Manipulator and production line

Abstract

The utility model discloses a manipulator and a production line, the manipulator is used for transferring and cooling a substrate, and the manipulator comprises a base, a first connecting arm and a supporting plate. The first connecting arm and the base are rotationally connected and oppositely arranged in the vertical direction, the first connecting arm is provided with a first rotating axis, and the extending direction of the first rotating axis is parallel to the vertical direction. The supporting plate is connected with the first connecting arm, the supporting plate is provided with a connecting face used for bearing the substrate, and the connecting face is provided with an air blowing opening. The first connecting arm is configured to be capable of rotating around a first rotating axis relative to the base, and airflow guided out of the air blowing opening can cool the substrate and enable the substrate to be separated from the connecting face. According to the mechanical arm and the production line, the substrate can be cooled in the process that the substrate is transferred by the supporting plate, the substrate machining efficiency is improved, the situation that the substrate collides with the supporting plate in the transferring process can be reduced, floating supporting of the substrate is achieved, and the machining quality of the substrate is guaranteed.

Description

Technical Field

[0001] The utility model relates to the technical field of substrate processing, in particular to a manipulator and a production line. Background Art

[0002] Substrates can be used in flat panel displays, solar devices, and board-level packaging manufacturing. Substrates can be rectangular sheets of glass, plastic, or other materials. During the substrate processing process, multiple processing steps need to be performed in multiple processing chambers of the substrate processing equipment. In the related art, in order to avoid warping caused by excessive temperature of the substrate, a cooling chamber is added to the substrate processing equipment and the substrate is transferred to the cooling chamber for cooling. However, placing the substrate in the cooling chamber for cooling will increase the processing time of the substrate and affect the production efficiency of the substrate. Utility Model Content

[0003] The main purpose of the utility model is to provide a robot and a production line, aiming to solve the technical problem of low production efficiency of substrates.

[0004] To achieve the above-mentioned purpose, the first embodiment of the utility model provides a robot for transferring and cooling a substrate, the robot comprising:

[0005] Pedestal;

[0006] A first connecting arm is rotatably connected to the base and arranged opposite to the base in a vertical direction, wherein the first connecting arm has a first rotation axis, and an extending direction of the first rotation axis is parallel to the vertical direction;

[0007] A support plate connected to the first connecting arm, the support plate having a connecting surface for carrying the substrate, the connecting surface being provided with an air blowing port;

[0008] The first connecting arm is configured to be rotatable relative to the base around the first rotation axis, and the airflow derived from the air outlet can cool the substrate and space the substrate from the connecting surface.

[0009] In some embodiments, the manipulator includes a first rotating shaft, the base is provided with a first connecting hole, the first connecting arm is provided with a second connecting hole, and the first rotating shaft is vertically penetrated by the first connecting hole and the second connecting hole so that the first connecting arm rotates around the first rotation axis.

[0010] In some embodiments, the manipulator has a first airflow channel, which includes a first section, a second section and a third section that are connected to each other, the first section is arranged in the base, the second section is arranged in the first rotating shaft, and the third section is arranged in the first connecting arm and is connected to the blowing port.

[0011] In some embodiments, the first air flow channel further includes a fourth section, one end of the fourth section is connected to the third section, and the other end of the fourth section is connected to the air outlet, and the fourth section is disposed in the support plate.

[0012] In some embodiments, the outer contour of the blowing port is circular, and the diameter of the blowing port is L 1 , where L 1 ≥0.5mm; and / or,

[0013] The first airflow channel is circular, and the diameter of the first airflow channel is L 2 , where L 2 ≥1 / 16inch.

[0014] In some embodiments, the manipulator includes a plurality of the blowing ports, each of which is arranged on the connecting surface at intervals along a lateral direction, and the lateral direction is perpendicular to the vertical direction.

[0015] In some embodiments, the manipulator further includes a limiting portion, which is disposed on the support plate and is arranged vertically opposite to and spaced from the support plate, and the limiting portion is suitable for preventing the substrate from moving in a direction away from the connecting surface.

[0016] In some embodiments, the gas flow derived from the gas outlet is Ar or He, and the flow rate of the gas flow is V, wherein V≥3sccm.

