Automatic control calibration system for channel type standard leak hole

Abstract

The utility model discloses an automatic control calibration system for a channel-type standard leak hole, and the system comprises a gas source unit which can output positive pressure gas and negative pressure gas; the pressure adjusting unit comprises a first pressure adjusting assembly and a second pressure adjusting assembly, one ends of the first pressure adjusting assembly and the second pressure adjusting assembly are connected with the gas treatment assembly, and the other ends are connected with the leak hole; the gas flowmeter unit is connected with the other end of the leak hole; the control unit is connected with the gas source unit, the pressure adjusting unit and the gas flow meter unit so as to control the first gas source assembly to be communicated with the first pressure adjusting assembly and the leak hole and the gas flow meter unit, or control the second gas source assembly to be communicated with the second pressure adjusting assembly and the leak hole to be detected and the gas flow meter unit. The calibration of the positive pressure standard leak hole and the calibration of the negative pressure standard leak hole are realized respectively; and automatic calibration of the leak hole can be realized through the control unit, so that the calibration time is shortened, the calibration efficiency is improved, man-made interference is effectively reduced, and the calibration precision is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of standard leak detection, in particular to an automatic control and calibration system for a channel type standard leak. Background Art

[0002] Channel-type standard leaks are widely used in sealing systems and leak detection fields such as deep space aerospace, semiconductor manufacturing, refrigeration industry, and new energy vehicles. Channel-type standard leaks play an important role in high-end equipment inspection and quality production safety. A leak with an inlet pressure greater than atmospheric pressure and an outlet pressure of one atmosphere is called a positive pressure standard leak; otherwise, it is called a vacuum standard leak.

[0003] The calibration parameter of the channel type standard leak is mainly the leak rate. If the leak rate of the leak is not calibrated accurately, it will have a significant impact on the application of the leak, such as seriously affecting the development of energy vehicles, gas appliances and household appliances, and even causing fires and other accidents in serious cases. In the sealing system, the inaccurate leak rate of the channel type standard leak will also affect the production and development of airtight leak detector products and the progress of medical equipment technology.

[0004] At present, in the prior art, when calibrating the leakage rate of a channel-type standard leak, the leakage rate is still calculated by manually reading the volume with a burette and manually reading a stopwatch. There are many human interference factors, and the gas source pressure and various valves are manually adjusted, which is time-consuming, labor-intensive and complicated. In addition, different workers have different conditions, such as different reaction times and estimations, and the final leakage rate values ​​are also different. Utility Model Content

[0005] In view of this, the embodiment of the present application is to solve at least one problem existing in the background technology and the purpose of the present application is to achieve the following technical solution: a channel type standard leak automatic control calibration system, comprising:

[0006] The gas source unit comprises a first gas source component, a second gas source component and a gas processing component connected to the first gas source component and the second gas source component respectively, wherein the first gas source component can output gas at a first preset pressure, and the second gas source component can output gas at a second preset pressure;

[0007] A pressure regulating unit, comprising a first pressure regulating component and a second pressure regulating component, wherein one end of the first pressure regulating component and the second pressure regulating component are respectively connected to the gas processing component, and the other end is connected to the leak hole;

[0008] A gas flow meter unit connected to the other end of the leak hole;

[0009] a control unit, connected to the gas source unit, the pressure regulating unit and the gas flow meter unit, respectively, to control the first gas source component to be connected to the first pressure regulating component, the leak hole and the gas flow meter unit, or to control the second gas source component to be connected to the second pressure regulating component, the leak hole to be measured and the gas flow meter unit;

[0010] Wherein, the first preset pressure gas is a positive pressure, and the second preset pressure gas is a negative pressure.

[0011] Optionally, at least two leakage holes are provided, and the gas flow meter unit includes at least two gas flow meters, at least two gas flow meters correspond one-to-one to at least two leakage holes, and the pressure regulating unit can be selectively connected to one of the leakage holes.

