Crucible tool for column-method liquid-phase siliconizing of cylindrical product
By designing conical ridges and grooves in the bottom support center of the crucible tool set, combining arc-shaped side wall flap assembly and isostatic graphite material, the problems of uneven distribution of silicon materials and uneven silicon blocks in the existing crucible tool set are solved, and the problem of uneven silicon material distribution in the existing crucible tool set is achieved. More efficient silicon material utilization and more stable cylindrical product placement.
Patent Information
- Application Number
- CN202420959025.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-30
- Publication Date
- 2025-02-18
- Estimated Expiration
- 2034-04-30
AI Technical Summary
The existing crucible tooling is designed as a plane at the bottom, resulting in uneven distribution of silicon materials, wasting silicon materials, and after the first use, the bottom condenses into uneven silicon blocks, affecting the placement stability of the cylindrical product.
Design a tool including a crucible bottom bracket, side wall and cover. The center of the bottom bracket is equipped with a conical raised structure and groove. The support pillars are placed in the groove to position the cylindrical product. The side walls are made of multiple arc-shaped side wall flaps. Assembled, the bottom bracket, side wall and cover are made of isostatic graphite, and expansion joints are provided between the parts of the tooling.
The utilization rate of silicon material is improved, and the silicon material is prevented from condensing into uneven silicon blocks, ensuring the stable placement of cylindrical products, reducing the difficulty of tooling assembly and production costs, and improving the utilization rate of substrate.
Smart Images
Figure CN222499329U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the field of liquid phase siliconization, and particularly relates to a crucible tooling used for liquid phase siliconization of cylindrical products by a pillar method. Background Art
[0002] In the production process of liquid phase siliconization by pillar method, the use of crucibles and other tooling is an indispensable link. As a container for carrying molten silicon, the structural design of the crucible is directly related to the utilization rate of silicon materials, product quality and production cost. At present, there is a common problem in the design of mainstream crucibles on the market, that is, the inner surface of the bottom is a flat design. This design brings many challenges in the actual production process.
[0003] First, since the bottom inner surface of the crucible is flat, the molten silicon is not easy to gather at the bottom of the cylindrical product during the process. This leads to uneven distribution of silicon material in the crucible, with too much silicon material in some areas and too little in others. This not only causes waste of silicon material, but also makes the estimation of silicon material usage inaccurate, increasing the difficulty of controlling production costs.
[0004] Secondly, after the crucible is used for the first time, silicon blocks will solidify at the bottom. Since the inner surface of the bottom is flat, the solidified silicon blocks are often uneven. This not only affects the appearance of the crucible, but more importantly, when the tooling is used next time, the uneven silicon blocks will interfere with the placement of the cylindrical products, making it impossible to stably place the cylindrical products in the crucible, thereby affecting the product quality and production stability. Utility Model Content
[0005] The utility model aims to overcome the deficiencies in the prior art and to provide a crucible tooling for liquid phase siliconization of cylindrical products by a pillar method, so as to solve the problems of low silicon material utilization rate in the existing crucible tooling and uneven silicon blocks condensed on the bottom after the first use, which affects the stability of the placement of the cylindrical products.
[0006] In order to achieve the above purpose, the technical solution adopted by the utility model is:
[0007] A crucible tooling for liquid phase siliconization of cylindrical products by the pillar method, comprising a crucible base, a crucible side wall and a crucible cover, wherein the crucible base comprises a bottom plate and a bottom plate side wall integrally formed at the outer edge of the bottom plate, the center of the bottom plate is a conical ridge structure, and the bottom plate is provided with a groove; a plurality of pillars are placed in the grooves, the cylindrical product is placed on the upper part of the pillars, the crucible cover is closed on the crucible side wall, the crucible cover is provided with a plurality of second screw holes, and the second screw holes are threadedly connected with hooks.
[0008] Furthermore, the crucible bottom support, the crucible side wall and the crucible cover are all made of isostatically pressed graphite.