[0017] In some embodiments, the manipulator includes a second connecting arm, the second connecting arm is rotatably connected to the first connecting arm and arranged opposite to the vertical direction, the second connecting arm has a second rotation axis, the extension direction of the second rotation axis is parallel to the vertical direction, and the second connecting arm is configured to be able to rotate relative to the first connecting arm around the second rotation axis;

[0018] The manipulator includes a second rotating shaft, the first connecting arm is provided with a third connecting hole, the second connecting arm is provided with a fourth connecting hole, and the second rotating shaft is vertically penetrated by the third connecting hole and the fourth connecting hole so that the second connecting arm rotates around the first rotation axis.

[0019] A second aspect of the present invention provides a production line, comprising the robot as described in the above embodiment.

[0020] Compared with the prior art, the beneficial effects of the utility model include:

[0021] In the technical solution of the utility model, the manipulator includes a base, a first connecting arm and a pallet. In the prior art, placing the substrate in an additional cooling chamber for cooling will increase the processing time of the substrate and affect the production efficiency of the substrate. The first connecting arm of the present solution can rotate relative to the base around the first rotation axis, and the pallet is connected to the first connecting arm, that is, the pallet can rotate relative to the base, so that the pallet can realize the transfer operation of the substrate between the processing chambers. The connection surface of the pallet is provided with an air blow port, and the airflow derived from the air blow port can cool the substrate. Therefore, the present solution can omit the setting of the cooling chamber, reduce the manufacturing cost of the substrate processing equipment, and can cool the substrate during the process of the pallet transporting the substrate, effectively improving the substrate processing efficiency. Furthermore, because the airflow derived from the air blow port can space the substrate from the connection surface, that is, it can effectively reduce the situation where the substrate collides with the pallet during the transportation process, realize the floating support of the substrate, and ensure the processing quality of the substrate. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0023] Figure 1 A schematic diagram of a manipulator in one embodiment of the utility model;

[0024] Figure 2 It is a schematic diagram of a support plate carrying a substrate in one embodiment of the utility model.

[0025] Description of Figure Numbers:

[0026] Robot 10;

[0027] Base 100; first connection hole 110;

[0028] First connecting arm 200; first rotation axis 210; second connecting hole 220; third connecting hole 230;

[0029] Support plate 300; connecting surface 310; blowing port 320; finger 330;

[0030] A first rotating shaft 400;

[0031] First air flow channel 500; first section 510; second section 520; third section 530; fourth section 540;

[0032] Second connecting arm 600; second rotation axis 610; fourth connecting hole 620;

[0033] A second rotating shaft 700;

[0034] Base plate 20; Pin 201;

[0035] Vertical Z; horizontal X.

[0036] The realization of the purpose, functional features and advantages of the utility model will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0037] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0038] Substrates can be used in flat panel displays, solar devices, and board-level packaging manufacturing. Substrates can be rectangular sheets of glass, plastic, or other materials. During the substrate processing process, multiple processing steps need to be performed in multiple processing chambers of the substrate processing equipment. In the related art, in order to avoid warping caused by excessive temperature of the substrate, a cooling chamber is added to the substrate processing equipment and the substrate is transferred to the cooling chamber for cooling. However, placing the substrate in the cooling chamber for cooling will increase the processing time of the substrate and affect the production efficiency of the substrate.

[0039] In view of this, the first embodiment of the utility model provides a robot 10, which is used to transfer and cool the substrate 20. The robot 10 can effectively improve the processing efficiency of the substrate 20 and ensure the processing quality of the substrate 20. It should be noted that the robot 10 in the embodiment of the present application can be a vacuum robot 10.

[0040] It can be understood that the substrate 20 includes pins 201 (pins), and the support pins of the substrate 20 refer to pins 201 or fixing devices used to stabilize and support the substrate 20. In some electronic devices or circuit board designs, the substrate 20 needs to be fixed and supported in a mechanical structure to ensure its stability and reliability during operation. The support pins are usually structural elements connected to the substrate 20 itself or attached to the edge of the substrate 20.