[0012] Optionally, the first gas source assembly includes a gas cylinder, a first digital pressure gauge connected to the gas cylinder, a first valve connected between the first digital pressure gauge and the gas processing assembly, a first pressure controller arranged between the gas cylinder and the first digital pressure gauge, and a first pneumatic valve connected to the first valve, and the first pressure controller and the first pneumatic valve are respectively connected to the control unit.

[0013] Optionally, the second gas source assembly includes a vacuum pump, a second digital pressure gauge connected to the vacuum pump, a second valve connected between the second digital pressure gauge and the gas processing assembly, a second pressure controller arranged between the vacuum pump and the second digital pressure gauge, and a second pneumatic valve connected to the second valve, and the second pressure controller and the second pneumatic valve are respectively connected to the control unit.

[0014] Optionally, the gas processing component includes a first filter, a pressure-stabilizing tank connected to the first filter, and a second filter connected to the pressure-stabilizing tank, the first filter being selectively connected to the first gas source component or to the second gas source component, and the second filter being selectively connected to the first pressure regulating component or to the second pressure regulating component.

[0015] Optionally, the first pressure regulating assembly includes a third valve, a third pneumatic valve connected to the third valve, a fourth valve connected to the third valve, a fourth pneumatic valve connected to the fourth valve, and a third digital pressure gauge arranged between the third valve and the fourth valve, and the third pneumatic valve and the fourth pneumatic valve are respectively connected to the control unit;

[0016] The second pressure regulating assembly includes a fifth valve, a fifth pneumatic valve connected to the fifth valve, a sixth valve connected to the fifth valve, a sixth pneumatic valve connected to the sixth valve, and a fourth digital pressure gauge arranged between the fifth valve and the sixth valve. The fifth pneumatic valve and the sixth pneumatic valve are respectively connected to the control unit.

[0017] Optionally, a seventh valve is further provided between each of the leak holes and the pressure regulating unit, and each of the seventh valves is connected to the control unit.

[0018] Optionally, the leakage rate range of each leakage hole is different.

[0019] Optionally, each of the gas flow meter units comprises a first connecting component, a second connecting component and a gas flow meter;

[0020] The gas flow meter comprises a first interface and a second interface, the first communication component is connected to the first interface, and the second communication component is connected to the second interface;

[0021] The first connecting component serves as a gas inlet to provide gas toward the gas flow meter, and the second connecting component serves as a gas outlet, and the gas in the gas flow meter is discharged from the second connecting component; or,

[0022] The second connecting component serves as a gas inlet to provide gas toward the gas flow meter, and the first connecting component serves as a gas outlet, and the gas in the gas flow meter is discharged from the first connecting component.

[0023] Optionally, the first connecting component includes an eighth valve connected to the leak hole, an eighth pneumatic valve connected to the eighth valve, and a ninth pneumatic valve connected between the eighth valve and the gas flow meter, and the eighth pneumatic valve and the ninth pneumatic valve are respectively connected to the control unit;

[0024] The second connecting component includes a tenth valve connected to the leak hole, a tenth pneumatic valve connected to the tenth valve, and an eleventh pneumatic valve connected between the tenth valve and the gas flow meter. The tenth pneumatic valve and the eleventh pneumatic valve are respectively connected to the control unit.

[0025] The utility model adopts the above-mentioned structure to achieve the following beneficial effects: by providing a first air source component and a second air source component, the first air source component and the second air source component can output positive pressure and negative pressure respectively, and the pressure is adjusted to the required air pressure through the pressure regulating unit respectively, so as to realize the calibration of the positive pressure standard leak hole and the calibration of the negative pressure standard leak hole respectively; and the control unit is connected to the air source unit, the pressure regulating unit and the gas flow meter unit respectively to realize automatic calibration of the leak hole, so as to shorten the calibration time, improve calibration efficiency, effectively reduce human interference, and improve calibration accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 A schematic diagram of an automatic control and calibration system for a channel-type standard leak shown in an embodiment of the present application;

[0027] Figure 2 for Figure 1 A partial schematic diagram of the channel-type standard leak automatic control calibration system is shown. DETAILED DESCRIPTION

[0028] The exemplary embodiments disclosed in the present application will be described in more detail below with reference to the accompanying drawings. Although the exemplary embodiments of the present application are shown in the accompanying drawings, it should be understood that the present application can be implemented in various forms and should not be limited by the specific embodiments described herein. On the contrary, these embodiments are provided to enable a more thorough understanding of the present application and to fully convey the scope disclosed in the present application to those skilled in the art.

