Laser-induced breakdown spectroscopy detection device

Abstract

The utility model discloses a laser-induced breakdown spectroscopy detection device which comprises a detection chamber, protective gas filled in the detection chamber, a laser focus lens assembly fixed on the detection chamber, a receiving lens assembly fixed on the laser focus lens assembly, and a nozzle assembly for spraying the protective gas to the detection chamber, the receiving lens assembly further comprises a lens adjusting seat, the lens adjusting seat is arranged between the receiving lens assembly and the detection chamber, and the lens adjusting seat adjusts the position of the receiving lens assembly; the nozzle assembly comprises a nozzle adjusting seat, the nozzle adjusting seat is arranged between the nozzle assembly and the detection chamber, and the nozzle adjusting seat is used for adjusting the position of the nozzle assembly. By arranging the nozzle adjusting seat, the problem that the field angle of the spectrum receiving lens is small can be solved, the distance and direction between the nozzle and a detection point can be accurately adjusted, and three-dimensional precise and accurate adjustment of the spectrum receiving lens is achieved.

Description

Technical Field

[0001] The utility model relates to the field of luminescence spectrum detection, in particular to a laser induced breakdown spectrum detection device. Background Art

[0002] Laser-induced breakdown spectroscopy detects the composition of materials. It uses a short-pulse, high-peak energy laser beam to irradiate the sample after being focused by a focusing mirror. The sample material near the focus of the focusing mirror is ablated and peeled off by the laser, forming a cloud of ions. The ion clusters continue to absorb laser energy to form plasma and excite the particles in the plasma. In the process of particles transitioning from high energy levels to low energy levels, light is emitted, which is captured by the detector and recorded as a spectrum. By analyzing the spectrum, the element information present in the sample can be obtained, and the spectrum can be quantitatively analyzed through algorithms.

[0003] The laser-induced breakdown spectroscopy detection sample uses a lens to receive the light emitted by the plasma, and the lens then couples the received light into the optical fiber connected to it, and finally transmits it to the spectrometer. During the installation and debugging of the lens, the position and angle of the lens must be constantly adjusted to make the received spectrum reach the appropriate intensity. After the laser beam is focused by the focusing lens, the laser energy density near the focus is very high. While the laser ablates the sample, it also breaks down the air, and the ablated sample also excites the surrounding air.

[0004] The laser-induced breakdown spectroscopy detection device needs to adjust the position of the lens during assembly and use in order to receive a spectrum with appropriate intensity. However, the sample ablated by the laser is very small, and the corresponding plasma cloud formed is also very small. The field of view of the spectrometer receiving lens is also very small, and the received spectrum intensity is extremely sensitive to the position of the lens. Especially for multi-channel spectrometers, each movement of the lens will cause a large change in the spectrum of each channel, which brings challenges to the rapid, precise and accurate adjustment of the lens.

[0005] In view of the above technical problems, the present utility model is specially introduced. Utility Model Content

[0006] The main purpose of the utility model is to provide a laser induced breakdown spectrum detection device to achieve rapid, precise and accurate adjustment of a receiving lens.

[0007] In order to achieve the above-mentioned purpose, the utility model discloses a laser induced breakdown spectroscopy detection device, the detection device includes a detection chamber, a protective gas filled in the detection chamber, a laser focusing lens assembly fixed on the detection chamber, a receiving lens assembly fixed on the detection chamber, and a nozzle assembly for spraying the protective gas into the detection chamber. The receiving lens assembly also includes a lens adjustment seat, which is arranged between the receiving lens assembly and the detection chamber, and the lens adjustment seat adjusts the position of the receiving lens assembly; the nozzle assembly includes a nozzle adjustment seat, which is arranged between the nozzle assembly and the detection chamber, and the nozzle adjustment seat adjusts the position of the nozzle assembly. By setting the nozzle adjustment seat, the distance and orientation between the nozzle and the detection point can be accurately adjusted. By setting the lens adjustment seat, the problem of small field angle of the spectrum receiving lens can be overcome, and the three-dimensional precision and accurate adjustment of the spectrum receiving lens can be achieved.

[0008] The following is a further optimization of the above scheme by the utility model:

[0009] Furthermore, the receiving lens assembly and the nozzle assembly are arranged outside the detection chamber, thereby miniaturizing the detection chamber and saving argon gas consumption.

[0010] Furthermore, the lens adjustment seat includes one or more lens transverse adjustment screws, and / or one or more lens vertical adjustment screws perpendicular to the lens transverse adjustment screws.

[0011] Furthermore, the lens adjustment seat comprises a lower joint bearing, and the lower joint bearing is arranged on a side of the lens adjustment seat close to the detection chamber.

