the cylinder body, the two ends of each heat exchange pipe are connected with the heat exchange medium inlet and the heat exchange medium outlet respectively, a containing space is formed between the cylinder body and the heat exchange pipes, and the containing space is communicated with the tail gas inlet, the tail gas outlet, the adsorbent inlet and the emptying opening; and the multiple sets of supporting structures are fixedly arranged in the barrel at intervals in the axial direction of the barrel, and the multiple sets of supporting structures fixedly support the heat exchange pipes in the axial direction of the barrel. The multiple heat exchange pipes are arranged in the barrel, each heat exchange pipe is arranged in a single-pipe spiral mode, meanwhile, the multiple sets of supporting structures are arranged at intervals in the axial direction of the barrel, the heat exchange pipes can be fixedly supported, each heat exchange pipe is arranged to be very long and very high, splicing is not needed, and leakage at the splicing positions of the heat exchange pipes is prevented.

Description

Technical Field

[0001] The utility model relates to the technical field of tail gas recovery, in particular to a tail gas recovery device and a tail gas recovery system. Background Art

[0002] In tail gas recovery, especially in polysilicon tail gas recovery, hydrogen adsorption is an important process. This process requires the use of a tail gas recovery device, generally an adsorption column, which uses activated carbon temperature variable adsorption to adsorb impurities in polysilicon tail gas.

[0003] The cylinder of the adsorption column is filled with activated carbon, and cold and hot media are introduced into the heat exchange tube. After hydrogen or chlorosilane is introduced into the cylinder for adsorption, hot media is introduced into the heat exchange tube to heat the activated carbon for desorption, that is, to remove impurities from the activated carbon. After desorption is completed, cold media is introduced into the heat exchange tube to cool the activated carbon, and the activated carbon is regenerated. After the activated carbon is cooled, hydrogen or chlorosilane is introduced into the cylinder for adsorption, that is, the activated carbon absorbs impurities in hydrogen or chlorosilane, and the adsorption and desorption process is cyclically carried out.

[0004] In the prior art, in order to achieve the adsorption of the adsorbent from the outside to the inside and from the inside to the outside at the same time, improve the adsorption and desorption efficiency of the adsorbent, and shorten the regeneration time of the adsorbent, an external coil is often set on the periphery of the adsorption column cylinder as a heat exchange channel.

[0005] In actual production, the cylinder height of the adsorption column is relatively high, and the heat exchange tubes and the outer coils need to be set relatively long. Therefore, there will be multiple pipe splicing phenomena along the height direction of the heat exchange tubes, and the outer coils will need to be welded to the outer side of the cylinder at multiple locations along the height direction. However, at present, the heat exchange tubes and the outer coils are very prone to fatigue conditions due to the alternating use of cold and hot media. During the adsorption and desorption process, the corner welds between the outer coils and the cylinder and the splicing and welding of the internal heat exchange tubes are affected by the alternating thermal expansion and contraction of the cold and hot media. During actual operation, the above welding locations are very prone to leakage. Utility Model Content

[0006] In view of this, the utility model provides a tail gas recovery device and a tail gas recovery system to solve the problem that the heat exchange tube and the outer coil are prone to leakage during the tail gas recovery process.

[0007] In a first aspect, the utility model provides an exhaust gas recovery device, comprising:

[0008] A cylinder, wherein the cylinder is provided with an exhaust gas inlet, an exhaust gas outlet, a heat exchange medium inlet, a heat exchange medium outlet, an adsorbent inlet and a drain outlet;

[0009] A plurality of heat exchange tubes are spirally wound in the cylinder at intervals along the radial direction of the cylinder, and each heat exchange tube is arranged as a single tube along the axial direction of the cylinder, and both ends of the heat exchange tube are respectively connected to the heat exchange medium inlet and the heat exchange medium outlet, and a containing space is provided between the cylinder and the heat exchange tube, and the containing space is communicated with the exhaust gas inlet, the exhaust gas outlet, the adsorbent inlet and the exhaust outlet;

[0010] A plurality of groups of supporting structures are fixedly arranged in the cylinder at intervals along the axial direction of the cylinder, and the plurality of groups of supporting structures are used to fix and support the heat exchange tube along the axial direction of the cylinder.