[0009] Furthermore, the side wall of the crucible is assembled by a plurality of arc-shaped side wall petals, and positioning steps are provided on the left and right sides of the side wall petals, and the positioning steps at both ends of adjacent side wall petals cooperate with each other; a bottom support step is provided on the upper part of the crucible bottom support, and a locking step is provided on the lower part of the crucible cover; side wall steps are provided on the upper and lower ends of the side wall petals, wherein the side wall step at the lower end cooperates with the bottom support step, and the side wall step at the upper end cooperates with the locking step; a plurality of first screw holes are provided at both ends of the side wall petals, and connecting plates are provided on the outside of adjacent side wall petals, and a plurality of through holes corresponding to the first screw holes are provided on both sides of the connecting plate, a screw is threadedly connected to the first screw hole, and the outer end of the screw passes through the through hole and is threadedly connected to a nut.
[0010] Furthermore, expansion joints are provided between adjacent side wall petals, between the side wall petals and the bottom support step, and between the side wall petals and the crucible cover, the distance of the expansion joints is 2mm-4mm, and the diameter of the through hole is larger than the diameter of the first screw hole.
[0011] Furthermore, the first screw hole and the second screw hole are both blind holes.
[0012] Furthermore, a center hole is provided at the center of the crucible cover, and the diameter of the center hole is less than 100 mm.
[0013] Furthermore, a transition fillet is provided between the bottom plate and the side wall of the bottom bracket.
[0014] Furthermore, the conical protrusion angle of the bottom plate center is 2° to 5°, and the height of the bottom support side wall is
[0015] Furthermore, the pillar is a truncated cone structure with a small diameter at the upper part and a large diameter at the lower part.
[0016] The beneficial effects of the utility model are:
[0017] 1) The utility model designs a conical protrusion at the center of the crucible bottom support and arranges a groove on the crucible bottom support, so as to facilitate the gathering of silicon material at the bottom of the tubular product, improve the utilization rate of silicon material, ensure the siliconization effect of the tubular product, gather and flow into the groove after melting, and avoid the silicon material condensing into uneven silicon blocks on the bottom plate.
[0018] 2) The crucible bottom support, crucible side wall and crucible cover are assembled in a detachable manner, and the crucible side wall adopts an assembled structure, which not only reduces the assembly difficulty of the crucible tooling, especially the large crucible tooling, but also reduces the size requirements of the graphite substrate during tooling production, improves the utilization rate of the substrate, and reduces the production cost of the tooling.
[0019] 3) Expansion joints are provided between the side wall petals of the crucible side wall, and between the crucible bottom support and the crucible cover that match the crucible side wall, to prevent the crucible from being heated and expanded when the siliconizing furnace is heated, causing excessive contact stress between the various parts of the crucible tooling and causing damage.
[0020] 4) A center hole is set at the center of the crucible cover to facilitate vacuuming in the siliconizing furnace at the front end of the process and ensure the vacuum degree inside the crucible.
[0021] 5) The pillar is a truncated cone structure with a small upper diameter and a large lower diameter. While ensuring the stability of the pillar supporting the cylindrical product, the contact area between the pillar and the cylindrical product is reduced, thereby ensuring the siliconization effect of the cylindrical product. BRIEF DESCRIPTION OF THE DRAWINGS
[0022] Attached Figure 1 The utility model is a schematic diagram of a crucible tooling structure used for liquid phase siliconization of cylindrical products by a pillar method.
[0023] Attached Figure 2 The utility model is a cross-sectional view of a crucible tooling for liquid phase siliconization of a cylindrical product by a pillar method.
[0024] Attached Figure 3 The utility model discloses a cross-sectional view of a crucible bottom support in a crucible tooling for liquid phase siliconization of a cylindrical product by a pillar method.
[0025] Attached Figure 4 The utility model is a schematic diagram of a support in a crucible tooling for liquid phase siliconization of a cylindrical product by a support method.
[0026] Attached Figure 5 The utility model is a partial view of the side wall of a crucible in a crucible tooling for liquid phase siliconization of a cylindrical product by a pillar method.
[0027] In the figure, 1. crucible base; 11. slot; 12. transition fillet; 13. base step; 14. bottom plate; 15. base side wall; 2. crucible side wall; 21. positioning step; 22. side wall step; 23. first screw hole; 24. side wall flap; 3. crucible cover; 31. center hole; 32. hook; 33. second screw hole; 4. tubular product; 5. pillar; 6. connecting plate; 61. screw; 62. nut. DETAILED DESCRIPTION
[0028] The following will be combined with the attached Figure 1-Figure 5 , clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of them. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0029] In the description of the present invention, it should be understood that the terms "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.