[0029] In the following description, a large number of specific details are given to provide a more thorough understanding of the present application. However, it is obvious to those skilled in the art that the present application can be implemented without one or more of these details. In other examples, in order to avoid confusion with the present application, some technical features known in the art are not described; that is, all features of the actual embodiments are not described here, and well-known functions and structures are not described in detail.

[0030] In the drawings, the sizes of layers, regions, elements and their relative sizes may be exaggerated for clarity. Like reference numerals denote like elements throughout.

[0031] It should be understood that when an element or layer is referred to as "on ...", "adjacent to ...", "connected to" or "coupled to" other elements or layers, it can be directly on, adjacent to, connected to or coupled to other elements or layers, or there can be intervening elements or layers. On the contrary, when an element is referred to as "directly on ...", "directly adjacent to ...", "directly connected to" or "directly coupled to" other elements or layers, there is no intervening element or layer. It should be understood that although the terms first, second, third, etc. can be used to describe various elements, components, regions, layers and / or parts, these elements, components, regions, layers and / or parts should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer or part from another element, component, region, layer or part. Therefore, without departing from the teachings of the present application, the first element, component, region, layer or part discussed below can be represented as the second element, component, region, layer or part. And when the second element, component, region, layer or part is discussed, it does not indicate that the present application necessarily has the first element, component, region, layer or part.

[0032] Spatially relative terms such as "under", "beneath", "below", "under", "above", "above", etc., may be used here for convenience of description to describe the relationship between an element or feature shown in the figure and other elements or features. It should be understood that in addition to the orientation shown in the figure, the spatial relationship terms are intended to also include different orientations of the device in use and operation. For example, if the device in the accompanying drawings is turned over, then the elements or features described as "under other elements" or "under it" or "under it" will be oriented as "on" other elements or features. Therefore, the exemplary terms "under" and "under" may include both upper and lower orientations. The device can be oriented otherwise (rotated 90 degrees or other orientations) and the spatial descriptors used herein are interpreted accordingly.

[0033] The purpose of the terms used herein is only to describe specific embodiments and is not intended to be limiting of the present application. When used herein, the singular forms "a", "an" and " / the" are also intended to include plural forms, unless the context clearly indicates another way. It should also be understood that the terms "consisting of" and / or "comprising", when used in this specification, determine the presence of features, integers, steps, operations, elements and / or parts, but do not exclude the presence or addition of one or more other features, integers, steps, operations, elements, parts and / or groups. When used herein, the term "and / or" includes any and all combinations of the relevant listed items.

[0034] In order to thoroughly understand the present application, detailed steps and detailed structures will be presented in the following description to illustrate the technical solution of the present application. The preferred embodiments of the present application are described in detail below, but in addition to these detailed descriptions, the present application may also have other implementation methods.

[0035] Please refer to Figure 1 As shown, an embodiment of the present application provides a channel-type standard leak automatic control calibration system, including a gas source unit, a pressure regulating unit, a gas flow meter unit and a control unit 1. The gas source unit is used to provide a gas source, the pressure regulating unit is used to adjust the gas source to the required gas pressure, the leak is connected to the pressure regulating unit and the gas flow meter unit, and the control unit 1 is respectively connected to the gas source unit, the pressure regulating unit and the gas flow meter unit to realize automatic calibration of the leak. It should be noted that in this embodiment, the components in the gas source unit, the pressure regulating unit and the gas flow unit that are connected to the control unit 1 can all be signal connections or electrical connections.

[0036] Specifically, the gas source unit includes a first gas source component, a second gas source component, and a gas processing component connected to the first gas source component and the second gas source component respectively. The first gas source component can output a first preset pressure gas, and the second gas source component can output a second preset pressure gas. In this embodiment, the first preset pressure gas is a positive pressure, and the second preset pressure gas is a negative pressure.