[0011] Beneficial effect: By arranging multiple heat exchange tubes in the cylinder, and each heat exchange tube is arranged in a single-tube spiral, and multiple groups of supporting structures are arranged at intervals along the axial direction of the cylinder, multiple positions of the heat exchange tube can be fixedly supported along the axial direction, so that each heat exchange tube can be arranged very long and high, and there is no need to splice, thereby preventing leakage at the splicing of the heat exchange tube, and adsorbent can be placed in the accommodating space between the heat exchange tube and the cylinder, so that the adsorbent can fully contact the heat exchange tube and the exhaust gas, without the need to arrange an outer coil outside the cylinder, thereby preventing leakage of the outer coil.

[0012] In an optional embodiment, each group of the support structures comprises:

[0013] A plurality of mounting rings are arranged at intervals along the radial direction of the cylinder, and the mounting rings are arranged one by one corresponding to the heat exchange tubes;

[0014] A plurality of connection blocks are fixedly connected between two adjacent mounting rings at intervals along the circumferential direction.

[0015] Beneficial effect: By configuring each group of supporting structures to include multiple mounting rings, the mounting rings can respectively support multiple radially arranged heat exchange tubes, and adjacent mounting rings are fixedly connected by connecting blocks, which facilitates connecting multiple mounting rings into an integral supporting structure and improves the connection strength.

[0016] In an optional embodiment, the tail gas recovery device comprises:

[0017] A plurality of connection structures are arranged along the axial direction of the cylinder, the connection structures are fixedly arranged on the outer side of the mounting ring, a plurality of accommodating spaces are arranged at intervals on the connection structures, and the heat exchange tubes are clamped in the accommodating spaces.

[0018] Beneficial effect: By arranging a connection structure on the outside of the mounting ring and arranging a plurality of accommodating spaces on the connection structure, it is convenient to place the heat exchange tubes corresponding to each mounting ring. At the same time, the heat exchange tubes are clamped in the accommodating space, and leakage caused by welding is avoided.

[0019] In an optional embodiment, the support structure at least at one end is fixedly connected to the cylinder through a fixing structure, and a plurality of support tubes are fixedly connected between two adjacent groups of the support structures.

[0020] Beneficial effect: By fixing the support structure at the end in the cylinder through a fixing structure, two adjacent groups of support structures are connected through multiple support pipes, which facilitates connecting multiple groups of support structures into a whole, thereby achieving firm fixation of the entire heat exchange tube bundle.

[0021] In an optional embodiment, the tail gas recovery device comprises:

[0022] A connecting pipe assembly is fixedly connected to at least one end of the cylinder, one end of the connecting pipe assembly is connected to at least one end of the plurality of heat exchange tubes, and the other end is connected to the heat exchange medium inlet and / or the heat exchange medium outlet.

[0023] In an optional embodiment, the connecting pipe assembly is provided at both ends of the heat exchange tube, and the connecting pipe assembly includes a tube sheet, and the tube sheet is fixedly connected to the ends of the plurality of heat exchange tubes.

[0024] Beneficial effect: By arranging connecting pipe assemblies at both ends of the heat exchange tube, and the connecting pipe assemblies include tube sheets, the ends of multiple heat exchange tubes can be joined through the tube sheets, which greatly improves the connection strength of the heat exchange tubes.

[0025] In an optional embodiment, the tail gas recovery device comprises:

[0026] A plurality of temperature measuring ports are arranged at intervals along the axial direction of the cylinder, the temperature measuring ports are communicated with the accommodation space of the cylinder, and the temperature measuring ports are suitable for connecting a thermometer;

[0027] And / or, a pressure measuring port is arranged on the cylinder near the exhaust gas outlet and is suitable for connecting a pressure gauge.

[0028] Beneficial effects: By arranging a plurality of temperature measuring ports at intervals along the axial direction of the cylinder, the temperature of the adsorbent at multiple positions inside the cylinder can be monitored during use, the adsorption temperature, regeneration temperature and regeneration effect of the adsorbent can be understood, the service life of the adsorbent and the exhaust gas recovery device can be increased, and the exhaust gas recovery efficiency can be improved; by arranging a pressure measuring port near the exhaust gas outlet of the cylinder, it is convenient to measure the pressure of the exhaust gas outlet with a pressure gauge.