[0012] Further, the nozzle adjustment seat includes one or more nozzle lateral adjustment screws, and / or one or more nozzle vertical adjustment screws perpendicular to the nozzle lateral adjustment screws.

[0013] Furthermore, the nozzle assembly includes a nozzle, a gas guide tube and an air pipe joint, the nozzle is inserted deep into the detection chamber, the air pipe joint is arranged outside the detection chamber, and the gas guide tube connects the nozzle and the air pipe joint.

[0014] Furthermore, a plurality of nozzle lateral adjustment screws pass through the nozzle adjustment seat and abut against the gas guide tube.

[0015] Furthermore, the plurality of nozzle lateral adjustment screws are two nozzle lateral adjustment screws arranged opposite to each other, and the two nozzle lateral adjustment screws arranged opposite to each other adjust the horizontal position of the nozzle.

[0016] Furthermore, the laser focusing lens assembly includes one or more focusing lens adjusting screws, and the one or more focusing lens adjusting screws adjust the position of the laser focusing lens assembly.

[0017] Furthermore, the number of the plurality of focusing lens adjusting screws is set to 3 to 8.

[0018] By applying the technical solution of the utility model, at least the following beneficial effects are achieved:

[0019] 1. Overcome the problem of small field angle of the receiving lens of the spectrometer and realize three-dimensional precision and accurate adjustment of the receiving lens;

[0020] 2. The distance and orientation between the nozzle and the detection point can be accurately adjusted;

[0021] 3. The detection room can be miniaturized, saving space and requiring less argon gas. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The drawings constituting part of the present invention are used to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation on the present invention. In the drawings:

[0023] Figure 1 A top view of a laser induced breakdown spectroscopy detection device is shown;

[0024] Figure 2 A cross-sectional view of a receiving lens adjustment device is shown;

[0025] Figure 3 A front view of the receiving lens adjustment device is shown;

[0026] Figure 4 A cross-sectional view of an argon nozzle adjustment device is shown;

[0027] Figure 5 A front view of the argon nozzle adjustment device is shown;

[0028] Figure 6 A front view of the viewing window is shown.

[0029] The above drawings include the following reference numerals:

[0030] 1. Detection chamber; 2. Receiving lens assembly; 3. Laser focusing lens assembly; 4. Nozzle assembly; 5. Observation window;

[0031] 201, lens adjustment seat; 202, lower joint bearing; 203, fixing tube; 204, lens lateral adjustment screw; 205, slider; 206, cover plate; 207, upper joint bearing; 208, spectrum receiving lens; 209, lens vertical adjustment screw; 210, lens adjustment seat fixing hole;

[0032] 301, focusing lens seat; 302, focusing lens; 303, focusing lens adjusting screw;

[0033] 401, nozzle adjustment seat; 402, air pipe joint; 403, gas guide tube; 404, nozzle lateral adjustment screw; 405, nozzle; 406, nozzle vertical adjustment screw; 407, nozzle adjustment seat fixing hole. DETAILED DESCRIPTION

[0034] It should be noted that, in the absence of conflict, the embodiments and features of the embodiments of the present invention can be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0035] The present invention is further described in detail below in conjunction with specific embodiments, and these embodiments cannot be understood as limiting the scope of protection claimed by the present invention. The term "including" indicates the existence of a feature when used, but does not exclude the existence or addition of one or more other features; the orientation or position relationship indicated by the terms "lateral", "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inside", "outside", etc. is based on the orientation or position relationship shown in the drawings, which is only for the convenience of description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention; in addition, the terms "first" and "second" are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance.

[0036] In the description, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected, or indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances. In addition, in the description of the present utility model, unless otherwise specified, "plurality" means two or more.

[0037] The utility model discloses a laser induced breakdown spectrum detection device. By arranging a three-dimensional adjustment device for a receiving lens of a spectrometer, the receiving lens can be adjusted quickly, precisely and accurately.

[0038] like Figure 1-Figure 4As shown, the detection device includes a detection chamber 1, a protective gas filled in the detection chamber 1, a laser focusing lens assembly 3 fixed on the detection chamber 1, a receiving lens assembly 2 fixed on the detection chamber 1, and a nozzle assembly 4 for spraying the protective gas into the detection chamber 1. The receiving lens assembly 2 also includes a lens adjustment seat 201, which is arranged between the receiving lens assembly 2 and the detection chamber 1, and can adjust the position of the receiving lens assembly 2. The nozzle assembly 4 includes a nozzle adjustment seat 401 arranged between the nozzle assembly 4 and the detection chamber 1, which can adjust the position of the nozzle assembly 4. By setting the nozzle adjustment seat 401, the distance and orientation of the nozzle 405 and the detection point can be accurately adjusted. The lens adjustment seat 201 can overcome the problem of the small field angle of the spectrum receiving lens 208, and realize the three-dimensional precision and accurate adjustment of the spectrum receiving lens 208.