[0037] More specifically, the first gas source assembly includes a gas cylinder 2, a first digital pressure gauge 4 connected to the gas cylinder 2, a first valve 91 connected between the first digital pressure gauge 4 and the gas processing assembly, a first pressure controller 6 disposed between the gas cylinder 2 and the first digital pressure gauge 4, and a first pneumatic valve 81 connected to the first valve 91, the first pressure controller 6 and the first pneumatic valve 81 are respectively connected to the control unit 1, and the first pneumatic valve 81 is used to control the opening or closing of the first valve 91. It should be noted that, in this embodiment, the gas cylinder 2 is used to provide gas, which includes but is not limited to air, helium, hydrogen, etc.; the first digital pressure gauge 4 is used to monitor the positive pressure value provided by the gas cylinder 2; the adjustable pressure range of the first pressure controller 6 is 0kPa-2000kPa.

[0038] The second gas source assembly includes a vacuum pump 3, a second digital pressure gauge 5 connected to the vacuum pump 3, a second valve 92 connected between the second digital pressure gauge 5 and the gas processing assembly, a second pressure controller 7 arranged between the vacuum pump 3 and the second digital pressure gauge 5, and a second pneumatic valve 82 connected to the second valve 92. The second pressure controller 7 and the second pneumatic valve 82 are respectively connected to the control unit 1, and the second pneumatic valve 82 is used to control the opening or closing of the second valve 92. Among them, the vacuum pump 3 is used to evacuate to provide a stable vacuum degree to ensure the calibration of the vacuum leak rate; the second digital pressure gauge 5 is used to monitor the negative pressure value provided by the vacuum pump 3; the adjustable pressure range of the second pressure controller 7 is -100kPa-0kPa.

[0039] The gas processing assembly includes a first filter 101, a pressure stabilizing tank 11 connected to the first filter 101, and a second filter 102 connected to the pressure stabilizing tank 11. The first filter 101 can be selectively connected to the first gas source assembly or the second gas source assembly, and the second filter 102 can be selectively connected to the first pressure regulating assembly or the second pressure regulating assembly. The first filter 101 and the second filter 102 are both used to remove impurities in the gas, and the pressure stabilizing tank 11 can provide stability in the temperature and pressure of the gas source.

[0040] When the first filter 101 is connected to the first gas source assembly, a positive pressure leak rate calibration can be implemented; when the first filter 101 is connected to the second gas source assembly, a vacuum leak rate calibration can be implemented.

[0041] In this embodiment, the pressure regulating unit includes a first pressure regulating component and a second pressure regulating component connected in parallel with the first pressure regulating unit. That is, one end of the first pressure regulating component and the second pressure regulating component are respectively connected to the gas processing component, and the other end is connected to the leak hole.

[0042] Specifically, the first pressure regulating component includes a third valve 93, a third pneumatic valve 83 connected to the third valve 93, a fourth valve 94 connected to the third valve 93, a fourth pneumatic valve 84 connected to the fourth valve 94, and a third digital pressure gauge 12 arranged between the third valve 93 and the fourth valve 94, and the third pneumatic valve 83 and the fourth pneumatic valve 84 are respectively connected to the control unit 1; the second pressure regulating component includes a fifth valve 95, a fifth pneumatic valve 85 connected to the fifth valve 95, a sixth valve 96 connected to the fifth valve 95, and a sixth pneumatic valve 86 connected to the sixth valve 96, and a fourth digital pressure gauge 13 arranged between the fifth valve 95 and the sixth valve 96, and the fifth pneumatic valve 85 and the sixth pneumatic valve 86 are respectively connected to the control unit 1.