[0029] In an optional embodiment, a filtering device is provided at the tail gas inlet and / or the tail gas outlet;

[0030] And / or, the exhaust gas recovery device comprises a skirt seat, the skirt seat is arranged below the cylinder, the skirt seat is provided with an inlet pipe, and the inlet pipe is connected to the heat exchange medium inlet.

[0031] Beneficial effects: By arranging filtering devices at the exhaust gas inlet and outlet, it is convenient to filter larger impurities during air intake and prevent activated carbon impurities from being discharged with the exhaust gas; by arranging a skirt seat under the cylinder body, the cylinder body can be supported, and the inlet pipe can be arranged on the skirt seat, making the overall structure more compact.

[0032] In an optional embodiment, the adsorbent inlet is obliquely arranged at the upper end of the cylinder.

[0033] Beneficial effect: By obliquely arranging the adsorbent inlet at the upper end of the cylinder, it is possible to facilitate feeding and prevent interference with other structures during feeding.

[0034] In a second aspect, the utility model also provides an exhaust gas recovery system, comprising: the above-mentioned exhaust gas recovery device.

[0035] Beneficial effect: Since the exhaust gas recovery system includes the above-mentioned exhaust gas recovery device, it has the same effect as the above-mentioned exhaust gas recovery device and will not be described in detail here. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0037] Figure 1 A cross-sectional view of an exhaust gas recovery device according to an embodiment of the utility model;

[0038] Figure 2 for Figure 1 A top view of the exhaust gas recovery device shown;

[0039] Figure 3 is a top view of the supporting structure;

[0040] Figure 4 is a schematic diagram of the spiral of the heat exchange tube;

[0041] Figure 5 A schematic diagram of the connection structure.

[0042] Description of reference numerals:

[0043] 1-cylinder; 101-exhaust gas inlet; 102-exhaust gas outlet; 103-heat exchange medium inlet; 104-heat exchange medium outlet; 105-adsorbent inlet; 106-drain outlet; 107-desorption outlet; 108-pressure measuring port; 109-temperature measuring port; 2-heat exchange tube; 3-mounting ring; 4-connecting block; 5-support tube; 6-connecting structure; 601-accommodating space; 7-fixing structure; 8-pipe assembly; 9-skirt; 10-entry tube; 11-shower outlet; 12-fixing structure; 13-insulation support ring. DETAILED DESCRIPTION

[0044] In order to make the purpose, technical solution and advantages of the embodiment of the utility model clearer, the technical solution in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all the embodiments. Based on the embodiment of the utility model, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the utility model.

[0045] Combine the following Figures 1 to 5 , describing an embodiment of the utility model.

[0046] According to an embodiment of the utility model, on the one hand, a tail gas recovery device is provided, comprising: a cylinder 1, on which a tail gas inlet 101, a tail gas outlet 102, a heat exchange medium inlet 103, a heat exchange medium outlet 104, an adsorbent inlet 105 and a drain port 106 are provided; a plurality of heat exchange tubes 2, which are spirally wound in the cylinder 1 at intervals along the radial direction of the cylinder 1, and along the axial direction of the cylinder 1, each heat exchange tube 2 is a single tube arrangement, and both ends of the heat exchange tube 2 are respectively connected to the heat exchange medium inlet 103 and the heat exchange medium outlet 104, and a accommodating space is provided between the cylinder 1 and the heat exchange tube 2, and the accommodating space is connected to the tail gas inlet 101, the tail gas outlet 102, the adsorbent inlet 105 and the drain port 106; a plurality of groups of supporting structures, which are fixedly arranged in the cylinder 1 at intervals along the axial direction of the cylinder 1, and the plurality of groups of supporting structures fix and support the heat exchange tube 2 along the axial direction of the cylinder 1.

[0047] By arranging a plurality of heat exchange tubes 2 in the cylinder 1, and each heat exchange tube 2 is arranged in a single-tube spiral, and a plurality of groups of support structures are arranged at intervals along the axial direction of the cylinder 1, the heat exchange tube 2 can be fixedly supported at multiple positions along the axial direction, so that each heat exchange tube 2 can be arranged very long and high without splicing, thereby preventing leakage at the splicing of the heat exchange tube 2, and an adsorbent can be placed in the accommodating space between the heat exchange tube 2 and the cylinder 1, so that the adsorbent can fully contact the heat exchange tube 2 and the exhaust gas, without the need to arrange an outer coil on the outside of the cylinder 1, thereby preventing leakage of the outer coil.