[0041] Refer to the following Figure 1 and Figure 2 The robot 10 of the embodiment of the present application is introduced. Specifically, the robot 10 includes a base 100, a first connecting arm 200 and a support plate 300. Figure 1First, the base 100 is introduced. The base 100 is used to connect the first connecting arm 200 and the support plate 300. The structure of the base 100 can be determined according to the actual situation. The first connecting arm 200 can connect the support plate 300 and drive the support plate 300 to move relative to the base 100. The specific setting of the first connecting arm 200 is introduced below. The first connecting arm 200 can be arranged relative to the base 100 along the vertical Z. Figure 1 The orientation in is used as a reference, that is, the first connecting arm 200 can be arranged on the upper side of the base 100. The first connecting arm 200 can be rotatably connected to the base 100. To facilitate the description and understanding of the specific rotation direction of the first connecting arm 200, the first connecting arm 200 is defined to have a first rotation axis 210. It should be noted that the extension direction of the first rotation axis 210 can be parallel to the vertical direction Z, that is, the first rotation axis 210 can be extended and arranged in the up and down direction.

[0042] Reference Figure 2 , the support plate 300 can carry the substrate 20, and the support plate 300 can be connected to the first connecting arm 200. Specifically, in some embodiments, the support plate 300 can be directly connected to the first connecting arm 200. In other embodiments, the support plate 300 can be connected to the first connecting arm 200 through other connecting arms. The specific connection setting between the support plate 300 and the first connecting arm 200 can be determined according to actual conditions.

[0043] Further, the support plate 300 has a connection surface 310 that can carry the substrate 20, and the connection surface 310 is located on the upper side of the substrate 20. The connection surface 310 can be provided with an air blow port 320. The air blow port 320 can derive a blowing airflow. It should be noted that the blowing airflow can cool the substrate 20 and can blow the substrate 20 so that the substrate 20 is spaced from the connection surface 310. It can be understood that the support plate 300 includes a finger 330, and the air blow port 320 can be provided on the connection surface 310 at the finger 330.

[0044] The first connecting arm 200 can rotate around the first rotation axis 210 relative to the base 100, that is, the pallet 300 connected to the first connecting arm 200 can rotate relative to the base, so that the pallet 300 can transport the substrate 20 from one processing chamber to another processing chamber, thereby realizing the transfer operation of the substrate 20.

[0045] In the technical solution of the utility model, the manipulator 10 includes a base 100, a first connecting arm 200 and a pallet 300. In the prior art, placing the substrate in an additional cooling chamber for cooling will increase the processing time of the substrate and affect the production efficiency of the substrate. The first connecting arm 200 of this solution can rotate relative to the base 100 around the first rotation axis 210, and the pallet 300 is connected to the first connecting arm 200, that is, the pallet 300 can rotate relative to the base 100, so that the pallet 300 can realize the transfer operation of the substrate 20 between each processing chamber. The connecting surface 310 of the pallet 300 is provided with an air outlet 320, and the airflow derived from the air outlet 320 can cool the substrate 20. Therefore, this solution can omit the setting of the cooling chamber, reduce the manufacturing cost of the substrate processing equipment, and can cool the substrate 20 during the process of the pallet 300 transporting the substrate 20, effectively improving the processing efficiency of the substrate 20. Furthermore, the airflow from the air outlet 320 can space the substrate 20 from the connecting surface 310 , which can effectively reduce the collision between the substrate 20 and the pallet 300 during transportation, thereby achieving floating support for the substrate 20 and ensuring the processing quality of the substrate 20 .

[0046] Reference Figure 1 , the specific rotation setting between the first connecting arm 200 and the base 100 is introduced below. In some embodiments, the manipulator 10 includes a first rotating shaft 400, the base 100 can be provided with a first connecting hole 110, the first connecting arm 200 can be provided with a second connecting hole 220, and the first rotating shaft 400 can be adapted to the arrangement of the first connecting hole 110 and the second connecting hole 220. The first rotating shaft 400 can be penetrated by the first connecting hole 110 and the second connecting hole 220 along the vertical Z direction, that is, the first connecting arm 200 can be rotated relative to the base 100 around the first rotating axis 210. This solution can ensure the stability of the rotation connection between the first connecting arm 200 and the base 100, so that the pallet 300 can stably transport the substrate 20.