[0043] When the positive pressure leak rate is calibrated, the first gas source assembly is connected to the gas processing assembly and the first pressure regulating assembly; when the vacuum leak rate is calibrated, the second gas source assembly is connected to the gas processing assembly and the second pressure regulating assembly. In this embodiment, the third valve 93, the fourth valve 94, the fifth valve 95 and the sixth valve 96 are all fine-tuning valves, which are connected to the control unit 1 to obtain the final accurate pressure value through the control unit 1; the third digital pressure gauge 12 is used to monitor the positive pressure value during the positive pressure leak rate calibration, and the fourth digital pressure gauge 13 is used to monitor the negative pressure value during the vacuum leak rate calibration.

[0044] As described above, in order to achieve calibration of a wider range of leak rates, at least two leak holes are provided, and accordingly, the gas flow meter unit also includes at least two gas flow meters, at least two gas flow meters correspond to at least two leak holes one by one, and the pressure regulating unit can be selectively connected to one of the leak holes. It should be noted that the leak rate range of each leak hole is different.

[0045] In this embodiment, there are three leak holes, and accordingly, the gas flow meter unit also includes three gas flow meters, which are respectively connected to the three leak holes to calibrate the leak rates of the corresponding leak holes. In addition, in this embodiment, for the convenience of description, the three leak holes are respectively defined as a first leak hole 19, a second leak hole 20, and a third leak hole 21, and the three gas flow meters are respectively defined as a first gas flow meter 28 connected to the first leak hole 19, a second gas flow meter 29 connected to the second leak hole 20, and a third gas flow meter 30 connected to the third leak hole 21.

[0046] In an optional embodiment, the leakage rate range of the first leak hole 19 is 0.1mL / min-5mL / min, the leakage rate range of the second leak hole 20 is 5mL / min-200mL / min, and the leakage rate range of the third leak hole 21 is 200mL / min-50000mL / min. In other embodiments, the leakage rate ranges of different leak holes can also be changed according to actual needs, and are not specifically limited here. In this embodiment, a seventh valve 97 is also provided between each leak hole and the pressure regulating unit, and each seventh valve 97 is connected to the control unit 1.

[0047] refer to Figure 1 and Figure 2As shown, each gas flow meter unit includes a first connecting component, a second connecting component and a gas flow meter. Each gas flow meter includes a first interface and a second interface, the first connecting component is connected to the first interface, and the second connecting component is connected to the second interface; the first connecting component serves as an air inlet to provide gas to the gas flow meter, the second connecting component serves as an air outlet, and the gas in the gas flow meter is discharged from the second connecting component; or, the second connecting component serves as an air inlet to provide gas to the gas flow meter, the first connecting component serves as an air outlet, and the gas in the gas flow meter is discharged from the first connecting component.

[0048] Specifically, the first connecting component includes an eighth valve 98 connected to the leak hole, an eighth pneumatic valve 88 connected to the eighth valve 98, and a ninth pneumatic valve 89 connected between the eighth valve 98 and the gas flow meter, and the eighth pneumatic valve 88 and the ninth pneumatic valve 89 are respectively connected to the control unit 1. The second connecting component includes a tenth valve 910 connected to the leak hole, a tenth pneumatic valve 810 connected to the tenth valve 910, and an eleventh pneumatic valve 811 connected between the tenth valve 910 and the gas flow meter, and the tenth pneumatic valve 810 and the eleventh pneumatic valve 811 are respectively connected to the control unit 1. The above-mentioned leak hole can be the first leak hole 19, the second leak hole 20, or the third leak hole 21.

[0049] In summary, the working process of the channel-type standard leak automatic control calibration system shown in the present application is: when the positive pressure standard leak is calibrated, after the first pneumatic valve 81 is controlled to open by the control unit 1, the corresponding first valve 91, the third valve 93, the fourth valve 94, the seventh valve 97, the tenth valve 910 and the ninth pneumatic valve 89 are all opened; at this time, the corresponding second pneumatic valve 82, the fifth pneumatic valve 85, the sixth pneumatic valve 86, the eighth pneumatic valve 88, and the eleventh pneumatic valve 811 are all closed, and the corresponding second valve 92, the fifth valve 95, the sixth valve 96 and the eighth valve 98 are all closed, so that the first pressure controller 6 near the gas cylinder 2 gradually delivers gas to the pipeline. At this time, the first digital pressure gauge 4 can monitor the pressure of the gas, and then the gas reaches the first filter 101 through the first valve 91. Since the second pneumatic valve 82 is closed and the corresponding second valve 92, the fifth valve 95, the sixth valve 96 and the eighth valve 98 are all closed, the gas will be blocked from passing here. The gas reaching the first filter 101 enters the pressure-stabilizing tank 11 and then enters the second filter 102. Then the gas passes through the third valve 93. The control unit 1 controls the third valve 93 to open (the valve is a fine-tuning valve). The third digital pressure gauge 12 displays the final required gas pressure. At this time, the leakage rate range of the leak hole is determined by controlling the opening and closing of the three seventh valves 97 through the control unit 1.