[0048] The tail gas recovery device in this embodiment is used to recover the tail gas of polysilicon, the adsorbent is activated carbon, and the heat exchange medium is cold water, hot water or high-temperature steam. As a convertible implementation, the tail gas recovery device can also be used to recover other tail gases, and the adsorbent and heat exchange medium can be adjusted accordingly according to actual needs, and no excessive restrictions are made here.

[0049] like Figure 3 As shown, each group of support structures in this embodiment includes: a plurality of mounting rings 3, which are arranged at intervals along the radial direction of the cylinder 1, and the mounting rings 3 are arranged one by one with the heat exchange tubes 2; and a plurality of connection blocks 4, which are fixedly connected between two adjacent mounting rings 3 at intervals along the circumferential direction. By configuring each group of support structures to include a plurality of mounting rings 3, the mounting rings 3 can respectively support a plurality of heat exchange tubes 2 arranged radially, and the adjacent mounting rings 3 are fixedly connected by the connection blocks 4, so that the plurality of mounting rings 3 can be connected into an integral support structure, and the connection strength can be improved at the same time.

[0050] Specifically, the connection block 4 is fixedly connected between adjacent mounting rings 3 by welding. As a convertible embodiment, the connection block 4 and the mounting ring 3 may be directly integrally formed, or the connection block 4 and the mounting ring 3 may be fixedly connected by other fixing methods, such as screw connection.

[0051] The mounting rings 3 of the same diameter are arranged at the same intervals along the axial direction. During installation, the multiple mounting rings 3 can be installed layer by layer. The multiple mounting rings 3 of each layer can be installed one by one and fixed by welding through the connecting block 4. Of course, in other embodiments, the mounting rings 3 of the same diameter can also be arranged at uneven intervals along the axial direction.

[0052] like Figure 5 As shown, the exhaust gas recovery device in this embodiment includes: a plurality of connection structures 6, the connection structures 6 are fixedly arranged on the outside of the mounting ring 3, a plurality of accommodating spaces 601 are arranged at intervals on the connection structures 6, and the heat exchange tubes 2 are clamped in the accommodating spaces 601.

[0053] By setting a connecting structure 6 on the outer side of the mounting ring 3 and setting a plurality of accommodating spaces 601 on the connecting structure 6, it is convenient to place the heat exchange tube 2 corresponding to each mounting ring 3. At the same time, the heat exchange tube 2 is clamped in the accommodating space 601, and leakage caused by welding is avoided.

[0054] Specifically, the connection structure 6 is a connection pad, each connection structure 6 is arranged along the axial direction of the cylinder 1, and along the circumferential direction, multiple connection structures 6 are arranged on the outer side of each mounting ring 3, and the accommodating space 601 is a groove. In order to prevent the heat exchange tube 2 from expanding and contracting, the size of the groove can be set slightly larger than the diameter of the heat exchange tube 2 to leave enough deformation space for the heat exchange tube 2. As a convertible embodiment, the accommodating space 601 can also be a through hole, and the heat exchange tube 2 is inserted into the through hole.

[0055] In order to make the connection between the heat exchange tube 2 and the connection structure 6 more secure, the heat exchange tube 2 and the connection structure 6 may be welded. Of course, the heat exchange tube 2 may also be simply clamped in the accommodating space 601, and no specific limitation is made here.

[0056] like Figure 3 As shown, the two support structures at both ends of this embodiment are fixedly connected in the cylinder 1 through the fixed structure 12, and a plurality of support tubes 5 are fixedly connected between two adjacent groups of support structures. By fixing the support structure at the end in the cylinder 1 through the fixed structure 12, and connecting two adjacent groups of support structures through a plurality of support tubes 5, it is convenient to connect the plurality of support structures as a whole, so as to achieve a firm fixation of the entire bundle of heat exchange tubes 2. As a convertible embodiment, it is also possible that only the uppermost or lowermost support structure is fixedly connected in the cylinder 1 through the fixed structure 12. As a convertible embodiment, it is also possible that each group of support structures is fixedly connected in the cylinder 1 through the fixed structure 12, and in this case, no support tube 5 is provided between two adjacent groups of support structures.

[0057] The fixing structure 12 is a reinforcing rib plate, one end of which is welded to the inner wall of the cylinder 1 , and the other end of which is welded to the mounting ring 3 .

