Recycling and buffering device for photovoltaic silicon wafer treatment wastewater

Abstract

The utility model discloses a photovoltaic silicon wafer treatment wastewater recycling and buffering device which comprises a buffering case, a rinse water recycling system, a medicament water recycling system and a spray water recycling system are arranged in the buffering case, water inlets corresponding to the rinse water recycling system, the medicament water recycling system and the spray water recycling system are formed in the side face of the buffering case, and a water outlet corresponding to the spray water recycling system is formed in the side face of the buffering case. Water inlets of the medicament water recovery system and the spray water recovery system are communicated through a pipeline, and the spray water recovery system and the rinse water recovery system are respectively provided with a water outlet. According to the utility model, silicon wafer rinsing, medicament water and spray water are guided into the rinsing water recovery system, the medicament water recovery system and the spray water recovery system for caching, and when enough water is accumulated, the water is guided out through the recovered water discharge port for one-time treatment, so that the carrying pressure of wastewater treatment equipment is reduced, and the wastewater treatment cost is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafers and semiconductor processing equipment, and in particular to a photovoltaic silicon wafer treatment wastewater recovery and buffering device. Background Art

[0002] At the photovoltaic silicon wafer manufacturing end, the processing of silicon wafers will produce wastewater such as rinsing, spraying and chemicals. Currently, the above wastewater will be directly exported to the treatment equipment along with production, and the wastewater will be treated before being discharged.

[0003] Therefore, we propose a photovoltaic silicon wafer treatment wastewater recovery and cache device, which is mainly designed for factories without special drainage systems, factories without underground drainage systems, and factories that need to discharge wastewater to a designated centralized water storage system above the ground. Utility Model Content

[0004] The purpose of the utility model is to provide a photovoltaic silicon wafer treatment wastewater recovery and buffering device to solve the problems raised in the above-mentioned background technology.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a photovoltaic silicon wafer treatment wastewater recovery and cache device, comprising: a cache box, wherein a rinsing water recovery system, a chemical water recovery system and a spray water recovery system are arranged in the cache box, and water inlets corresponding to the rinsing water recovery system, the chemical water recovery system and the spray water recovery system are arranged on the side of the cache box;

[0006] The water inlets of the pharmaceutical water recovery system and the spray water recovery system are connected through a pipeline;

[0007] The spray water recovery system and the rinse water recovery system are respectively provided with water discharge outlets.

[0008] Preferably, the water inlet includes a first recycled water inlet, a second recycled water inlet and a third recycled water inlet, the rinse water recovery system is connected to the first recycled water inlet, the chemical water recovery system is connected to the second recycled water inlet, and the spray water recovery system is connected to the third recycled water inlet.

[0009] Preferably, a second recovered water outlet is provided above the spray water recovery system, and a first recovered water outlet is provided above the rinse water recovery system.

[0010] Preferably, the first recycled water outlet and the second recycled water outlet are both equipped with water pumps.

[0011] Compared with the prior art, the beneficial effects of the utility model are:

[0012] The silicon wafer rinsing, chemical water and spray water are introduced into the rinse water recovery system, the chemical water recovery system and the spray water recovery system for cache. When a sufficient amount of water is accumulated, it is discharged through the recovery water outlet for one-time treatment, which reduces the carrying pressure of the wastewater treatment equipment and reduces the cost of wastewater treatment. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a structural schematic diagram of the utility model;

[0014] Figure 2 It is a top view of the utility model;

[0015] Figure 3 It is a partial structural front perspective view of the utility model.

[0016] In the figure: 1. Cache chassis; 2. First recycled water outlet; 3. First recycled water inlet; 4. Second recycled water inlet; 5. Third recycled water inlet; 6. Rinse water recovery system; 7. Chemical water recovery system; 8. Spray water recovery system; 9. Second recycled water outlet. DETAILED DESCRIPTION

[0017] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0018] See also Figure 1-3 The utility model provides a technical solution: a photovoltaic silicon wafer wastewater recovery and caching device, comprising: a cache chassis 1, a first recovery water inlet 3, a second recovery water inlet 4 and a third recovery water inlet 5 are provided on the side of the cache chassis 1;

[0019] The cache cabinet 1 is provided with a rinse water recovery system 6, a reagent water recovery system 7 and a spray water recovery system 8;

[0020] The rinse water recovery system 6 is connected to the first recovery water inlet 3, and a first recovery water outlet 2 is provided above the rinse water recovery system 6;

[0021] The rinse water is introduced into the rinse water recovery system 6 through the first recovery water inlet 3 for buffering, and is discharged through the first recovery water outlet 2 for treatment;

[0022] The reagent water recovery system 7 and the spray water recovery system 8 are connected through a pipeline;

[0023] The pharmaceutical water recovery system 7 is connected to the second recovery water inlet 4, and the pharmaceutical water is introduced into the pharmaceutical water recovery system 7 buffer through the second recovery water inlet 4, and flows into the spray water recovery system 8 through the pipeline;

[0024] The spray water recovery system 8 is connected to the third recovery water inlet 5, and the spray water is introduced into the spray water recovery system 8 through the third recovery water inlet 5;

[0025] A second water recovery outlet 9 is provided above the spray water recovery system 8, and the second water recovery outlet 9 discharges the spray water and the chemical water for treatment;

[0026] The first recovered water outlet 2 and the second recovered water outlet 9 are both provided with water pumps for pumping the water in the spray water recovery system 8 and the rinse water recovery system 6 out of the recovered water outlets.

[0027] Working principle: The silicon wafer rinsing equipment is connected to the first recycled water inlet 3, and the waste water generated by the silicon wafer rinsing process is returned to the rinsing water recovery system 6 for temporary storage. When the waste water generated after multiple rinsings is collected, it is discharged through the first recycled water outlet 2 for treatment at one time;

[0028] The same is true for the reagent water and spray water for silicon wafer processing. They are introduced into the reagent water recovery system 7 and the spray water recovery system 8 for buffering. When a sufficient amount of water is accumulated, it is discharged through the second recovery water outlet 9 for one-time treatment.

[0029] The contents not described in detail in this specification belong to the prior art known to professional and technical personnel in this field.

[0030] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A photovoltaic silicon wafer wastewater recovery and buffering device, comprising: A cache cabinet (1), characterized in that a rinse water recovery system (6), a chemical water recovery system (7) and a spray water recovery system (8) are provided in the cache cabinet (1), and water inlets corresponding to the rinse water recovery system (6), the chemical water recovery system (7) and the spray water recovery system (8) are provided on the side of the cache cabinet (1); The water inlets of the pharmaceutical water recovery system (7) and the spray water recovery system (8) are connected via a pipeline; The spray water recovery system (8) and the rinse water recovery system (6) are respectively provided with water discharge outlets.

2. A photovoltaic silicon wafer treatment wastewater recovery and buffering device according to claim 1, characterized in that: The water inlet comprises a first recycled water inlet (3), a second recycled water inlet (4) and a third recycled water inlet (5); the rinse water recycling system (6) is connected to the first recycled water inlet (3); the chemical water recycling system (7) is connected to the second recycled water inlet (4); and the spray water recycling system (8) is connected to the third recycled water inlet (5).

3. A photovoltaic silicon wafer treatment wastewater recovery and buffering device according to claim 2, characterized in that: A second recovered water outlet (9) is provided above the spray water recovery system (8), and a first recovered water outlet (2) is provided above the rinse water recovery system (6).

4. A photovoltaic silicon wafer treatment wastewater recovery and buffering device according to claim 3, characterized in that: The first recycled water outlet (2) and the second recycled water outlet (9) are both equipped with water pumps.

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