[0050] For example: when the leakage rate range of the measured leak hole is 0.1mL / min-5mL / min, the seventh valve 97 corresponding to the second leak hole 20 and the third leak hole 21 is closed, and the seventh valve 97 corresponding to the first leak hole 19 is opened, and the first flow meter 28 correspondingly connected to the first leak hole 19 measures and calibrates the leakage rate of the first leak hole 19.

[0051] When the leakage rate range of the measured leak hole is 5mL / min-200mL / min, the seventh valve 97 corresponding to the first leak hole 19 and the third leak hole 21 is closed, and the seventh valve 97 corresponding to the second leak hole 20 is opened, and the second flow meter correspondingly connected to the second leak hole 20 measures and calibrates the leakage rate of the second leak hole 20.

[0052] When the leakage rate range of the measured leak hole is 200mL / min-50000mL / min, the seventh valve 97 corresponding to the first leak hole 19 and the second leak hole 20 is closed, and the seventh valve 97 corresponding to the third leak hole 21 is opened, and the third flowmeter correspondingly connected to the third leak hole 21 measures and calibrates the leakage rate of the third leak hole 21.

[0053] After completing the measurement and calibration of a leak, the corresponding gas flow meter is connected to the control unit 1, and the control unit 1 can obtain the measurement data, thereby automatically identifying and storing it. When the calibration is completed, the control unit 1 can control one of the three seventh valves 97 corresponding to the leak to be measured to be closed.

[0054] On the contrary, when the vacuum standard leak hole is calibrated, after the second pneumatic valve 82 is opened by the control unit 1, the corresponding second valve 92, fifth valve 95, sixth valve 96, eighth valve 98 and eleventh pneumatic valve 811 are all opened; the corresponding first pneumatic valve 81, third pneumatic valve 83, fourth pneumatic valve 84, ninth pneumatic valve 89 and tenth pneumatic valve 810 are all closed, and the corresponding first valve 91, third valve 93, fourth valve 94 and tenth valve 910 are all closed. The second pressure controller 7 near the vacuum pump 3 gradually evacuates the pipeline, and the second digital pressure gauge 5 can monitor the pressure at this time. Since the first pneumatic valve 81 is closed and the corresponding first valve 91, third valve 93, fourth valve 94, tenth valve 910 and ninth pneumatic valve 89 are all closed. Therefore, the pipeline will not be evacuated. The first filter 101, the second filter 102 and the pressure stabilizing tank 11 all have a certain degree of vacuum. The fifth valve 95 and the sixth valve 96 (both are fine-tuning valves) are controlled by the control unit 1, and the fourth digital pressure gauge 13 displays the final required pressure; at this time, the leakage rate range of the standard leak hole is judged by controlling the three seventh valves 97 to be opened or closed by the control unit 1.

[0055] For example: when the leakage rate range of the measured leak hole is 0.1mL / min-5mL / min, the seventh valve 97 corresponding to the second leak hole 20 and the third leak hole 21 is closed, and the seventh valve 97 corresponding to the first leak hole 19 is opened, and the first flow meter 28 correspondingly connected to the first leak hole 19 measures and calibrates the leakage rate of the first leak hole 19.

