Fabricated ribbed beam structure of steel structure semiconductor plant

Abstract

According to the fabricated ribbed beam structure of the steel structure semiconductor plant, the mode that a cheese plate is replaced by the reinforced concrete ribbed beam is adopted, the construction difficulty is lowered, construction is easier and more convenient, the construction period is greatly shortened, and meanwhile the aperture ratio is higher. The structure comprises main beams, secondary beams and ribbed beams, the main beams comprise horizontal main beams and vertical main beams, the horizontal main beams and the vertical main beams are crossed and distributed in a net shape, the secondary beams are evenly distributed in the main beams distributed in the net shape in the horizontal direction and connected with the main beams, and the ribbed beams are precast beams made of reinforced concrete and distributed at the upper ends of the main beams and the secondary beams in the vertical direction.

Description

Technical Field

[0001] The utility model relates to the technical field of clean room assembly design and construction of semiconductor plants, in particular to an assembly rib beam structure of a steel structure semiconductor plant. Background Art

[0002] In recent years, with the vigorous development of the high-tech semiconductor field, the corresponding semiconductor plant buildings have also increased. Semiconductor plants require large clean rooms, which are usually large-span spaces, mainly to provide spacious production space and a high-cleanliness environment for the production process of semiconductor products. In addition, there are high-precision equipment such as photolithography machines in the clean room. These high-precision equipment are sensitive to micro-vibration, and the clean room floor must also meet the corresponding anti-micro-vibration requirements.

[0003] Traditional semiconductor factories are mainly made of concrete structures. Usually, one factory has one clean room. The clean room floor adopts cast-in-place concrete beam-slab structures such as waffle boards and cheese boards to meet the requirements of open hole ventilation and cleanliness and provide anti-micro-vibration performance. However, as urban land becomes increasingly scarce, especially in megacities, the area of ​​industrial land is becoming less and less. Double-layer or even three-layer stacked clean room semiconductor high-rise factories have gradually emerged in recent years due to actual needs. Stacked clean rooms are large-span spaces, and traditional concrete structures cannot achieve large-span structures. Steel structures are usually used. The floor structure of steel-structured semiconductor factories still uses the traditional cheese board cast-in-place on steel beams to achieve ventilation, cleanliness and anti-micro-vibration requirements. Since the cheese board is relatively thick, it is usually 300mm∼600mm. During construction, formwork is first supported at high altitude, connecting bolts are welded on the steel beams, and then steel bars are tied on site, and waffle tubes are installed in the steel grid. Concrete is poured and cured. Finally, epoxy coating is applied to the concrete surface after demolding. However, this method is complex, difficult, and has a long construction period. At the same time, the waffle tube hole opening method is used, and the opening rate is less than 30%, which is a low opening rate. Utility Model Content

[0004] In view of the problems that the existing clean rooms adopt the method of casting cheese plates on steel beams and use waffle cones to open holes, which leads to complex and difficult construction, long construction period and low opening rate, the utility model provides a steel structure semiconductor factory building assembled rib beam structure, which adopts reinforced concrete rib beams instead of cheese plates, which not only reduces the construction difficulty and makes the construction more convenient, greatly shortens the construction period, but also has a higher opening rate.

[0005] The technical solution is as follows: a steel structure semiconductor factory building assembled rib beam structure, characterized in that: it includes a main beam, a secondary beam and a rib beam, the main beam includes a horizontal main beam and a vertical main beam, the horizontal main beam and the vertical main beam are cross-distributed in a mesh, the secondary beams are evenly distributed in the horizontal direction inside the mesh-distributed main beams and connected thereto, the rib beams are prefabricated beams made of reinforced concrete, and are distributed in the vertical direction at the upper ends of the main beams and secondary beams. It is further characterized in that: a square steel pipe column is provided at the lower end of the intersection node of the horizontal main beam and the vertical main beam;