[0058] The support tube 5 is arranged perpendicularly to the mounting ring 3 , and is arranged perpendicularly between two adjacent mounting rings 3 in the axial direction. The support tube 5 and the mounting ring 3 together form a cage-shaped structure, which plays a role of fixed connection.

[0059] The tail gas recovery device in this embodiment includes: a pipe assembly 8, which is fixedly connected to both ends of the cylinder 1, wherein one end of one pipe assembly 8 is connected to one end of a plurality of heat exchange tubes 2, and the other end is connected to the heat exchange medium inlet 103, and another end of another pipe assembly 8 is connected to the other end of a plurality of heat exchange tubes 2, and the other end is connected to the heat exchange medium outlet 104. As a convertible embodiment, the tail gas recovery device may also include no pipe assembly 8, but the ends of the plurality of heat exchange tubes 2 are connected to the heat exchange medium inlet 103 and the heat exchange medium outlet 104, respectively.

[0060] The connecting pipe assembly 8 includes a tube sheet, and the tube sheet is fixedly connected to the ends of the plurality of heat exchange tubes 2. Specifically, the tube sheet is a forged tube sheet. By arranging the connecting pipe assembly 8 at both ends of the heat exchange tube 2, and the connecting pipe assembly 8 includes the tube sheet, the ends of the plurality of heat exchange tubes 2 can be joined through the tube sheet, which greatly improves the connection strength of the heat exchange tube 2.

[0061] like Figure 1As shown, one end of the connecting pipe assembly 8 extends into the interior of the cylinder 1 and is welded and fixed to the cylinder 1, and the other end is connected to the heat exchange medium inlet 103 and / or the heat exchange medium outlet 104. The tube sheet is welded and fixed to the ends of multiple heat exchange tubes 2, and the tube sheet is arranged outside the cylinder 1.

[0062] like Figure 1 As shown, the tail gas recovery device in this embodiment includes: a plurality of temperature measuring ports 109, which are arranged at intervals along the axial direction of the cylinder 1, the temperature measuring ports 109 are connected to the accommodating space of the cylinder 1, and the temperature measuring ports 109 are suitable for connecting a thermometer; a pressure measuring port 108, which is arranged at the cylinder 1 near the tail gas outlet 102, and is suitable for connecting a pressure gauge. By arranging a plurality of temperature measuring ports 109 at intervals along the axial direction of the cylinder 1, the temperature of the adsorbent at multiple positions inside the cylinder 1 can be monitored during use, the adsorption temperature, regeneration temperature and regeneration effect of the adsorbent can be understood, the service life of the adsorbent and the tail gas recovery device can be improved, and the recovery efficiency of the tail gas can be improved; by arranging the pressure measuring port 108 at the cylinder 1 near the tail gas outlet 102, it is convenient to measure the pressure of the tail gas outlet 102 by the pressure gauge.

[0063] Specifically, three temperature measuring ports 109 are provided, respectively located at the upper, middle and lower positions of the cylinder 1. As a convertible embodiment, two temperature measuring ports 109 may be provided, respectively located at the upper and lower positions of the cylinder 1, or four or more temperature measuring ports 109 may be provided, evenly spaced along the axial direction of the cylinder 1.

[0064] In order to facilitate filtering of larger impurities during air intake and to prevent activated carbon impurities from being discharged with exhaust gas, a filter device is provided at both the tail gas inlet 101 and the tail gas outlet 102 in this embodiment. Specifically, the filter device can be a filter net. As a convertible embodiment, a filter device can also be provided only at the tail gas inlet 101, or a filter device can be provided only at the tail gas outlet 102.

[0065] In order to support the cylinder 1, the exhaust gas recovery device in this embodiment includes a skirt seat 9, which is arranged below the cylinder 1. The skirt seat 9 is provided with an inlet pipe 10, which is connected to the heat exchange medium inlet 103, which also makes the overall structure more compact.

[0066] like Figure 1As shown, the adsorbent inlet 105 in this embodiment is tilted at the upper end of the cylinder 1, and the angle A between the plane where the adsorbent inlet 105 is located and the horizontal plane is between 20° and 30°. Specifically, the angle A between the plane where the adsorbent inlet 105 is located and the horizontal plane is 25°. By tilting the adsorbent inlet 105 at the upper end of the cylinder 1, it is convenient to feed and prevent interference with other structures during feeding. As a convertible embodiment, it is also possible that the angle A between the plane where the adsorbent inlet 105 is located and the horizontal plane is in other angle ranges, which can be set according to actual needs, and no excessive restrictions are made here.