[0047] Reference Figure 1, the specific blowing settings of the manipulator 10 of some embodiments are introduced below. Specifically, the manipulator 10 has a first airflow channel 500. The first airflow channel 500 includes a first section 510, a second section 520 and a third section 530 that are mutually conductive. The first section 510 can be arranged in the base 100, the second section 520 can be arranged in the first rotating shaft 400, and the third section 530 can be arranged in the first connecting arm 200 and be conductive with the blowing port 320. It can be understood that the air inlet can also be arranged in the base 100, that is, the blowing airflow can be sucked in by the air inlet, flow through the base 100, the first rotating shaft 400 and the first connecting arm 200, and then flow to the blowing port 320 of the support plate 300 to achieve cooling and floating support of the substrate 20. Compared with the solution of setting up an air flow channel outside the manipulator, this solution only requires adding an air flow channel in the control circuit inside the manipulator 10. The overall improvement is convenient and fast, and can avoid the situation where the external air flow channel interferes with the manipulator 10 in performing related actions, thereby ensuring that the manipulator 10 can continue to transfer and cool the substrate 20 normally.

[0048] It should be noted that in some other embodiments, a second airflow channel and a third airflow channel may be provided in the manipulator 10, and the specific settings of the second airflow channel and the third airflow channel may be the same as the first airflow channel 500. It is understood that the airflow channels may be arranged independently of each other. The specific number of airflow channels may be determined according to actual conditions. Some embodiments of the present application are described by taking the setting of a single airflow channel as an example.

[0049] Reference Figure 1 , the specific arrangement of the gas flow on the support plate 300 is described below. In some embodiments, the first airflow channel 500 also includes a fourth section 540. One end of the fourth section 540 can be connected to the third section 530, and the other end can be connected to the air outlet 320, that is, the blowing airflow can flow from the air inlet through the base 100, the first rotating shaft 400 and the first connecting arm 200, and then flow to the fourth section 540 of the support plate 300, and then flow from the fourth section 540 to the air outlet 320. Specifically, the fourth section 540 can be arranged inside the support plate 300, that is, the gas can flow inside the support plate 300. Compared with the solution in which the fourth section is arranged outside the support plate, this solution can optimize the structural layout of the support plate 300 and ensure the stability of the gas flow.

[0050] The specific dimensions of the air outlet 320 are described below. In some embodiments, the outer contour of the air outlet 320 may be circular. The diameter of the air outlet 320 may be L 1 Among them, L 1 ≥0.5mm. For example, L 1It can be 0.5mm, 0.7mm, 0.9mm, 1mm or 1.5mm, etc. In other embodiments, the air outlet 320 can also be square or triangular, etc. The specific shape of the air outlet 320 can be determined according to the actual situation. In other embodiments, the opening area of ​​the air outlet 320 can be smaller than the area of ​​the air flow channel adjacent to the air outlet 320, so that the air flow can be effectively compressed at the air outlet 320, thereby increasing the air flow velocity at the air outlet 320, and ensuring the cooling and supporting effect on the substrate 20.

[0051] The specific dimensions of the first airflow channel 500 are described below. In some embodiments, the first airflow channel 500 is circular, and the diameter of the first airflow channel 500 is L 2 Among them, L 2 ≥1 / 16 inch. For example, L 2 It may be 1 / 16 inch, 1 / 15 inch, 1 / 10 inch, 1 / 8 inch or 1 / 5 inch, etc. In other embodiments, the first airflow channel 500 may also be square or triangular, etc. The specific shape of the first airflow channel 500 may depend on the actual situation.

[0052] In some embodiments, the manipulator 10 may be provided with a plurality of air outlets 320. The specific number of air outlets 320 may be determined according to the actual situation. In some embodiments of the present application, 100 or more air outlets 320 are provided as an example. Each air outlet 320 may be arranged at intervals on the connecting surface 310 along the horizontal direction X. It should be noted that the horizontal direction X may be any direction perpendicular to the vertical direction Z. Figure 2 The direction in is used as a reference, and the horizontal direction X can point to the left and right direction. It can be understood that the interval between two adjacent blowing ports 320 can be uniform or non-uniform, and some embodiments of the present application are described by taking uniform interval as an example.