[0056] When the leakage rate range of the measured leak hole is 5mL / min-200mL / min, the seventh valve 97 corresponding to the first leak hole 19 and the third leak hole 21 is closed, and the seventh valve 97 corresponding to the second leak hole 20 is opened, and the second flow meter correspondingly connected to the second leak hole 20 measures and calibrates the leakage rate of the second leak hole 20.

[0057] When the leakage rate range of the measured leak hole is 200mL / min-50000mL / min, the seventh valve 97 corresponding to the first leak hole 19 and the second leak hole 20 is closed, and the seventh valve 97 corresponding to the third leak hole 21 is opened, and the third flowmeter correspondingly connected to the third leak hole 21 measures and calibrates the leakage rate of the third leak hole 21.

[0058] After completing the measurement and calibration of a leak, the corresponding gas flow meter is connected to the control unit 1, and the control unit 1 can obtain the measurement data, thereby automatically identifying and storing it. When the calibration is completed, the control unit 1 can control one of the three seventh valves 97 corresponding to the leak to be measured to be closed.

[0059] In order to further illustrate the working condition of the corresponding gas flow meter unit of each gas flow meter when measuring the leakage rate of a positive pressure leak or a vacuum leak, this embodiment selects the first gas flow meter 28 as an example for detailed description, and the working principles of the second gas flow meter 29 and the third gas flow meter 30 when working are the same as the first gas flow meter 28, and the second gas flow meter 29 and the second gas flow meter 29 are not described here.

[0060] Specifically, Figure 2 As shown, when the first gas flow meter 28 is calibrating the positive pressure leak of the first leak 19, the working states of the eighth valve 98, the eighth pneumatic valve 88, the ninth pneumatic valve 89, the tenth valve 910, the tenth pneumatic valve 810 and the eleventh pneumatic valve 811 corresponding to the first gas flow meter 28 are described as follows: when the positive pressure leak of the first leak 19 is calibrated, the seventh valve 97 is opened, the eighth pneumatic valve 88 and the eleventh pneumatic valve 811 are both closed, and the gas cannot pass through and be discharged; and the tenth pneumatic valve 810 and the ninth pneumatic valve 89 are opened, and the corresponding tenth valve 910 is opened and connected to the pipeline, so that the gas can pass through to enter the first gas flow meter 28. After the calibration is completed, the gas in the first gas flow meter 28 is finally discharged from the ninth pneumatic valve 89.

[0061] When performing a vacuum standard leak calibration, the seventh valve 97 is opened, the tenth pneumatic valve 810 and the ninth pneumatic valve 89 are both closed, and the eighth pneumatic valve 88 and the eleventh pneumatic valve 811 are opened, so that the eighth valve 98 is connected to the pipeline, and the gas can pass through to enter the first gas flow meter 28. After the calibration is completed, the gas in the first gas flow meter 28 is finally discharged from the eleventh pneumatic valve 811.

[0062] The above description of the utility model and its implementation methods is not restrictive. The drawings show only one implementation method of the utility model, and the actual structure is not limited thereto. In short, if ordinary technicians in this field are inspired by it and design structural methods and embodiments similar to the technical solution without creativity without departing from the purpose of the invention of the utility model, they should all fall within the protection scope of the utility model.

Claims

1. A channel type standard leak automatic control calibration system, characterized in that: include: The gas source unit comprises a first gas source component, a second gas source component and a gas processing component connected to the first gas source component and the second gas source component respectively, wherein the first gas source component can output gas at a first preset pressure, and the second gas source component can output gas at a second preset pressure; A pressure regulating unit, comprising a first pressure regulating component and a second pressure regulating component, wherein one end of the first pressure regulating component and the second pressure regulating component are respectively connected to the gas processing component, and the other end is connected to the leak hole; A gas flow meter unit connected to the other end of the leak hole; a control unit, connected to the gas source unit, the pressure regulating unit and the gas flow meter unit, respectively, to control the first gas source component to be connected to the first pressure regulating component, the leak hole and the gas flow meter unit, or to control the second gas source component to be connected to the second pressure regulating component, the leak hole to be measured and the gas flow meter unit; Wherein, the first preset pressure gas is a positive pressure, and the second preset pressure gas is a negative pressure.