[0006] The cross section of the rib beam is rectangular, the width of the cross section is 250mm, the length is 300mm~600mm, the length of the rib beam is less than 10m, anchor steel bars are arranged inside the rib beam, and an embedded channel steel is arranged at the bottom of the rib beam;

[0007] The net distance between the horizontally arranged ribs is greater than 300 mm;

[0008] The main beam and the secondary beam are respectively H-shaped steel beams, a node plate is provided at the intersection node between the secondary beam and the main beam, a horizontal stiffening rib corresponding to the lower end of the secondary beam is provided inside the main beam, and a vertical stiffening rib is provided between the horizontal stiffening rib and the lower end surface of the main beam; the upper end of the main beam and the secondary beam are rigidly connected by a butt weld at the butt position, and the horizontal stiffening rib of the main beam and the lower end of the secondary beam are rigidly connected by a butt weld at the butt position;

[0009] The rib beam is connected to the top surface of the main beam or secondary beam in contact with it through the channel steel by fillet welding;

[0010] An elevated floor is arranged at the upper end of the rib beam, and the bottom of the elevated floor is connected to the interior of the anchoring steel bars of the rib beam through expansion bolts.

[0011] After adopting the above structure, the horizontal main beam and the vertical main beam are cross-connected vertically to form a mesh structure, and the connection strength is increased by arranging horizontal secondary beams inside. Vertically arranged rib beams (precast concrete beams) are arranged on the surface of the main beam and the secondary beam. In this way, the assembly is simple, the construction is convenient, and the time consumption is short. The rib beams are arranged vertically and cross-arranged with the main and secondary beams, and the rigidity is superimposed to provide sufficient anti-micro-vibration performance. At the same time, the rectangular opening area enclosed by the rib beam and the main beam or the secondary beam is larger than the opening area of ​​the waffle cone opening on the traditional cheese board, so the opening rate is higher. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 This is a top view of the overall structure of the utility model;

[0013] Figure 2 For this utility model Figure 1Middle AA section view;

[0014] Figure 3 This is a schematic diagram of the structure of the rigid connection nodes of the main beam and the secondary beam of the utility model;

[0015] Figure 4 This is a schematic diagram of the connection position structure of the rib beam and the steel beam of the utility model;

[0016] Figure 5 This is a schematic diagram of the rib beam structure of the utility model;

[0017] Figure 6 The utility model is a schematic diagram of the gap processing structure between the rib beam and the steel beam. DETAILED DESCRIPTION

[0018] like Figure 1 , 2 As shown in Figure 3, a steel structure semiconductor plant assembled rib beam structure includes a main beam 3, a secondary beam 2 and a rib beam 1, wherein the main beam 3 includes a horizontal main beam and a vertical main beam, the horizontal main beam and the vertical main beam are vertically cross-distributed to form a mesh structure, a square steel pipe column 4 is provided at the lower end of the intersection node position of the horizontal main beam and the vertical main beam, the secondary beam 2 is evenly distributed between the horizontal main beams in the horizontal direction and connected to the vertical main beam, the main beam 3 and the secondary beam 2 are respectively steel beams with H-shaped cross-sections, and the secondary beam 2 is connected to the vertical main beam. A node plate 14 is provided at the intersection node of the main beam 3, and the node plate 14 is connected to the secondary beam 2 by a high-strength bolt 15. A horizontal stiffening rib 11 corresponding to the lower end face of the secondary beam is provided inside the main beam 3, and a vertical stiffening rib 12 is provided between the horizontal stiffening rib 11 and the lower end face of the main beam 3; the main beam 3 and the secondary beam 2 are rigidly connected at the upper end butt joint position through a butt weld 13, and the horizontal stiffening rib 11 of the main beam 3 and the secondary beam 2 are rigidly connected at the lower end butt joint position through a butt weld 13.