[0053] In some embodiments, the manipulator 10 further includes a limiting portion. The limiting portion may be provided on the pallet 300. Specifically, the limiting portion may be arranged relative to the pallet 300 in the vertical direction Z and spaced apart. It can be understood that the substrate 20 may be accommodated in the spaced apart position. In this solution, the limiting portion may inhibit the substrate 20 from moving in a direction away from the connecting surface 310, that is, it may ensure the stability of the pallet 300 in carrying and transporting the substrate 20.

[0054] It should be noted that in some embodiments, the airflow derived from the air outlet 320 may be Ar or He, etc. The flow rate of the airflow is V. Wherein, V ≥ 3 sccm (3 cubic centimeters per minute). Exemplarily, V may be 3 sccm, 5 sccm, 7 sccm, 9 sccm or 10 sccm, etc. This solution uses an inert cooling gas such as Ar or He, which can prevent the cooling gas from interfering with the normal processing of the substrate 20 by each chamber and prevent gas contamination of each chamber.

[0055] Reference Figure 1 In some embodiments, the manipulator 10 includes a second connecting arm 600, which can be connected to the pallet 300 and drive the pallet 300 to move relative to the base 100. The specific setting of the second connecting arm 600 is described below. It can be understood that the setting of the second connecting arm 600 can be the same as that of the first connecting arm 200. Specifically, the second connecting arm 600 can be arranged relative to the first connecting arm 200 along the vertical Z, and the second connecting arm 600 can be arranged on the upper side of the first connecting arm 200. The second connecting arm 600 can be rotatably connected to the first connecting arm 200. In order to facilitate the description and understanding of the specific rotation direction of the second connecting arm 600, it is defined that the second connecting arm 600 has a second rotation axis 610, and the extension direction of the second rotation axis 610 can be parallel to the vertical Z, that is, the second rotation axis 610 can be extended and arranged in the up and down direction. The second connecting arm 600 can rotate relative to the base 100 around the second rotation axis 610, that is, the pallet 300 connected to the second connecting arm 600 can rotate relative to the base. This solution can effectively increase the transfer range of the pallet 300 to meet different transfer requirements.

[0056] Reference Figure 1 , the specific rotation setting between the second connecting arm 600 and the first connecting arm 200 is introduced below. In some embodiments, the robot 10 includes a second rotating shaft 700, the first connecting arm 200 can be provided with a third connecting hole 230, the second connecting arm 600 can be provided with a fourth connecting hole 620, and the second rotating shaft 700 can be adapted to the arrangement of the third connecting hole 230 and the fourth connecting hole 620. The third connecting hole 230 and the fourth connecting hole 620 can be penetrated by the second rotating shaft 700 along the vertical Z direction, that is, the second connecting arm 600 can be rotated relative to the first connecting arm 200 around the second rotation axis 610. This solution can ensure the stability of the rotation connection between the second connecting arm 600 and the first connecting arm 200, so that the pallet 300 can stably transport the substrate 20.

[0057] It can be understood that the pallet 300 can be rotatably connected to the second connecting arm 600. Specifically, a third rotating shaft can be added, and the specific configuration of the third rotating shaft can be the same as the first rotating shaft 400, that is, the pallet 300 can be rotated relative to the second connecting arm 600 through the third rotating shaft. This solution can further increase the rotation range of the pallet 300 to meet various transportation requirements.

[0058] It should be noted that the first airflow channel 500 may also include a fifth section and a sixth section that are connected to each other, the fifth section may be arranged in the second rotating shaft 700, and the sixth section may be arranged in the second connecting arm 600. That is, the fifth section may be connected to the third section 530 of the airflow channel, and the sixth section may be connected to the fourth section 540 of the airflow channel, that is, the cooling airflow may be taken in from the air inlet, flow through the base 100, the first rotating shaft 400, the first connecting arm 200, the second rotating shaft 700 and the second connecting arm 600, and then flow to the blowing port 320 of the support plate 300, so as to realize cooling and floating support of the substrate 20.

