Bracket for monitoring cavity temperature

Abstract

The utility model provides a support for cavity temperature monitoring. The support for cavity temperature monitoring comprises a base, a telescopic supporting rod and a pivoting mechanism. The telescopic supporting rod is arranged on the base and extends upwards, and the telescopic supporting rod can stretch out and draw back to adjust the length of the telescopic supporting rod in the vertical direction. The pivoting mechanism is arranged at the top of the telescopic supporting rod, can pivot in a vertical plane and is used for being connected with a temperature measuring meter for temperature monitoring. The position of the whole thermodetector in the vertical direction can be adjusted through the telescopic supporting rod, the thermodetector can pivot in the vertical plane through the pivoting mechanism, and the position of the temperature measuring end of the thermodetector in the vertical direction can be adjusted. Therefore, the universality of the bracket for cavity temperature monitoring is improved, the cost is reduced, and the application range is expanded.

Description

Technical Field

[0001] The present disclosure relates to the semiconductor vacuum industry, and more specifically to a bracket for cavity temperature monitoring. Background Art

[0002] In the semiconductor vacuum industry, the cavity temperature monitoring bracket designed is a fixed bracket. The fixed bracket can only be used for one machine and cannot be used between different equipment, which greatly increases the design cost of the part. In addition, the fixed bracket cannot be adjusted, so the pyrometer (i.e., thermometer) installed on it can only monitor the temperature of one position, which has limitations in use. Utility Model Content

[0003] In view of the problems existing in the background technology, the purpose of the present invention is to provide a cavity temperature monitoring bracket, which can improve the versatility of the cavity temperature monitoring bracket, reduce costs, and expand the scope of use.

[0004] Therefore, a cavity temperature monitoring bracket is provided. The cavity temperature monitoring bracket comprises a base, a telescopic support rod and a pivot mechanism; the telescopic support rod is arranged on the base and extends upward, and the telescopic support rod can be telescoped to adjust the length of the telescopic support rod in the vertical direction; the pivot mechanism is arranged on the top of the telescopic support rod, and can be pivoted in a vertical plane, and the pivot mechanism is used to connect a temperature monitoring thermometer.

[0005] The beneficial effects of the present disclosure are as follows: in the cavity temperature monitoring bracket according to the present disclosure, the telescopic support rod enables the position of the thermometer as a whole to be adjusted in the vertical direction, and the pivot mechanism enables the thermometer to pivot in the vertical plane, thereby enabling the position of the temperature measuring end of the thermometer to be adjusted in the vertical direction. As a result, the versatility of the cavity temperature monitoring bracket is improved, the cost is reduced, and the scope of use is expanded. BRIEF DESCRIPTION OF THE DRAWINGS

[0006] Figure 1 It is a stereoscopic view of a bracket for cavity temperature monitoring according to the present disclosure.

[0007] Figure 2 yes Figure 1 A stereoscopic view of the cavity temperature monitoring bracket viewed from another angle.

[0008] Figure 3 It is a three-dimensional picture of the compression nut together with the thermometer.

[0009] The reference numerals are described as follows:

[0010] 100 Cavity temperature monitoring bracket 3 pivot mechanism

[0011] D1 31 positive U-shaped bend inner piece in the up and down direction

[0012] D2 32 inverted U-shaped bend outer piece in left and right direction

[0013] D3 front and rear direction 33 axis rod

[0014] 1 base 34 stopper

[0015] 11 waist hole 35 rotating handle

[0016] 12 mounting holes 4 screws

[0017] 13 threaded holes 5 tighten the screws

[0018] 2 shrink rods 6 connecting pieces

[0019] 21 sleeve 7 compression nut

[0020] 22 telescopic rod 200 thermometer

[0021] 23 screw 200a external thread DETAILED DESCRIPTION

[0022] The accompanying drawings show embodiments of the present disclosure, and it will be understood that the disclosed embodiments are merely examples of the present disclosure, and the present disclosure can be implemented in various forms. Therefore, the specific details disclosed herein should not be interpreted as limiting, but merely as the basis for the claims and as a representative basis for teaching ordinary technicians in the field to implement the present disclosure in various ways.