[0067] In this embodiment, a drain port 106 is provided on the right side of the bottom of the cylinder 1, and the drain port 106 is used to discharge the adsorbent.

[0068] like Figure 1 As shown, the heat exchange medium inlet 103 in this embodiment is arranged at the lower right of the bottom of the cylinder 1, the tail gas outlet 102 is arranged at the upper left of the side wall of the cylinder 1, the tail gas inlet 101 is arranged at the lower left of the side wall of the cylinder 1, and the heat exchange medium outlet 104 is arranged at the upper right of the top of the cylinder 1. The tail gas outlet 102 and the heat exchange medium outlet 104 are respectively arranged on opposite sides of the cylinder 1, so that the gas can be discharged easily and the interference of the heat exchange tube bundle can be avoided.

[0069] In this embodiment, a drain port 11 is provided at the bottom of the cylinder 1, and the drain port 11 is provided on the skirt 9 for discharging the accumulated liquid or impurities in the cylinder 1; a desorption outlet 107 is provided at the top of the cylinder 1, and the desorption outlet 107 is used to discharge the gas adsorbed in the desorbed activated carbon.

[0070] In this embodiment, a plurality of heat-insulating support circles 13 are arranged on the outer side of the cylinder 1. The heat-insulating support circles 13 are used to place heat-insulating materials. Each heat-insulating support circle 13 is composed of a plurality of equally divided arc plates.

[0071] When in use, a certain amount of activated carbon can be filled into the cylinder 1 through the adsorbent inlet 105, and the tail gas mixed with impurities such as hydrogen or chlorosilane enters the cylinder 1 through the tail gas inlet 101, and the impurities are adsorbed by the activated carbon. The clean hydrogen or chlorosilane comes out from the tail gas outlet 102. After the adsorption is completed, steam or hot water is passed into the heat exchange tube 2 from the heat exchange medium inlet 103 to heat the activated carbon, and the steam or hot water comes out from the heat exchange medium outlet 104 to desorb the impurities in the activated carbon. After desorption is completed, the introduction of steam or hot water is stopped, and cooling water is switched to be introduced from the heat exchange medium inlet 103 to cool the activated carbon in preparation for adsorption, and also comes out from the heat exchange medium outlet 104.

[0072] The exhaust gas recovery device in this embodiment cancels the external coil design outside the cylinder 1 to avoid the instability of the corner weld under fatigue conditions. The multiple heat exchange tubes 2 inside the cylinder 1 are evenly distributed inside the cylinder 1, and the heat exchange tubes 2 have no splicing phenomenon, so the risk of leakage is small.

[0073] The tail gas recovery device in this embodiment adopts a spirally wound heat exchange tube 2. Compared with the ordinary coiled heat exchanger, a single-tube multi-layer support design is adopted to solve the problem that the coiled heat exchanger has a small gap and cannot adapt to the heat exchange of activated carbon particles. Since the activated carbon is solid, the heat transfer effect between activated carbons is poor. The single-tube design avoids the heat exchange being concentrated at the inlet end of the heat exchange medium, resulting in a small temperature difference in and out of the cylinder 1, affecting the adsorption effect and processing capacity. At the same time, the spiral winding of the heat exchange tube 2 has a good disturbing effect on the fluid in the tube, uniform heat exchange, and greatly improved efficiency; and the spiral winding of the heat exchange tube bundle is similar to a spring structure, which effectively absorbs the stress caused by alternating hot and cold, and has a strong ability to resist fluctuations.

[0074] According to an embodiment of the present utility model, on the other hand, a tail gas recovery system is provided, comprising the tail gas recovery device mentioned above.

[0075] The tail gas recovery system in this embodiment is used for the tail gas recovery process in the production of polysilicon, and includes a tail gas recovery device, a heat exchanger, a silicon powder filter and a collection tank.

[0076] First, the hydrogen (containing a small amount of chlorosilane and hydrogen chloride) is adsorbed and purified by the tail gas recovery device to obtain pure hydrogen, and then the purified hydrogen is passed into the heat exchanger, and then into the silicon powder filter. Finally, the silicon powder intercepted from the silicon powder filter is collected by the collection tank, and the gas in the collection tank is discharged.