[0030] like Figure 1 , Figure 2 As shown, a crucible tooling for liquid phase siliconization of cylindrical products by pillar method comprises a crucible bottom support 1, a crucible side wall 2 and a crucible cover 3, as shown in FIG. Figure 3 As shown, the crucible base 1 includes a bottom plate 14 and a base side wall 15 integrally formed on the outer edge of the bottom plate 14. The center of the bottom plate 14 is a conical bulge structure, and a groove 11 is provided on the bottom plate 14. The conical bulge structure of the bottom plate 14 facilitates the silicon material to gather and flow into the groove 11 after melting, thereby improving the utilization rate of the silicon material and preventing the silicon material from condensing into silicon blocks on the bottom plate 14; a plurality of pillars 5 are placed in the groove 11 for positioning and supporting the cylindrical product 4, and the cylindrical product 4 is placed on the upper part of the pillars 5. The crucible cover 3 is covered on the crucible side wall 2, and the crucible cover 3 is provided with a plurality of second screw holes 33, and the second screw holes 33 are threadedly connected with hooks 32 for hanging the crucible cover 3.
[0031] Furthermore, the crucible bottom support 1, the crucible side wall 2 and the crucible cover 3 are all made of isostatic graphite, so that the crucible tooling has the characteristics of good heat resistance, low thermal expansion coefficient and isotropy. In addition, the crucible bottom support, the crucible side wall and the crucible cover made of static graphite also have good chemical corrosion resistance and good thermal conductivity, ensuring the effect of the siliconizing process.
[0032] like Figure 5 As shown, the crucible side wall 2 is assembled by a plurality of arc-shaped side wall petals 24. In this embodiment, the crucible side wall 2 is assembled by four side wall petals 24. Positioning steps 21 are provided on both sides of the side wall petals 24, and the positioning steps 21 at both ends of adjacent side wall petals 24 cooperate with each other. Figure 3As shown, the upper part of the crucible bottom support 1 is provided with a bottom support step 13, and the lower part of the crucible cover 3 is provided with a locking step (not shown in the figure); the upper and lower ends of the side wall petals 24 are provided with side wall steps 22, wherein the side wall step 22 at the lower end cooperates with the bottom support step 13, and the side wall step 22 at the upper end cooperates with the locking step; a plurality of first screw holes 23 are provided at both ends of the side wall petals 24, and a connecting plate 6 is provided on the outside of adjacent side wall petals 24, and a plurality of through holes corresponding to the first screw holes 23 are provided on both sides of the connecting plate 6, and a screw 61 is threadedly connected to the inner thread of the first screw hole 23, and the outer end of the screw 61 passes through the through hole and is threadedly connected to a nut 62; as the size of the cylindrical product increases, the size requirements of the crucible are also increased accordingly, but due to the limitations of the size and cost of raw materials, the manufacture of large-sized crucibles becomes difficult. In this scheme, a detachable spliced crucible side wall is used to solve the problem of difficulty in manufacturing and assembling the side wall of a large-sized crucible.
[0033] In this embodiment, expansion joints are provided between adjacent side wall petals 24, between the side wall petals 24 and the bottom support step 13, and between the side wall petals 24 and the crucible cover 3. The distance of the expansion joints is 3 mm. The diameter of the through hole is larger than the diameter of the first screw hole 23 to prevent the crucible from expanding due to heat when the siliconizing furnace is heated, causing damage to the crucible tooling components due to excessive contact stress.
[0034] In this embodiment, the first screw hole 23 and the second screw hole 33 are both blind holes, which prevent silicon vapor from corroding the screw rod and the hook through the threaded holes during the process, thereby causing failure of the connection structure.
[0035] like Figure 1 As shown, a center hole 31 is provided at the center of the crucible cover 3, which is convenient for evacuating the siliconizing furnace in the front stage of the process and ensuring the vacuum degree inside the crucible. The aperture of the center hole 31 is less than 100 mm to prevent silicon vapor from escaping from the crucible in large quantities and corroding the heat field in the furnace.
[0036] like Figure 3 As shown, a transition fillet 12 is provided between the bottom plate 14 and the bottom support side wall 15, so as to avoid a large stress concentration between the bottom plate 14 and the bottom support when the crucible is heated, and at the same time enhance the strength of the crucible bottom support 1.