[0023] Reference Figure 1 and Figure 2 According to the present disclosure, the cavity temperature monitoring bracket 100 includes a base 1, a telescopic support rod 2, and a pivot mechanism 3. The telescopic support rod 2 is arranged on the base 1 and extends upward, and the telescopic support rod 2 can be extended to adjust the length of the telescopic support rod 2 in the up-down direction D1. The pivot mechanism 3 is arranged at the top of the telescopic support rod 2 and can pivot in a vertical plane. The pivot mechanism 3 is used to connect the temperature monitoring thermometer 200.

[0024] In the cavity temperature monitoring bracket 100 according to the present disclosure, the telescopic support rod 2 enables the position of the thermometer 200 as a whole to be adjustable in the vertical direction D1, and the pivot mechanism 3 enables the thermometer 200 to pivot in a vertical plane, thereby enabling the position of the temperature measuring end of the thermometer 200 to be adjustable in the vertical direction D1. As a result, the versatility of the cavity temperature monitoring bracket 100 is improved, the cost is reduced, and the scope of use is expanded.

[0025] Reference Figure 1 and Figure 2In one example, the base 1 is provided with a waist hole 11, which extends along the left-right direction D2. The cavity temperature monitoring bracket 100 further includes a screw 4, which is used to pass through the waist hole 11 and be installed on a mounting plate (not shown) to adjust the position of the base 1 on the mounting plate in the left-right direction D2. Through the cooperation of the waist hole 11 and the screw 4, the adjustment of the thermometer 200 as a whole in the left-right direction D2 is achieved. Similarly, the versatility of the cavity temperature monitoring bracket 100 is improved, the cost is reduced, and the scope of use is expanded.

[0026] like Figure 1 and Figure 2 As shown, the telescopic support rod 2 is detachably arranged on the base 1. When the telescopic support rod 2 of different lengths needs to be replaced to adapt to a wider range of temperature measurement, this provides convenience and versatility of the base 1 and reduces costs. Specifically, the base 1 is provided with a mounting hole 12 and a threaded hole 13, the mounting hole 12 is used for the bottom of the telescopic support rod 2 to be inserted therein; the threaded hole 13 is orthogonal to the mounting hole 12, and the cavity temperature monitoring bracket 100 also includes a tightening screw 5, which is used to tighten the screw 5 into the threaded hole 13 and abut the bottom of the telescopic support rod 2 after the bottom of the telescopic support rod 2 is inserted into the mounting hole 12 so that the bottom of the telescopic support rod 2 is fixed in the mounting hole 12.

[0027] like Figure 1 and Figure 2 As shown, in one example, the telescopic support rod 2 includes a sleeve 21, a telescopic rod 22 and a screw 23. The sleeve 21 extends in the up-down direction D1 and is arranged on the base 1; the telescopic rod 22 can be telescoped in the sleeve 21; the screw 23 is threaded through the sleeve 21, and the screw 23 is used to press against the part of the telescopic rod 22 in the sleeve 21 after the telescopic rod 22 is telescoped relative to the sleeve 21, so as to fix the telescopic rod 22 relative to the sleeve 21.

[0028] like Figure 1 and Figure 2 As shown, in one example, the pivot mechanism 3 includes a positive U-shaped bend inner piece 31, an inverted U-shaped bend outer piece 32, a shaft 33, a stopper 34 and a rotating handle 35. The positive U-shaped bend inner piece 31 is fixed to the top of the telescopic support rod 2. The inverted U-shaped bend outer piece 32 is used to connect the temperature monitoring thermometer 200, and the inverted U-shaped bend outer piece 32 and the positive U-shaped bend inner piece 31 are relatively sleeved together. The shaft 33 passes through the sleeved positive U-shaped bend inner piece 31 and the inverted U-shaped bend outer piece 32, so that the inverted U-shaped bend outer piece 32 can rotate around the shaft 33 relative to the positive U-shaped bend inner piece 31. The shaft 33 is perpendicular to the telescopic support rod 2. The stopper 34 is arranged at one end of the shaft 33, and is used to stop and abut against the outer side of the sleeved positive U-shaped bend inner piece 31 and the inverted U-shaped bend outer piece 32. The rotating handle 35 is sleeved on and screwed to the other end of the shaft 33 . The rotating handle 35 and the stopper 34 cooperate to lock the inverted U-shaped bent outer piece 32 .