[0039] Among them, the cavity of the detection chamber 1 is filled with a protective gas, such as argon. In order to avoid interference from the air, the argon nozzle is very close to the detection point to ensure that the argon at the detection point evacuates the air, so the distance and orientation of the nozzle 405 and the detection point need to be accurately adjusted. In addition, if the detection point is in an open space, the ejected gas will quickly diffuse into the air, so it is necessary to keep filling with argon, resulting in a large consumption of argon. In order to save argon consumption, the detection chamber 1 can be miniaturized, and the receiving lens assembly 2 and the nozzle assembly 4 can be arranged outside the detection chamber 1. At the same time, a closed design is made around the detection chamber 1 to prevent the diffusion of argon.

[0040] The lens adjustment seat 201 includes one or more lens transverse adjustment screws 204, which adjust the horizontal direction of the lens. In order to adjust the vertical direction of the lens, one or more lens vertical adjustment screws 209 perpendicular to the lens transverse adjustment screws 204 may also be provided. Figure 3 , Figure 4 As shown, the plurality of lens lateral adjustment screws 204 are set to two, and the plurality of lens vertical adjustment screws 209 are also set to two. The two lens lateral adjustment screws 204 cooperate with each other, pass through the lens adjustment seat 201, and the ends thereof press against the slider 205, so as to adjust the left and right direction of the spectrum receiving lens 208. The two lens vertical adjustment screws 209 cooperate with each other, and the ends thereof also press against the lens adjustment seat 201, so as to adjust the front and back direction of the spectrum receiving lens 208. By adjusting the position of the spectrum receiving lens 208 in the fixed tube 203, the distance between the spectrum receiving lens 208 and the detection point can be adjusted.

[0041] The lens adjustment seat 201 includes a lower joint bearing 202, which is fixed below the lens adjustment seat 201 and is arranged on a side of the lens adjustment seat 201 close to the detection chamber 1. The spectrum receiving lens 208 passes through the lower joint bearing 202 below, passes through the fixed tube 203 above, and passes through the upper joint bearing 207 above the fixed tube 203. The upper joint bearing 207 passes through a slider 205 arranged in a groove above the lens adjustment seat 201. The lens adjustment seat 201 is also connected to a cover plate 206, which can encapsulate the slider 205 in the lens adjustment seat 201.

[0042] The lens adjustment seat 201 has four lens adjustment seat fixing holes 210, and the receiving lens assembly 2 is connected to the detection chamber 1 through the four lens adjustment seat fixing holes 210. Figure 3 As shown, the four lens adjustment seat fixing holes 210 are waist-shaped holes.

[0043] The nozzle assembly 4 includes a nozzle 405, a gas guide tube 403 and a gas pipe joint 402. The nozzle 405 is inserted into the detection chamber 1, and the gas pipe joint 402 is arranged outside the detection chamber 1. The nozzle 405 passes through the nozzle adjustment seat 401 and points to the detection point, and the gas guide tube 403 is connected to the nozzle 405 at one end and to the gas pipe joint 402 at the other end.

[0044] The nozzle adjustment seat 401 has four nozzle adjustment seat fixing holes 407 , and the nozzle assembly 4 is connected to the detection chamber 1 through the four nozzle adjustment seat fixing holes 407 , wherein the nozzle adjustment seat fixing holes 407 can be waist-shaped holes.

[0045] The nozzle adjustment seat 401 also includes one or more nozzle transverse adjustment screws 404 to adjust the horizontal position of the nozzle 405. In order to adjust the vertical position of the nozzle 405, the nozzle adjustment seat 401 may also be provided with one or more nozzle vertical adjustment screws 406 perpendicular to the transverse adjustment screws. The plurality of nozzle transverse adjustment screws 404 pass through the nozzle adjustment seat 401 and abut against the gas guide tube 403. By adjusting the position of the gas guide tube 403 in the nozzle adjustment seat 401, the distance between the nozzle 405 and the detection point can be accurately adjusted.

[0046] The plurality of nozzle lateral adjustment screws 404 are two nozzle lateral adjustment screws 404 arranged opposite to each other, and the two nozzle lateral adjustment screws 404 arranged opposite to each other adjust the horizontal position of the nozzle 405. The two nozzle lateral adjustment screws 404 cooperate with each other, pass through the nozzle adjustment seat 401, and the ends thereof are against the gas guide tube 403, so as to adjust the left and right directions of the nozzle 405.