2. The automatic control and calibration system for a channel-type standard leak according to claim 1, characterized in that: There are at least two leakage holes, and the gas flow meter unit includes at least two gas flow meters, at least two gas flow meters correspond to at least two leakage holes one by one, and the pressure regulating unit can be selectively connected to one of the leakage holes.

3. The automatic control and calibration system for a channel type standard leak according to claim 1, characterized in that: The first gas source assembly includes a gas cylinder, a first digital pressure gauge connected to the gas cylinder, a first valve connected between the first digital pressure gauge and the gas processing assembly, a first pressure controller arranged between the gas cylinder and the first digital pressure gauge, and a first pneumatic valve connected to the first valve, and the first pressure controller and the first pneumatic valve are respectively connected to the control unit.

4. The automatic control and calibration system for a channel type standard leak according to claim 1, characterized in that: The second gas source component includes a vacuum pump, a second digital pressure gauge connected to the vacuum pump, a second valve connected between the second digital pressure gauge and the gas processing component, a second pressure controller arranged between the vacuum pump and the second digital pressure gauge, and a second pneumatic valve connected to the second valve, and the second pressure controller and the second pneumatic valve are respectively connected to the control unit.

5. The automatic control and calibration system for a channel type standard leak according to claim 1, characterized in that: The gas processing component includes a first filter, a pressure-stabilizing tank connected to the first filter, and a second filter connected to the pressure-stabilizing tank. The first filter can be selectively connected to the first gas source component or the second gas source component, and the second filter can be selectively connected to the first pressure regulating component or the second pressure regulating component.

6. The automatic control and calibration system for a channel type standard leak according to claim 5, characterized in that: The first pressure regulating assembly includes a third valve, a third pneumatic valve connected to the third valve, a fourth valve connected to the third valve, a fourth pneumatic valve connected to the fourth valve, and a third digital pressure gauge arranged between the third valve and the fourth valve, and the third pneumatic valve and the fourth pneumatic valve are respectively connected to the control unit; The second pressure regulating assembly includes a fifth valve, a fifth pneumatic valve connected to the fifth valve, a sixth valve connected to the fifth valve, a sixth pneumatic valve connected to the sixth valve, and a fourth digital pressure gauge arranged between the fifth valve and the sixth valve. The fifth pneumatic valve and the sixth pneumatic valve are respectively connected to the control unit.

7. The automatic control and calibration system for a channel type standard leak according to claim 2, characterized in that: A seventh valve is further arranged between each of the leak holes and the pressure regulating unit, and each of the seventh valves is connected to the control unit.

8. The automatic control and calibration system for a channel-type standard leak according to claim 1, characterized in that: The leak rate range of each leak is different.

9. The automatic control and calibration system for a channel type standard leak according to claim 1, characterized in that: Each of the gas flow meter units includes a first communication component, a second communication component and a gas flow meter; The gas flow meter comprises a first interface and a second interface, the first communication component is connected to the first interface, and the second communication component is connected to the second interface; The first connecting component serves as a gas inlet to provide gas toward the gas flow meter, and the second connecting component serves as a gas outlet, and the gas in the gas flow meter is discharged from the second connecting component; or, The second connecting component serves as a gas inlet to provide gas toward the gas flow meter, and the first connecting component serves as a gas outlet, and the gas in the gas flow meter is discharged from the first connecting component.

10. The automatic control and calibration system for a channel-type standard leak according to claim 9, characterized in that: The first connecting component includes an eighth valve connected to the leak hole, an eighth pneumatic valve connected to the eighth valve, and a ninth pneumatic valve connected between the eighth valve and the gas flow meter, and the eighth pneumatic valve and the ninth pneumatic valve are respectively connected to the control unit; The second connecting component includes a tenth valve connected to the leak hole, a tenth pneumatic valve connected to the tenth valve, and an eleventh pneumatic valve connected between the tenth valve and the gas flow meter. The tenth pneumatic valve and the eleventh pneumatic valve are respectively connected to the control unit.

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