[0029] When it is necessary to pivot the inverted U-shaped bend outer piece 32, the operator holds the stopper 34 with one hand to keep the stopper 34 and the shaft rod 33 stationary, and holds the rotating handle 35 with the other hand to rotate the rotating handle 35 toward the other outer side of the positive U-shaped bend inner piece 31 and the inverted U-shaped bend outer piece 32 that are sleeved together, so that the rotating handle 35 is disengaged from the other end of the shaft rod 33 from the other outer side of the positive U-shaped bend inner piece 31 and the inverted U-shaped bend outer piece 32 that are sleeved together, so that the locking of the inverted U-shaped bend outer piece 32 by the rotating handle 35 and the stopper 34 is released, and then the inverted U-shaped bend outer piece 32 can pivot around the shaft rod 33 relative to the positive U-shaped bend inner piece 31. When the inverted U-shaped bent outer piece 32 is pivoted into place, the operator holds the stopper 34 with one hand to keep the stopper 34 and the shaft 33 stationary, and the operator holds the rotating handle 35 with the other hand to rotate the rotating handle 35 in the opposite direction, until the rotating handle 35 abuts against the other outer side of the positive U-shaped bent inner piece 31 and the inverted U-shaped bent outer piece 32 that are sleeved together from the other end of the shaft 33, and the rotating handle 35 and the stopper 34 together achieve locking of the inverted U-shaped bent outer piece 32.

[0030] like Figure 1 and Figure 2 Shown, the rotating handle 35 can also be pivoted near or away from the telescopic support rod 2. Realize thus that the rotating handle 35 is opened during work (i.e. to realize above-mentioned pivoting) and is folded after the work is finished.

[0031] For ease of assembly, the stopper 34 is screwed to one end of the shaft 33. In order to increase friction, the outer surface of the stopper 34 may be provided with textures.

[0032] like Figure 1 and Figure 2 Shown and combined Figure 3 , the bracket 100 for cavity temperature monitoring also includes a connecting piece 6. The connecting piece 6 extends upward from the inverted U-shaped bent outer piece 32, and the connecting piece 6 is provided with a threaded hole (not shown), and the threaded hole of the connecting piece 6 is used to be screwed with the thermometer 200 with an external thread 200a to adjust the position of the thermometer 200 relative to the connecting piece 6. Through the threaded hole of the connecting piece 6 and the external thread 200a of the thermometer 200, the position adjustment of the thermometer 200 in a direction transverse to the up-down direction D1 can be achieved. Similarly, the versatility of the bracket 100 for cavity temperature monitoring is improved, the cost is reduced, and the scope of use is expanded. In one example, the central axis of the threaded hole of the connecting piece 6 is in the front-to-back direction D3. As shown in the figure, the connecting piece 6 and the inverted U-shaped bent outer piece 32 are an integral single piece.

[0033] Reference Figures 1 to 3In one example, the cavity temperature monitoring bracket 100 also includes two clamping nuts 7; the two clamping nuts 7 are used to be screwed to the external threads 200a of the thermometer 200 from opposite sides of the connecting piece 6 and respectively clamp the opposite sides of the connecting piece 6, thereby ensuring that the thermometer 200 is stably set on the connecting piece 6.

[0034] The above detailed description is used to describe multiple exemplary embodiments, but this document is not intended to be limited to the explicitly disclosed combinations. Therefore, unless otherwise stated, the various features disclosed herein can be combined together to form multiple additional combinations that are not shown for the sake of simplicity.

Claims

1. A cavity temperature monitoring bracket, characterized in that: The cavity temperature monitoring bracket (100) comprises a base (1), a telescopic support rod (2) and a pivot mechanism (3); The telescopic support rod (2) is arranged on the base (1) and extends upward, and the telescopic support rod (2) can be telescoped to adjust the length of the telescopic support rod (2) in the up-down direction (D1); The pivot mechanism (3) is arranged at the top of the telescopic support rod (2) and is capable of pivoting in a vertical plane. The pivot mechanism (3) is used to connect a temperature monitoring thermometer (200).