[0019] like Figure 4 , 5 As shown, the rib beam 1 is a prefabricated beam made of reinforced concrete, and it is distributed at the upper end of the main beam 3 and the secondary beam 2 in the vertical direction. Specifically, the cross-section of the rib beam 1 is rectangular, and its width is 250mm and its length is 300mm~600mm. The overall length of the rib beam 1 is less than 10m. The interior of the rib beam 1 is provided with embedded anchor steel bars 8, and the bottom of the rib beam 1 is provided with embedded channel steels 9. The channel steels 9 are embedded in the prefabricated reinforced concrete rib beam 1 and connected to the anchor steel bars 8 inside the rib beam 1. The channel steels 9 include 4 channels evenly distributed at the bottom of the rib beam 1. The rib beam 1 is connected to the top surface of the main beam 3 or the secondary beam 2 in contact with it through the channel steels 9 through fillet welds 10. Due to errors in construction, there may be slight differences in the top elevations after the main beam 3 and the secondary beam 2 are installed, so that there may be slight gaps between the rib beam 1 and some steel beams after welding and installation. For gaps less than or equal to 1mm, no treatment is required. For gaps greater than 1mm, such as Figure 6 As shown, the seams are sealed with caulking steel sheets 18. The top of the rib beam 1 is provided with a pre-buried screw hole 17 at a position about 1 / 4 of the beam length from both ends thereof, and the pre-buried screw hole 17 is connected to the annular hanging bolt 16, which facilitates the on-site hanging of the rib beam 1.

[0020] The upper end of the rib beam 1 is provided with an elevated floor 6, and the bottom of the elevated floor 6 is connected to the rib beam 1 through an expansion bolt 7. The conventional module of the elevated floor 6 is 600mmx600mm, and the spacing of the rib beams 1 (the spacing between the centers of two adjacent rib beams 1) of the present invention also adopts a spacing of 600mm. The width of the rib beam 1 itself is less than 300mm, so that the net distance between two adjacent rib beams 1 will be greater than 300mm, leaving enough space for the installation and construction of the rib beam 1. At the same time, by adopting this method, the rectangular opening area enclosed by the rib beam 1 and the main beam 3 or the secondary beam 2 is larger than the opening area of ​​the existing cheese board using the pre-embedded waffle tube method. The existing cheese board uses the waffle tube opening method, and the maximum diameter of the floor cavity does not exceed 380 mm, and the opening rate is relatively low, not exceeding 30% at most. In this application, the rib beam 1 and the rigid main beam 3 or the secondary beam 2 are arranged vertically to form an opening, which is equivalent to changing the circular hole into a square hole, and the opening rate is increased to 40%, which can meet the future new process requirements for increased cleanliness. At the same time, the two are cross-arranged to form a stiffness superposition system to provide the required anti-micro-vibration performance.

[0021] The installation method of the assembled rib beam structure of the utility model is as follows:

[0022] First, install the main steel structure. After the square steel pipe column 4 is installed in place, install the steel structure main beam 3. The main beam 3 and the steel pipe column 4 are connected by high-strength bolts + on-site welding. Then install the steel structure secondary beam 2. The secondary beam 2 is a continuous beam design with rigid connection at the end. Figure 3 As shown, the main beam 3 and the opposite secondary beam 2 are rigidly connected by a butt weld 13. After the secondary beam 2 is installed, the prefabricated reinforced concrete rib beam 1 is hoisted on site. The rib beam 1 reaches the actual length requirement on site through assembly. A gap 5 is left at the end of the rib beam 1 to prevent the rib beams 1 from colliding with each other. The width of the gap 5 is usually about 20 mm. After the rib beam 1 is in place, it is connected to the main beam 3 or the secondary beam 2 by an on-site fillet weld 10 through the embedded channel steel 9. Finally, the expansion bolts 7 are driven into the prefabricated rib beam 1, and the elevated floor 6 is installed.