[0037] In this embodiment, the conical protrusion angle of the center of the bottom plate 14 is 2° to 5°, and the height of the bottom support side wall 15 is 1 / 2 of the diameter of the bottom plate 14. On the one hand, the shallow crucible bottom support 1 is convenient for cleaning silicon blocks condensed on the crucible bottom support 1 , and on the other hand, the shallow crucible bottom support 1 is less wasteful in the production of raw materials, thus saving manufacturing costs.
[0038] like Figure 4As shown, the support 5 is a truncated cone structure with a small upper diameter and a large lower diameter. While ensuring the stability of the support 5 supporting the cylindrical product 4, the contact area between the support 5 and the cylindrical product 4 is reduced, thereby ensuring the siliconization effect of the cylindrical product 4.
[0039] The above contents are merely examples and explanations of the structure of the utility model. The technicians in this technical field may make various modifications or additions to the specific embodiments described or replace them in a similar manner. As long as they do not deviate from the structure of the utility model or exceed the scope defined in the claims, they should all fall within the protection scope of the utility model.
Claims
1. A crucible tooling for liquid phase siliconization of cylindrical products by a pillar method, comprising a crucible bottom support, a crucible side wall and a crucible cover, wherein the crucible bottom support comprises a bottom plate and a bottom support side wall integrally formed at the outer edge of the bottom plate, characterized in that: The center of the bottom plate is a conical raised structure, and a groove is provided on the bottom plate; a plurality of pillars are placed in the groove, and the cylindrical product is placed on the upper part of the pillars. The crucible cover is covered on the side wall of the crucible, and a plurality of second screw holes are provided on the crucible cover, and hooks are threadedly connected to the second screw holes.
2. A crucible tooling for liquid phase siliconizing of cylindrical products by pillar method according to claim 1, characterized in that: The crucible bottom support, the crucible side wall and the crucible cover are all made of isostatic graphite.
3. The crucible tooling for liquid phase siliconizing of cylindrical products by pillar method according to claim 1, characterized in that: The side wall of the crucible is assembled by a plurality of arc-shaped side wall petals, and positioning steps are provided on the left and right sides of the side wall petals, and the positioning steps at both ends of adjacent side wall petals cooperate with each other; a bottom support step is provided on the upper part of the crucible bottom support, and a locking step is provided on the lower part of the crucible cover; side wall steps are provided on the upper and lower ends of the side wall petals, wherein the side wall step at the lower end cooperates with the bottom support step, and the side wall step at the upper end cooperates with the locking step; a plurality of first screw holes are provided at both ends of the side wall petals, and connecting plates are provided on the outside of adjacent side wall petals, and a plurality of through holes corresponding to the first screw holes are provided on both sides of the connecting plate, a screw is threadedly connected to the inner thread of the first screw hole, and the outer end of the screw passes through the through hole and is threadedly connected to a nut.
4. A crucible tooling for liquid phase siliconizing of cylindrical products by pillar method according to claim 3, characterized in that: Expansion joints are arranged between adjacent side wall petals, between the side wall petals and the bottom support step, and between the side wall petals and the crucible cover. The distance of the expansion joints is 2mm to 4mm. The diameter of the through hole is larger than the diameter of the first screw hole.
5. The crucible tooling for liquid phase siliconizing of cylindrical products by pillar method according to claim 3, characterized in that: The first screw hole and the second screw hole are both blind holes.
6. The crucible tooling for liquid phase siliconizing of cylindrical products by pillar method according to claim 1, characterized in that: A central hole is provided at the center of the crucible cover, and the diameter of the central hole is less than 100 mm.
7. The crucible tooling for liquid phase siliconizing of cylindrical products by pillar method according to claim 1, characterized in that: A transition fillet is provided between the bottom plate and the side wall of the bottom bracket.
8. A crucible tool for liquid phase siliconizing of cylindrical products by pillar method according to any one of claims 1 to 7, characterized in that: The conical protrusion angle of the bottom plate center is 2° to 5°, and the height of the bottom support side wall is 1 / 2 of the bottom plate diameter.
9. The crucible tooling for liquid phase siliconizing of cylindrical products by pillar method according to claim 1, characterized in that: The support column is a truncated cone structure with a small diameter at the upper part and a large diameter at the lower part.