2. The cavity temperature monitoring bracket according to claim 1, characterized in that: The base (1) is provided with a waist hole (11), and the waist hole (11) extends along the left-right direction (D2). The cavity temperature monitoring bracket (100) further comprises a screw (4), which is used to pass through the waist hole (11) and be installed on the installation plate to adjust the position of the base (1) on the installation plate in the left-right direction (D2).

3. The cavity temperature monitoring bracket according to claim 1, characterized in that: The telescopic support rod (2) is detachably arranged on the base (1).

4. The cavity temperature monitoring bracket according to claim 3, characterized in that: The base (1) is provided with a mounting hole (12) and a threaded hole (13), wherein the mounting hole (12) is used for inserting the bottom of the telescopic support rod (2) therein; The threaded hole (13) is perpendicular to the mounting hole (12). The cavity temperature monitoring bracket (100) further comprises a tightening screw (5), which is used to screw the tightening screw (5) into the threaded hole (13) and abut the bottom of the telescopic support rod (2) after the bottom of the telescopic support rod (2) is inserted into the mounting hole (12) so as to fix the bottom of the telescopic support rod (2) in the mounting hole (12).

5. The cavity temperature monitoring bracket according to claim 1, characterized in that: The telescopic support rod (2) comprises a sleeve (21), a telescopic rod (22) and a screw (23). The sleeve (21) extends in the up-down direction (D1) and is arranged on the base (1); The telescopic rod (22) can be telescoped within the sleeve (21); The screw (23) is threadedly connected through the sleeve (21). The screw (23) is used to press against the part of the telescopic rod (22) inside the sleeve (21) after the telescopic rod (22) is telescoped relative to the sleeve (21), so as to fix the telescopic rod (22) relative to the sleeve (21).

6. The cavity temperature monitoring bracket according to claim 1, characterized in that: The pivot mechanism (3) comprises a positive U-shaped bent inner plate (31), an inverted U-shaped bent outer plate (32), a shaft (33), a stopper (34) and a rotating handle (35); The positive U-shaped bent inner sheet (31) is fixed to the top of the telescopic support rod (2); The inverted U-shaped bent outer sheet (32) is used to connect a temperature monitoring thermometer (200), and the inverted U-shaped bent outer sheet (32) and the positive U-shaped bent inner sheet (31) are sleeved together with their openings facing each other; The shaft (33) passes through the sleeved positive U-shaped inner sheet (31) and the inverted U-shaped outer sheet (32), so that the inverted U-shaped outer sheet (32) can rotate around the shaft (33) relative to the positive U-shaped inner sheet (31), and the shaft (33) is perpendicular to the telescopic support rod (2); A stopper (34) is arranged at one end of the shaft (33) and is used to stop and abut against the outer sides of the positive U-shaped bent inner sheet (31) and the inverted U-shaped bent outer sheet (32) which are sleeved together; The rotating handle (35) is sleeved on and screwed to the other end of the shaft (33). The rotating handle (35) and the stopper (34) cooperate to lock the inverted U-shaped bent outer sheet (32).

7. The cavity temperature monitoring bracket according to claim 6, characterized in that: The stopper (34) is screwed to one end of the shaft (33); The rotating handle (35) can also be pivoted towards or away from the telescopic support rod (2).

8. The cavity temperature monitoring bracket according to claim 6, characterized in that: The cavity temperature monitoring bracket (100) further comprises a connecting piece (6); The connecting piece (6) extends upward from the inverted U-shaped bent outer piece (32), and the connecting piece (6) is provided with a threaded hole. The threaded hole of the connecting piece (6) is used for threaded connection with a thermometer (200) with an external thread (200a) to adjust the position of the thermometer (200) relative to the connecting piece (6).

9. The cavity temperature monitoring bracket according to claim 8, characterized in that: The connecting piece (6) and the inverted U-shaped bent outer piece (32) are an integrated single piece.

10. The cavity temperature monitoring bracket according to claim 8, characterized in that: The cavity temperature monitoring bracket (100) further comprises two compression nuts (7); The two compression nuts (7) are used to be threadedly connected to the external threads (200a) of the thermometer (200) from opposite sides of the connecting piece (6) and to compress the opposite sides of the connecting piece (6) respectively.

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