[0023] The assembled rib beam structure of the utility model has the following advantages:

[0024] 1. Simple construction and short construction period

[0025] The use of prefabricated concrete rib beams 1 can realize prefabrication in the factory. At the same time, the components are finely divided, and the prefabricated components are light in weight, convenient for transportation, and simple for hoisting. In addition, there is no need for on-site pouring, and on-site welding can be completed after positioning, which can greatly reduce the construction difficulty, increase the construction speed, and shorten the construction period.

[0026] 2. Low cost

[0027] Since the waffle cone hole-forming method is not used, the cost is greatly reduced. Usually, the cost of the waffle cone accounts for about 40% of the overall cost of the cheese board. In addition, the steel beam does not need to be welded with studs, and the secondary beam of the steel structure adopts the end rigid connection node as a continuous beam design, the cost is reduced by more than 40% compared with the traditional cast-in-place cheese board.

[0028] 3. Clean site and fewer processes

[0029] The use of prefabricated components eliminates the need for wet concrete pouring operations, making the site clean. In addition, prefabricated concrete ribs are hoisted on site after epoxy coating, reducing the number of on-site epoxy coating procedures.

[0030] 4. The floor opening rate is high, which can meet the needs of future process upgrades.

[0031] By adopting the cross arrangement of rib beam 1 and steel beam, the opening rate is increased from the traditional 30% to 40%, which can meet the demand for higher cleanliness of new processes in the future.

[0032] The above are only preferred specific implementations of the utility model, but the protection scope of the utility model is not limited thereto. Any changes or substitutions that can be easily thought of by anyone familiar with the technology within the technical scope disclosed by the utility model should be included in the protection scope of the utility model. Therefore, the protection scope of the utility model should be based on the protection scope of the claims.

Claims

1. An assembled rib beam structure for a steel structure semiconductor plant, characterized by: It includes a main beam, a secondary beam and a rib beam. The main beam includes a horizontal main beam and a vertical main beam. The horizontal main beam and the vertical main beam are crossed and distributed in a grid. The secondary beams are evenly distributed inside the grid-distributed main beams in the horizontal direction and connected thereto. The rib beams are prefabricated beams made of reinforced concrete and are distributed at the upper ends of the main beams and the secondary beams in the vertical direction.

2. The assembled rib beam structure of a steel structure semiconductor plant according to claim 1, characterized in that: A square steel pipe column is provided at the lower end of the intersection node of the horizontal main beam and the vertical main beam.

3. The assembled rib beam structure of a steel structure semiconductor plant according to claim 1, characterized in that: The cross section of the rib beam is rectangular, with a width of 250mm and a height of 300mm~600mm. The length of the rib beam is less than 10m. Anchor steel bars are arranged inside the rib beam, and an embedded channel steel is arranged at the bottom of the rib beam.

4. The assembled rib beam structure of a steel structure semiconductor plant according to claim 1, characterized in that: The net distance between the horizontally arranged rib beams is greater than 300 mm.

5. The assembled rib beam structure of a steel structure semiconductor plant according to claim 1, characterized in that: The main beam and secondary beam are respectively H-shaped steel beams, a node plate is provided at the intersection node between the secondary beam and the main beam, a horizontal stiffening rib corresponding to the lower end of the secondary beam is provided inside the main beam, and a vertical stiffening rib is provided between the horizontal stiffening rib and the lower end face of the main beam; the main beam and the secondary beam are rigidly connected at the upper end butting position by a butt weld, and the horizontal stiffening rib of the main beam and the secondary beam are rigidly connected at the lower end butting position by a butt weld.

6. The assembled rib beam structure of a steel structure semiconductor plant according to claim 3, characterized in that: The rib beam is connected to the top surface of the main beam or the secondary beam in contact with it through the channel steel by corner welds.

7. The assembled rib beam structure of a steel structure semiconductor plant according to claim 1, characterized in that: An elevated floor is arranged at the upper end of the rib beam, and the bottom of the elevated floor is connected to the interior of the anchoring steel bars of the rib beam through expansion bolts.

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