[0059] The second aspect of the utility model proposes a production line, which includes the manipulator 10 of the above embodiment. It is understandable that the production line may also include substrate processing equipment. This solution can omit the setting of the cooling chamber, reduce the manufacturing cost of the substrate processing equipment, and can cool the substrate 20 during the process of transporting the substrate 20 on the pallet 300, effectively improving the processing efficiency of the substrate 20. Furthermore, because the airflow derived from the air outlet 320 can space the substrate 20 from the connecting surface 310, it can effectively reduce the collision between the substrate 20 and the pallet 300 during the transportation process, realize the floating support of the substrate 20, and ensure the processing quality of the substrate 20.

[0060] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back...), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indications will also change accordingly.

[0061] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the utility model, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features limited to "first" and "second" may explicitly or implicitly include at least one of the features. In addition, if "and / or", "and / or" or "and / or" appears in the full text, its meaning includes three parallel schemes. Taking "A and / or B" as an example, it includes scheme A, or scheme B, or a scheme that satisfies both A and B. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the utility model.

[0062] The above are only preferred embodiments of the present invention, and do not limit the patent scope of the present invention. All equivalent structural changes made by using the contents of the present invention specification and drawings under the utility model concept, or directly / indirectly used in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. A robot for transferring and cooling a substrate, characterized in that: The manipulator comprises: Pedestal; A first connecting arm is rotatably connected to the base and arranged opposite to the base in a vertical direction, wherein the first connecting arm has a first rotation axis, and an extending direction of the first rotation axis is parallel to the vertical direction; A support plate connected to the first connecting arm, the support plate having a connecting surface for carrying the substrate, the connecting surface being provided with an air blowing port; The first connecting arm is configured to be rotatable relative to the base around the first rotation axis, and the airflow derived from the air outlet can cool the substrate and space the substrate from the connecting surface.

2. The robot according to claim 1, characterized in that: The manipulator includes a first rotating shaft, the base is provided with a first connecting hole, the first connecting arm is provided with a second connecting hole, and the first rotating shaft is vertically penetrated by the first connecting hole and the second connecting hole so that the first connecting arm rotates around the first rotating axis.

3. The robot according to claim 2, characterized in that: The manipulator has a first airflow channel, which includes a first section, a second section and a third section that are connected to each other, the first section is arranged in the base, the second section is arranged in the first rotating shaft, and the third section is arranged in the first connecting arm and is connected to the blowing port.

4. The robot according to claim 3, characterized in that: The first air flow channel also includes a fourth section, one end of the fourth section is connected to the third section, and the other end of the fourth section is connected to the air outlet, and the fourth section is arranged in the support plate.

5. The robot according to claim 3, characterized in that: The outer contour of the blowing port is circular, and the diameter of the blowing port is L1, wherein L1 ≥ 0.5 mm; and / or, The first air flow channel is circular, and the diameter of the first air flow channel is L2, wherein L2≥1 / 16 inch.

6. The robot according to claim 1, characterized in that: The manipulator comprises a plurality of the blowing ports, each of which is arranged on the connecting surface at intervals along a lateral direction, and the lateral direction is perpendicular to the vertical direction.

7. The robot according to claim 1, characterized in that: The manipulator further comprises a limiting portion, which is disposed on the support plate and is arranged vertically opposite to and spaced from the support plate, and is suitable for restraining the substrate from moving in a direction away from the connection surface.

8. The robot according to claim 1, characterized in that: The gas flow derived from the gas blowing port is Ar or He, and the flow rate of the gas flow is V, wherein V≥3sccm.

9. The robot according to claim 1, characterized in that: The manipulator comprises a second connecting arm, the second connecting arm is rotatably connected to the first connecting arm and arranged opposite to the first connecting arm in the vertical direction, the second connecting arm has a second rotation axis, the extension direction of the second rotation axis is parallel to the vertical direction, and the second connecting arm is configured to be rotatable relative to the first connecting arm around the second rotation axis; The manipulator includes a second rotating shaft, the first connecting arm is provided with a third connecting hole, the second connecting arm is provided with a fourth connecting hole, and the second rotating shaft is vertically penetrated by the third connecting hole and the fourth connecting hole so that the second connecting arm rotates around the first rotation axis.

10. A production line, characterized in that Comprising a robot as described in any one of claims 1-9.

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