[0077] Although the embodiments of the present invention are described in conjunction with the accompanying drawings, those skilled in the art may make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations are all within the scope defined by the appended claims.

Claims

1. A tail gas recovery device, characterized in that: include: A cylinder (1), wherein the cylinder (1) is provided with an exhaust gas inlet (101), an exhaust gas outlet (102), a heat exchange medium inlet (103), a heat exchange medium outlet (104), an adsorbent inlet (105) and a drain outlet (106); A plurality of heat exchange tubes (2) are spirally wound in the cylinder (1) at intervals along the radial direction of the cylinder (1); along the axial direction of the cylinder (1), each heat exchange tube (2) is arranged as a single tube; two ends of the heat exchange tube (2) are respectively connected to the heat exchange medium inlet (103) and the heat exchange medium outlet (104); a containing space is provided between the cylinder (1) and the heat exchange tube (2); the containing space is communicated with the exhaust gas inlet (101), the exhaust gas outlet (102), the adsorbent inlet (105) and the exhaust outlet (106); A plurality of groups of support structures are fixedly arranged in the cylinder (1) at intervals along the axial direction of the cylinder (1), and the plurality of groups of support structures are used to fixedly support the heat exchange tube (2) along the axial direction of the cylinder (1).

2. The tail gas recovery device according to claim 1, characterized in that: Each set of the support structures comprises: A plurality of mounting rings (3) are arranged at intervals along the radial direction of the cylinder (1), and the mounting rings (3) are arranged in one-to-one correspondence with the heat exchange tubes (2); A plurality of connection blocks (4) are fixedly connected between two adjacent mounting rings (3) at intervals along the circumferential direction.

3. The tail gas recovery device according to claim 2, characterized in that: The tail gas recovery device comprises: A plurality of connection structures (6), wherein the connection structures (6) are fixedly arranged on the outside of the mounting ring (3), and a plurality of accommodating spaces (601) are arranged at intervals on the connection structures (6), and the heat exchange tubes (2) are clamped in the accommodating spaces (601).

4. The tail gas recovery device according to claim 1, characterized in that: The support structure at at least one end is fixedly connected to the cylinder (1) via a fixing structure (12), and a plurality of support tubes (5) are fixedly connected between two adjacent groups of the support structures.

5. The tail gas recovery device according to any one of claims 1 to 4, characterized in that: The tail gas recovery device comprises: A connecting pipe assembly (8) is fixedly connected to at least one end of the cylinder (1), one end of the connecting pipe assembly (8) is connected to at least one end of the plurality of heat exchange tubes (2), and the other end is connected to the heat exchange medium inlet (103) and / or the heat exchange medium outlet (104).

6. The tail gas recovery device according to claim 5, characterized in that: The connecting pipe assembly (8) is provided at both ends of the heat exchange tube (2), and the connecting pipe assembly (8) comprises a tube sheet, and the tube sheet is fixedly connected to the ends of a plurality of the heat exchange tubes (2).

7. The tail gas recovery device according to any one of claims 1 to 4, characterized in that: The tail gas recovery device comprises: A plurality of temperature measuring ports (109) are arranged at intervals along the axial direction of the cylinder (1), the temperature measuring ports (109) are communicated with the accommodating space of the cylinder (1), and the temperature measuring ports (109) are suitable for connecting a thermometer; And / or, a pressure measuring port (108) is provided on the cylinder (1) near the exhaust gas outlet (102) and is suitable for connecting a pressure gauge.

8. The tail gas recovery device according to any one of claims 1 to 4, characterized in that: A filtering device is provided at the tail gas inlet (101) and / or the tail gas outlet (102); And / or, the exhaust gas recovery device comprises a skirt seat (9), the skirt seat (9) is arranged below the cylinder (1), an inlet pipe (10) is arranged on the skirt seat (9), and the inlet pipe (10) is connected to the heat exchange medium inlet (103).

9. The tail gas recovery device according to any one of claims 1 to 4, characterized in that: The adsorbent inlet (105) is arranged obliquely at the upper end of the cylinder (1).

10. A tail gas recovery system, characterized in that: include: The tail gas recovery device according to any one of claims 1 to 9.

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