[0047] The plurality of nozzle vertical adjustment screws 406 are two nozzle vertical adjustment screws 406 arranged opposite to each other, which cooperate with each other to adjust the vertical position of the nozzle 405 .

[0048] The laser focusing lens assembly 3 is fixed above the detection chamber 1, and includes one or more focusing lens adjusting screws 303, which can adjust the position of the laser focusing lens assembly 3. The number of the plurality of focusing lens adjusting screws 303 is 3 to 8. Figure 5 , Figure 6 There are eight focusing lens adjusting screws 303 provided in the middle, and the eight focusing lens adjusting screws 303 control the focusing lens 302 at the center of the focusing lens seat 301 . By adjusting the eight focusing lens adjusting screws 303 , the three-dimensional position and direction of the focusing lens 302 can be adjusted.

[0049] The detection device further includes an observation window 5, which is located on one side of the detection chamber 1 and can be made of a transparent material. In summary, from the above description, it can be seen that the above embodiments of the utility model achieve the following technical effects:

[0050] 1. Overcome the problem of small field angle of the receiving lens of the spectrometer and realize three-dimensional precision and accurate adjustment of the receiving lens;

[0051] 2. The distance and orientation between the nozzle and the detection point can be accurately adjusted;

[0052] 3. The detection room can be miniaturized, saving space and requiring less argon gas.

[0053] The above description is only the preferred embodiment of the utility model, and is not intended to limit the utility model. For those skilled in the art, the utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A laser induced breakdown spectroscopy detection device, comprising a detection chamber (1), a protective gas filled in the detection chamber (1), a laser focusing lens assembly (3) fixed on the detection chamber (1), a receiving lens assembly (2) fixed on the detection chamber (1), and a nozzle assembly (4) for spraying the protective gas into the detection chamber (1). Features: The receiving lens assembly (2) further comprises a lens adjustment seat (201), wherein the lens adjustment seat (201) is arranged between the receiving lens assembly (2) and the detection chamber (1), and the lens adjustment seat (201) adjusts the position of the receiving lens assembly (2); The nozzle assembly (4) comprises a nozzle adjustment seat (401), wherein the nozzle adjustment seat (401) is arranged between the nozzle assembly (4) and the detection chamber (1), and the nozzle adjustment seat (401) adjusts the position of the nozzle assembly (4).

2. The detection device according to claim 1, characterized in that: The receiving lens assembly (2) and the nozzle assembly (4) are arranged outside the detection chamber (1).

3. The detection device according to claim 2, characterized in that: The lens adjustment seat (201) comprises one or more lens transverse adjustment screws (204), and / or one or more lens vertical adjustment screws (209) perpendicular to the lens transverse adjustment screws (204).

4. The detection device according to claim 3, characterized in that: The lens adjustment seat (201) comprises a lower joint bearing (202), and the lower joint bearing (202) is arranged on a side of the lens adjustment seat (201) close to the detection chamber (1).

5. The detection device according to claim 4, characterized in that: The nozzle adjustment seat (401) includes one or more nozzle transverse adjustment screws (404), and / or one or more nozzle vertical adjustment screws (406) perpendicular to the nozzle transverse adjustment screws (404).

6. The detection device according to claim 5, characterized in that: The nozzle assembly (4) comprises a nozzle (405), a gas guide tube (403) and an air pipe joint (402); the nozzle (405) is inserted into the interior of the detection chamber (1); the air pipe joint (402) is arranged outside the detection chamber (1); and the gas guide tube (403) connects the nozzle (405) and the air pipe joint (402).

7. The detection device according to claim 6, characterized in that: The plurality of nozzle lateral adjustment screws (404) pass through the nozzle adjustment seat (401) and abut against the gas guide tube (403).

8. The detection device according to claim 7, characterized in that: The plurality of nozzle lateral adjustment screws (404) are two nozzle lateral adjustment screws (404) arranged opposite to each other, and the two nozzle lateral adjustment screws (404) arranged opposite to each other adjust the horizontal position of the nozzle (405).

9. The detection device according to claim 1, characterized in that: The laser focusing mirror assembly (3) comprises one or more focusing mirror adjusting screws (303), and the one or more focusing mirror adjusting screws (303) adjust the position of the laser focusing mirror assembly (3).

10. The detection device according to claim 9, characterized in that: The number of the focusing mirror adjusting screws (303) is set to 3 to 8.

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